CN102298123B - Probe with high sensitivity, no zero-field blind spot and linear-response cross-zero weak magnetic field - Google Patents
Probe with high sensitivity, no zero-field blind spot and linear-response cross-zero weak magnetic field Download PDFInfo
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- CN102298123B CN102298123B CN201110200045.XA CN201110200045A CN102298123B CN 102298123 B CN102298123 B CN 102298123B CN 201110200045 A CN201110200045 A CN 201110200045A CN 102298123 B CN102298123 B CN 102298123B
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Abstract
The invention relates to a magnetic sensor probe and especially relates to a probe with high sensitivity, no zero-field blind spot and linear-response cross-zero weak magnetic field. The probe comprises a metal solenoid and a magnetic core. The probe is characterized in that: the magnetic core is a composite magnetic core; the composite magnetic core is formed by superposing a magnetic material containing a hard magnetic phase and a soft-magnetic material possessing soft-magnetic performance. The probe possesses advantages of the no zero-field blind spot, the high sensitivity, the linear-response cross-zero weak magnetic field, high reliability, high stability, a low price and the like. And the probe possesses a direction identification capability and low power consumption, and is convenient for miniaturization.
Description
Technical field
The present invention relates to a kind of magneto-dependent sensor probe, particularly a kind of high sensitivity, no zero-field blind spot linear response across the probe of zero Weak magentic-field.
Background technology
To Weak magentic-field, particularly to the Weak magentic-field close to null value, there is the magneto sensor of highly sensitive response, be the current development in science and technology such as biological magnetic measurement, mine locating, nondestructive examination institute active demand.But existing magneto-dependent sensor, if fluxgate, giant magnetoresistance, hall magnetic sensor etc. are all due to sensitive not and can not satisfy the demands to Weak magentic-field.Although superconducting quantum interference device (SQUID) has high sensitivity, can meet to a certain extent the demand that current high-tech is measured Weak magentic-field,, because it is required to meet the required low temperature of superconduction, make the instrument cannot be microminiaturized and the reason such as manufacturing cost and operating cost height, limited the application of superconducting quantum interference device (SQUID) in many occasions.The discovery of giant magnetoresistance effect, make people see the hope of research and development high sensitivity magneto-dependent sensor, because its remolding sensitivity giant magnetoresistance effect will exceed an order of magnitude, than Hall effect, exceed two orders of magnitude, but, giant magnetoresistance effect is still not high in the sensitivity at nearly zero place, magnetic field, and conventional symmetrical giant magnetoresistance effect is very low in the sensitivity at nearly zero place, magnetic field, is called as null field blind spot.As the patent magnetic sensitive material with high sensitivity (patent No.: 200810163790.X), a kind of magnetic sensitive material with high sensitivity (patent No.: 201110028111.X) with wide linear zone, 201110026317.9) etc. (patent No.: patent all exists a problem for null field blind spot can not meet across the zero sensitive response requirement of Weak magentic-field the wide magnetic-sensitive material method in highly sensitive and linear zone.Although there is null field blind spot in asymmetric giant magnetoresistance effect, exist also overall sensitivity to be not so good as the problem of symmetrical giant magnetoresistance effect near zero magnetic field unlike symmetrical giant magnetoresistance effect, also do not possess use value.Although, by additional bias direct current magnetic field, the sensitive volume of magneto-dependent sensor is moved to near the technology zero magnetic field, can improve the sensitivity of existing sensor to nearly zero Weak magentic-field response, but, not only there is the problem that power consumption is large in this technology, but also require bias direct current magnetic field to there is high stability, yet, existing electronic technology can't meet the desired high stability of highly sensitive magneto-dependent sensor, tend to because the factor impacts such as temperature variation, power-supply fluctuation are fluctuateed bias-field to some extent.
Therefore, existing technology can not meet, to responsive across zero Weak magentic-field, and again can be microminiaturized and the modern development in science and technology demand of low power consuming and low manufacturing cost.
