CN102243328A - Solar simulator optical filter of photovoltaic cell component and manufacturing method thereof - Google Patents

Solar simulator optical filter of photovoltaic cell component and manufacturing method thereof Download PDF

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CN102243328A
CN102243328A CN201110197269XA CN201110197269A CN102243328A CN 102243328 A CN102243328 A CN 102243328A CN 201110197269X A CN201110197269X A CN 201110197269XA CN 201110197269 A CN201110197269 A CN 201110197269A CN 102243328 A CN102243328 A CN 102243328A
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optical filter
photovoltaic cell
cell component
solar simulator
centre wavelength
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潘永强
杭凌侠
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Xian Technological University
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Xian Technological University
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy

Abstract

The invention relates to a solar simulator optical filter of a photovoltaic cell component and a manufacturing method thereof. The problem that the angle effect caused by an optical filter influences the performance test of a whole photovoltaic cell component while only utilizing a plurality of pulse xenon lamps as light sources exists in the prior art. In order to solve the problem existing in the prior art, the invention provides a solar simulator optical filter of a photovoltaic cell component, wherein the centre wavelength of the centre part thereof is less than that of the peripheral part; and provides a manufacturing method for the solar simulator optical filter of the photovoltaic cell component, comprising the step of splicing two optical filters with different centre wavelengths, and gluing the two optical filters with different centre wavelengths on an uncoated substrate while splicing, wherein the size of the substrate is 100*100 mm. The optical filter and the manufacturing method in the invention have the advantages that the spectrum matching degree of each point on the large-area simulator test surface of the photovoltaic cell component in a condition of only utilizing an optical filter with one centre wavelength can be increased; the operability is strong; the realization is easy; and the cost is low.

