CN102253486B - Two-dimensional MEMS tilting mirror with freely changeable deflection axis - Google Patents
Two-dimensional MEMS tilting mirror with freely changeable deflection axis Download PDFInfo
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- CN102253486B CN102253486B CN 201110224471 CN201110224471A CN102253486B CN 102253486 B CN102253486 B CN 102253486B CN 201110224471 CN201110224471 CN 201110224471 CN 201110224471 A CN201110224471 A CN 201110224471A CN 102253486 B CN102253486 B CN 102253486B
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- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
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- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
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- 238000009413 insulation Methods 0.000 description 2
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- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 208000029215 central polydactyly of fingers Diseases 0.000 description 1
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Abstract
A two-dimensional MEMS tilting mirror with freely changeable deflection axis is disclosed, wherein the single side of the upper electrode is fixed on the substrate asymmetrically, and the free change of the deflection axis of the two-dimensional MEMS tilting mirror is completed by adding the same voltage value on the lower electrode blocks of the tilting mirror in different arrangement modes or adding different voltage values on the lower electrode blocks of the tilting mirror in the same arrangement mode, or by using the two schemes comprehensively. The tilting mirror has high flexibility, effectively improves the light path conversion efficiency and quality of the tilting mirror, reduces the use cost, and is favorable for promoting the further application of the tilting mirror in the fields of optical communication, projection display, optical imaging, laser confocal microscopy and the like.
Description
Technical field
The invention belongs to the making field of MEMS (Micro-electromechanical Systems) tilting mirror, relate to for the designing and producing of the MEMS tilting mirror in field such as optical communication, Projection Display, optical imagery and confocal laser be micro-, be specifically related to the two-dimentional MEMS tilting mirror that a kind of yawing axis can free conversion.
Background technology
The optical tilt mirror has important use and is worth in optical communication, Projection Display, optical imagery and confocal laser microscopic system.The MEMS tilting mirror except possess the common cost of MEMS device low, be easy to realize to produce in batches, advantage such as it is fast also to have a dynamic response, low in energy consumption.Two dimension MEMS tilting mirror can be realized the light path conversion of two-dimensional direction at a device, and the space hold volume is little, high efficiency.
The yawing axis of traditional two-dimentional MEMS tilting mirror is quadrature, when the conversion light path has specific characteristics when requiring, when in a restricted clearance, realizing the mutual conversion of two light paths on the nonopiate direction, not only need high-precision deflection mirror surface twice, efficient is low, but also may can't finish intended target because of the restriction of limited space.If the yawing axis of tilting mirror is nonopiate, then mirror is when the light path conversion that realizes on its non-orthogonal axes direction, and deflection once both can be finished, the relative efficiency height.As seen when the conversion light path was non-orthogonal states and arranges, nonopiate two-dimentional MEMS tilting mirror had special advantages.According to document 1[village palpus leaf, Wang Weimin, Tao Fenggang, Yao Jun, Gao Fuhua.The development of nonopiate two-dimentional MEMS tilting mirror.The optical precision engineering, 2011 (8), In Press] report, the author is based on the design of silicon face processing technology and made non-orthogonal two-dimentional MEMS tilting mirror, minute surface can be realized the tilted deflecting around two nonopiate yawing axis, the angle of two yawing axis is 145.37 °, can once finish the efficient height to realizing around the light path conversion of 145.37 ° of axles.Can not move but the yawing axis of mirror is fixing, for specific demand, need the specific mirror structure of design, make two yawing axis of mirror hand over into specific angle, so that the minute surface modulation that needs the light path of conversion to be turned about this axis easily just, increased the cost of manufacture of two-dimentional MEMS tilting mirror, and because the existence of design and mismachining tolerance, always there are certain difference in two yawing axis angles and the designing requirement of the two-dimentional MEMS tilting mirror after the processing, angle angle as two yawing axis of design in the document 1 is 145 °, but actual angle is 145.37 °, causes tilting mirror to the decline of optical path modulation quality.
Summary of the invention:
The objective of the invention is to the two-dimentional MEMS tilting mirror that a kind of yawing axis can free conversion, to overcome the deficiency that exists in the known technology.