Summary of the invention
For above problem, the object of this invention is to provide a kind of probe across zero Weak magentic-field without null field blind spot, highly sensitive, linear response that has.
High sensitivity, no zero-field blind spot linear response, across a probe for zero Weak magentic-field, comprises metal spiral pipe and magnetic core, it is characterized in that: magnetic core is composite cores, and composite cores is by being formed by stacking containing the magnetic material of Hard Magnetic phase and the soft magnetic material of soft magnet performance.
The object of the invention is to be realized by the composite cores being formed by stacking containing the magnetic material of Hard Magnetic phase and the soft magnetic material of soft magnet performance by adopting.So not only have without null field blind spot, highly sensitive, linear response across zero Weak magentic-field, high reliability, high stability and all the advantage such as cheap, also there is direction recognition capability and be convenient to microminiaturization and low power consuming.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention,
Fig. 2 is the magnetoimpedance curve of a kind of probe of the present invention.
Fig. 3 is the magnetoimpedance curve of comparing embodiment 1,
Fig. 4 is the giant magnetic impedance curve of comparing embodiment 2.
In figure: solenoid 1, probe magnetic core 2, containing the magnetic material 3 of Hard Magnetic phase, the soft magnetic material 4 of soft magnet performance, drive electrode 5, potential electrode 6.
Embodiment
Below in conjunction with embodiment, describe in detail:
Fig. 1 is a kind of high sensitivity, no zero-field blind spot linear response across the probe of zero Weak magentic-field, mainly comprises metal spiral pipe 1 and magnetic core 2, it is characterized in that: magnetic core 2 is composite cores, by being composited containing the magnetic material 3 of Hard Magnetic phase and the soft magnetic material 4 of soft magnet performance.
In order to improve performance, containing the magnetic material 3 of Hard Magnetic phase for have asymmetric magneto-impedance effect characteristic containing Hard Magnetic phase magnetic material, the soft magnetic material 4 of soft magnet performance is for having the pure soft magnetism phase material of symmetrical giant magnetoresistance effect characteristic.
Fig. 2 be a kind of have asymmetric magneto-impedance effect characteristic containing Hard Magnetic phase magnetic material and there is the magnetoimpedance curve map of the probe of faint the magnetic of high sensitivity, no zero-field blind spot, linear response that the pure soft magnetism phase material of symmetrical giant magnetoresistance effect characteristic is composited.What it had asymmetric magneto-impedance effect characteristic is to adopt Fe containing Hard Magnetic phase magnetic material 3
76si
7.6b
9.5p
5c
1.9non-crystalline material applies vertically the magnetic field of 3000A/m and within 1 hour, makes in 490 annealing under nitrogen protection; The pure soft magnetism phase material 4 with symmetrical giant magnetoresistance effect characteristic is to adopt Fe
76si
7.6b
9.5p
5c
1.9non-crystalline material makes in 470 ℃ of annealing in air for 1 hour.
A kind of high sensitivity, no zero-field blind spot linear response in figure, across the probe of zero Weak magentic-field, is prepared as follows:
(1) enameled wire that is 0.1mm by wire diameter is close makes around 100 circles the solenoid 1 that diameter is 0.57mm.
(2) 0.35mm is the wide and thick Fe of 33 μ m
76si
7.6b
9.5p
5c
1.9amorphous thin ribbon, the magnetic field that axially applies 3000A/m along strip under nitrogen protection, in 490 annealing 1 hour, then intercepts 15mm long, makes the magnetic material 3 containing Hard Magnetic phase.
(3) 0.35mm is the wide and thick Fe of 33 μ m
76si
7.6b
9.5p
5c
1.9amorphous thin ribbon in 470 ℃ of annealing 1 hour, then intercepts 15mm long in air, makes the soft magnetic material 4 of soft magnet performance.
