CN102272910B - Bidirectionally movable table - Google Patents
Bidirectionally movable table Download PDFInfo
- Publication number
- CN102272910B CN102272910B CN200980153294.9A CN200980153294A CN102272910B CN 102272910 B CN102272910 B CN 102272910B CN 200980153294 A CN200980153294 A CN 200980153294A CN 102272910 B CN102272910 B CN 102272910B
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- G—PHYSICS
- G12—INSTRUMENT DETAILS
- G12B—CONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILS OF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR
- G12B5/00—Adjusting position or attitude, e.g. level, of instruments or other apparatus, or of parts thereof; Compensating for the effects of tilting or acceleration, e.g. for optical apparatus
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
- H01L2224/78—Apparatus for connecting with wire connectors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01004—Beryllium [Be]
Abstract
A Y-direction motor for an XY-table used for a bonding device is provided with a Y-direction mover (43) including a movable arm (43a) and an annular drive coil (44). The movable arm (43a) is constructed from a rectangular cross-section pipe consisting of fiber-reinforced plastic, having one end fixed to the table, and extending in the Y-direction. Also, the movable arm (43a) has openings (43b) formed in the surfaces of the short sides and extending in the Y-direction and moves in the XY-directions together with the table. The annular drive coil (44) is mounted to the movable arm (43a) by being inserted in the opening (43b) in the movable arm (43a) and has a portion thereof projecting in the width direction of the movable arm from the openings (43b). The construction speeds up operation of the bonding device.
Description
Technical field
The present invention relates to the structure for two direction travelling carriages of welder (bonding device).
Background technology
In the welders such as lead bonding device, use the XY platform, be the two direction travelling carriages that directions X and Y-direction move as the orthogonal two crossing directions of welding object along continuous straight runs that make semiconductor device etc.The XY platform comprises lower stage and upper stage, and described lower stage is directed to along directions X, moves along directions X by the directions X motor, and described upper stage is led along Y-direction by the guide above lower stage, moves along Y-direction by the Y-direction motor.Upper stage is positioned on the lower stage that moves along directions X, moves along Y-direction, therefore, constitutes and can move freely along X, Y-direction.
In this XY platform, in order to make the location high precision int, propose movable piece and the upper stage of Y-direction motor are connected and fixed (for example, with reference to patent documentation 1).
[patent documentation 1] TOHKEMY 2002-329772 communique
But in the XY platform of the conventional art that patent documentation 1 is put down in writing, movable piece and the upper stage of Y-direction motor are connected and fixed, and move along directions X together with upper stage.Therefore, the directions X motor that makes lower stage move along directions X, must make the movable piece of lower stage, upper stage and Y-direction motor move along directions X,, the large occasion of the weight of the movable piece of Y-direction motor, because the load that is applied to the directions X motor becomes large, accelerate the lower stage translational speed very difficult, existence can not make the problem of welder high speed.
In addition, in the XY platform of the conventional art that patent documentation 1 is put down in writing, it is outstanding towards Y-direction near the movable piece of Y-direction motor is installed as above upper stage, therefore, when driving upper stage along Y-direction, the movable piece of Y-direction motor is subject to the counter-force of Y-direction and the counter-force of moment of flexure from upper stage, and movable piece is because of this moment of flexure vibration-generating, change because this vibration causes racking capillaceous during welding, exist welding quality to reduce problem.The large occasion of the weight of the movable piece of Y-direction motor, the radio-frequency component that upper stage reciprocating action comprises are near the eigentone of movable piece, and therefore, vibration becomes larger, exist welding quality to reduce problem.And, reduce for fear of welding quality, can not make the responsiveness high speed of XY platform, existence can not make the problem of welder high speed.
In addition, therefore the movable piece of the Y-direction motor of patent documentation 1 record is arranged on coil on flat board,, when electric current flows through coil, the heat diffusion that coil produces is scarcely abundant, causes that coil temperature rises, thereby causes resistance to increase, cause that output reduces, or because the thermal expansion of coil circumferential component causes thermal walking, cause welding precision low, therefore, be difficult to flow through large electric current, exist to make very hard problem of Y-direction movable piece high-speed mobile.
Summary of the invention
The object of the invention is to, make the welder high speed.
For the means that solve above-mentioned problem as follows.
