CN102258933B - Method for treating tail gas of germane production system - Google Patents
Method for treating tail gas of germane production system Download PDFInfo
- Publication number
- CN102258933B CN102258933B CN201110132142XA CN201110132142A CN102258933B CN 102258933 B CN102258933 B CN 102258933B CN 201110132142X A CN201110132142X A CN 201110132142XA CN 201110132142 A CN201110132142 A CN 201110132142A CN 102258933 B CN102258933 B CN 102258933B
- Authority
- CN
- China
- Prior art keywords
- germane
- tail gas
- production system
- chamber
- germanium
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P20/00—Technologies relating to chemical industry
- Y02P20/10—Process efficiency
- Y02P20/129—Energy recovery, e.g. by cogeneration, H2recovery or pressure recovery turbines
Landscapes
- Silicon Compounds (AREA)
Abstract
The invention provides a method for treating tail gas aiming at the characteristics that the components of the tail gas of a germane production system are hydrogen and a trace amount of germane. The method comprises the following steps of: allowing the tail gas of the germane production system to flow through a tail gas treatment device consisting of an air inlet (1), an inflowing decomposition chamber (2), a collection chamber (3) and a liquid sealing bottle (4) and finally discharging by an air outlet (5) which is connected with a discharge system. When the tail gas flows through a preheated composition chamber, the germane is heated and decomposed into metal germane power, the superfine germane metal power formed through decomposition is brought into a collection chamber and is collected, a trace amount of germane powder of the treated tail gas is absorbed by the liquid sealing bottle filled with a liquid medium and then the treated gas is discharged so as to realize the standard emission of the tail gas and the recycling of germanium. The method is simple, low in cost, and high in germane removal efficiency, and by the method, industrial production is easy to realize.
Description
Technical field
The present invention relates to a kind of processing method of tail gas of germane production system, be specifically related to a kind of tail gas heating with germane production system, make wherein contained micro-germane decomposes, then collect the germanium metal powder that is decomposed to form, realize the method that tail gas qualified discharge and germanium reclaim.
Background technology
High-purity germane is a kind of important semiconductor industry unstrpped gas, progressively is applied to metallo-organic compound vapour phase epitaxy (MOVPE), for the preparation of containing Germanium semiconductor material or device, such as the germanium-silicon thin membrane solar cell.
The manufacture method of germane has following a few class: germanium alloy and acid or ammoniacal liquor solution; The alkaline solution electrolysis of germanium dioxide; The reducing process of the oxide of germanium salt or germanium.
Said method is produced germane all can produce accessory substance hydrogen, so the tail gas of germane production system main component is hydrogen, usually contains micro-germane.By environmental regulations, hydrogen can import the high-altitude and directly discharge.After tail gas of germane production system need be removed micro-Germane gas, just can meet emission request.Germanium is dissipated metal, and is expensive, and the recovery of germanium is necessary very much in the tail gas.Therefore need to the germane in the tail gas of germane production system be recycled, when guaranteeing the tail gas qualified discharge, can realize again the recovery of germanium, cut the waste.
Summary of the invention
For problems of the prior art, the processing method that the purpose of this invention is to provide a kind of tail gas of germane production system, described method is the tail gas heating with germane production system, make wherein contained micro-germane decomposes, then collect the germanium metal powder that is decomposed to form, realize the recovery of tail gas qualified discharge and germanium.
The method of the invention is achieved through the following technical solutions: a kind of processing method of tail gas of germane production system, realize vent gas treatment and germanium removal process with flow through successively decomposition chamber, collecting chamber and the fluid-tight bottle of a cover exhaust gas processing device of the tail gas of germane production system; Decomposition chamber preheats, and tail gas stream is crossed decomposition chamber, and germane decomposes wherein forms the germanium metal powder; Tail gas stream is through collecting chamber, and the germanium metal powder that flows into collecting chamber with air-flow is collected; Tail gas is by the fluid-tight bottle, and not collecting completely, the trace germanium metal powder is further absorbed by liquid medium.
The pre-warmed temperature range of described decomposition chamber is at 280 ℃ ~ 450 ℃;
Described liquid medium is the concentrated sulfuric acid.