(4) magnetic material 3 containing Hard Magnetic phase being made by step (2), (3) and the flat folded bonding of soft magnetic material 4 of soft magnet performance are made to magnetic core 2.
(5) magnetic core 2 is inserted to solenoid 1 and form magneto-dependent sensor probe.
(6) the magnetosensitive solenoidal magnetoimpedance curve containing magnetic core 2 of Fig. 2 for making with said method.During measurement, the amplitude of drive current is 10mA, and frequency is 380kHz.
Test result ,-348A/m to 232A/m across zero magnetic field range in, the solenoidal sensitivity of magnetosensitive is 0.89%/Am
-1, linear maximum deviation is only 0.78%.
comparing embodiment 1
For the advantage of magnetic core 2 is described, change the magnetic core in embodiment 12 into magnetic material 3 containing Hard Magnetic phase, for comparing.Specific implementation method is as follows:
(1) with embodiment step (1), make solenoid 1.
(2) with embodiment step (2), make the magnetic material 3 containing Hard Magnetic phase.
(3) magnetic material 3 containing Hard Magnetic phase being made by step (2) is inserted in the solenoid being made by step (1) and makes magnetic sensitive probe.
(4) the magnetoimpedance curve that Fig. 3 is the magnetic sensitive probe that makes with said method.During measurement, the amplitude of drive current is 10mA, and frequency is 380kHz.
Test result ,-1600A/m to 1600A/m across zero magnetic field range in, magnetoimpedance is with externally-applied magnetic field linear change, but sensitivity is very low, only has 0.0048%/Am
-1.
comparing embodiment 2
For the advantage of magnetic core 2 is described, the magnetic core in embodiment 12 is changed into the soft magnetic material 4 of soft magnet performance, for comparing.Specific implementation method is as follows:
(1) with embodiment step (1), make solenoid 1.
(2) with embodiment step (3), make the soft magnetic material 4 of soft magnet performance.
(3) soft magnetic material of the soft magnet performance being made by step (2) 4 is inserted in the solenoid being made by step (1) and makes magnetic sensitive probe.
(4) the giant magnetic impedance curve that Fig. 4 is the magnetic sensitive probe that makes with said method.During measurement, drive current amplitude is 10mA, and frequency is 380kHz.
Test result ,-1600A/m to 1600A/m across zero magnetic field range in, impedance with externally-applied magnetic field change curve about zero magnetic field point symmetry.The sensitivity of different sections is different: outside magnetic field absolute value is greater than in the scope of 1500A/m, and probe is tending towards saturated, and sensitivity is close to 0; Magnetic field absolute value is within the scope of 800～1500A/m, and impedance and magnetic field are nonlinear relationship, and sensitivity is 0 to 0.89%/Am
-1between change; Magnetic field absolute value is within the scope of 50～800A/m, and impedance is linear change with externally-applied magnetic field, and sensitivity is 0.90%/Am
-1; Magnetic field is within the scope of-50～+ 50A/m, and sensitivity approaches zero, has null field blind spot.
