The specific embodiment
Below, use accompanying drawing that embodiments of the present invention are described.
In addition, the embodiment that the following describes has following diversified purposes: as the coating object and to the glass substrate that in flat-panel monitor, uses carried out being used to controlling the arrangement mode of liquid crystal molecule the Kapton that grinds rub (rubbing), used the soft crooked Electronic Paper (Electronic paper) etc. that electrophoresis mode etc. is known as flexible display.In this embodiment, the compliant member of film shape is made as an example of coating object, for example (for example at the semi-conducting material that imposes non-silicon system, the CIGS film) on the solar cell film, come coated electrode material, insulating materials by the applicator head of utilizing ink-jetting style, thereby the film that carries out electrode, dielectric film etc. forms.According to ink-jetting style, have the plate-making funds of can cutting down, can effectively use the such advantage of coating material, enlarge day by day based on the employing of the coating of ink-jetting style.In addition, the CIGS film is that " CIGS " is the abbreviation of having arranged the beginning letter of these materials by the film of the semi-conducting material of Cu (copper), In (indium), Ga (gallium) and Se (selenium) formation.
Fig. 1 is the stereogram of the summary structure in the embodiment of expression ink-jet coating apparatus of the present invention and method, the 1st, and solar cell is with laminate film (below, simply be called film), the 2nd, roll out the side film roll, the 3rd, winding side film roll, 4, the 5th, deflector roll, 6, the 7th, the lifting deflector roll, 8, the 9th, the absorption rod, the 10th, the absorption platform, the 11st, roll out the side shaft motor, the 12nd, the winding side spindle motor, 13, the 14th, film is by pressure bar, the 15th, applicator head, the 16th, roll out portion, the 17th, coating portion, the 18th, coiling portion, the 19th, video camera, 20a are fine motion Z axle driver elements, the 21st, and θ axle driver element, the 22nd, rubber heater, the 23rd, roller heater.
In the figure, the length direction (moving direction) of film 1 is made as X-direction, is divided into the portion of rolling out 16, coating portion 17 and coiling portion 18 along the space of this X-direction.In the portion of rolling out 16, on X-direction, be arranged in order to be provided with and be rotated the deflector roll that rolls out side film roll 2, upstream side 4, the lifting deflector roll 6 of driving and adsorb rod 8 by rolling out side shaft motor 11, in coiling portion 18, on X-direction, be arranged in order the absorption rod 9, lifting deflector roll 7, deflector roll 5 and the winding side film roll 3 that are provided with the downstream.
In addition, here be right after at the rear of coating portion 17 and be provided with coiling portion 18, but also can between coating portion 17 and coiling portion 18, be provided with relief portion, drying section, be arranged on and then making interval after film 1 coating attached to the solution evaporation of the coating material (not shown) of film 1 by these unit.
In the portion of rolling out 16, the film 1 of band shape that will become the coating object of electrode material, insulating materials in rolling out side film roll 2 in coating portion 17 is rolled into the roller shape.In addition, this film 1 rolls out side film roll 2 from this and rolls out and by coating portion 17, be wound on the winding side film roll 3 by coiling portion 18.In rolling out side film roll 2, built-in roller as heating unit, can heat the film 1 that roll out to coating portion 17 with 20~80 ℃ temperature range with heater 23 thus in advance.
In coating portion 17, be provided with absorption platform 10, applicator head 15, film by pressure bar 13,14, film 1 by vacuum suction and fixed-site on absorption platform 10.In applicator head 15, be provided with video camera 19, fine motion Z axle driver element 20a, θ axle driver element 21 etc. and constitute head.When absorption platform 10 is in the state of the lower surface that is attracted to film 1, sometimes the both sides avris of film 1 contracts from the surface of absorption platform 10 owing to curl, but film is partly pressed to absorption platform 10 from upside with this dual-side side that contracts by pressure bar 13,14.Thus, corrected curling of film 1.Absorption platform 10, film carry out as vacuum source and by vacuum valve with vavuum pump by the absorption action of pressure bar 13,14, and the absorption of carrying out film 1 is fixed, fixed solution removes.
Lower surface at absorption platform 10 is pasted with rubber heater 22, also comprise course of action thus to the coating of film 1, absorption platform 10 integral body are heated by the temperature range with 50~100 ℃ all the time, accompany therewith, and the film 1 that is adsorbed on this absorption platform 10 also is heated.Like this, by the heating in this coating process, at short notice, spue and, can suppress the moistening diffusion of the coating material on the film 1 attached to the solution evaporation of the coating material on the film 1 from the nozzle that spues (not shown) of applicator head 15.
