CN102298123A - Probe with high sensitivity, no zero-field blind spot and linear-response cross-zero weak magnetic field - Google Patents
Probe with high sensitivity, no zero-field blind spot and linear-response cross-zero weak magnetic field Download PDFInfo
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- CN102298123A CN102298123A CN201110200045XA CN201110200045A CN102298123A CN 102298123 A CN102298123 A CN 102298123A CN 201110200045X A CN201110200045X A CN 201110200045XA CN 201110200045 A CN201110200045 A CN 201110200045A CN 102298123 A CN102298123 A CN 102298123A
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Abstract
The invention relates to a magnetic sensor probe and especially relates to a probe with high sensitivity, no zero-field blind spot and linear-response cross-zero weak magnetic field. The probe comprises a metal solenoid and a magnetic core. The probe is characterized in that: the magnetic core is a composite magnetic core; the composite magnetic core is formed by superposing a magnetic material containing a hard magnetic phase and a soft-magnetic material possessing soft-magnetic performance. The probe possesses advantages of the no zero-field blind spot, the high sensitivity, the linear-response cross-zero weak magnetic field, high reliability, high stability, a low price and the like. And the probe possesses a direction identification capability and low power consumption, and is convenient for miniaturization.
Description
Technical field
The present invention relates to a kind of magneto-dependent sensor probe, the probe of zero Weak magentic-field is striden in the linear response of particularly a kind of highly sensitive no null field blind spot.
Background technology
To Weak magentic-field, particularly to approaching the Weak magentic-field of null value, have the novel magneto-dependent sensor of highly sensitive response, be current development in science and technology institute such as biological magnetic measurement, mine locating, nondestructive examination active demand.But, existing magneto-dependent sensor, as fluxgate, giant magnetoresistance, hall magnetic sensor etc. all because sensitive inadequately and can not satisfy the demands to Weak magentic-field.Though superconducting quantum interference device (SQUID) has high sensitivity, can satisfy the demand that current high-tech is measured Weak magentic-field to a certain extent,, because the required low temperature of superconduction is satisfied in its requirement, make that instrument can't microminiaturized and reasons such as manufacturing cost and operating cost height, limited the application of superconducting quantum interference device (SQUID) in many occasions.The discovery of giant magnetoresistance effect, make people see the hope of research and development high sensitivity magneto-dependent sensor, because its remolding sensitivity giant magnetoresistance effect will exceed an order of magnitude, exceed two orders of magnitude than Hall effect, but, giant magnetoresistance effect is still not high in the sensitivity at place, nearly zero magnetic field, and the giant magnetoresistance effect of conventional symmetry is very low in the sensitivity at place, nearly zero magnetic field, is called as the null field blind spot.As the patent magnetic sensitive material with high sensitivity (patent No.: 200810163790.X), a kind of magnetic sensitive material with high sensitivity (patent No.: 201110028111.X) with wide linear zone, 201110026317.9) etc. a kind ofly prepare the wide magnetic-sensitive material method of highly sensitive and linear zone (patent No.: all there is the problem of null field blind spot in patent, can not satisfy striding the sensitive response of zero Weak magentic-field requirement.Though there is the null field blind spot in asymmetric giant magnetoresistance effect unlike the giant magnetoresistance effect of symmetry near zero magnetic field, exist overall sensitivity to be not so good as the problem of symmetrical giant magnetoresistance effect also, does not also possess use value.Though, by adding bias direct current magnetic field the sensitive volume of magneto-dependent sensor is moved near zero magnetic field technology, can improve of the sensitivity of existing sensor to nearly zero Weak magentic-field response, but, not only there is the big problem of power consumption in this technology, but also require bias direct current magnetic field to have high stability, yet, existing electronic technology can't satisfy the desired high stability of highly sensitive magneto-dependent sensor, tend to because factor affecting such as temperature variation, power-supply fluctuation make bias-field fluctuate to some extent.
Therefore, existing technology can not satisfy, to striding zero Weak magentic-field sensitivity, and again can be microminiaturized and low power consuming and hang down the modern development in science and technology demand of manufacturing cost.
Summary of the invention
At above problem, the purpose of this invention is to provide a kind of probe that no null field blind spot, highly sensitive, linear response are striden zero Weak magentic-field that has.