In sum, the object of the invention is to adopt the composite magnetic being composited containing the magnetic material 3 of Hard Magnetic phase and the soft magnetic material 4 of pure soft magnetism phase to make magnetic sensitive probe core, obtain highly sensitive, linear response across the magneto sensor probe of zero Weak magentic-field.Provide a kind of and there is highly sensitive, high reliability simultaneously, without zero magnetic field blind spot, linear response across zero Weak magentic-field and there is the magneto sensor probe of the multiple advantages such as magnetic direction recognition capability.As shown in Figure 1, the flat folded bonding of the soft magnetic material 4 of the magnetic material containing Hard Magnetic phase 3 and soft magnet performance is formed to magnetic core 2, magnetic core 2 is inserted to energization solenoids 1 and form magneto-dependent sensor probe, make the axially parallel of magnetic core 2 and solenoid 1.Exchange current produces one along the axial driving field of magnetic core 2 by powered electrode 5 lead-in groove pipes 1, longitudinally driving under the effect of electromagnetic field, solenoid 1 and magnetic core 2 are connected and form an equiva lent impedance element, the impedor impedance of this equivalence meeting, along with acting on externally-applied magnetic field on magnetic core 2 linear change delicately, shows linear response across the excellent magnetic sensitive characteristic of zero Weak magentic-field.This composite cores magnetic sensitive probe has linear response across the main cause of the excellent magnetic sensitive characteristic of zero Weak magentic-field, is because the magnetic material 3 containing Hard Magnetic phase is under annealing bias field action, has formed a remnant field along annealing outer magnetic field direction.In the time of sticky the stacking of soft magnetic material 4 of the magnetic material 3 containing Hard Magnetic phase and soft magnet performance, containing the remnant field of the magnetic material 3 of Hard Magnetic phase, just formed the bias-field on a stable soft magnetic material that acts on soft magnet performance 4.Under the effect of this bias-field, originally about zero magnetic field symmetry only containing the solenoidal magnetoimpedance curve of magnetosensitive of the soft magnetic material 4 of soft magnet performance, along the translation of bias-field direction equal the displacement of bias-field size, result makes the solenoid containing magnetic core 2 have the characteristic across zero Weak magentic-field without null field blind spot, linear response.By the contrast of embodiment and comparing embodiment measurement result, obviously, the magnetic sensitive probe that adopts composite cores provided by the present invention to make, not only overcome the muting sensitivity shortcoming of the magnetic sensitive probe of the magnetic material 3 that only contains Hard Magnetic phase, also keeping under highly sensitive prerequisite, overcome the problem of the magnetic sensitive probe existence zero magnetic field blind spot of the soft magnetic material 4 that only contains soft magnet performance, and the ability with identification outer magnetic field direction: when outer magnetic field direction is with magnetic material 3 remanence directions containing Hard Magnetic phase when consistent, sensor is exported positive voltage; When outer magnetic field direction is with magnetic material 3 remanence directions containing Hard Magnetic phase when contrary, sensor output negative voltage.
The probe of faint magnetic of a kind of high sensitivity, no zero-field blind spot linear response provided by the present invention, compare current conventional giant magnetoresistance, hall magnetic sensor, not only have advantages of without null field blind spot, highly sensitive to Weak magentic-field, and there is direction recognition capability.Compare fluxgate and also have advantages of that volume is little, it is low to consume energy.Compare superconducting quantum interference device (SQUID), have advantages of that Miniaturized, manufacturing cost and operating cost are low.Compare direct current biasing field method, have advantages of that stability is high, precision is high, low and low cost of manufacture consumes energy.
A kind of high sensitivity, no zero-field blind spot linear response provided by the invention is across the probe of zero Weak magentic-field, possess the not available superiority that simultaneously has high sensitivity, high reliability, high stability and all the advantage such as cheap of existing dependent sensor, particularly have advantages of without null field blind spot, linear response is across zero Weak magentic-field and have direction recognition capability.Make to adopt the present invention to have improved again the reliability of magneto-dependent sensor carrying the highly sensitive while, and have and be convenient to microminiaturization, low power consuming and cheap comprehensive excellent superiority.Therefore, use the magneto-dependent sensor that the technology of the present invention is produced to have broad application prospects and the extremely strong market competitiveness.
For the ease of making and microminiaturization, metal spiral pipe 1 use enameled wire is close around forming, or the miniature coils that adopts plated film and photoetching technique to combine and make; Obviously, can adopt single or multiple lift coil, as long as can pass to electric current, produce driving electromagnetic field.Magnetic material 3 containing Hard Magnetic phase is thin rod, strip, filament or film shape, also can adopt other shape, as long as have applicable remnant field, and can insert solenoid 1 and be suitable for the soft magnetic material 4 of soft magnet performance compound.The soft magnetic material 4 of soft magnet performance is thin rod, strip, filament or film shape, also can adopt other shape, as long as have good soft magnet performance, and can insert solenoid 1 and be suitable for the magnetic material 3 containing Hard Magnetic phase compound.