Two direction travelling carriages of the present invention move along orthogonal crossing first direction in same plane and two directions of second direction, and this two directions travelling carriage comprises:
First is directed to along first direction, is driven along first direction by the first motor;
Second, led along second direction by the second direction guide that is located at above above-mentioned First, driven along first direction together with above-mentioned First, simultaneously, also driven along second direction by the second motor; And
Movable piece (mover), comprise moveable arm and annular drive coil, described moveable arm one end is fixed on above-mentioned second, the ducted body in the rectangle cross section of the fiber-reinforced plastic that extends along second direction, be provided with the opening that extends along second direction in each short side, together with above-mentioned second, move along first and second direction, described drive coil inserts above-mentioned each opening of above-mentioned moveable arm, be arranged on above-mentioned moveable arm, its part is outstanding towards the Width of above-mentioned moveable arm from above-mentioned each opening of above-mentioned moveable arm.
In two direction travelling carriages of the present invention, suitable is, the contour length with the direction of insertion vertical direction along the above-mentioned drive coil of Length Ratio of second direction of above-mentioned each opening of the above-mentioned moveable arm of above-mentioned movable piece is long, the width of the above-mentioned moveable arm of Length Ratio of the internal diameter of the above-mentioned drive coil of direction of insertion is long, and the inner space of above-mentioned drive coil and above-mentioned moveable arm outer space are communicated with.
Again, in two direction travelling carriages of the present invention, suitable is to comprise the nozzle that directly air is sprayed to the above-mentioned drive coil of above-mentioned movable piece.
Again, in two direction travelling carriages of the present invention, suitable is, above-mentioned First is the X platform, and above-mentioned second is the Y platform.
The following describes effect of the present invention.
The present invention has the effect that can make the welder high speed.
Description of drawings
Fig. 1 is the plane graph of the XY platform of the invention process form.
Fig. 2 is the front elevation of the XY platform of the invention process form.
Fig. 3 is the side view of XY platform that is provided with the Y-direction movable piece of the invention process form.
Fig. 4 means the stereogram of Y-direction movable piece of the XY platform of the invention process form.
Fig. 5 is the plane graph of the XY platform of another example of the present invention.
Symbol description is as follows:
10 XY platforms
11 pallets
12 keep platform
13 lower stage
14,37 directions X guide rails
16,36,46 supports
17 Y motors keep platform
18 lower stage transducers
19 upper stage transducers
21 upper stage
22,47 Y-direction guide rails
23 bolts
30 directions X motors
31 directions X motor stators
32,42 permanent magnets
33 directions X movable pieces (X-direction mover)
34,44 coils
38 directions X motor stator velocity transducers
40 Y-direction motors
41 Y-direction motor stators
43 Y-direction movable pieces (Y-direction mover)
The 43a moveable arm
43b, the 43e opening
The 43c hole
The 43d cable
The 43f top panel
The 43g lower panel
The 43h side plate
45 inner spaces
48 Y-direction motor stator velocity transducers
50 dynamic vibration absorbers
51 flat boards
52 ballasts
53 braces
55 nozzles
100 lead bonding device
101 plumb joints
102 welding arms
103 capillaries
Embodiment
Below, illustrate referring to the drawings the suitable example of the present invention.As shown in Figure 1, the XY platform 10 of lead bonding device 100 is all directions of X-axis (X-X line direction) and Y-axis (Y-Y line direction) along orthogonal in the plane crossing axes of coordinates, be provided with lower stage 13 and upper stage 21, directions X motor 30, Y-direction motor 40 are connected with each, motor 30 by all directions, 40 drive lower stage 13 moves towards directions X, and upper stage 21 moves towards Y-direction.In addition, on upper stage 21, the plumb joint 101 that makes capillary 103 knee-actions that are arranged on welding arm 102 front ends is installed.As shown in Figure 1, the bearing of trend of welding arm 102 is Y-direction, and its right angle orientation is directions X.
As shown in Figure 2, directions X motor 30 is arranged on above pallet 11 by directions X guide rail 37.Directions X motor 30 is voice coil motor, and is well-known, by the directions X motor stator 31 with permanent magnet 32, and directions X movable piece 33 formations with coil 34.Directions X movable piece 33 is not by having illustrated directions X guide to remain on the inboard of directions X motor stator 31, and thus, directions X movable piece 33 only is made as and can moves along directions X.Directions X guide system utilizes the known Direct Action Type device of crossed roller guide etc.Directions X motor stator 31 is kept by directions X guide rail 37, makes to move along the directions X as the driving direction of directions X movable piece 33, and can not move along Y-direction.