The probe of zero Weak magentic-field is striden in the linear response of a kind of highly sensitive no null field blind spot, comprises metal spiral pipe and magnetic core, and it is characterized in that: magnetic core is a composite cores, and composite cores is formed by stacking by the soft magnetic material of magnetic material that contains the Hard Magnetic phase and soft magnet performance.
The objective of the invention is to realize by the composite cores that the soft magnetic material that adopts by magnetic material that contains the Hard Magnetic phase and soft magnet performance is formed by stacking.Stride zero Weak magentic-field, high reliability, high stability and all advantage such as cheap so not only have no null field blind spot, highly sensitive, linear response, also have the direction recognition capability and be convenient to the advantage of microminiaturization and low power consuming.
Description of drawings
Fig. 1 is a structural representation of the present invention,
Fig. 2 is the magnetoimpedance curve of a kind of probe of the present invention.
Fig. 3 is the magnetoimpedance curve of comparing embodiment 1,
Fig. 4 is the giant magnetic impedance curve of comparing embodiment 2.
Among the figure: solenoid 1, probe magnetic core 2, the magnetic material 3 that contains the Hard Magnetic phase, the soft magnetic material 4 of soft magnet performance, drive electrode 5, potential electrode 6.
Embodiment
Describe in detail below in conjunction with embodiment:
Fig. 1 is the probe that zero Weak magentic-field is striden in the linear response of a kind of highly sensitive no null field blind spot, mainly comprises metal spiral pipe 1 and magnetic core 2, it is characterized in that: magnetic core 2 is composite cores, is composited by the soft magnetic material 4 of magnetic material 3 that contains the Hard Magnetic phase and soft magnet performance.
In order to improve performance, the magnetic material 3 that contains the Hard Magnetic phase contains Hard Magnetic phase magnetic material, the pure soft magnetism phase material of soft magnetic material 4 for having symmetrical giant magnetoresistance effect characteristic of soft magnet performance for what have an asymmetric magneto-impedance effect characteristic.
Fig. 2 a kind ofly has containing Hard Magnetic phase magnetic material and having the magnetoimpedance curve map of the probe of faint the magnetic of highly sensitive no null field blind spot, linear response that the pure soft magnetism phase material of symmetrical giant magnetoresistance effect characteristic is composited of asymmetric magneto-impedance effect characteristic.Its Hard Magnetic phase magnetic material 3 that contains with asymmetric magneto-impedance effect characteristic is to adopt Fe
76Si
7.6B
9.5P
5C
1.9Non-crystalline material applies the magnetic field of 3000A/m vertically and made in 1 hour in 490 annealing under nitrogen protection; Pure soft magnetism phase material 4 with symmetrical giant magnetoresistance effect characteristic is to adopt Fe
76Si
7.6B
9.5P
5C
1.9Non-crystalline material made in 470 ℃ of annealing in air in 1 hour.
The probe of zero Weak magentic-field is striden in a kind of highly sensitive no null field blind spot linear response among the figure, prepares as follows:
(1) directly being that the enameled wire of 0.1mm is close with line makes the solenoid 1 that diameter is 0.57mm around 100 circles.
(2) the wide and thick Fe of 33 μ m with 0.35mm
76Si
7.6B
9.5P
5C
1.9Amorphous thin ribbon, the magnetic field that axially applies 3000A/m at nitrogen protection lower edge strip was in 490 annealing 1 hour, and it is long to intercept 15mm then, makes the magnetic material 3 that contains the Hard Magnetic phase.
(3) the wide and thick Fe of 33 μ m with 0.35mm
76Si
7.6B
9.5P
5C
1.9In 470 ℃ of annealing 1 hour, it was long to intercept 15mm then in air for amorphous thin ribbon, made the soft magnetic material 4 of soft magnet performance.
(4) will make magnetic core 2 with the soft magnetic material 4 flat folded bondings of soft magnet performance by the magnetic material that contains the Hard Magnetic phase 3 that step (2), (3) make.
(5) magnetic core 2 is inserted solenoid 1 and constitute the magneto-dependent sensor probe.
(6) magnetosensitive that the contain magnetic core 2 solenoidal magnetoimpedance curve of Fig. 2 for making with said method.The amplitude of drive current is 10mA during measurement, and frequency is 380kHz.