Description

Photovoltaic cell component solar simulator optical filter and manufacture method thereof
Technical field
The present invention relates to the optical filter technical field, be specifically related to a kind of photovoltaic cell component solar simulator optical filter and manufacture method thereof.
Background technology
Solar simulator is a kind of visual plant that utilizes the demarcation of artificial light source simulated solar irradiation Radiation Characteristics and detect solar cell.When photovoltaic industry is constantly fast-developing, also greatly influence and promoted the development of photovoltaic cell coherent detection equipment.In order to detect every performance index of solar cell better, the measuring accuracy and the performance of solar cell checkout equipment, the special most important checkout equipment solar simulator of solar cell are all constantly being improved in each countries and regions.
The product of solar cell or assembly production firm will come into the market, must be through the detection of a series of performances and safety, wherein the most important thing is to utilize sunshine to measure the parameters such as IV curve, short-circuit current, open-circuit voltage, fill factor, curve factor and battery efficiency of battery ground or assembly, solar cell is identified and classification.Because the influence of outdoor weather and environment, natural light can not satisfy the measurement of growing photovoltaic cell far away, thereby being necessary to develop a kind of room light electrical measurement equipment, solar simulator arises at the historic moment under this environment, and the technology of simulator and performance constantly are improved.According to international IEC standard, the performance of solar simulator can be weighed from several aspects such as irradiation unevenness, irradiation spectrum and irradiation instabilities, can be divided into A, B and C Three Estate respectively.The effective irradiation intensity of solar simulator can be determined according to different practical applications with irradiated area in addition.
The photovoltaic cell testing apparatus is used widely abroad, and there are series of products each big photovoltaic cell factory commercial city.Advanced testing apparatus, its solar simulator adopts xenon long-arc lamp to do light source more.Its irradiation nonuniformity is generally ± and 3%, effective area of irradiation is from less than one square metre to several square metres, and the price comparison costliness.The measuring accuracy of testing apparatus is generally ± 0.5%~± 1%, tens kilowatts of power consumptions do not wait to tens kilowatts, several square metres to tens square metres of floor areas, its fetch long price, Spire SPI-SUN SIMULATOR240 type, the Hughes company grown place HUGHES4500-I type tester price of producing as U.S. Spire company arrive the hundreds of thousands dollar up to several ten thousand.Cost height, volume are big, power consumption is greatly its distinguishing feature.
Several stages has been experienced in the research and development of domestic solar simulator, at first is the solar simulator of light source such as iodine tungsten, and the CCM-2C type photovoltaic cell test board of photovoltaic cell research department, Shanghai Communications University, Xi'an development is typically arranged.But because stable light source solar simulator power consumption is big, temperature raises, general Validity Test precision ± about 1%, volume is big, power consumption is still weak point greatly.Next is a simulator of selecting the xenon short-act lamp light source for use, and the luminescent spectrum of xenon lamp and the matching of solar spectrum are fine, and the optical texture that adopts xenon short-act lamp to add ellipsoid can access very high capacity usage ratio, and this is the important breakthrough of solar simulator technology.These simulators of power according to xenon lamp can be divided into hectowatt grade, multikilowatt even myriawatt level.Powerful xenon lamp is commonly used in the test of assembly, and low power xenon lamp is used in the test of photovoltaic cell monomer and widgets more.
The commercialization solar simulator of stipulating in the GB that is applied to the photovoltaic cell performance test has two classes, and a class is the steady-state simulation device, and this analoglike device is applicable to the test of monomer photovoltaic cell and small size components.Another kind of is the pulsed solar simulator, is a kind of solar simulator that uses the pulse xenon long-arc lamp as light source that development in recent years is got up.The only cold light that xenon flash light source is sent, its spectral characteristic are very near daylight, and light source color temperature is 5700K ~ 6000K.Pulse power is up to more than 100 kilowatts, and average power has only several watts.This class solar simulator generally is made up of several pulse xenon lamps, be mainly used in the test of large scale assembly, its another one advantage is because the pulse xenon lamp flash pulse duration is very short, has only several milliseconds usually, the solar battery surface variation of temperature can be do not caused, therefore thermostatic equipment can be saved.Therefore, the pulsed solar simulator is subjected to the favor of vast photovoltaic cell producer.Because there are certain difference in the irradiance spectrum and the standard solar spectrum of pulse xenon lamp, referring to Fig. 1, must additional spectrum correction facility, i.e. solar simulator optical filter.Simultaneously because the large tracts of land simulator of test light photovoltaic assembly generally only uses several pulse xenon lamps as light source, at this moment, directly over xenon lamp, the light that xenon lamp sends is almost perpendicular to optical filter incident, and in position far away directly over xenon lamp, the light that xenon lamp sends is mapped on the