But, as described above, by being built in the roller heater 23 that rolls out side film roll 2, be wound under the state that rolls out side film roll 2 in advance by temperature range heating at film 1 with 20~80 ℃, but become thus under the state that has been heated film 1 is transported to absorption platform 10 from rolling out side film roll 2, therefore can when beginning, its coating make this film 1 be in heated condition, even when film 1 being adsorbed onto absorption platform 1, begin the coating action immediately, also can suppress to be coated to the moistening diffusion of the coating material on this film 1.In addition, when film 1 is moved on the absorption platform 10, has heated with heater 23 and become soft, so can waltz through film and film 1 is pressed to the surface of adsorbing platform 10 by pressure bar 13,14 to a certain degree by roller.
In addition, the roller that rolls out in the side film roll 2 is made as the low or same degree than the design temperature in the rubber heater 22 with the design temperature of heater 23, is effectively aspect this distortion, the positioning accuracy, but is not limited thereto at film 1.
Fig. 2 is applicator head 15 in the presentation graphs 1 and the stereogram that a concrete example of state is set thereof, 20a
1Be the fine motion drive division, 20a
2Be Z axle holding plate, 20bc is a Z axle retention tab, the 24th, and the X-axis driver element, the 25th, laser range finder, the 26th, coating material, the 27th, head, the 28th, stand is for also the repetitive description thereof will be omitted with the additional same tag of the corresponding part of Fig. 1.
In the figure, on the X-direction that film 1 moves, on elongated retention tab 20bc, be fixed with not shown head holding plate, keep substrate to upload at this head and be equipped with head 27.In addition, retention tab 20bc constitutes independent Z axle driver element described later and shared Z axle driver element.
In addition, fine motion Z axle driver element 20a is by fine motion drive division 20a
1, Z axle holding plate 20a
2Constitute.
This head 27 is made of applicator head 15, fine motion Z axle driver element 20a, θ axle driver element 21, X-axis driver element 24 and laser range finder 25 etc., and laser range finder 25 is installed on the applicator head 15, and applicator head 15 is installed in Z axle holding plate 20a
2On, this Z axle holding plate 20a
2Fine motion Z axle driver element 20a by fine motion Z axle driver element 20a
1And driven to Z-direction (perpendicular to the direction on the surface of adsorbing platform 10) fine motion.Thereby, by fine motion Z axle drive division 20a
1Driving, applicator head 15 and laser range finder 25 are to Z-direction fine motion, the i.e. relative face that is adsorbed on the film 1 on the absorption platform 10 and direction fine motion up and down.
In addition, θ axle driver element 21 is located at the upside of applicator head 15, laser range finder 25 or fine motion Z axle driver element 20a etc. and locates, and is rotated to the θ direction of principal axis by making them, change with respect to X-direction 15 towards.
In addition, X-axis driver element 24 makes applicator head 15, laser range finder 25, fine motion Z axle driver element 20a, video camera 19 move to X-direction by the not shown head holding plate that head 27 is installed, and adjusts the position of the X-direction of applicator head 15 thus.
As described later, stand 28 constitutes Y-axis driver element described later, and stand 28 moves and retention tab 20bc also moves to Y direction to Y direction, and applicator head 15 moves to Y direction relative to the film 1 that is adsorbed on the absorption platform 10 thus.
In addition, as described later, retention tab 20bc constitutes the Z axle driver element (independent Z axle driver element and shared Z axle driver element) different with fine motion Z axle driver element 20a, can move to Z-direction, moving of Z-direction by this retention tab 20bc, head 27 moves and applicator head 15 moves up and down to Z-direction.
The sign (not shown) that video camera 19 is taken the expression reference position, described reference position is located on the film 1 that is adsorbed in absorption platform 10, carries out the position adjustment of film 1 according to this shooting results.
In addition, be provided with the nozzle that spues (not shown) in the lower surface of applicator head 15 (with the opposed face of face that is adsorbed on the film 1 on the absorption platform 10), when to being adsorbed on the film 1 of absorption on the platform 10 when applying, spuing coating material 26 and be coated on this film 1 from this nozzle that spues.
Fig. 3 is the figure of a concrete example that expression is located at the arrangement of a plurality of nozzles on this applicator head 15, and Figure 15 a is the lower surface of applicator head 15, and 15b is the nozzle that spues.
In the figure, the lower surface 15a of applicator head 15 is elongated shape, is provided with a plurality of nozzle 15b and be arranged in row of spuing along its length direction in the 15a of this lower surface.The length direction of the lower surface 15a of this applicator head 15 is along the direction of X-direction when applicator head 15 is in not the state (initial rotation status) that drives by 21 rotations of θ axle driver element.When utilizing 15 rotations of θ axle driver element 21 applicator heads, the orientation of the nozzle 15b that spues is tilted and the corresponding angle of this rotation amount with respect to X-direction.