Test result ,-348A/m is in the zero magnetic field range of striding of 232A/m, and the solenoidal sensitivity of magnetosensitive is 0.89%/Am
-1, linear maximum deviation only is 0.78%.
Comparing embodiment 1
For the advantage of magnetic core 2 is described, change the magnetic core among the embodiment 12 into contain the Hard Magnetic phase magnetic material 3, be used for comparison.Specific implementation method is as follows:
(1) makes solenoid 1 with embodiment step (1).
(2) make the magnetic material 3 that contains the Hard Magnetic phase with embodiment step (2).
The magnetic material that contains the Hard Magnetic phase 3 that (3) will be made by step (2) inserts and makes the magnetosensitive probe in the solenoid that is made by step (1).
(4) Fig. 3 is the magnetoimpedance curve of popping one's head in the magnetosensitive that said method makes.The amplitude of drive current is 10mA during measurement, and frequency is 380kHz.
Test result ,-1600A/m is in the zero magnetic field range of striding of 1600A/m, and magnetoimpedance is with the externally-applied magnetic field linear change, but sensitivity is very low, has only 0.0048%/Am
-1
Comparing embodiment 2
For the advantage of magnetic core 2 is described, change the magnetic core among the embodiment 12 soft magnetic material 4 of soft magnet performance into, be used for comparison.Specific implementation method is as follows:
(1) makes solenoid 1 with embodiment step (1).
(2) make the soft magnetic material 4 of soft magnet performance with embodiment step (3).
(3) soft magnetic material 4 of the soft magnet performance that will be made by step (2) inserts and makes the magnetosensitive probe in the solenoid that is made by step (1).
(4) Fig. 4 is the giant magnetic impedance curve of popping one's head in the magnetosensitive that said method makes.The drive current amplitude is 10mA during measurement, and frequency is 380kHz.
Test result, at-1600A/m to the striding in zero magnetic field range of 1600A/m, impedance with the externally-applied magnetic field change curve about zero magnetic field point symmetry.The sensitivity difference of different sections: in the scope of outside magnetic field absolute value greater than 1500A/m, probe is tending towards saturated, and sensitivity is close to 0; The magnetic field absolute value is in 800～1500A/m scope, and impedance and magnetic field are nonlinear relationship, and sensitivity is 0 to 0.89%/Am
-1Between change; The magnetic field absolute value is in 50～800A/m scope, and impedance is linear change with externally-applied magnetic field, and sensitivity is 0.90%/Am
-1Magnetic field-50～+ the 50A/m scope in, promptly there is the null field blind spot in sensitivity near zero.
In sum, the objective of the invention is to adopt magnetic material 3 that contains the Hard Magnetic phase and the composite magnetic that pure soft magnetism soft magnetic material 4 mutually is composited to make magnetosensitive probe core, obtain novel magneto-dependent sensor probe highly sensitive, that zero Weak magentic-field is striden in linear response.A kind of novel magneto-dependent sensor probe that highly sensitive, high reliability, nothing zero magnetic field blind spot, linear response are striden zero Weak magentic-field and had multiple advantages such as magnetic direction recognition capability that has simultaneously is provided.As shown in Figure 1, will contain the magnetic material 3 of Hard Magnetic phase and the soft magnetic material 4 flat folded bondings of soft magnet performance and constitute magnetic cores 2, and magnetic core 2 be inserted energization solenoids 1 constitute the magneto-dependent sensor probe, make the axially parallel of magnetic core 2 and solenoid 1.Exchange current produces one along the axial Driving Field of magnetic core 2 by powered electrode 5 lead-in groove pipes 1, vertically driving under the effect of electromagnetic field, make solenoid 1 and magnetic core 2 connect and constitute an equiva lent impedance element, the impedor impedance of this equivalence meeting promptly shows the excellent magnetosensitive characteristic that zero Weak magentic-field is striden in linear response along with the externally-applied magnetic field linear change delicately that acts on the magnetic core 2.This composite cores magnetosensitive probe has the main cause that the excellent magnetosensitive characteristic of zero Weak magentic-field is striden in linear response, is because the magnetic material 3 that contains the Hard Magnetic phase under the effect of annealing bias-field, has formed a remnant field along the annealing outer magnetic field direction.In the time of soft magnetic material 4 sticking the stacking of the magnetic material 3 that contains the Hard Magnetic phase and soft magnet performance, the remnant field that contains the magnetic material 3 of Hard Magnetic phase has just formed the bias-field on the stable soft magnetic material that acts on soft magnet performance 4.Under the effect of this bias-field, originally about the solenoidal magnetoimpedance