optical filter so that certain angle is oblique, and along with the increase that departs from distance directly over the xenon lamp, the incident angle that the light that xenon lamp sends incides optical filter is big more, this just makes from xenon lamp light at a distance by optical filter the time, the centre wavelength that is equivalent to optical filter is offset to some extent to the shortwave direction, this just make pulse xenon lamp send light after filtration the mating plate light that projects difference on the simulator test surfaces have certain angular effect with respect to optical filter, thereby the spectral irradiance that makes diverse location on the large tracts of land solar simulator test surfaces distributes and has certain difference, some position even the requirement that does not reach A level simulator, thus the test of overall optical photovoltaic cell components performance influenced.
Summary of the invention
The purpose of this invention is to provide a kind of photovoltaic cell component solar simulator optical filter, with overcome that prior art exists when only using several pulse xenon lamps as light source, because of the angular effect that optical filter causes, influence the problem of overall optical photovoltaic cell components performance test.
For overcoming the problem that prior art exists, photovoltaic cell component solar simulator optical filter provided by the invention, the centre wavelength of its core is less than the centre wavelength of peripheral part.
Above-mentioned core is a square or circular.
The manufacture method of above-mentioned photovoltaic cell component solar simulator optical filter, be that these two kinds of different optical filters of centre wavelength are spliced, during splicing, two kinds of not concentric wavelength filter are glued on the uncoated substrate of a slice, the size of substrate is 100 * 100mm.
The manufacture method of above-mentioned photovoltaic cell component solar simulator optical filter, it is the long film of peripheral depocenter wavelength at the substrate of 100 * 100mm, and core deposit film not, and then the optical filter that centre wavelength is short is glued at the only core of the substrate of peripheral plated film.
The manufacture method of above-mentioned photovoltaic cell component solar simulator optical filter, be that periphery with whole substrate blocks, carry out thin film deposition at core, and then will be deposit film partly block, at the periphery short film of plated film part depocenter wavelength not.
Compared with prior art, advantage of the present invention is:
1, can improve and only use under a kind of centre wavelength optical filter situation the Spectral matching degree of each point on the photovoltaic cell component large tracts of land simulator test surfaces;
2, several at only using (being generally 6) high-power circular arc pulse xenon lamp is as the photovoltaic cell component simulator of illuminating source, appropriate design and effective manufacture method by optical filter, the light that sends from principle elimination pulse xenon lamp incides on the optical filter, project the angular effect of simulator test surfaces diverse location again, it is identical as far as possible to make test surfaces be that the spectral irradiance of each point on the large tracts of land simulator test surfaces of 1200 * 2000mm distributes, and makes the Spectral matching degree of each point all be better than the requirement of A level simulator (0.75-1.25) in the GB.
3, workable, be easy to realize, and cost is low.
Description of drawings
Fig. 1. survey high-power circular arc pulse xenon lamp spectrum and standard solar spectrum.
Fig. 2. test surfaces is the photovoltaic cell component simulator structural representation of 1200 * 2000mm.
Fig. 3. the measured spectra transmittance graph of the optical filter that two kinds of centre wavelength is different.
Fig. 4. optical filter carries out two kinds of combined and spliced different modes, and wherein (a) core is a square, and (b) core is circular.
Fig. 5. optical filter adopt combined and spliced after, the measured spectra irradiance distribution curve of difference on the simulator test surfaces, the irradiance distribution curve of (a) position 0 wherein, (b) the irradiance distribution curve of position 1, (c) the irradiance distribution curve of position 2.
Embodiment
To describe in detail the present invention by specific embodiments and the drawings below.
The description of prior art:
The band resistance optical filter that centre wavelength is 930nm, this optical filter is about 15% in the transmissivity at 930nm place, and half width is 300nm, average transmittance Ta in average transmittance Ta 〉=93%, the 1050~1200nm in 400~750nm wave band 〉=91%.
With above-mentioned area be 6 identical optical filters of 100 * 100mm to be installed in test surfaces be to test its spectral irradiance on 1200 * 2000mm large tracts of land sun mould, testing tool is a fiber spectrometer, concrete test point is referring to Fig. 2, the result of test is as follows:
It is 100 * 100mm that table 1 has provided area, and centre wavelength is 930nm, and not splicing preceding 6 identical optical filters, to be installed in test surfaces be that the spectral irradiance of the diverse location point tested on 1200 * 2000mm large tracts of land solar simulation distributes and the Spectral matching degree.Wherein, SS represents AM1.5 standard spectrum irradiance distribution, and promptly the irradiance in each spectral range accounts for the number percent of solar global irradiance; P0, P1, P2 represent the spectral irradiance (the test point position is seen shown in Figure 2) of actual measurement on position 0 on the test surfaces, position 1 and the position 2 respectively; SM0, SM1 and SM2 represent spectral irradiance measured on above these three points and the ratio of AM1.5 standard spectrum irradiance, i.e. Spectral matching degree respectively.
  