Fig. 4 is an integrally-built vertical view of seeing the embodiment shown in Fig. 1 from the top, and 20b is independent Z axle driver element, 20b
1Be independent Z axle drive division, 20c is shared Z axle driver element, 20c
1Be shared Z axle drive division, 20c
2Be guide, 29a, 29b are linear guides, the 30th, and the Y-axis drive division is for also the repetitive description thereof will be omitted with the additional same tag of the corresponding part of Fig. 1, Fig. 2.
In the figure, be provided with the applicator head 15 of a plurality of ink jet types in coating portion 17, be provided with 8 here, as described above, each applicator head 15 can move up and down respectively by fine motion Z axle driver element 20a.These applicator heads 15 are a group with 4, are provided with two groups here.But, also can be more than 3 groups.
In addition, stride across with parallel two linear guides 29a, the 29b of direction (Y direction) that cross absorption platform 10 and set up stand 28,4 Z axle retention tab 20bc are parallel to each other and the compartment of terrain that is spaced from each other regulation is provided with in X-direction between these linear guides 29a, 29b in addition.
In these 4 Z axle retention tab 20bc, begin to be made as successively first from the most close stand 28 sides, the 2nd, the 3rd, the 4th Z axle retention tab 20bc, and the group of linear guides 29a side is made as first group, the group of linear guides 29b side is made as the 2nd group, on first Z axle retention tab 20bc, separate first predetermined distance ground configuration first, the 2nd group of each applicator head 15 of one, on the 2nd Z axle retention tab 20bc, dispose first with the first identical predetermined distance, the 2nd group of each other applicator head 15 of one, this other applicator head 15 separates the 2nd predetermined distance with the applicator head 15 that is configured on first Z axle retention tab 20bc on directions X, on the 3rd Z axle retention tab 20bc, with identical first predetermined distance configuration first, the 2nd group of each another other applicator head 15 of one, this another other applicator head 15 be configured in the 2nd applicator head 15 on the Z axle retention tab 20bc and on identical directions X, separate the 2nd predetermined distance, and, on the 4th Z axle retention tab 20bc, with identical first predetermined distance configuration first, the 2nd group of each residue applicator head 15 of one, and this residue applicator head 15 be configured in the 3rd applicator head 15 on the Z axle retention tab 20bc and on identical directions X, separate the 2nd predetermined distance.
Thus, in the arrangement of these 8 applicator heads 15 that X-direction is seen, each applicator head 15 to the configuration of X-direction staggered positions ground, is still set above-mentioned the first, the 2nd predetermined distance, so that the interval of the X-direction of these applicator heads 15 becomes equal mutually.And specifically, as shown in Figure 3, each applicator head 15 possesses a plurality of nozzle 15b that spue that are arranged as linearity, but sets the first, the 2nd above-mentioned predetermined distance, so that the position of the X-direction of the nozzle 15b that spues of 8 whole applicator heads 15 all becomes uniformly-spaced.
In addition, between Z axle retention tab 20bc, be provided with predetermined distance, as shown in Figure 2, each applicator head 15 is by on the Z axle holding plate 20a that remains on fine motion Z axle driver element 20a, and the arrangement of the nozzle 15b that spues of the lower surface 15a of applicator head 15 is whole directly mutually opposed with the face of film 1.
The shared Z axle drive division 20c that forms shared Z axle driver element 20c is installed in the linear guides 29a of stand 28 side
1, at this shared Z axle drive division 20c
1In 4 independent Z axle drive division 20b that form 4 independent Z axle driver element 20b are installed
1And, these 4 independent Z axle drive division 20b
1Each on Z axle retention tab 20bc is installed.The end of the linear guides 29b side of these Z axle retention tabs 20bc is by guide 20c
2Support.
Therefore, Z axle retention tab 20bc and shared Z axle drive division 20c
1Constitute shared Z axle driver element 20c Deng together, in addition, with independent Z axle drive division 20b
1Deng constituting independent Z axle driver element 20b together.And, by shared Z axle drive division 20c
1Driving, whole Z axle retention tab 20bc will move up and down identical distance to Z-direction simultaneously, thus, whole applicator heads 15 move up and down identical distance to Z-direction simultaneously.In addition, by 4 independent Z axle drive division 20b
1Some drivings, be installed in this independent Z axle drive division 20b
1On Z axle retention tab 20bc will move up and down to Z-direction, thus, each one the applicator head 15 that is installed on this Z axle retention tab 20bc first, the 2nd group moves up and down identical distance to Z-direction simultaneously.
In addition, in Fig. 2, as the fine motion Z axle drive division 20a that is located on the applicator head 15
1When driving, have only this applicator head 15 to move up and down to Z-direction.
Like this, in this embodiment, be provided with fine motion Z axle driver element 20a, independent Z axle driver element 20b and shared Z axle driver element 20c as Z axle driver element, thus, a specified applicator head 15 is moved up and down, and can make two applicator heads 15 that are located on the specified Z axle retention tab 20bc move up and down identical distance simultaneously, can make whole applicator head 15 move up and down identical distance simultaneously, the state in the time of can be according to the coating in the film 1 selects to carry out the driving of some Z-directions.
