Background technology
To Weak magentic-field, particularly the Weak magentic-field close to null value is there is the magneto material of highly sensitive response, be the current development in science and technology such as biological magnetic measurement, mine locating, nondestructive inspection institute active demand.But, adopt magnetic-sensitive material prepared by existing technology of preparing often can not sensitive response close to zero Weak magentic-field.Amorphous and nanocrystalline magnetosensitive material are current study hotspots, the sensitivity that people's method that employing is annealed amorphous alloy material under inert gas shielding conventionally improves magnetic-sensitive material, the giant magnetoresistance effect that the nanometer crystal alloy (FINEMET) making for 1 hour through 540 ℃ of insulations under nitrogen protection as F eCuNbSiB non-crystaline amorphous metal is had, comparing the Hall effect of traditional semi-conducting material and the giant magnetoresistance effect of multilayer film has improved much the sensitivity of Weak magentic-field, but still there is near very insensitive zonule zero magnetic field, still there is zero magnetic field blind spot.So existing magnetic-sensitive material preparation method can not prepare without zero magnetic field blind spot and Weak magentic-field be had to the magneto material of highly sensitive response, be difficult to meet current development in science and technology in the urgent need to.Although Squid has high sensitivity, can meet to a certain extent the demand that current high-tech is measured Weak magentic-field,, because it is required to meet the required low temperature of superconduction, make the instrument cannot be microminiaturized and the reason such as manufacturing cost and operating cost height, in many occasions, cannot apply.The discovery of giant magnetoresistance effect, make people see the hope of research and development high sensitivity magneto-dependent sensor, because its remolding sensitivity giant magnetoresistance effect will exceed an order of magnitude, than Hall effect, exceed two orders of magnitude, but, giant magnetoresistance effect is still not high in the sensitivity at nearly zero place, magnetic field, and conventional symmetrical giant magnetoresistance effect is very low in the sensitivity at nearly zero place, magnetic field, is called as null field blind spot.As the patent magnetic sensitive material with high sensitivity (patent No.: 200810163790.X), a kind of magnetic sensitive material with high sensitivity (patent No.: 201110028111.X) with wide linear zone, 201110026317.9) etc. (patent No.: patent all exists a problem for null field blind spot can not meet across the zero sensitive response requirement of Weak magentic-field to prepare the wide magnetic-sensitive material method in highly sensitive and linear zone.Although there is null field blind spot in asymmetric giant magnetoresistance effect, have also the not high enough problem of overall sensitivity near zero magnetic field unlike symmetrical giant magnetoresistance effect, also do not possess at present use value.Although, by additional bias direct current magnetic field, the sensitive volume of magneto-dependent sensor is moved to near the technology zero magnetic field, can partly solve existing magnetic-sensitive material to the nearly zero insensitive problem of Weak magentic-field, but, not only there is the problem that power consumption is large in this technology, but also require bias direct current magnetic field to there is high stability, otherwise the fluctuation in bias direct current magnetic field itself, by the precision of severe jamming magneto-dependent sensor, yet, existing electronic technology can't meet the desired high stability of highly sensitive magneto-dependent sensor, tend to because variations in temperature, the factor impacts such as power-supply fluctuation, bias-field is fluctuateed to some extent, thereby cannot realize the accurate response to nearly zero Weak magentic-field.
Therefore, existing technology can not meet, to responsive across zero Weak magentic-field, and again can be microminiaturized and the modern development in science and technology demand of low power consuming and low manufacturing cost.
Embodiment
Below in conjunction with embodiment, describe in detail:
Fig. 1 is a kind of composite material for magnetic core of magnetic sensitive probe.Its main points are: adopt containing the core material 1 of Hard Magnetic phase and the core material 2 of soft magnetism and be formed by stacking.Obviously, can, by being stacked together simply containing the core material 1 of Hard Magnetic phase and the core material 2 of soft magnetism, also can stick with glue knot together.For making to be difficult for dislocation, to guarantee probe performance containing the core material 1 of Hard Magnetic phase and the core material of soft magnetism 2, preferably will be bonded together containing the core material 1 of Hard Magnetic phase and the core material 2 of soft magnetism.