Figure 861706DEST_PATH_IMAGE001
As can be seen from Table 1, adding after centre wavelength is the optical filter of 930nm, the Spectral matching degree at 0 place, position is 0.909-1.061 directly over the pulse xenon lamp, is much better than the standard of the A level Spectral matching degree 0.75-1.25 in the GB/T6495.9-2006/ IEC60904-9:1995 standard.Though the Spectral matching degree of position 1 is with respect to the Spectral matching degree of position 0 variation to some extent, but still satisfy the requirement of A level.But, the measured data of position 2 from the test surfaces, its Spectral matching degree in 700~800nm and 800~900nm wave band obviously reduces, and the Spectral matching degree in 900~1100nm wave band then obviously increases.
From top test as can be seen: (test surfaces is for 1200 * 2000mm) solar simulators to the large tracts of land of several for only having (being generally 6) pulse xenon lamp, only adopts the optical filter of a centre wavelength can't make Spectral matching degree from xenon lamp position farthest satisfy the requirement of A level simulator in the GB.
Embodiment 1:
Material comprises:
The band resistance optical filter that centre wavelength is 930nm, this optical filter is about 15% in the transmissivity at 930nm place, and half width is 300nm, average transmittance Ta 〉=93% in 400~750nm wave band, average transmittance Ta in 1050~1200nm 〉=91%, its spectral transmission rate curve is referring to Fig. 3.
The band resistance optical filter that centre wavelength is 960nm, this optical filter is about 15% in the transmissivity at 960nm place, and half width is 300nm, average transmittance Ta in average transmittance Ta 〉=93%, the 1080~1200nm in 400~780nm wave band 〉=91%.
Referring to Fig. 4-a, the optical filters that these two kinds of centre wavelengths are different carry out combined and spliced, when combined and spliced, making the centre wavelength of the optical filter center optical filter of 100 * 100mm is 930nm, size is the square of 50 * 50mm, the centre wavelength of periphery optical filter is 960nm, and its spectral transmission rate curve is referring to Fig. 3.
Test process is as follows:
Adopt in the photovoltaic cell component solar simulator of high-power circular arc pulse xenon lamp as light source, because the spectral irradiance of xenon lamp distributes and there is certain difference in the irradiance distribution of standard solar spectrum, and this difference mainly shows in the near-infrared band scope, for this reason, must design optical filter the spectrum of xenon lamp is carried out certain correction, make its solar spectrum that is near the mark as far as possible.(test surfaces is 1200 * 2000mm) solar simulators for the large tracts of land that 6 pulse xenon lamps are only arranged, after replacing original centre wavelength only to be the optical filter of 930nm with 6 tablet filters after the combination, distribution of the spectral irradiance of difference and Spectral matching degree are as shown in table 2 on the test surfaces, and its spectral irradiance distributes as shown in Figure 5.
  