Here, when applying action on the film 1 on being adsorbed on absorption platform 10, laser range finder 25 (Fig. 2) is measured the distance between the nozzle 15b (Fig. 3) of spuing of the surface of this film 1 and applicator head 15 non-contactly by optics, fine motion Z axle driver element 20a carries out drive actions to be made applicator head 15 move to Z-direction to adjust this film 1, distance between the nozzle 15b spues, so that this film 1, the distance between the nozzle 15b of spuing becomes the distance of regulation, but at film 1, the distance between the nozzle 15b of spuing surpasses the scope that can adjust by the drive actions of fine motion Z axle driver element 20a and under situation about can't adjust, next, independent Z axle driver element 20b begins drive actions, adjusts film 1, distance between the nozzle 15 spues.In this case, on an applicator head 15 that becomes on the Z axle retention tab 20bc of driven object, can adjust film 1, distance between the nozzle 15b spues, at another applicator head 15 upper films 1, spue distance between the nozzle 15b also under the situation of ranging offset of regulation, fine motion Z axle driver element 20a carries out drive actions, adjust this applicator head 15 film 1, distance between the nozzle 15b spues.
Exist also can't adjust film 1 by the drive actions of independent Z axle driver element 20b, under the situation of the applicator head 15 of the distance between the nozzle 15b that spues, shared Z axle driver element 20c carries out drive actions, but this shared Z axle driver element 20c is used for the film 1 to applicator head 15 when also beginning to apply action on film 1 being adsorbed on absorption platform 10, the distance that spues between the nozzle 15b is carried out initial setting.
Fig. 5 is the figure of the concrete example that drives of the Z-direction of the applicator head 15 in the presentation graphs 2, for the additional same tag of the corresponding part of above-mentioned accompanying drawing and the repetitive description thereof will be omitted.
In the figure, from its width (Y direction), in film 1, produce the section difference d that the bending etc. of film 1 causes
1, form the section difference d that circuit etc. causes in advance
2Protuberance, section difference d
3Recess.Here, be made as d
1>d
2, d
3, the distance of the regulation between the nozzle 15b that spues of film 1 and applicator head 15 is made as D.
As described above, fine motion Z axle driver element 20a absorbs the mechanical alignment error of each applicator head 15, eliminates the alignment error of the applicator head 15 see, still, owing to be formed on the existence of circuit on the film 1 etc. in advance, also has a section difference d sometimes on film 1 in addition
2Protuberance, section difference d
3Recess, make the distance between the nozzle of spuing of in this concave, convex portion film 1 and applicator head 15 also become regulation distance D be fine motion Z axle driver element 20a.
In addition, in film 1, produce bending at width sometimes.By pressing the dual-side portion of film 1 by pressure bar 13,14 by above-mentioned film, this bending of having corrected film 1, but such as shown, sometimes because a section difference d
1And the dual-side portion of film 1 produces ripple to the upside expansion.This ripple produces on the width of film 1 easily, but be difficult on the length direction of film 1, produce, and situation about can't tackle in fine motion Z axle driver element 20a is many, therefore adjust by independent Z axle driver element 20b, so that the distance that spues between the nozzle 15b of film 1 and applicator head 15 can not produce deviation owing to the ripple of the main width of this film 1, adjustment is listed in two applicator heads 15 of X-direction along this corrugation rows, promptly be installed in the distance between nozzle 15b and the film 1 of spuing of two applicator heads 15 on the identical Z axle retention tab 20bc, make the distance of regulation become D.
In addition, deal with under the situation of this ripple in the driving that can utilize fine motion Z axle driver element 20a, in this ripple, the measurement result of laser range finder 25 becomes much at one on identical Z axle retention tab 20bc, in this case, also can move these applicator heads 15 to Z-direction simultaneously by independent Z axle driver element 20b.
Switching under the altered situation of the thickness of film 1 or in order to prevent that spray nozzle clogging from carrying out what is called when giving up action etc. in the service action owing to section, under the situation that whole applicator head 15 is moved up and down together, carry out the driving of the Z-direction of shared Z axle driver element 20c.
In addition, the effect of each above Z axle driver element 20a~20c is main, is not limited thereto, and can also change purpose a little and applies flexibly this 3 kinds of Z axle driver elements.
Return Fig. 4, on linear guides 29a, 29b, be provided with and be used to Y-axis driver element 30 that stand 28 is moved to Y direction.By the driving of this Y-axis driver element 30, stand 28 moves to Y direction, accompanies therewith, and independent Z axle driver element 20b and shared Z axle driver element 20c move to Y direction, and whole Z axle retention tab 20b keeps mutual compartment of terrains to move to Y direction.Thereby whole applicator heads 15 moves to Y direction with identical speed therefrom simultaneously.