For achieving the above object, yawing axis provided by the invention can free conversion two-dimentional MEMS tilting mirror, yawing axis can free conversion two-dimentional MEMS tilting mirror, monolateral asymmetrical being fixed in the substrate of its top electrode, add identical magnitude of voltage or add different magnitudes of voltage at identical bottom electrode piece of arranging by the bottom electrode piece at the different arrangement modes of tilting mirror, or add different magnitudes of voltage at the bottom electrode piece of different arrangement modes, finish the free conversion of the yawing axis of two-dimentional MEMS tilting mirror.
Described yawing axis can free conversion two-dimentional MEMS tilting mirror, its bottom electrode is arranged in a combination by a plurality of bottom electrode pieces 6, the number of bottom electrode piece 6 is greater than 2, and leaves spacing between each bottom electrode piece.
Described yawing axis can free conversion two-dimentional MEMS tilting mirror, wherein, the bottom electrode piece exceeds the fore-and-aft distance control on top electrode border between-500 μ m to 500 μ m, exceed the lateral dimension on top electrode border apart from controlling between-500 μ m to 500 μ m, negative sign represents that the bottom electrode piece is in top electrode inside.
Described yawing axis can free conversion two-dimentional MEMS tilting mirror, wherein, the distance of top electrode and bottom electrode piece is 0.5-100 μ m.
Described yawing axis can free conversion two-dimentional MEMS tilting mirror, wherein, the minute surface of tilting mirror vertically the indentation in top electrode apart from control between-500 μ m to 500 μ m, the minute surface of tilting mirror laterally the indentation size Control in top electrode between-500 μ m to 500 μ m, the distance of the minute surface of tilting mirror and top electrode upper surface is between the 0.5-100 μ m, and negative sign represents that the minute surface of tilting mirror is in the outside of top electrode.
The present invention is by carrying out asymmetric powering up with monolateral asymmetrical being fixed in the substrate and by the bottom electrode piece to tilting mirror of the top electrode of tilting mirror, realize the free conversion of mirror deflection axle, and make the minute surface can be around the yawing axis deflection freely of required angle, high-efficiency reliable realizes desired light path conversion, improves light path conversion efficiency and the quality of tilting mirror.
Description of drawings
Fig. 1 is the structural representation of the two-dimentional MEMS tilting mirror that yawing axis of the present invention can free conversion.
Fig. 2 is the diagrammatic cross-section of the two-dimentional MEMS tilting mirror that yawing axis can free conversion.
Fig. 3 is the vertical view of the two-dimentional MEMS tilting mirror that yawing axis can free conversion.
Fig. 4 is two-dimentional MEMS tilting mirror top electrode 5 that yawing axis can free conversion and the layout viewing of bottom electrode piece 6.
Fig. 5 is the minute surface 1 of the two-dimentional MEMS tilting mirror that yawing axis can free conversion and the layout viewing of top electrode 5.
Fig. 6 is the synoptic diagram of arranging of the two-dimentional MEMS tilting mirror bottom electrode piece 6 that yawing axis can free conversion.
Fig. 7 is when the two-dimentional MEMS tilting mirror bottom electrode piece 6-4 that yawing axis can free conversion powers up, the deflection mirror surface synoptic diagram of tilting mirror.
Fig. 8 is when the two-dimentional MEMS tilting mirror bottom electrode piece 6-5 that yawing axis can free conversion powers up, the deflection mirror surface synoptic diagram of tilting mirror.
Fig. 9 be yawing axis can free conversion two-dimentional MEMS tilting mirror bottom electrode piece 6-1,6-2,6-3, when 6-4 adds identical magnitude of voltage, the deflection mirror surface synoptic diagram of tilting mirror.
Figure 10 be yawing axis can free conversion two-dimentional MEMS tilting mirror bottom electrode piece 6-5,6-6,6-7, when 6-8 adds identical magnitude of voltage, the deflection mirror surface synoptic diagram of tilting mirror.
Figure 11 be yawing axis can free conversion two-dimentional MEMS tilting mirror bottom electrode piece 6-4, when 6-5 adds identical magnitude of voltage, the deflection mirror surface synoptic diagram of tilting mirror.
Figure 12 is when the magnitude of voltage on rotating shaft can the two-dimentional MEMS tilting mirror bottom electrode piece 6-5 of free conversion is 10 times of bottom electrode piece 6-4, the deflection mirror surface synoptic diagram of tilting mirror.