As shown in Figure 2, on pallet 11, installation is for detection of the directions X motor stator velocity transducer 38 of the directions X translational speed of directions X motor stator 31, and on platform keeps platform 12, installation is for detection of the position of the directions X of lower stage 13 and the lower stage transducer 18 of translational speed.
As shown in Figure 3, Y-direction motor 40 keeps platform 17 and Y-direction guide rail 47 to remain and can move along Y-direction by the Y motor on pallet 11.Y-direction motor 40 is the planar linear motor, is made of the Y-direction motor stator 41 with permanent magnet 42 and flat Y-direction movable piece 43 with coil 44 shown in Figure 1.
As shown in Figure 3, upper stage 21 sides at Y-direction movable piece 43 are provided with support 46, and the support 46 of Y-direction movable piece 43 is fixed on above upper stage 21 by bolt 23.Upper stage 21 remains on lower stage 13 by the Y-direction guide rail 22 that extends along Y-direction.Therefore, upper stage 21 constitutes and can move along directions X together with lower stage 13, simultaneously, can move along Y-direction on lower stage 13, and upper stage 21 can move along X, Y two directions.In addition, the Y-direction movable piece 43 that is fixed on upper stage 21 also constitutes and can move along X, Y-direction together with upper stage 21.
As shown in Figure 1, the permanent magnet 42 as magnetic field formation means of Y-direction motor stator 41 is made as until the end of Y-direction motor stator 41, its result, permanent magnet 42 cover region-wide that the directions X as the coil 44 of magnetic action section of Y-direction movable pieces 43 moves.In addition, the total weight of weight ratio Y-direction movable piece 43, upper stage 21 and the plumb joint 101 of Y-direction motor stator 41 is large.
Keep platform 12 at platform, the lower stage transducer 18 of the position of installation and measuring lower stage 13 and speed, on lower stage 13, installation is for detection of the position of the Y-direction of upper stage 21 and the upper stage transducer 19 of translational speed.Keep platform 17 at the Y motor, the Y-direction motor stator velocity transducer 48 for detection of the translational speed of Y-direction motor stator 41 is installed.In addition, be provided with the cooling-air jetting nozzle 55 for cooling Y-direction movable piece 43, nozzle 55 is installed as the direction that the ejiction opening that makes its air becomes coil 44.
The action of the XY platform 10 that simple declaration consists of like this.If never illustrated control device output is used for making lower stage 13 to move to the position command signal of institute's allocation, directions X movable piece 33 accelerates to move along directions X, and lower stage 13 is moved along directions X by directions X guide rail 14 guiding.On the other hand, directions X motor stator 31 is made as and can moves along directions X along directions X guide rail 37, therefore, and as the reaction of the driving of directions X movable piece 33 and lower stage 13, be subject to equal-sized reverse power, accelerate mobile towards the mobile rightabout with lower stage 13.Like this, directions X motor stator 31 moves towards the moving direction rightabout with lower stage 13, therefore, becomes in theory zero to the amount of exercise with pallet 11, produces hardly rocking of pallet 11.
And position and speed by lower stage transducer 18 detection lower stage 13 feed back to control device, to coil 34 service voltages of directions X motor 30, make lower stage 13 move to institute's allocation, control its position.In addition, detect position and the speed of directions X motor stator 31 by directions X motor stator velocity transducer 38, compensation is moved the electric power of consumption because of directions X motor stator 31, with the power input line circle 34 of compensation.
Equally, if the output of never illustrated control device is used for making upper stage 21 to move to the position command signal of institute's allocation, Y-direction movable piece 43 accelerates to move along Y-direction, and upper stage 21 is moved along Y-direction by Y-direction guide rail 22 guiding.On the other hand, Y-direction motor stator 41 is made as and can moves along Y-direction along Y-direction guide rail 47, therefore, and as the reaction of the driving of Y-direction movable piece 43 and upper stage 21, be subject to equal-sized reverse power, accelerate mobile towards the mobile rightabout with upper stage 21.Like this, Y-direction motor stator 41 moves towards the moving direction rightabout with upper stage 21, therefore, gives with pallet 11, platform to keep the amount of exercise of platform 12 to become in theory zero, produces hardly rocking of pallet 11, platform maintenance platform 12.