When the coating do not carried out in the film 1, applicator head 15 is set to its orientation that spues nozzle 15b (Fig. 3) becomes the state that is parallel to X-direction, but, need to change the orientation of nozzle 15b of spuing sometimes according to the coating situation of the coating material on the film 1 26 (Fig. 2).In this case, come spin coated 15 by θ axle driver element 21 shown in Figure 2.
Fig. 6 is the vertical view of this state of expression, for also the repetitive description thereof will be omitted with the additional same tag of the corresponding part of above-mentioned accompanying drawing.
In the figure, the driving by θ axle driver element 21 makes applicator head 15 anglec of rotation α, and the orientation of the nozzle 15b that spues of these applicator heads 15 becomes the state that relative X-direction has been offset angle [alpha].Like this, when making applicator head 15 anglec of rotation α, the interval along X-direction of this nozzle 15b that spues dwindles becomes cos α doubly.Thereby, when a plurality of nozzle 15b that spue that utilize this applicator head 15 when Y direction applies simultaneously, compare during with state before the spin coated 15, the interval of the coating track of these nozzle 15b that spue is narrowed cos α doubly, can make in this way under situation about applying with narrower track spacing.
In addition, as shown in Figure 4, when each applicator head 15 is in the state that is parallel to X-direction (is α=0 degree, the direction that sets of the nozzle 15b that spues in the applicator head 15 shown in Figure 3 is the direction that is parallel to X-axis) time, the end of these applicator heads 15 is in the overlapping state of the last branch of X-direction, thus, the whole nozzle 15b that spue in whole applicator heads of first, the 2nd group all become equal interval at the interval of this X-direction.For example shown in Figure 3, as the interval of the orientation of establishing the nozzle 15b that spues (below be called arrangement pitch) during for P, in state shown in Figure 4, the interval of the X-direction between the nozzle 15b that spues of left end (perhaps right-hand member) of other applicator head 15 that spues nozzle 15b and be configured in the right side (perhaps left side) of this applicator head 15 of the right-hand member of certain applicator head 15 (perhaps left end) also equates with the interval of the nozzle 15b that spues in the applicator head 15, is made as interval P.
In addition, as shown in Figure 6, also identical under the situation that makes each applicator head 15 anglec of rotation α, the interval of the nozzle 15b that spues in the applicator head 15 becomes Pcos α, but in this case, the interval of the X-direction between the nozzle 15b that spues of left end (perhaps right-hand member) of other applicator head 15 that spues nozzle 15b and be configured in the right side (perhaps left side) of this applicator head 15 of the right-hand member of certain applicator head 15 (perhaps left end) also becomes Pcos α.This realizes in the following way: with the rotation of applicator head 15, the driving by X-axis driver element 24 (Fig. 2) makes applicator head 15 move to X-direction, so that approaching mutually on X-direction.
Under the situation of coating coating material 26 (Fig. 2) in the zone of the film 1 that is being adsorbed in absorption platform 10 by applicator head 15, use a plurality of applicator heads 15 to apply simultaneously sometimes.In this case, the interval of the coating track by making each the nozzle 15b that spues in this zone narrows down, can apply uniformly as a whole, but also must make the interval of this coating track also narrower sometimes than the interval P of this orientation of the nozzle 15b that spues in the applicator head 15, in this case, as shown in Figure 6, by rotating each applicator head 15 interval of interval and desirable coating track of the X-direction of the nozzle 15b that spues is coincide.
In addition, setting can rotating range based on the applicator head 15 of θ axle driver element 21 (Fig. 2), even applicator head 15 can be rotated in the rotating range at this, the arrangement of the nozzle 15b that spues at the 15a place, lower surface of applicator head 15, as a whole also between Z axle retention tab 20bc, directly mutually opposed with the face of film 1.
Fig. 7 is the figure that represents to apply like this state of the applicator head 15 of track when also narrower than the interval P of the orientation of the nozzle 15b that spues in the applicator head 15, this figure (a) is the vertical view of the part of the film 1 on the expression absorption platform 10, this figure (b) amplifies the part of the A among this figure of expression (a) and the vertical view of the relation between the nozzle 15b that spues in each applicator head 15, the 31st, the area of application, the 32nd, edge part, the 33rd, coating track.In addition, for also the repetitive description thereof will be omitted with the additional same tag of the corresponding part of above-mentioned accompanying drawing.