Figure 13 is when the magnitude of voltage on rotating shaft can the two-dimentional MEMS tilting mirror bottom electrode piece 6-5 of free conversion is 10 times of bottom electrode piece 6-1, the deflection mirror surface synoptic diagram of tilting mirror.
Figure 14 is when two-dimentional MEMS tilting mirror bottom electrode piece 6-2 that can free conversion at yawing axis adds identical magnitude of voltage with 6-5, the deflection mirror surface synoptic diagram of tilting mirror.
Element numbers explanation in the accompanying drawing:
1 tilting mirror minute surface;
2-1 rete deposition substrate; The 2-2 silicon base;
3 fixed beams;
4 insulation courses;
5 electric pole plates;
6 bottom electrode pieces;
7 minute surface pillars;
The spacing of 8 top electrodes and bottom electrode;
The spacing of electroplax and minute surface on 9;
The polysilicon layer of 10 minute surfaces;
11 minute surfaces gold layer;
The width dimensions of 12 fixed beams;
The length dimension of 13 bottom electrode pieces;
The width dimensions of 14 bottom electrode pieces;
The longitudinal pitch size of 15 bottom electrode pieces;
16 bottom electrode pieces exceed the longitudinal size of top electrode;
The longitudinal pitch of 17 bottom electrode pieces;
The longitudinal size of 18 top electrodes;
The horizontal indentation size of 19 bottom electrode pieces;
The lateral dimension of 20 top electrodes;
The length dimension of 21 fixed beams;
22 top electrodes exceed the lateral dimension of minute surface distance;
The lateral dimension of 23 minute surfaces;
The longitudinal size of 24 minute surfaces;
25 top electrodes exceed the longitudinal size of minute surface distance;
First bottom electrode piece of the following left end of 6-1 tilting mirror; Second bottom electrode piece of the following left end of 6-2 tilting mirror; The 3rd bottom electrode piece of the following left end of 6-3 tilting mirror; The 4th bottom electrode piece of the following left end of 6-4 tilting mirror; First bottom electrode piece of 6-5 tilting mirror top right-hand member; Second bottom electrode piece of 6-6 tilting mirror top right-hand member; The 3rd bottom electrode piece of 6-7 tilting mirror top right-hand member; The 4th bottom electrode piece of 6-8 tilting mirror top right-hand member;
The angle of 26 tilting mirror yawing axis Y ' and Y-axis.
Embodiment
Be to solve the deficiency that the fixing two-dimentional MEMS tilting mirror of yawing axis exists in the background technology when light path is changed, improve light path conversion efficiency and the quality of two-dimentional MEMS tilting mirror, the invention provides the two-dimentional MEMS tilting mirror that a kind of yawing axis can free conversion.
See also Fig. 1,2,3,4,5 and Fig. 6, it is respectively the structural representation of the two-dimentional MEMS tilting mirror that yawing axis of the present invention can free conversion, yawing axis can free conversion the diagrammatic cross-section of two-dimentional MEMS tilting mirror, yawing axis can free conversion the vertical view of two-dimentional MEMS tilting mirror, yawing axis can free conversion the layout viewing of two-dimentional MEMS tilting mirror top electrode 5 and bottom electrode piece 6, yawing axis can free conversion the layout viewing of minute surface 1 and top electrode 5 of two-dimentional MEMS tilting mirror, and the synoptic diagram of arranging of the two-dimentional MEMS tilting mirror bottom electrode piece 6 that yawing axis can free conversion.
Yawing axis of the present invention can free conversion two-dimentional MEMS tilting mirror formed by minute surface 1, rete deposition substrate 2-1, silicon base 2-2, fixed beam 3, insulation course 4, top electrode 5, bottom electrode piece 6 and support column 7, wherein bottom electrode piece 6 is combined into the bottom electrode of tilting mirror.Rete deposition substrate 2-1 and silicon base 2-2 form the substrate 2 of the two-dimentional MEMS tilting mirror that yawing axis can free conversion jointly, by with top electrode 5 monolateral being fixed in the substrate 2, and power up the free conversion that can realize the tilting mirror yawing axis in that bottom electrode is asymmetric, realize that minute surface is around the deflection distortion of required yawing axis.
