CN102258933A - Method for treating tail gas of germane production system - Google Patents
Method for treating tail gas of germane production system Download PDFInfo
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- CN102258933A CN102258933A CN201110132142XA CN201110132142A CN102258933A CN 102258933 A CN102258933 A CN 102258933A CN 201110132142X A CN201110132142X A CN 201110132142XA CN 201110132142 A CN201110132142 A CN 201110132142A CN 102258933 A CN102258933 A CN 102258933A
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- germane
- tail gas
- production system
- chamber
- germanium
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P20/00—Technologies relating to chemical industry
- Y02P20/10—Process efficiency
- Y02P20/129—Energy recovery, e.g. by cogeneration, H2recovery or pressure recovery turbines
Abstract
The invention provides a method for treating tail gas aiming at the characteristics that the components of the tail gas of a germane production system are hydrogen and a trace amount of germane. The method comprises the following steps of: allowing the tail gas of the germane production system to flow through a tail gas treatment device consisting of an air inlet (1), an inflowing decomposition chamber (2), a collection chamber (3) and a liquid sealing bottle (4) and finally discharging by an air outlet (5) which is connected with a discharge system. When the tail gas flows through a preheated composition chamber, the germane is heated and decomposed into metal germane power, the superfine germane metal power formed through decomposition is brought into a collection chamber and is collected, a trace amount of germane powder of the treated tail gas is absorbed by the liquid sealing bottle filled with a liquid medium and then the treated gas is discharged so as to realize the standard emission of the tail gas and the recycling of germanium. The method is simple, low in cost, and high in germane removal efficiency, and by the method, industrial production is easy to realize.
Description
Technical field
The present invention relates to a kind of processing method of germane production system tail gas, be specifically related to a kind of tail gas heating with the germane production system, make wherein contained micro-germane decomposes, collect the germanium metal powder that is decomposed to form then, realize the method that tail gas qualified discharge and germanium reclaim.
Background technology
High-purity germane is a kind of important semiconductor industry unstrpped gas, progressively is applied to metallo-organic compound vapour phase epitaxy (MOVPE), is used for preparation and contains Germanium semiconductor material or device, as the germanium-silicon thin membrane solar cell.
The manufacture method of germane has following a few class: germanium alloy and acid or ammoniacal liquor solution; The alkaline solution electrolysis of germanium dioxide; The reducing process of the oxide of germanium salt or germanium.
Said method is produced germane all can produce accessory substance hydrogen, so germane production system tail gas main component is hydrogen, contains micro-germane usually.By environmental regulations, hydrogen can import the high-altitude and directly discharge.After germane production system tail gas need be removed micro-Germane gas, just can meet emission request.Germanium is dissipated metal, costs an arm and a leg, and the recovery of germanium is necessary very much in the tail gas.Therefore need the germane in the germane production system tail gas be recycled, when guaranteeing the tail gas qualified discharge, can realize the recovery of germanium again, cut the waste.
Summary of the invention
At problems of the prior art, the processing method that the purpose of this invention is to provide a kind of germane production system tail gas, described method is the tail gas heating with the germane production system, make wherein contained micro-germane decomposes, collect the germanium metal powder that is decomposed to form then, realize the recovery of tail gas qualified discharge and germanium.
The method of the invention is achieved through the following technical solutions: a kind of processing method of germane production system tail gas, realize vent gas treatment and germanium removal process with flow through successively decomposition chamber, collecting chamber and the fluid-tight bottle of a cover exhaust gas processing device of the tail gas of germane production system; Decomposition chamber preheats, and tail gas stream is crossed decomposition chamber, and germane decomposes wherein forms the germanium metal powder; Tail gas stream is through collecting chamber, and the germanium metal powder that flows into collecting chamber with air-flow is collected; Tail gas is by the fluid-tight bottle, and not collecting completely, the trace germanium metal powder is further absorbed by liquid medium.
The pre-warmed temperature range of described decomposition chamber is at 280 ℃ ~ 450 ℃;
Described liquid medium is the concentrated sulfuric acid.
The beneficial effect that the present invention has is: the present invention utilizes germane to be heated and easily resolves into the character of germanium and hydrogen, make micro-germane wherein decompose the purpose that realizes removing germane the heating of germane production system tail gas, dust chamber and fluid-tight bottle are set simultaneously collect the germanium metal powder that germane is decomposed to form, realize the recovery of tail gas qualified discharge and germanium.This method cost is low, and technology is simple, removes the efficient height of germane, is easy to realize industrialization.
Description of drawings
Fig. 1 is a germane production system exhaust gas processing device schematic diagram.
Among the figure: 1-air inlet, 2-decomposition chamber, 3-collecting chamber, 4-fluid-tight bottle, 5-gas outlet.
The specific embodiment
Below in conjunction with the drawings and specific embodiments the invention is further elaborated.
The tail gas of germane production system is flowed into the exhaust gas processing device that decomposition chamber 2, collecting chamber 3 and fluid-tight bottle 4 are formed via air inlet 1, connect the exhaust system discharging by gas outlet 5 at last.When tail gas stream is crossed pre-warmed decomposition chamber 2, contained germane decomposes forms the germanium metal powder, the ultra-fine germanium metal powder that is decomposed to form is brought into collecting chamber 3 by air-flow and is collected, and treated tail gas discharges after sponging the trace germanium powder by the fluid-tight bottle 4 that liquid medium is housed at last.