In this figure (a), in film 1, when being located on absorption platform 10 by coating portion 17 (Fig. 1), set rectangular-shaped the area of application 31 of regulation number, at each the area of application, 15 pairs of these rectangular box-like edge parts of applicator head, the 32 coating coating materials 26 (coating material 26 of this edge part 32 is fixed by rubber heater 22 (Fig. 1) heating) of at first use regulation, then, the inside to edge part 31 in each the area of application 31 applies coating material 26.Like this, under the situation that forms rectangular box-like edge part 32, the part along Y direction at this edge part 32 moves applicator head 15 by Y-axis driver element 30 to Y direction, and the specific nozzle 15b that spues by specific applicator head 15 applies coating material 26.
In addition, edge part 32 in the part of X-direction, followingly apply like that.That is, each applicator head 15 is configured on the different Z axle retention tab 20bc, so its position is offset in Y direction successively.Therefore, when when Y direction moves each applicator head 15, each applicator head 15 sequentially arrives the part along X-direction of edge part 32 with different timings.Therefore, by the coating material 26 that spues from the nozzle 15b that spues that arrives this edge part 32 along the applicator head 15 of the part of X-direction, by each applicator head 15 part along X-direction of application edge portion 32 sequentially, form the edge part 32 of the X-direction that has applied coating material 26.
In addition, as illustrated among Fig. 7 (b), in the area of application 31, consistent for the interval in the interval of X-direction and the figure that carries out the Y direction coating by each applicator head 15 of the nozzle 15b that spues that makes each applicator head 15 along the coating track 33 of this Y direction, be made as and make each applicator head 15 rotate the state of predetermined angular α.In this case, even identical applicator head 15, the relative X-direction tilt angle alpha of the orientation of its nozzle 15b that spues, therefore moving to Y direction under the situation of applicator head 15, the timing along the part unanimity of X-direction of respectively spue nozzle 15b and the edge part 32 of identical applicator head 15 is different.Therefore, when applicator head 15 has been in the state of angle [alpha] like this, the spue nozzle 15b consistent in this applicator head 15 the coating material 26 that spues with the part along X-direction edge part 32.Thus, in each applicator head 15, be arranged in wherein a plurality of discharge head 15b sequentially at the coating material 26 that spues on the part of X-direction of edge part 32.
Thus, even be under the state that the relative X-direction of the arrangement of the nozzle 15b that spues of applicator head 15 tilts, also along the part coating coating material 26 along X-direction of edge part 32.
The coating of the coating material 26 in this edge part 32 then, is described according to Fig. 7 (b).
In this edge part 32, apply equably along the coating track 33 that is parallel to Y direction.In this case, as the Q that is spaced apart that establishes these coating tracks 33, and when using a plurality of applicator heads 15 in edge part 32, to apply simultaneously, under the also big situation of the interval Q of the arrangement pitch P of the nozzle 15b that spues that establishes each applicator head 15 ratio coating track 33, make each applicator head 15 rotation satisfy the angle [alpha] of Q=Pcos α by this θ axle driver element 21, and as described above, adjust the position of the X-direction of each applicator heads 15 by X-axis driver element 24, so that the equating with the interval Q of coating track 33 evenly and at intervals of the nozzle 15b that in the integral body of these applicator heads 15, spues.
By in each applicator head 15, setting this state, move a plurality of applicator heads 15 to Y direction, and, can side by side apply coating material 26 along the whole coating tracks 33 in the area of application 31 by the nozzle 15b that spues in the width of the X-direction that is included in the area of application 31 among the nozzle 15b that spues of these applicator heads 15.Therefore, can carry out the coating of the area of application 31 by once the moving of Y direction of applicator head 15.In this case, certainly much less, each applicator head 15 relative Y direction tilts, and therefore makes the coating of the nozzle 15b that respectively spues of each applicator head 15 begin regularly, apply the stop timing difference according to this inclination.Under by the situation that once moves the coating to carry out the area of application 31 integral body,, applicator head 15 is moved in the direction with for the first time opposite of Y-axis get final product as long as make film 1 to the Y direction displacement.
In addition, even make applicator head 15 rotate to its can rotating range to greatest extent, the spue interval of X-direction of nozzle 15b can not become under the situation of interval Q of coating track 33 yet, the position of further adjusting the X-direction of applicator head 15 makes the part of adjacent applicator head 15 overlapping on Y direction, and the position of X-direction that the nozzle 15b that spues of another applicator head 15 is arranged in the interval of the X-direction of the nozzle 15b that spues of an applicator head 15 of two applicator heads 15 that overlap each other, thereby can reduce the interval of X-direction of the nozzle 15b that spues of these applicator head 15 integral body, thus, can make each nozzle 15b that spues of applicator head 15 identical with narrow at interval coating track 33.But, in this case, 1 Y direction by applicator head 15 move simultaneously that the width in the zone of coating diminishes, need to repeat that the Y direction of applicator head 15 moves more than 2 times.