The material of silicon base 2-2 is monocrystalline silicon, deposits the thick silicon nitride dielectric layer 4 of 2nm-0.5 μ m thereon, is used for intercepting the short circuit current between bottom electrode piece 6 and silicon base 2-2.The doped polysilicon layer of deposit thickness 0.5-3 μ m is as constituting bottom electrode piece 6 on silicon nitride dielectric layer.
The bottom electrode of tilting mirror is not a single electrode, but is arranged in a combination by a plurality of bottom electrode pieces 6, and the shape of bottom electrode piece 6 can be that circle, triangle, quadrilateral or other are polygon-shaped, and the present invention sets forth with rectangular bottom electrode piece 6.Bottom electrode piece 6 be distributed in top electrode 5 below, wherein the length dimension 13 of bottom electrode piece 6 is between 1-1000 μ m, width dimensions 14 is between 1-1000 μ m, horizontal spacing 15 controls between the bottom electrode piece 6 are between 1-1000 μ m, and fore-and-aft distance 17 controls of bottom electrode piece 6 are between 1-1000 μ m.Bottom electrode piece 6 exceeds fore-and-aft distance 16 controls on top electrode 5 borders between-500 μ m to 500 μ m, and negative sign represents that bottom electrode piece 6 is in top electrode 5 inside.Exceed lateral dimension distance 19 controls on top electrode 5 borders between-500 μ m to 500 μ m, negative sign represents that bottom electrode piece 6 is in top electrode 5 inside.
Instantly after the size of electrode block is determined, exceed the certain distance in border of top electrode 5 by making bottom electrode piece 6, can when guaranteeing to obtain big rotating torque, reduce the relative area between upper/lower electrode, avoid the electrostatic suction effect to produce.The number of bottom electrode piece 6 requires greater than 2.
The material of top electrode 5 is the polysilicons that mix, thickness 0.5-50 μ m, and by fixed beam 3 monolateral asymmetrical being fixed in the substrate 2, the shape and size of fixed beam 3 can design according to actual demand, and this sentences rectangular fixed beam is that example is set forth.The upper surface of top electrode 5 supports minute surface 1 by support column 7, and the lower surface of top electrode 5 is 0.5-100 μ m apart from the spacing 8 of bottom electrode piece 6.
Principle of work of the present invention is:
By making alive value between the top electrode 5 of tilting mirror and bottom electrode piece 6, under the effect of electrostatic attraction, produce electrostatic force between the upper and lower electrode, the moment of utilizing electrostatic force to produce drives tilting mirrors 1 and produces deflection around yawing axis.Add identical magnitude of voltage by the bottom electrode piece 6 at different arrangement modes, or add different magnitudes of voltage at the bottom electrode piece 6 of same row mode for cloth, or add the free conversion that different magnitudes of voltage is realized the tilting mirror yawing axis at the bottom electrode piece of different arrangement modes.
1) the bottom electrode piece 6 at different arrangement modes adds identical magnitude of voltage, realizes the free conversion of two-dimentional MEMS tilting mirror yawing axis.
In structural drawing shown in Figure 6,6-4 powers up at its bottom electrode piece, and under the effect of electrostatic force, the top electrode 5 of inclination mirror produces deflection, takes the deflection that minute surface 1 produces same angle to, and its deflection mirror surface axle Y ' is 83 degree with the angle of Y-axis.As adding identical magnitude of voltage at tilting mirror electrode block 6-5, then the angle of tilting mirror yawing axis Y and Y-axis is 65 degree.
2) the bottom electrode piece 6 at the same row mode for cloth adds the free conversion that different magnitudes of voltage is realized the yawing axis of two-dimentional MEMS tilting mirror.
Utilization adds the transform effect that different magnitudes of voltage can produce the tilting mirror yawing axis equally at the bottom electrode piece 6 of tilting mirror same row mode for cloth, for example at tilting mirror bottom electrode piece 6-4, when 6-5 adds identical magnitude of voltage, the yawing axis Y ' of tilting mirror is 90 degree with the angle of mirror Y-axis, but when the magnitude of voltage on the electrode block 6-5 was 10 times of bottom electrode piece 6-4 instantly, the yawing axis Y ' of tilting mirror was 88 degree with the angle of Y-axis.
