CN102301214A - Mems装置和利用该mems装置的远程传感系统 - Google Patents

Mems装置和利用该mems装置的远程传感系统 Download PDF

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Publication number
CN102301214A
CN102301214A CN2010800063227A CN201080006322A CN102301214A CN 102301214 A CN102301214 A CN 102301214A CN 2010800063227 A CN2010800063227 A CN 2010800063227A CN 201080006322 A CN201080006322 A CN 201080006322A CN 102301214 A CN102301214 A CN 102301214A
Authority
CN
China
Prior art keywords
signal
sensing element
frequency
mems device
resonance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN2010800063227A
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English (en)
Chinese (zh)
Inventor
D·W·塞克斯顿
G·P·科斯特
A·J·克诺布洛奇
R·G·布朗
D·W·费尔努伊
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
General Electric Co
Original Assignee
General Electric Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US12/360,144 external-priority patent/US20100156629A1/en
Application filed by General Electric Co filed Critical General Electric Co
Publication of CN102301214A publication Critical patent/CN102301214A/zh
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K1/00—Details of thermometers not specially adapted for particular types of thermometer
    • G01K1/02—Means for indicating or recording specially adapted for thermometers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D21/00—Measuring or testing not otherwise provided for
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
    • G01K7/32—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using change of resonant frequency of a crystal
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0019—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a semiconductive element
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0019—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a semiconductive element
    • G01L9/002—Optical excitation or measuring
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
    • G01K2215/00—Details concerning sensor power supply

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Arrangements For Transmission Of Measured Signals (AREA)
  • Micromachines (AREA)
CN2010800063227A 2009-01-27 2010-01-06 Mems装置和利用该mems装置的远程传感系统 Pending CN102301214A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US12/360,144 US20100156629A1 (en) 2008-12-19 2009-01-27 Mems devices and remote sensing systems utilizing the same
US12/360,144 2009-01-27
PCT/US2010/020238 WO2010088011A1 (fr) 2009-01-27 2010-01-06 Composants mems et systèmes de détection à distance utilisant ceux-ci

Publications (1)

Publication Number Publication Date
CN102301214A true CN102301214A (zh) 2011-12-28

Family

ID=42077714

Family Applications (1)

Application Number Title Priority Date Filing Date
CN2010800063227A Pending CN102301214A (zh) 2009-01-27 2010-01-06 Mems装置和利用该mems装置的远程传感系统

Country Status (4)

Country Link
KR (1) KR20110123730A (fr)
CN (1) CN102301214A (fr)
SG (1) SG173051A1 (fr)
WO (1) WO2010088011A1 (fr)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104219346A (zh) * 2013-05-30 2014-12-17 马库伯公司 基于mems的接近传感器装置及方法
CN104737457A (zh) * 2012-05-22 2015-06-24 芬兰国家技术研究中心 基于机械共振器的互调传感器平台
CN105067137A (zh) * 2015-07-27 2015-11-18 武汉大学 一种基于mems系统的高灵敏度高分辨率的微型温度传感器及监测方法
CN106643826A (zh) * 2016-11-02 2017-05-10 中国科学院电子学研究所 Lc谐振式传感器的检测电路及检测方法
CN109520489A (zh) * 2014-01-21 2019-03-26 应美盛公司 用于减小非线性运动的构型
CN109937390A (zh) * 2016-10-31 2019-06-25 雅马哈株式会社 致动器的驱动控制装置

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106404209B (zh) * 2016-12-08 2019-04-05 佛山市海科云筹信息技术有限公司 一种测温方法、装置及使用该测温装置的产品
DE102018110511B3 (de) 2018-05-02 2019-05-16 Christian-Albrechts-Universität Zu Kiel Mikrowellenresonator-Magnetfeldmessvorrichtung sowie Magnetfeldmessverfahren
US11467131B2 (en) * 2020-06-19 2022-10-11 Beijing Voyager Technology Co., Ltd. Systems and methods for detecting resonant frequency of MEMS mirrors

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
AU2003901253A0 (en) * 2003-03-17 2003-04-03 Zip Holdings Pty Ltd Temperature Sensing Devices, Systems and Methods
US7605391B2 (en) * 2004-12-12 2009-10-20 Burns David W Optically coupled resonator
EP1923674A1 (fr) * 2006-11-14 2008-05-21 Infineon Technologies SensoNor AS Capteur à rétrodiffusion modulé

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104737457A (zh) * 2012-05-22 2015-06-24 芬兰国家技术研究中心 基于机械共振器的互调传感器平台
CN104737457B (zh) * 2012-05-22 2016-08-24 芬兰国家技术研究中心 基于机械共振器的互调传感器平台
CN104737457B8 (zh) * 2012-05-22 2016-10-26 芬兰国家技术研究中心股份公司 基于机械共振器的互调传感器平台
US10145729B2 (en) 2012-05-22 2018-12-04 Teknologian Tutkimuskeskus Vtt Oy Intermodulation sensor platform based on mechanical resonator
CN104219346A (zh) * 2013-05-30 2014-12-17 马库伯公司 基于mems的接近传感器装置及方法
CN109520489A (zh) * 2014-01-21 2019-03-26 应美盛公司 用于减小非线性运动的构型
CN105067137A (zh) * 2015-07-27 2015-11-18 武汉大学 一种基于mems系统的高灵敏度高分辨率的微型温度传感器及监测方法
CN105067137B (zh) * 2015-07-27 2017-11-28 武汉大学 一种基于mems系统的高灵敏度高分辨率的微型温度传感器及监测方法
CN109937390A (zh) * 2016-10-31 2019-06-25 雅马哈株式会社 致动器的驱动控制装置
CN106643826A (zh) * 2016-11-02 2017-05-10 中国科学院电子学研究所 Lc谐振式传感器的检测电路及检测方法

Also Published As

Publication number Publication date
SG173051A1 (en) 2011-08-29
KR20110123730A (ko) 2011-11-15
WO2010088011A1 (fr) 2010-08-05

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Application publication date: 20111228