Following technology had been proposed in the past: as shown in Figure 7, under the kind needs according to the coating object reduce situation that the interval of coating track of the nozzle 15b that spues of applicator head 15 applies, if apply by the mobile of Y direction, then then moving applicator head 15 to X-direction is provided with ensuing coating starting position, moves applicator head 15 to Y direction once more from this position and carries out coating the area of application.But the processing time in this technology will increase several times and efficient is low.
Relative therewith, in this embodiment, X-direction tilts relatively according to make applicator head 15 rotations by θ axle driver element 21, thereby can change the interval of X-direction of the nozzle 15b that spues of applicator head 15, the interval of the coating track 33 in this interval and the area of application 31 is equated, can make a plurality of nozzle 15b that spue, further make a plurality of nozzle 15b that spue of a plurality of applicator heads 15 be applied to the coating action simultaneously, can improve the coating operating efficiency significantly.
Here, about above-mentioned fine motion Z axle driver element 20a, independent Z axle driver element 20b, shared Z axle driver element 20c, X-axis driver element 24, Y-axis driver element 30, θ axle driver element 21, in this embodiment, all drive source is set at servomotor, via power transfer units such as ball-screws and carry out linearly operating by linear guides, but under the situation that needs prevent the lubricant of ball-screw to disperse the air cleanliness that causes descends, also these drive source can be made as linear electric motors.
In addition, in this embodiment, as the positioning unit of film 1 on absorption platform 10, the X-axis driver element that possesses film 1, this X-axis driver element possesses each unit of film roll 2,3, lifting deflector roll 6,7 etc. in the portion that rolls out 16 of the location of the X-direction of carrying out film 1, coiling portion 18, in addition, positioning unit as applicator head 15 to film 1, possess X-axis driver element 24, Y-axis driver element 30, θ axle driver element 21 and Z axle driver element 20a~20c, film 1 makes applicator head 15 adjust to 3 direction of principal axis of X, Y, Z axle relatively.And, as Z axle driver element, be provided with these 3 kinds of unit of Z axle driver element 20a~20c, according to the position of the Z-direction of applicator head 15 relative films 1, the some action among this Z axle driver element 20a~20c.
Fig. 8 is the block diagram of a concrete example of the control part of the ink-jet coating in the expression embodiment shown in Figure 1, the 34th, and control module, 34a are microcomputers, 34b is an external interface, 34c is the applicator head controller, and 34d is an image process controller, and 34e is an electric machine controller, 34f is a data communication bus, the 35th, USB (Universal Serial Bus: memory USB), the 36th, hard disk, the 37th, monitor, the 38th, keyboard, the 39th, vavuum pump, the 40th, vacuum valve portion, the 41st, cylinder, the 42nd, valve unit, the 43rd, adjuster, 44X are the X-axis drivers, and 44Y is the Y-axis driver, 44 θ are θ axle drivers, and 44Za~44Zc is a Z axle driver.
In the figure, control module 34 is made of microcomputer 34a and the external interface 34b that is connected with microcomputer 34a via data communication bus 34f, applicator head controller 34c, image process controller 34d and electric machine controller 34e, the each several part that control is connected with data communication bus 34f under the management of microcomputer 34a.
In addition, as the USB storage 35 of the external memory storage of microcomputer 34a, hard disk 36, as data show efferent monitor 37, be connected with control module 34 via external interface 34b as the keyboard 38 of operating portion.
Externally also connect air driven equipment such as adjuster 43, valve unit 42, cylinder 41 among the interface 34b, rolled out side shaft motor 11, winding side spindle motor 12 and other roller motor, under the control of microcomputer 34a, driven these unit of control.In addition, become the vavuum pump 39 that is used for the vacuum source of vacuum suction film 1 on absorption rod 8,9, absorption platform 10, carry out being connected with external interface 34b from the vacuum valve portion 40 of the switching of vavuum pump 39, and the rubber heater 22, roller that carry out the heating of film 1 in addition also are connected with external interface 34b with heater 23, drive under the control of microcomputer 34a or carry out ON/OFF and control.
Applicator head controller 34c under the control of microcomputer 34a, control each applicator head 15 each nozzle 15b that spues coating material 26 (Fig. 2) spue have or not, regularly.
Image process controller 34d handles position in the visual field of this video camera 19 that calculates the shootings such as positioning mark that film 1 is implemented by the output of video camera 19 being carried out image under the control of microcomputer 34a.
Electric machine controller 34e is under the control of microcomputer 34a, X-axis driver 44X, Y-axis driver 44Y and θ axle driver 44 θ are driven control, wherein X-axis driver 44X to the X-axis drive motors that is installed in the X-axis driver element 24 (Fig. 2) on the applicator head 15 drive, Y-axis driver 44Y to the linear electric motors or the drive motors of Y-axis driver element 25 drive, θ axle driver 44 θ drive the θ axis drive motor of θ axle driver element 24.And the Z axle driver 44Zc of the Z axle driver 44Za of fine motion Z axle driver element 20c, the Z axle driver 44Zb of independent Z axle driver element 20b, shared Z axle driver element 20c similarly drives control by electric machine controller 34e.