curve of magnetosensitive of the soft magnetic material that only contains soft magnet performance 4 of zero magnetic field symmetry, along the translation of bias-field direction equal the displacement of bias-field size, the result makes the solenoid that contains magnetic core 2 have the characteristic that no null field blind spot, linear response are striden zero Weak magentic-field.Contrast by embodiment and comparing embodiment measurement result, obviously, the magnetosensitive probe that adopts composite cores provided by the present invention to make, not only overcome the muting sensitivity shortcoming of the magnetosensitive probe of the magnetic material 3 that only contains the Hard Magnetic phase, also keeping under the highly sensitive prerequisite, there is the problem of zero magnetic field blind spot in the magnetosensitive probe that has overcome the soft magnetic material 4 that only contains soft magnet performance, and ability with identification outer magnetic field direction: when outer magnetic field direction is consistent with magnetic material 3 remanence directions that contain the Hard Magnetic phase, sensor output positive voltage; When outer magnetic field direction with contain Hard Magnetic magnetic material 3 remanence directions mutually when opposite, sensor output negative voltage.
The probe of faint magnetic of a kind of highly sensitive no null field blind spot provided by the present invention linear response, compare current giant magnetoresistance commonly used, hall magnetic sensor, not only have no null field blind spot, to the highly sensitive advantage of Weak magentic-field, and have the advantage of direction recognition capability.Compare fluxgate and also have the advantage that volume is little, power consumption is low.Compare superconducting quantum interference device (SQUID), then have Miniaturized, manufacturing cost and the low advantage of operating cost.Compare the direct current biasing field method, then have stability height, high, the low advantage of low manufacturing cost that reaches of power consumption of precision.
The probe of zero Weak magentic-field is striden in a kind of highly sensitive no null field blind spot provided by the invention linear response, possess the not available superiority that has high sensitivity, high reliability, high stability and all advantage such as cheap simultaneously of existing dependent sensor, particularly have the advantage that no null field blind spot, linear response are striden zero Weak magentic-field and had the direction recognition capability.Make to adopt the present invention when improving sensitivity, to have improved the reliability of magneto-dependent sensor again, and have and be convenient to microminiaturization, low power consuming and cheap comprehensive excellent superiority.Therefore, the magneto-dependent sensor that uses the technology of the present invention to produce will have broad application prospects and the extremely strong market competitiveness.
For the ease of making and microminiaturized, metal spiral pipe 1 usefulness enameled wire is close around forming, or employing plated film and the photoetching technique miniature coils that combines and make; Obviously, can adopt the single or multiple lift coil, produce the driving electromagnetic field as long as can pass to electric current.The magnetic material 3 that contains the Hard Magnetic phase also can adopt other shape for thin rod, strip, filament or film shape, as long as have suitable remnant field, and can insert solenoid 1 and be suitable for soft magnetic material 4 compound getting final product with soft magnet performance.The soft magnetic material 4 of soft magnet performance is thin rod, strip, filament or film shape, also can adopt other shape, as long as have good soft magnet performance, and can insert solenoid 1 and is suitable for and contains Hard Magnetic magnetic material 3 compound getting final product mutually.
In order to improve the probe performance, the soft magnetic material 4 of soft magnet performance adopts amorphous or nano-crystal soft-magnetic alloy to make, and preferably adopts alloy materials such as FeCuNbSiB, FeCoNbSiB, FeSiPBC to make; Obviously, for simple and easy to do, reduce cost, make things convenient for processing and fabricating, the soft magnetic material 4 of soft magnet performance can also adopt Fe, Co or the single metal of planting of Ni to make, as long as have magnetic performance preferably, be suitable for adding that marked change can take place magnetic permeability under the action of a magnetic field, and be convenient to insert solenoid 1 and get final product.
Magnetosensitive signal of the present invention is taken out from the potential electrode 6 at solenoid 1 two ends by signal processing circuit, exports to signal display system or control system by signal processing circuit then.In order to improve the probe performance, drive current is preferably alternating current.The frequency of alternating current can be that several thousand Hz are to several GHz.