The beneficial effect that the present invention has is: the present invention utilizes germane to be heated and easily resolves into the character of germanium and hydrogen, make micro-germane wherein decompose the purpose that realizes removing germane the tail gas of germane production system heating, dust chamber and fluid-tight bottle are set simultaneously collect the germanium metal powder that germane is decomposed to form, realize the recovery of tail gas qualified discharge and germanium.This method cost is low, and technique is simple, and the efficient of removing germane is high, is easy to realize industrialization.
Description of drawings
Fig. 1 is tail gas of germane production system treating apparatus schematic diagram.
Among the figure: 1-air inlet, 2-decomposition chamber, 3-collecting chamber, 4-fluid-tight bottle, 5-gas outlet.
The specific embodiment
Below in conjunction with the drawings and specific embodiments the invention is further elaborated.
The tail gas of germane production system is flowed into the exhaust gas processing device that decomposition chamber 2, collecting chamber 3 and fluid-tight bottle 4 form via air inlet 1, connect the exhaust system discharging by gas outlet 5 at last.When tail gas stream is crossed pre-warmed decomposition chamber 2, contained germane decomposes forms the germanium metal powder, the ultra-fine germanium metal powder that is decomposed to form is brought into collecting chamber 3 by air-flow and is collected, and treated tail gas discharges after sponging the trace germanium powder by the fluid-tight bottle 4 that liquid medium is housed at last.
Embodiment 1:
Germane content 31ppm in the tail gas of germane production system, decomposition chamber preheats and controls temperature at 280 ℃, and tail gas is passed into exhaust gas processing device with the 5L/min flow via air inlet, discharges from the gas outlet behind the decomposition chamber of flowing through, collecting chamber and the fluid-tight bottle.Detect gas port institute exhaust body composition, wherein contain germane 20ppb, contain dust 0.003mg/m
3
Embodiment 2:
Decomposition chamber temperature among the embodiment 1 is controlled at 360 ℃, and other treatment conditions are identical, detect gas port institute exhaust body composition, wherein contain germane 12ppb, contain dust 0.005mg/m
3
Embodiment 3:
Decomposition chamber temperature among the embodiment 1 is controlled at 450 ℃, and other treatment conditions are identical, detect gas port institute exhaust body composition, wherein contain germane 9ppb, contain dust 0.006mg/m
3
Although the invention with preferred embodiment openly as above; but embodiment and accompanying drawing are not to limit the invention; anyly be familiar with this skill person; in the spirit and scope that do not break away from the invention; can make various changes or retouch from working as, but same within the protection domain of the invention.Therefore the protection domain of the invention should with the application claim was defined is as the criterion.
Claims (2)
1. the processing method of a tail gas of germane production system is characterized in that: flow through successively decomposition chamber, collecting chamber and the fluid-tight bottle of a cover exhaust gas processing device of the tail gas of germane production system realized vent gas treatment and germanium removal process; Decomposition chamber preheats, and tail gas stream is crossed decomposition chamber, and germane decomposes wherein forms the germanium metal powder; Tail gas stream is through collecting chamber, and the germanium metal powder that flows into collecting chamber with air-flow is collected; Tail gas is during by the fluid-tight bottle, and not collecting completely, the trace germanium metal powder is further absorbed by liquid medium; Described liquid medium is the concentrated sulfuric acid.