The XY θ direction of principal axis of the applicator head 15 that moves integratedly with laser range finder 25, video camera 19 and the mobile control of Z-direction, be that microcomputer 34a carries out via electric machine controller 34e, therefore holding the current location and the next moving target position of applicator head 15.And also according to the management of action sequence, spuing regularly based on the coating material 26 of the nozzle 15b that respectively spues of the timing of the measurement action of laser range finder 25, each applicator head 15 managed in grasp to microcomputer 34a.
Fig. 9 represents to make as shown in Figure 7 the interval of X-direction of the nozzle 15b that spues of applicator head 15 to equate with the interval Q of coating track 31 and the flow chart of a concrete example of motion flow when applying on film 1.Below, describe with reference to above-mentioned accompanying drawing.
At first, the roller that makes and roll out in the film roll 2 moves with the rubber heater 22 that heater 23 and absorption platform become one, and begins heating (step 101).Then, film 1 stops at the position of absorption platform 10, carries out its interim location (step 102).Take home position on the film 1 by the video camera 19 of the applicator head 15 of selected appointment, handle calculating the film 1 of interim positioning states and relative position side-play amount (step 103) between the stand 28 of applicator head 15 is installed by image.According to this relative position side-play amount that calculates, calculate moving and coating starting point position and the coating end point position (step 104) of each nozzle 15b that spues of applicator head 15 of X-axis driver element 24.
Then, move whole applicator head 15 to Y direction, the periphery pattern (step 105) that becomes edge part 32 in the application pattern that coating finally should apply by Y-axis driver element 25.This periphery pattern is the peripheral part of the area of application 31, becomes a mouthful word shape in Fig. 7.Here, the roller that film 1 is rolled out in the film side roller 2 heats in advance with heater 23, and by with the rubber heater 22 that becomes one of absorption platform more reliably or the temperature higher than this prior heating heat, therefore in the coating material 26 of the peripheral part of the mouth word shape that is coated on film 1, solution evaporates and drying at short notice, will form edge part 32 accurately.
Then, the spacing Q with the more very thin nozzle 15b that spues carries out the coating of the inside pattern of the area of application 31.
That is, rotate by θ axle driver element 21 and to move each applicator head 15, so that the mode that becomes desired value Q to the projection spacing of X-axis is provided with its anglec of rotation α (step 106).Under this state, move whole applicator head 15 by Y-axis driver element 25 to Y direction, apply (step 107) simultaneously along each coating track 33.
Here, as shown in Figure 6, move each applicator head 15 by 21 rotations of θ axle driver element, thereby can reduce the coating interval of X-direction, it is the interval of X-direction of the nozzle 15b that spues of each applicator head 15, but under the coating of wanting further to reduce X-direction situation at interval, on the basis of the judgement of having carried out whether needing the spacing skew and having applied (step 108), further reduced coating coating (" Y " of step 108) at interval if desired, then spacing is offset to X-direction by X-axis driver element 24, move whole applicator head 15 by Y-axis driver element 25 to Y direction, apply along each coating track 33 by each nozzle 15b that spues, thus depicting interior pattern (step 109).
In addition, under the situation about applying in the coating compartment of terrain of wanting to reduce Y direction (" N " of step 108), on the basis of the judgement that needs the spacing skew whether and apply (step 110), further reduced coating (" Y " of step 110) at interval if desired, spacing is offset to the Y direction, after having changed the coating starting point of Y direction, move whole applicator head 15 by Y-axis driver element 25 to Y direction, thereby apply inner pattern (step 111).
Judge whether spacing skew coating is all finished, if finish (" Y " of step 112), then make each whole applicator heads 15 to turning back to original state (being state shown in Figure 4) (step 113) with above-mentioned rightabout rotation by θ axle driver element 21, the stop roller action (step 114) of heater 23 and rubber heater 22, tenth skill.
If (" N " of step 112) also all do not finished in spacing skew coating, then from judging (step 108) repetitive operation once more.
Here, if carry out the skew of half spacing, then follow the coating number of times that moves based on Y direction of the driving of Y-axis driver element 25 to become initial coating and repeat coating totally 2 coatings for 1 time, if carry out the coating of 1/4 spacing skew, then become initial coating and repeat coating totally 4 coatings for 3 times.Can on X-direction and Y direction, determine this side-play amount respectively.
As described above, in this embodiment, be not limited in the XY plane, carry out the Z axle driver element that moves of short transverse by setting, can carry out three-dimensional location management, and can apply object with coating action heating side by side in addition, can apply uniformly with high accuracy thus.