In order to improve performance, containing the core material 1 of Hard Magnetic phase for have asymmetric magneto-impedance effect characteristic containing Hard Magnetic phase magnetic material, soft magnetism core material 2 is for having the pure soft magnetism phase material of symmetrical giant magnetoresistance effect characteristic.
Fig. 2 is the magnetic sensitive probe of faint magnetic of a kind of high sensitivity, no zero-field blind spot linear response that adopts material of the present invention to make.Its probe magnetic core is to adopt Fe
76si
7.6b
9.5p
5c
1.9soft magnetism core material 2 and Fe that non-crystalline material makes in 470 ℃ of annealing in air for 1 hour
76si
7.6b
9.5p
5c
1.9non-crystalline material applies vertically the magnetic field of 3000A/m under nitrogen protection and the composite cores material being formed by stacking containing the core material 1 of Hard Magnetic phase that makes for 1 hour in 490 ℃ of annealing is made; Be that its Hard Magnetic phase core material 1 that contains with asymmetric magneto-impedance effect characteristic is to adopt Fe
76si
76b
9.5p
5c
1.9non-crystalline material applies vertically the magnetic field of 3000A/m and within 1 hour, makes in 490 ℃ of annealing under nitrogen protection, and the soft magnetism core material 2 with symmetrical giant magnetoresistance effect characteristic is to adopt Fe
76si
7.6b
9.5p
5c
1.9non-crystalline material makes in 470 ℃ of annealing in air for 1 hour.Fig. 3 is the solenoidal magnetoimpedance curve that comprises composite cores 3 of the present invention, and Fig. 4 is that the solenoid that comprises composite cores 3 of the present invention is the output voltage of the magneto-dependent sensor of probe and the relation curve between externally-applied magnetic field.From voltage and the magnetic field dependence test result of Fig. 4, its-348A/m to 232A/m across zero magnetic field range in, sensor output voltage and externally-applied magnetic field are linear, sensitivity is 7.38mV/(Am
-1), linear maximum deviation is only 0.76%.And there is magnetic direction recognition capability, when the remanence direction of outer magnetic field direction and core material 1 is identical, output voltage be on the occasion of; When the remanence direction of outer magnetic field direction and core material 1 is contrary, output voltage is negative value.
Obviously, the core material 2 of the soft magnetism of the composite material 3 for magnetic core of magnetic sensitive probe of the present invention, can adopt amorphous or nano-crystal soft-magnetic alloy to make, as the alloy materials such as FeCuNbSiB, FeCoNbSiB, FeSiPBC are made; For simple and easy to do, reduce costs, facilitate processing and fabricating, can also adopt single metal of planting of Fe, Co or Ni to make, as long as have good soft magnet performance, under additional magnetic fields, magnetic permeability can marked change, and is convenient to insert solenoid 4.
comparing embodiment 1
In order to illustrate that the present invention is used for the advantage of the composite material 3 of magnetic core of magnetic sensitive probe, change the composite material in embodiment 3 into core material 1, for comparing.Specific implementation method is as follows:
(1) with embodiment, make core material 1.
(2) core material being made by step (1) 1 is inserted in solenoid 4 and makes magnetic core solenoid and measure its magnetic sensitive characteristic.
The magnetic characteristic curve that Fig. 5 is the magnetic core solenoid that makes with said method.During measurement, by drive electrode 5 input amplitudes, be 10mA, the interchange that frequency is 380kHz drives signal, by measurement electrode 6, measures magnetoimpedance curve.
Test result is ,-1600A/m to 1600A/m across zero magnetic field range in, magnetic core solenoid impedance is with externally-applied magnetic field linear change, but sensitivity is very low, only has 0.0048%/Am
-1if, with this comparing embodiment, to pop one's head in, the sensitivity of the transducer made from the identical circuit of embodiment will be less than 0.001mV/Am
-1, obviously there is no practical value.
comparing embodiment 2
In order to illustrate for the advantage of the composite material 3 of magnetic core of magnetic sensitive probe, change the composite material in embodiment 3 into core material 2, for comparing.Specific implementation method is as follows:
(1) with embodiment, make core material 2.
(2) core material being made by step (1) 2 is inserted in solenoid and makes magnetosensitive solenoid.