And position and speed by upper stage transducer 19 detection upper stage 21 feed back to control device, to coil 44 service voltages of Y-direction motor 40, make upper stage 21 move to institute's allocation, control its position.In addition, detect position and the speed of Y-direction motor stator 41 by Y-direction motor stator velocity transducer 48, compensation is moved the electric power of consumption because of Y-direction motor stator 41, with the power input line circle 44 of compensation.
As mentioned above, XY platform 10 is moved along directions X by directions X motor 30 and drives lower stage 13, drives upper stage 21 by Y-direction motor 40 along Y-direction, and this upper stage 21 is arranged on lower stage 13 sliding freely along Y-direction, makes upper stage 21 move along X, Y-direction.And the Y-direction movable piece 43 that is fixed on upper stage 21 is followed moving and move along X, Y-direction along X, Y-direction of upper stage 21.
Below, with reference to Fig. 4, Y-direction movable piece 43 is described.Y-direction movable piece 43 comprises the moveable arm 43a of the carbon fiber reinforced plastic pipe with rectangle cross sectional shape, be located at the opening 43b of side plate 43h of the face with short brink of moveable arm 43a, insert opening 43b, be fixed on the annulus 44 of moveable arm 43a from the Width (directions X) of moveable arm 43a, be located at the support 46 of moveable arm 43a one end, be located at the dynamic vibration absorber 50 with the end of support 46 opposition sides, to the cable 43d of coil 44 supply capabilities.Be provided with hole 43c on support 46, Y-direction movable piece 43 by break-through to above-mentioned hole 43c be bolted to upper stage 21, make its length direction become Y-direction.
The carbon fiber reinforced plastic that consists of moveable arm 43a is the pipe of rectangle cross sectional shape, constitute most of fibers by the length direction (Y-direction) of moveable arm 43a, make the strength ratio Width intensity of length direction (Y-direction) large, its wall thickness is roughly certain thickness t, width W
1Than thickness H
1Long.The inside of moveable arm 43a becomes the cavity.
The coil 44 that is arranged on Y-direction movable piece 43 is roughly oblong ring-type, and the cross section of coil 44 is square.The contour length W of the Width along moveable arm 43a of coil 44 (directions X)
2Width W than moveable arm 43a
1Long, in addition, the interior electrical path length W of the Width along moveable arm 43a of coil 44 (directions X)
3Also than the width W of moveable arm 43a
1Long.The length of the length direction along moveable arm 43a (Y-direction) of the opening 43b that coil 44 inserts is only than the length L of the length direction along moveable arm 43a (Y-direction) of coil 44
2Slightly large L
1The thickness H of coil 44
2Become and the inner face of the thickness direction of moveable arm 43a between height H
3=H
1The thickness that-2 * t is roughly the same.And, coil 44 inserts the opening 43b of moveable arm 43a along the Width (directions X) of moveable arm 43a, sandwich top panel 43f and the lower panel 43g of moveable arm 43a, fix by binding agent, make the outside of broad ways of coil 44 and inner face become side from moveable arm 43a towards the outstanding position of the Width of moveable arm 43a.
In the interior face portion of the coil 44 of the side plate 43h of moveable arm 43a, form the opening 43e of the length direction along moveable arm 43a (Y-direction) of coil 44, its length is the inner face length W of coil 44
4, it is highly height H between the inner face of moveable arm 43a
3Constitute opening 43e and be communicated with the inner space 45 of the coil 44 that is positioned at moveable arm 43a inboard that becomes the cavity, the inner space 45 of coil 44 is communicated with the outer space of moveable arm 43a.
In addition, support 46 is that the metal clamp dog of size of inner face that will just embed the moveable arm 43a of rectangle cross sectional shape pipe embeds from the end face of moveable arm 43a, fixing with binding agent after, form erection opening 43c together with moveable arm 43a.The length of metal clamp dog becomes with upper/lower positions: compare with erection opening 43c position, become the position that enters inner some degree.Therefore, the inside of moveable arm 43a almost becomes the cavity.