3) the bottom electrode piece 6 at different arrangement modes adds the free conversion that different magnitudes of voltage is realized the yawing axis of two-dimentional MEMS tilting mirror.
Add the free conversion that different magnitudes of voltage also can be realized two-dimentional MEMS tilting mirror yawing axis by the bottom electrode piece 6 at different arrangement modes, for example the magnitude of voltage that adds at tilting mirror bottom electrode piece 6-5 is on bottom electrode piece 6-5 during 10 times of institute's making alive value, the yawing axis Y ' of tilting mirror is 96 degree with the angle of mirror Y-axis, but when the magnitude of voltage of the institute's making alive value on the electrode block 6-5 and bottom electrode piece 6-2 was identical instantly, the yawing axis Y ' of tilting mirror was 87 degree with the angle of Y-axis.
Yawing axis of the present invention can free conversion two-dimentional MEMS tilting mirror add identical magnitude of voltage or add different magnitudes of voltage at the bottom electrode piece 6 of same arrangement mode by the bottom electrode piece 6 at the different arrangement modes of tilting mirror, or add different magnitudes of voltage at the bottom electrode piece of different arrangement modes, can realize the free conversion of tilting mirror yawing axis, its significance is:
1) improved the dirigibility of two-dimentional MEMS tilting mirror.Rotating shaft can free conversion the angle of two-dimentional MEMS tilting mirror by the modulation yawing axis, can realize minute surface along this free deflection, improved the light path conversion efficiency of tilting mirror;
2) freely changing of rotating shaft angle can be adjusted the light path conversion effect of mirror easily, and the two-dimentional MEMS tilting mirror of eliminating stationary shaft improves the light path conversion quality of tilting mirror because of the optical path-deflecting error that the existence of mismachining tolerance causes;
3) the two-dimentional MEMS tilting mirror that yawing axis can free conversion is simple in structure, and easily processing can realize the light path conversion of a plurality of directions on a slice mirror, and usable range is wide, the utilization ratio height, use and cost of manufacture low.
Carry out the explanation of the specific embodiment of the two-dimentional MEMS tilting mirror that yawing axis of the present invention can free conversion with the arrangement mode of bottom electrode piece shown in Figure 6.The length dimension 20 of the top electrode 5 of two-dimentional MEMS tilting mirror shown in Figure 6 is 230 μ m, width dimensions 18 is 100 μ m, the length dimension 21 of fixed beam 3 is 38 μ m, width dimensions 12 is 22 μ m, the length dimension 13 of bottom electrode piece 6 is 40 μ m, width dimensions 14 is 30 μ m, the horizontal spacing 15 of bottom electrode piece 6 is 30 μ m, longitudinal pitch 17 is 40 μ m, the size 16 that bottom electrode piece 6 vertically exceeds top electrode 5 is 10 μ m, the size 19 of bottom electrode piece 6 horizontal indentation top electrodes 5 is 35 μ m, top electrode 5 thickness 3 μ m, and the thickness of bottom electrode piece 6 is 0.5 μ m.
1) the bottom electrode piece 6 on different arrangement modes adds the free conversion that identical magnitude of voltage is realized two-dimentional MEMS tilting mirror yawing axis.
When bottom electrode piece 6-4 powers up, the yawing axis Y ' of tilting mirror is 83 degree with the angle of Y-axis, and the distortion of minute surface as shown in Figure 7.
When electrode block 6-5 powers up, the yawing axis Y ' of tilting mirror is 65 degree with the angle of Y-axis, and the distortion of minute surface as shown in Figure 8.
When at bottom electrode piece 6-1,6-2,6-3, when 6-4 adds identical magnitude of voltage, the yawing axis Y ' of tilting mirror is 98 degree with the angle of Y-axis, and the distortion of minute surface as shown in Figure 9.
When at bottom electrode piece 6-5,6-6,6-7, when 6-8 adds identical magnitude of voltage, the yawing axis Y ' of tilting mirror is 78 degree with the angle of Y-axis, and the distortion of minute surface as shown in figure 10.
2) the bottom electrode piece 6 at the same row mode for cloth adds the free conversion that different magnitudes of voltage is realized two-dimentional MEMS tilting mirror yawing axis.
When at bottom electrode piece 6-4, when 6-5 adds identical magnitude of voltage simultaneously, the yawing axis Y ' of tilting mirror is 90 degree with the angle of Y-axis, and the distortion of minute surface as shown in figure 11.