The magnetosensitive solenoidal giant magnetic impedance curve of Fig. 6 for making with said method.During measurement, by drive electrode 5 input amplitudes, be 10mA, frequency is that the interchange of 380kH z drives signal, by measurement electrode 6, measures giant magnetic impedance curve.
Test result is ,-1600A/m to 1600A/m across zero magnetic field range in, impedance with externally-applied magnetic field change curve about zero magnetic field point symmetry.The sensitivity of different sections is different: the absolute value of outside magnetic field is greater than in the scope of 1500A/m, and probe is tending towards saturated, and sensitivity is close to 0; Magnetic field absolute value is within the scope of 800~1500A/m, and impedance and magnetic field are non-linear relation, and sensitivity is 0 to 0.89%/Am
-1between change; Magnetic field absolute value is within the scope of 50~800A/m, and impedance is linear change with externally-applied magnetic field, and sensitivity is 0.90%/Am
-1; Magnetic field is within the scope of-50~+ 50A/m, and sensitivity approaches zero, has null field blind spot.
In sum, composite material 3 for magnetic core of magnetic sensitive probe of the present invention, reason is made containing core material 1 and 2 stacks of soft magnetism core material of Hard Magnetic phase, and the axial driving field that alternating current produces by powered electrode 5 lead-in groove pipes 4 magnetic core of magnetic sensitive probe of being made by composite material 3 on an edge, longitudinally driving under the effect of electromagnetic field, make solenoid 4 connect and form an equiva lent impedance element with the magnetic core of being made by composite material 3, the impedor impedance of this equivalence meeting changes delicately along with acting on the variation of the additional Weak magentic-field on magnetic core.The remnant field of core material 1 acts on soft magnetism magnetic core 2, make the linear magnetosensitive district center of equiva lent impedance element move on to zero place, magnetic field, so that the impedance of equiva lent impedance element can be is linearly changed with additional Weak magentic-field, show linear response across the excellent magnetic sensitive characteristic of zero Weak magentic-field.
The magnetosensitive solenoid that the present invention of take is magnetic core for the composite material 3 of magnetic core of magnetic sensitive probe, not only overcome and only contained the solenoidal muting sensitivity shortcoming of single core material 1, also keeping under highly sensitive prerequisite, overcoming and only containing the magnetosensitive solenoid of single core material 2, had the problem of zero magnetic field blind spot; And the ability that has possessed identification outer magnetic field direction: when the remanence direction of outer magnetic field direction and core material 1 is consistent, transducer is exported positive voltage; When outer magnetic field direction and core material 1 remanence direction is when contrary, transducer output negative voltage.
Take the magnetic sensitive probe of preparing as magnetic core for the composite material 3 of magnetic core of magnetic sensitive probe of the present invention, compare with current conventional giant magnetoresistance, hall magnetic sensor probe, not only have advantages of without null field blind spot, highly sensitive to Weak magentic-field, and there is direction recognition capability.Compare fluxgate and have advantages of that volume is little, it is low to consume energy.Compare superconducting quantum interference device (SQUID), embody Miniaturized and manufacturing cost and the low advantage of operating cost.Compare direct current biasing field method, have advantages of that stability is high, it is low to consume energy and low cost of manufacture.
The composite material of preparing with the technology of the present invention, possess the not available superiority that simultaneously has high sensitivity, high reliability, high stability and all the advantage such as cheap of existing magnetic-sensitive material, particularly have advantages of without null field blind spot, linear response is across zero Weak magentic-field and have direction recognition capability.Make to adopt the prepared magnetic-sensitive material of the technology of the present invention to have improved again the reliability of magneto-dependent sensor carrying the highly sensitive while, and have and be convenient to microminiaturization, low power consuming and cheap integrated superiority.Therefore, use the magnetic-sensitive material that the technology of the present invention is produced to have broad application prospects and the extremely strong market competitiveness.
Composite material 3 for magnetic core of magnetic sensitive probe of the present invention can be thin rod, strip, filament or film shape, also can adopt other shape; As long as core material 1 has applicable remnant field, core material 2 has good soft magnet performance, after both are compound, can insert solenoid 4.