Obviously, composite cores can be stacked together the magnetic material 3 of Hard Magnetic phase and the soft magnetic material 4 of soft magnet performance simply, also can glue bond together, can also be combined with each other with the method for plated film.For the soft magnetic material 4 that makes the magnetic material 3 that contains the Hard Magnetic phase and soft magnet performance is difficult for dislocation, guarantees the performance of popping one's head in, preferably will contain the magnetic material 3 of Hard Magnetic phase and the soft magnetic material 4 of soft magnet performance and bond together.
Claims (8)
1. the probe of zero Weak magentic-field is striden in highly sensitive no null field blind spot linear response, comprise metal spiral pipe (1) and magnetic core (2), it is characterized in that: magnetic core (2) is a composite cores, is formed by stacking by the soft magnetic material (4) of magnetic material that contains the Hard Magnetic phase (3) and soft magnet performance.
2. the probe of zero Weak magentic-field is striden in highly sensitive no null field blind spot according to claim 1 linear response, it is characterized in that: the magnetic material (3) that contains the Hard Magnetic phase contains Hard Magnetic phase magnetic material, the pure soft magnetism phase material of the soft magnetic material of soft magnet performance (4) for having symmetrical giant magnetoresistance effect characteristic for what have an asymmetric magneto-impedance effect characteristic.
3. the probe of zero Weak magentic-field is striden in highly sensitive no null field blind spot according to claim 2 linear response, it is characterized in that: the Hard Magnetic phase magnetic material (3) that contains with asymmetric magneto-impedance effect characteristic is to adopt Fe
76Si
7.6B
9.5P
5C
1.9Non-crystalline material applies the magnetic field of 3000A/m vertically and made in 1 hour in 490 ℃ of annealing under nitrogen protection, the pure soft magnetism phase material (4) with symmetrical giant magnetoresistance effect characteristic is to adopt Fe
76Si
7.6B
9.5P
5C
1.9Non-crystalline material made in 470 ℃ of annealing in air in 1 hour.
4. stride the probe of zero Weak magentic-field according to claim 1,2 or 3 described highly sensitive no null field blind spot linear responses, it is characterized in that: contain the magnetic material (3) of Hard Magnetic phase and the soft magnetic material (4) of soft magnet performance and bond together.
5. the probe of zero Weak magentic-field is striden in highly sensitive no null field blind spot according to claim 4 linear response, it is characterized in that: magnetosensitive sense signal is taken out from the potential electrode (6) at solenoid (1) two ends by signal processing circuit, exports to signal display system or control system by signal processing circuit then.
6. the probe of zero Weak magentic-field is striden in highly sensitive no null field blind spot according to claim 5 linear response, and it is characterized in that: drive current is an alternating current.
7. stride the probe of zero Weak magentic-field according to claim 1,2 or 3 described highly sensitive no null field blind spot linear responses, it is characterized in that: magnetosensitive sense signal is taken out from the potential electrode (6) at solenoid (1) two ends by signal processing circuit, exports to signal display system or control system by signal processing circuit then.
8. the probe of zero Weak magentic-field is striden in highly sensitive no null field blind spot according to claim 7 linear response, and it is characterized in that: drive current is an alternating current.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104931899A (en) * | 2015-05-11 | 2015-09-23 | 太原科技大学 | Magnetic field sensor probe sensitivity improving method |
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| CN101299370A (en) * | 2008-03-05 | 2008-11-05 | 内蒙古科技大学 | Synthesis magnet of hard magnetic phase and soft magnetic phase as well as preparing method |
| CN101667480A (en) * | 2009-10-12 | 2010-03-10 | 钢铁研究总院 | Hard magnetic linear nano coaxial cable wrapped by soft magnetic tube and preparation method thereof |
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| DE10111460A1 (en) * | 2001-03-09 | 2002-09-19 | Siemens Ag | Magnetic HF device with magnetically soft layer system e.g. for telecommunications systems, has adjustment of permeability of layer system by at least one other layer |
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| CN101299370A (en) * | 2008-03-05 | 2008-11-05 | 内蒙古科技大学 | Synthesis magnet of hard magnetic phase and soft magnetic phase as well as preparing method |
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| CN104931899A (en) * | 2015-05-11 | 2015-09-23 | 太原科技大学 | Magnetic field sensor probe sensitivity improving method |
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