2. the processing method of a kind of tail gas of germane production system as claimed in claim 1, it is characterized in that: the pre-warmed temperature range of described decomposition chamber is at 280 ℃ ~ 450 ℃.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110132142XA CN102258933B (en) | 2011-05-21 | 2011-05-21 | Method for treating tail gas of germane production system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201110132142XA CN102258933B (en) | 2011-05-21 | 2011-05-21 | Method for treating tail gas of germane production system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102258933A CN102258933A (en) | 2011-11-30 |
| CN102258933B true CN102258933B (en) | 2013-04-03 |
Family
ID=45005882
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201110132142XA Active CN102258933B (en) | 2011-05-21 | 2011-05-21 | Method for treating tail gas of germane production system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102258933B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105536395A (en) * | 2016-02-26 | 2016-05-04 | 吕远芳 | Germanium oil mist recycling system and technology |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100731836B1 (en) * | 1998-04-09 | 2007-06-25 | 허니웰 인터내셔널 인코포레이티드 | Preparation and purification of diborane |
| US7160360B2 (en) * | 2003-12-08 | 2007-01-09 | Air Products And Chemicals, Inc. | Purification of hydride gases |
| US7638058B2 (en) * | 2005-04-07 | 2009-12-29 | Matheson Tri-Gas | Fluid storage and purification method and system |
| CN101549300A (en) * | 2008-04-01 | 2009-10-07 | 刘宝珠 | Catalyst for acid and halogen gas treatment and production method thereof |
-
2011
- 2011-05-21 CN CN201110132142XA patent/CN102258933B/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN102258933A (en) | 2011-11-30 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN110783658B (en) | Ex-service power ternary lithium battery recovery demonstration process method | |
| CN109193064A (en) | A kind of method of waste power lithium battery valuable constituent sorting recycling | |
| CN102544627A (en) | Method for recycling N-methyl-2-pyrrolidone from lithium battery electrode material | |
| CN108288738A (en) | A method of lithium-ion battery electrolytes are recycled using supercritical carbon dioxide fluid | |
| CN104748507B (en) | Treatment system for recovering chemical plant waste gas containing ammonia into liquid ammonia and treatment method thereof | |
| CN104941340A (en) | Device and treatment method for treating organic waste gas | |
| CN109244586A (en) | A kind of waste and old power battery environmental protection recycling and reusing method | |
| CN202141345U (en) | Tail gas recovering system for annealing furnace | |
| CN102258933B (en) | Method for treating tail gas of germane production system | |
| CN103961997B (en) | A kind of ammonium metavanadate roaster gives off the recovery process of tail gas | |
| CN107803319A (en) | A kind of NMP recovery purification systems and its recovery method of purification | |
| CN107681221B (en) | Method and device for treating waste lithium batteries | |
| CN106241928A (en) | A kind of high ammonia-nitrogen wastewater processes technique and system | |
| CN103849453B (en) | Waste emulsified oil purifying method | |
| CN107459021B (en) | Apparatus and method for decomposing nitrate solution | |
| CN203861954U (en) | Removing and recycling system for solvents | |
| CN105983304A (en) | Modularized green packaged treating process for waste rubber regeneration waste gas | |
| CN101745298A (en) | Recycling method of sulfur dioxide tail gas produced in organic chemical production | |
| CN211125915U (en) | Device for treating electrolyte of waste battery | |
| CN103553084A (en) | Method and device for treating converted gas in production of sodium nitrate | |
| CN104627966B (en) | A kind of method preparing nano-sulfur for raw material with sulfur dioxide flue gas | |
| CN203577612U (en) | Organized zero discharge system of electroplating exhaust gas | |
| CN207596591U (en) | A kind of processing system of the waste water of heterogeneous system containing ammonia | |
| CN201950057U (en) | Waste gas recovery device for lithium battery electrode sheet coating equipment | |
| CN221107637U (en) | Rotating wheel system for recovering NMP in exhaust gas of lithium battery coating machine |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| EE01 | Entry into force of recordation of patent licensing contract |
Application publication date: 20111130 Assignee: CHINA GERMANIUM Co.,Ltd. Assignor: NANJING GERMANIUM TECHNOLOGY Co.,Ltd. Contract record no.: 2014320000338 Denomination of invention: Method for treating tail gas of germane production system Granted publication date: 20130403 License type: Exclusive License Record date: 20140424 |
|
| LICC | Enforcement, change and cancellation of record of contracts on the licence for exploitation of a patent or utility model | ||
| CP01 | Change in the name or title of a patent holder | ||
| CP01 | Change in the name or title of a patent holder |
Address after: 211165 No. 718, Jiangjun Avenue, Jiangning Development Zone, Nanjing, Jiangsu Patentee after: CHINA GERMANIUM Co.,Ltd. Address before: 211165 No. 718, Jiangjun Avenue, Jiangning Development Zone, Nanjing, Jiangsu Patentee before: NANJING GERMANIUM TECHNOLOGY Co.,Ltd. |
|
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20211124 Address after: 211299 No. 9, Zhongxing East Road, Lishui District, Nanjing City, Jiangsu Province Patentee after: CHINA GERMANIUM Co.,Ltd. Address before: 211165 No. 718, Jiangjun Avenue, Jiangning Development Zone, Nanjing, Jiangsu Patentee before: CHINA GERMANIUM Co.,Ltd. |