Figure 841163DEST_PATH_IMAGE002
As can be seen from Table 2, adopted the optical filter of above-mentioned two kinds of different centre wavelengths carry out combined and spliced after, distribution of the spectral irradiance at 0 place, position and Spectral matching degree change little with respect to having to improve preceding value on the test surfaces, and after having adopted combined and spliced technological improvement, the Spectral matching degree of position 1 and position 2 all makes moderate progress on the test surfaces, and the Spectral matching degree that is apparent that 2 places, position on the test surfaces most is from improving the 0.942-1.098 after preceding 0.729-1.292 changes to improvement.Thereby making test surfaces is the requirement that the irradiance distribution of each point all reaches even be better than A level simulator in the GB on the large tracts of land simulator test surfaces of 1200 * 2000mm.
Referring to Fig. 5, the Spectral matching degree requirement of the A grade solar simulator that the optical filter that adopts method for designing of the present invention to produce can make the each point on the large tracts of land solar simulator test surfaces all reach to stipulate in the GB.
Embodiment 2:
Material comprises:
The band resistance optical filter that centre wavelength is 930nm, this optical filter is about 15% in the transmissivity at 930nm place, and half width is 300nm, average transmittance Ta 〉=93% in 400~750nm wave band, average transmittance Ta in 1050~1200nm 〉=91%, its spectral transmission rate curve is referring to Fig. 3.
The band resistance optical filter that centre wavelength is 960nm, this optical filter is about 15% in the transmissivity at 960nm place, and half width is 300nm, average transmittance Ta 〉=93% in 400~780nm wave band, average transmittance Ta in 1080~1200nm 〉=91%, its spectral transmission rate curve is referring to Fig. 3.
Referring to Fig. 4-a, the optical filter that these two kinds of centre wavelengths are different carries out combined and spliced, and when combined and spliced, making the centre wavelength of the optical filter center optical filter of 100 * 100mm is 930nm, size is the square of 30 * 30mm, and the centre wavelength of peripheral optical filter is 960nm.
Test process is as follows:
When the device light source that adopts high-power circular arc pulse xenon lamp as the photovoltaic cell component solar simulation, and be square 30 * 30mm in the middle of adopting, after centre wavelength is the optical filter of 930nm and the combination of optical filter that peripheral centre wavelength is 960nm, and after replacing above-mentioned centre wavelength only to be the optical filter of 930nm with 6 tablet filters after the combination, distribution of the spectral irradiance of difference and Spectral matching degree are as shown in table 3 on the test surfaces, data from table 3 can be seen, after adopting the optical filter of the present invention's design, can make test surfaces is the requirement that the irradiance distribution of each point all reaches even be better than A level simulator in the GB on the large tracts of land simulator test surfaces of 1200 * 2000mm.
Embodiment 3:
Material comprises:
The band resistance optical filter that centre wavelength is 920nm, this optical filter is about 15% in the transmissivity at 920nm place, and half width is 300nm, average transmittance Ta in average transmittance Ta 〉=93%, the 1050~1200nm in 400~750nm wave band 〉=91%.
The band resistance optical filter that centre wavelength is 950nm, this optical filter is about 15% in the transmissivity at 950nm place, and half width is 300nm, average transmittance Ta in average transmittance Ta 〉=93%, the 1080~1200nm in 400~780nm wave band 〉=91%.
Referring to Fig. 4-a, the optical filter that these two kinds of centre wavelengths are different carries out combined and spliced, and when combined and spliced, making the centre wavelength of the optical filter center optical filter of 100 * 100mm is 920nm, size is the square of 50 * 50mm, and the centre wavelength of peripheral optical filter is 950nm.
Test process is as follows:
When the device light source that adopts high-power circular arc pulse xenon lamp as the photovoltaic cell component solar simulation, and be square 50 * 50mm in the middle of adopting, after centre wavelength is the optical filter of 920nm and the combination of optical filter that peripheral centre wavelength is 950nm, and after replacing above-mentioned centre wavelength only to be the optical filter of 920nm with 6 tablet filters after the combination, distribution of the spectral irradiance of difference and Spectral matching degree are as shown in table 4 on the test surfaces, data from table 4 can be seen, after adopting the optical filter of the present invention's design, can make test surfaces is the requirement that the irradiance distribution of each point all reaches even be better than A level simulator in the GB on the large tracts of land simulator test surfaces of 1200 * 2000mm.
Figure 78427DEST_PATH_IMAGE004
Embodiment 4:
Material comprises:
The band resistance optical filter that centre wavelength is 930nm, this optical filter is about 15% in the transmissivity at 930nm place, and half width is 300nm, average transmittance Ta 〉=93% in 400~750nm wave band, average transmittance Ta in 1050~1200nm 〉=91%, its spectral transmission rate curve is referring to Fig. 3.
The band resistance optical filter that centre wavelength is 960nm, this optical filter is about 15% in the transmissivity at 960nm place, and half width is 300nm, average transmittance Ta 〉=93% in 400~780nm wave band, average transmittance Ta in 1080~1200nm 〉=91%, its spectral transmission rate curve is referring to Fig. 3.
Referring to Fig. 4-b, the periphery of the substrate of 100 * 100mm is blocked in the method elder generation of use mask, at the circular portion depocenter of diameter of phi=50mm wavelength is the band resistance optical filter of 930nm, and then will be deposit film partly blocked, again periphery not plated film part depocenter wavelength be the band resistance optical filter of 960nm.
Test process is as follows:
When the device light source that adopts high-power circular arc pulse xenon lamp as the photovoltaic cell component solar simulation, and be circular Φ=50mm in the middle of adopting, after centre wavelength is the optical filter of 930nm and the combination of optical filter that peripheral centre wavelength is 960nm, and after replacing above-mentioned centre wavelength only to be the optical filter of 930nm with 6 tablet filters after the combination, distribution of the spectral irradiance of difference and Spectral matching degree are as shown in table 5 on the test surfaces, data from table 5 can be seen, after adopting the optical filter of the present invention's design, can make test surfaces is the requirement that the irradiance distribution of each point all reaches even be better than A level simulator in the GB on the large tracts of land simulator test surfaces of 1200 * 2000mm.
Embodiment 5:
Material comprises:
The band resistance optical filter that centre wavelength is 930nm, this optical filter is about 15% in the transmissivity at 930nm place, and half width is 300nm, average transmittance Ta 〉=93% in 400~750nm wave band, average transmittance Ta in 1050~1200nm 〉=91%, its spectral transmission rate curve is referring to Fig. 3.
The band resistance optical filter that centre wavelength is 960nm, this optical filter is about 15% in the transmissivity at 960nm place, and half width is 300nm, average transmittance Ta 〉=93% in 400~780nm wave band, average transmittance Ta in 1080~1200nm 〉=91%, its spectral transmission rate curve is referring to Fig. 3.
Referring to Fig. 4-b, the periphery of the substrate of 100 * 100mm is blocked in the method elder generation of use mask, at the circular portion depocenter of diameter of phi=50mm wavelength is the band resistance optical filter of 930nm, and then will be deposit film partly blocked, again periphery not plated film part depocenter wavelength be the band resistance optical filter of 960nm.
Test process is as follows:
When the device light source that adopts high-power circular arc pulse xenon lamp as the photovoltaic cell component solar simulation, and be circular Φ=65mm in the middle of adopting, after centre wavelength is the optical filter of 930nm and the combination of optical filter that peripheral centre wavelength is 960nm, and after replacing above-mentioned centre wavelength only to be the optical filter of 930nm with 6 tablet filters after the combination, distribution of the spectral irradiance of difference and Spectral matching degree are as shown in table 6 on the test surfaces, data from table 6 can be seen, after adopting the optical filter of the present invention's design, can make test surfaces is the requirement that the irradiance distribution of each point all reaches even be better than A level simulator in the GB on the large tracts of land simulator test surfaces of 1200 * 2000mm.
Figure 715261DEST_PATH_IMAGE006
The optical filter that is adopted among the present invention, the selection of the centre wavelength of its core and the centre wavelength of peripheral part can be selected according to known method, and wherein: the centre wavelength of core is 920 ~ 930nm, and the centre wavelength of peripheral part is 950 ~ 960nm; Its core is 1/7 ~ 1/3 with the ratio of the area of peripheral part, and the side size range when promptly core is for square is 35 ~ 60mm, wherein, and length of side 50mm best results; Diameter when core is circular is 40 ~ 65mm, best results when wherein diameter is 50mm.
  