When the magnitude of voltage on bottom electrode piece 6-5 was 10 times of bottom electrode piece 6-4, the yawing axis Y ' of tilting mirror was 94 degree with the angle of Y-axis, and the distortion of minute surface as shown in figure 12.
3) add different magnitudes of voltage at the bottom electrode piece 6 of different arrangement modes and realize two-dimentional MEMS tilting mirror deflection transformation of axis.
When the magnitude of voltage on being added in tilting mirror bottom electrode piece 6-5 was 10 times of bottom electrode piece 6-1, the yawing axis Y ' of tilting mirror was 96 degree with the angle of Y-axis, and the distortion of minute surface as shown in figure 13.
When tilting mirror bottom electrode piece 6-2 adds identical magnitude of voltage with 6-5, the yawing axis Y ' of tilting mirror is 87 degree with the angle of Y-axis, and the distortion of minute surface as shown in figure 14.
Claims (5)
1. the two-dimentional MEMS tilting mirror that a yawing axis can free conversion, monolateral asymmetrical being fixed in the substrate of its top electrode, add identical magnitude of voltage or add different magnitudes of voltage at identical bottom electrode piece of arranging by the bottom electrode piece at the different arrangement modes of tilting mirror, or add different magnitudes of voltage at the bottom electrode piece of different arrangement modes, finish the free conversion of the yawing axis of two-dimentional MEMS tilting mirror.
According to the described yawing axis of claim 1 can free conversion two-dimentional MEMS tilting mirror, its bottom electrode is arranged in a combination by a plurality of bottom electrode pieces (6), the number of bottom electrode piece (6) is greater than 2, and leaves spacing between each bottom electrode piece.
According to the described yawing axis of claim 1 can free conversion two-dimentional MEMS tilting mirror, wherein, the bottom electrode piece exceeds the fore-and-aft distance control on top electrode border between-500 μ m to 500 μ m, exceed the lateral dimension on top electrode border apart from controlling between-500 μ m to 500 μ m, negative sign represents that the bottom electrode piece is in top electrode inside.
According to the described yawing axis of claim 1 can free conversion two-dimentional MEMS tilting mirror, wherein, the distance of top electrode and bottom electrode piece is 0.5-100 μ m.
According to the described yawing axis of claim 1 can free conversion two-dimentional MEMS tilting mirror, wherein, the minute surface of tilting mirror vertically the indentation in top electrode apart from control between-500 μ m to 500 μ m, the minute surface of tilting mirror laterally the indentation size Control in top electrode between-500 μ m to 500 μ m, the distance of the minute surface of tilting mirror and top electrode upper surface is between the 0.5-100 μ m, and negative sign represents that the minute surface of tilting mirror is in the outside of top electrode.
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| US6388789B1 (en) * | 2000-09-19 | 2002-05-14 | The Charles Stark Draper Laboratory, Inc. | Multi-axis magnetically actuated device |
| CN1172208C (en) * | 1996-06-10 | 2004-10-20 | 三星电子株式会社 | Deformable mirror device and mfg. method thereof |
| CN101475136A (en) * | 2009-01-09 | 2009-07-08 | 中国科学院光电技术研究所 | Manufacturing method of electrostatic repulsion force driven MEMS deformable mirror |
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| WO2002042825A1 (en) * | 2000-11-22 | 2002-05-30 | Ball Semiconductor, Inc. | Light modulation device and system |
| CN103105674A (en) * | 2007-01-26 | 2013-05-15 | 明锐有限公司 | A MEMS mirror system for laser printing applications |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN1172208C (en) * | 1996-06-10 | 2004-10-20 | 三星电子株式会社 | Deformable mirror device and mfg. method thereof |
| US6388789B1 (en) * | 2000-09-19 | 2002-05-14 | The Charles Stark Draper Laboratory, Inc. | Multi-axis magnetically actuated device |
| CN101475136A (en) * | 2009-01-09 | 2009-07-08 | 中国科学院光电技术研究所 | Manufacturing method of electrostatic repulsion force driven MEMS deformable mirror |
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| Title |
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| 汪为民等.新型分立倾斜式微变形镜研究.《中国激光》.2011, * |
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