Be arranged on the dynamic vibration absorber 50 with end faces support 46 opposition sides moveable arm 43a and comprise the outstanding flat board 51 from moveable arm 43a, and be arranged on the ballast 52 above dull and stereotyped 51.Dull and stereotyped 51 are provided with brace 53, and this brace 53 embeds the inner face of the moveable arm 43a of cubic pipe just, connects flat board 51 and moveable arm 43a, and brace 53 use binding agents are fixed on moveable arm 43a.In addition, at dull and stereotyped 51 and surfaces ballast 52 opposition sides, bonding attenuating material be used to making vibration attenuation.Attenuating material can bonding two-sided tape etc.Dynamic vibration absorber 50 makes the vibration peak of Y-direction movable piece 43 disperse by weight and the attenuating material of ballast 52.
The Y-direction movable piece 43 use light weights of above-mentioned formation, high-intensity carbon fiber reinforced plastic consist of, and therefore support 46 and to insert beyond coil 44 parts of moveable arm 43a inside be empty, is compared with Y-direction movable piece in the past, very light weight.In addition, the intensity direction of carbon fiber is length direction, by the top panel 43f of moveable arm 43a, lower panel 43g, side plate 43h, the metal derby of embedding support 46, annulus 44, and brace 53, above-below direction is fixed, and is therefore, very large around the bending strength of directions X axle.Due to the such structure of light weight, high rigidity, can improve will be fixed on upper stage 21 support 46 as fixing point, the frequency of a vibration mode of dynamic vibration absorber 50 side up-down vibration.In this example, weight can become Y-direction movable piece only about half of of conventional art, and natural frequency can become about 1.5 times of left and right of the Y-direction movable piece of conventional art.
Thus, can not increase the output of each motor 30,40, can accelerate each translational speed of 13,21.In addition, the natural frequency of Y-direction movable piece 43 uprises, and therefore, can make radio-frequency component in the reciprocating action that is included in upper stage 21 and the natural frequency of Y-direction movable piece 43 deviate from, and can suppress vibration and occur, can high-speed mobile upper stage 21.
In addition, the Y-direction movable piece 43 as shown in Figure 4, and outstanding from the side of moveable arm 43a because of coil 44, the cooling-air that sprays from nozzle 55 shown in Figure 1 directly is ejected into coil 44, and therefore, cooling coil 44 effectively.Have, cooling-air enters the inner space 45 of coil 44 from the opening 43e of the side of moveable arm 43a again, and therefore the inner face of cooling coil 44, can increase the film-cooled heat of coil 44.Thus, can improve the cooling effectiveness of coil 44, suppress coil 44 temperature and rise.In addition, the periphery that thermal impact causes expands little, therefore, can improve welding precision, simultaneously, can make larger electric current flow through, high-speed mobile Y-direction movable piece 43.
In this example, illustrate that the nozzle 55 of cooling-air ejection use is configured in the outside of Y-direction movable piece 43, nozzle 55 still, also can insert hollow sectors from support 46 sides of moveable arm 43a with nozzle 55 towards the direction of coil 44, carries out coil 44 cooling.In this example, length W between the inner face of the Width along moveable arm 43a (directions X) of coil 44 is described again,
3Also than the width W of moveable arm 43a
1Long, form in the side of moveable arm 43a the opening 43e that is communicated with the inner space 45 of coil 44, still, also can be constructed so that length W between the inner face of the Width along moveable arm 43a (directions X) of coil 44
3Width W than moveable arm 43a
1Short, only the exterior side of coil 44 is outstanding from the side of moveable arm 43a, does not form opening 43e.
In this example, illustrate that Y-direction movable piece 43 is made of the square pipe of carbon fiber reinforced plastic, still, so long as hollow structure, even be not that the square pipe is good, for example, can sandwich cellular thing or rib between the upper and lower plates of carbon fiber reinforced plastic, become hierarchy.Again, in this example, illustrate that Y-direction movable piece 43 is made of the square pipe of carbon fiber reinforced plastic, still, also XY platform 10 is such as shown in Figure 5, directions X motor 60, and the formation of Y-direction motor 70 is opposite with example shown in Figure 1.This occasion, the movable piece of directions X motor 60 is made of the square pipe of carbon fiber reinforced plastic.
The present invention is not limited to the example of above-mentioned explanation, comprises the whole changes and the correction that do not break away from by the technology of the present invention scope or the essence of claims regulation, and they all belong to protection scope of the present invention.