Claims (5)

1. photovoltaic cell component solar simulator optical filter, it is characterized in that: the centre wavelength of its core is less than the centre wavelength of peripheral part.
2. according to claims 1 described photovoltaic cell component solar simulator optical filter, it is characterized in that: described core is a square or circular.
3. as the manufacture method of claims 1 described photovoltaic cell component solar simulator optical filter, it is characterized in that: be that these two kinds of different optical filters of centre wavelength are spliced, during splicing, two kinds of not concentric wavelength filter are glued on the uncoated substrate of a slice, and the size of substrate is 100 * 100mm.
4. the manufacture method of photovoltaic cell component solar simulator optical filter as claimed in claim 1, it is characterized in that: be the long film of peripheral depocenter wavelength at the substrate of 100 * 100mm, and core deposit film not, and then the optical filter that centre wavelength is short is glued at the only core of the substrate of peripheral plated film.
5. the manufacture method of photovoltaic cell component solar simulator optical filter as claimed in claim 1, it is characterized in that: be that periphery with whole substrate blocks, carry out thin film deposition at core, and then will be deposit film partly blocked, at the periphery short film of plated film part depocenter wavelength not.
CN201110197269XA 2011-07-14 2011-07-14 Solar simulator optical filter of photovoltaic cell component and manufacturing method thereof Pending CN102243328A (en)

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CN111537231A (en) * 2019-12-31 2020-08-14 北京金风科创风电设备有限公司 Wind generating set's thermal radiation analogue means and have its system
CN113721311A (en) * 2021-08-17 2021-11-30 中国电子科技集团公司第十一研究所 Laser infrared composite attenuation sheet, preparation method thereof and optical axis adjusting device

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111537231A (en) * 2019-12-31 2020-08-14 北京金风科创风电设备有限公司 Wind generating set's thermal radiation analogue means and have its system
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CN113721311A (en) * 2021-08-17 2021-11-30 中国电子科技集团公司第十一研究所 Laser infrared composite attenuation sheet, preparation method thereof and optical axis adjusting device
CN113721311B (en) * 2021-08-17 2024-03-19 中国电子科技集团公司第十一研究所 Laser infrared composite attenuation sheet, preparation method thereof and optical axis adjusting device

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Application publication date: 20111116