Embodiment 1:
Germane content 31ppm in the germane production system tail gas, decomposition chamber preheats and controls temperature at 280 ℃, and tail gas is fed exhaust gas processing device with the 5L/min flow via air inlet, discharges from the gas outlet behind the decomposition chamber of flowing through, collecting chamber and the fluid-tight bottle.Detect gas port institute exhaust body composition, wherein contain germane 20ppb, contain dust 0.003mg/m
3
Embodiment 2:
Decomposition chamber temperature among the embodiment 1 is controlled at 360 ℃, and other treatment conditions are identical, detect gas port institute exhaust body composition, wherein contain germane 12ppb, contain dust 0.005mg/m
3
Embodiment 3:
Decomposition chamber temperature among the embodiment 1 is controlled at 450 ℃, and other treatment conditions are identical, detect gas port institute exhaust body composition, wherein contain germane 9ppb, contain dust 0.006mg/m
3
Though the invention with preferred embodiment openly as above; but embodiment and accompanying drawing are not to be used for limiting the invention; anyly be familiar with this skill person; in the spirit and scope that do not break away from the invention; can do various variations or retouching from working as, but same within the protection domain of the invention.Therefore the protection domain of the invention should with the application claim was defined is as the criterion.
Claims (3)
1. the processing method of a germane production system tail gas is characterized in that: flow through successively decomposition chamber, collecting chamber and the fluid-tight bottle of a cover exhaust gas processing device of the tail gas of germane production system realized vent gas treatment and germanium removal process; Decomposition chamber preheats, and tail gas stream is crossed decomposition chamber, and germane decomposes wherein forms the germanium metal powder; Tail gas stream is through collecting chamber, and the germanium metal powder that flows into collecting chamber with air-flow is collected; Tail gas is during by the fluid-tight bottle, and not collecting completely, the trace germanium metal powder is further absorbed by liquid medium.
2. the processing method of a kind of germane production system tail gas as claimed in claim 1 is characterized in that: the pre-warmed temperature range of described decomposition chamber is at 280 ℃ ~ 450 ℃.
3. the processing method of a kind of germane production system tail gas as claimed in claim 1 is characterized in that: described liquid medium is the concentrated sulfuric acid.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110132142XA CN102258933B (en) | 2011-05-21 | 2011-05-21 | Method for treating tail gas of germane production system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110132142XA CN102258933B (en) | 2011-05-21 | 2011-05-21 | Method for treating tail gas of germane production system |
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| Publication Number | Publication Date |
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| CN102258933A true CN102258933A (en) | 2011-11-30 |
| CN102258933B CN102258933B (en) | 2013-04-03 |
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| CN201110132142XA Active CN102258933B (en) | 2011-05-21 | 2011-05-21 | Method for treating tail gas of germane production system |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105536395A (en) * | 2016-02-26 | 2016-05-04 | 吕远芳 | Germanium oil mist recycling system and technology |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030103885A1 (en) * | 1998-04-09 | 2003-06-05 | Honeywell Intellectual Properties, Inc. | Preparation and purification of diborane |
| CN1657138A (en) * | 2003-12-08 | 2005-08-24 | 气体产品与化学公司 | Purification of hydride gases |
| US20060226072A1 (en) * | 2005-04-07 | 2006-10-12 | Wyse Carrie L | Fluid storage and purification method and system |
| CN101549300A (en) * | 2008-04-01 | 2009-10-07 | 刘宝珠 | Catalyst for acid and halogen gas treatment and production method thereof |
-
2011
- 2011-05-21 CN CN201110132142XA patent/CN102258933B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030103885A1 (en) * | 1998-04-09 | 2003-06-05 | Honeywell Intellectual Properties, Inc. | Preparation and purification of diborane |
| CN1657138A (en) * | 2003-12-08 | 2005-08-24 | 气体产品与化学公司 | Purification of hydride gases |
| US20060226072A1 (en) * | 2005-04-07 | 2006-10-12 | Wyse Carrie L | Fluid storage and purification method and system |
| CN101549300A (en) * | 2008-04-01 | 2009-10-07 | 刘宝珠 | Catalyst for acid and halogen gas treatment and production method thereof |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105536395A (en) * | 2016-02-26 | 2016-05-04 | 吕远芳 | Germanium oil mist recycling system and technology |
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| CN102258933B (en) | 2013-04-03 |
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| EE01 | Entry into force of recordation of patent licensing contract |
Application publication date: 20111130 Assignee: CHINA GERMANIUM Co.,Ltd. Assignor: NANJING GERMANIUM TECHNOLOGY Co.,Ltd. Contract record no.: 2014320000338 Denomination of invention: Method for treating tail gas of germane production system Granted publication date: 20130403 License type: Exclusive License Record date: 20140424 |
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Address after: 211165 No. 718, Jiangjun Avenue, Jiangning Development Zone, Nanjing, Jiangsu Patentee after: CHINA GERMANIUM Co.,Ltd. Address before: 211165 No. 718, Jiangjun Avenue, Jiangning Development Zone, Nanjing, Jiangsu Patentee before: NANJING GERMANIUM TECHNOLOGY Co.,Ltd. |
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| TR01 | Transfer of patent right |
Effective date of registration: 20211124 Address after: 211299 No. 9, Zhongxing East Road, Lishui District, Nanjing City, Jiangsu Province Patentee after: CHINA GERMANIUM Co.,Ltd. Address before: 211165 No. 718, Jiangjun Avenue, Jiangning Development Zone, Nanjing, Jiangsu Patentee before: CHINA GERMANIUM Co.,Ltd. |