Claims (5)
1. a direction travelling carriage, move along orthogonal crossing first direction in same plane and two directions of second direction, and this two directions travelling carriage comprises:
First is directed to along first direction, is driven along first direction by the first motor;
Second, led along second direction by the second direction guide that is located at above above-mentioned First, driven along first direction together with above-mentioned First, simultaneously, also driven along second direction by the second motor; And
Movable piece, comprise moveable arm and annular drive coil, described moveable arm is that an end is fixed on above-mentioned second, the ducted body in the rectangle cross section of the fiber-reinforced plastic that extends along second direction, be provided with the opening that extends along second direction in each short side, together with above-mentioned second, move along first and second direction, described drive coil inserts above-mentioned each opening of above-mentioned moveable arm, be arranged on above-mentioned moveable arm, its part is outstanding towards the Width of above-mentioned moveable arm from above-mentioned each opening of above-mentioned moveable arm.
2. two direction travelling carriages according to claim 1 is characterized in that:
The contour length along the second direction vertical with direction of insertion of the above-mentioned drive coil of Length Ratio of second direction of above-mentioned each opening of the above-mentioned moveable arm of above-mentioned movable piece is long;
The width of the above-mentioned moveable arm of Length Ratio of the internal diameter of the above-mentioned drive coil of direction of insertion is long;
The inner space of above-mentioned drive coil and above-mentioned moveable arm outer space are communicated with.
3. two direction travelling carriages according to claim 1 is characterized in that:
Comprise the nozzle that directly air is sprayed to the above-mentioned drive coil of above-mentioned movable piece.
4. two direction travelling carriages according to claim 2 is characterized in that:
Comprise the nozzle that directly air is sprayed to the above-mentioned drive coil of above-mentioned movable piece.
5. two direction travelling carriages according to claim 1 is characterized in that:
Above-mentioned First is the X platform, and above-mentioned second is the Y platform.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009000570A JP4381468B1 (en) | 2009-01-06 | 2009-01-06 | Two-way moving table |
| JP2009-000570 | 2009-01-06 | ||
| PCT/JP2009/062670 WO2010079632A1 (en) | 2009-01-06 | 2009-07-13 | Bidirectionally movable table |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102272910A CN102272910A (en) | 2011-12-07 |
| CN102272910B true CN102272910B (en) | 2013-06-12 |
Family
ID=41459756
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200980153294.9A Active CN102272910B (en) | 2009-01-06 | 2009-07-13 | Bidirectionally movable table |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP4381468B1 (en) |
| CN (1) | CN102272910B (en) |
| SG (1) | SG172877A1 (en) |
| WO (1) | WO2010079632A1 (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8985935B2 (en) * | 2012-02-17 | 2015-03-24 | Novellus Systems, Inc. | Mass damper for semiconductor wafer handling end effector |
| JP7192518B2 (en) | 2019-01-22 | 2022-12-20 | ウシオ電機株式会社 | Flat stage equipment |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001148398A (en) * | 1999-09-10 | 2001-05-29 | Nec Corp | Xy stage |
| JP2007318903A (en) * | 2006-05-25 | 2007-12-06 | Nikon Corp | Linear motor, stage apparatus, and aligner |
| CN101326588A (en) * | 2005-12-06 | 2008-12-17 | Thk株式会社 | XY table actuator |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01181537A (en) * | 1988-01-12 | 1989-07-19 | Nec Corp | Xy transfer stage |
| JP2789543B2 (en) * | 1992-07-30 | 1998-08-20 | 株式会社カイジョー | XY table |
-
2009
- 2009-01-06 JP JP2009000570A patent/JP4381468B1/en active Active
- 2009-07-13 CN CN200980153294.9A patent/CN102272910B/en active Active
- 2009-07-13 WO PCT/JP2009/062670 patent/WO2010079632A1/en active Application Filing
- 2009-07-13 SG SG2011049293A patent/SG172877A1/en unknown
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001148398A (en) * | 1999-09-10 | 2001-05-29 | Nec Corp | Xy stage |
| CN101326588A (en) * | 2005-12-06 | 2008-12-17 | Thk株式会社 | XY table actuator |
| JP2007318903A (en) * | 2006-05-25 | 2007-12-06 | Nikon Corp | Linear motor, stage apparatus, and aligner |
Also Published As
| Publication number | Publication date |
|---|---|
| JP4381468B1 (en) | 2009-12-09 |
| SG172877A1 (en) | 2011-08-29 |
| CN102272910A (en) | 2011-12-07 |
| WO2010079632A1 (en) | 2010-07-15 |
| JP2010161094A (en) | 2010-07-22 |
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