In order to improve probe performance, the soft magnetic material 4 of soft magnet performance adopts amorphous or nano-crystal soft-magnetic alloy to make, and preferably adopts the alloy materials such as FeCuNbSiB, FeCoNbSiB, FeSiPBC to make; Obviously, for simple and easy to do, reduce costs, facilitate processing and fabricating, the soft magnetic material 4 of soft magnet performance can also adopt Fe, Co or mono-kind of metal of Ni to make, as long as there is good magnetic performance, be suitable for magnetic permeability under additional magnetic fields marked change can occur, and be convenient to insert solenoid 1.
Magnetosensitive signal of the present invention is taken out from the potential electrode 6 at solenoid 1 two ends by signal processing circuit, then by signal processing circuit, exports to signal display system or control system.In order to improve probe performance, drive current is preferably alternating current.The frequency of alternating current can be that several thousand Hz are to several GHz.
Obviously, composite cores can be stacked together the soft magnetic material of the magnetic material of Hard Magnetic phase 3 and soft magnet performance 4 simply, also can glue bond together, can also be combined with each other by the method for plated film.For making to be difficult for dislocation, to guarantee probe performance containing the magnetic material 3 of Hard Magnetic phase and the soft magnetic material of soft magnet performance 4, preferably will be bonded together containing the magnetic material 3 of Hard Magnetic phase and the soft magnetic material 4 of soft magnet performance.
Claims (5)
1. a high sensitivity, no zero-field blind spot linear response is across the probe of zero Weak magentic-field, comprise metal spiral pipe (1) and magnetic core (2), it is characterized in that: magnetic core (2) is composite cores, by being formed by stacking containing the magnetic material (3) of Hard Magnetic phase and the soft magnetic material (4) of soft magnet performance; Containing the magnetic material (3) of Hard Magnetic phase for have asymmetric magneto-impedance effect characteristic containing Hard Magnetic phase magnetic material, the soft magnetic material of soft magnet performance (4) is for having the pure soft magnetism phase material of symmetrical giant magnetoresistance effect characteristic; What have asymmetric magneto-impedance effect characteristic is to adopt Fe containing Hard Magnetic phase magnetic material (3)
76si
7.6b
9.5p
5c
1.9non-crystalline material applies vertically the magnetic field of 3000A/m and within 1 hour, makes in 490 ℃ of annealing under nitrogen protection, and the soft magnetic material (4) with the soft magnet performance of symmetrical giant magnetoresistance effect characteristic is to adopt Fe
76si
7.6b
9.5p
5c
1.9non-crystalline material makes in 470 ℃ of annealing in air for 1 hour.
2. high sensitivity, no zero-field blind spot linear response according to claim 1, across the probe of zero Weak magentic-field, is characterized in that: containing the magnetic material (3) of Hard Magnetic phase and the soft magnetic material (4) of soft magnet performance, be bonded together.
3. high sensitivity, no zero-field blind spot linear response according to claim 2 is across the probe of zero Weak magentic-field, it is characterized in that: magnetic susceptibility signal is taken out from the potential electrode (6) at metal spiral pipe (1) two ends by signal processing circuit, then by signal processing circuit, exports to signal display system or control system.
4. high sensitivity, no zero-field blind spot linear response according to claim 1 is across the probe of zero Weak magentic-field, it is characterized in that: magnetic susceptibility signal is taken out from the potential electrode (6) at metal spiral pipe (1) two ends by signal processing circuit, then by signal processing circuit, exports to signal display system or control system.
5. the probe across zero Weak magentic-field according to the high sensitivity, no zero-field blind spot linear response described in claim 3 or 4, is characterized in that: drive current is alternating current.
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