CN102231355B - Isolation device for observation room of electron microscope - Google Patents
Isolation device for observation room of electron microscope Download PDFInfo
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- CN102231355B CN102231355B CN 201110134583 CN201110134583A CN102231355B CN 102231355 B CN102231355 B CN 102231355B CN 201110134583 CN201110134583 CN 201110134583 CN 201110134583 A CN201110134583 A CN 201110134583A CN 102231355 B CN102231355 B CN 102231355B
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- 238000002955 isolation Methods 0.000 title claims abstract description 48
- 238000007789 sealing Methods 0.000 claims description 22
- 230000000149 penetrating effect Effects 0.000 claims description 3
- 238000009434 installation Methods 0.000 abstract description 3
- 238000012423 maintenance Methods 0.000 abstract description 3
- 238000010586 diagram Methods 0.000 description 3
- 230000003139 buffering effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005086 pumping Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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Abstract
The invention discloses an isolation device for an observation room of an electron microscope, belonging to the field of electron microscopes. The isolation device is formed by connecting an outer support shell, a chassis assembly, a sliding guide rail assembly, a valve assembly and a driving cylinder. The driving cylinder drives the valve assembly to isolate or communicate a through hole of the chassis assembly arranged in an annular groove of the outer support shell, thus the purposes of opening and closing the isolation device are achieved. The isolation device has the advantages of simple structure and convenience for operation, installation and maintenance; and the driving cylinder is taken as a drive unit; and pneumatic drive has the advantages of small volume, large acting force, reliability in work, no pollution and the like. The motion of a valve body is matched with mechanical limit, and a sliding block is driven to move through a groove and a stage, contact surfaces of which are mutually matched, so that an isolating valve is opened or closed, and functions of the isolating valve are achieved under the condition of a limited occupied volume.
Description
Technical Field
The present invention relates to an isolation device for an observation chamber of an electron microscope, and more particularly, to an isolation device suitable for an observation chamber of an electron microscope.
Background
An electron microscope is an important instrument for observing fine substances, and people can observe substances with a wavelength of 0.25nm or less by using the electron microscope. The electron microscope uses an electron beam as an illumination light source and a magnetic lens or an electrostatic lens as a device for deflecting electrons, thereby realizing optical magnification. The electron microscope has very wide application prospect in the fields of physics, chemistry, materials, scientific research, life science, geology, prospecting, mechanical industry, electronic industry and the like.
The achievement of high vacuum state is the prerequisite for the operation of electron microscope, the tube of electron microscope must be vacuumed, besides the mechanical pump diffusion pump, the suction device must be connected with the tube by pipes, and a series of vacuum valves must be arranged at the connection. The observation chamber isolation valve is positioned below the projection lens and above the observation chamber, and is a vacuum valve which is used for independently forming an air pumping system with the observation chamber and the camera together with a pre-pumping valve and an air release valve, so that the instrument can be normally operated and used when the camera is used for replacing a negative film. In addition, when the lens barrel is vacuumized, the observation chamber isolation valve and the electron gun isolation valve are divided into three parts, so that the air extraction efficiency is greatly improved. In addition, when a fault occurs in the lens barrel, the isolation valve is closed, so that the part which is not subjected to the fault can be protected, and the fault can be conveniently eliminated and searched. However, the existing isolation valves of various observation rooms have the following defects: the mechanical structure design is more complex, more parts are used, and the volume is larger; and inconvenient assembly and maintenance.
Disclosure of Invention
The invention aims to provide an observation chamber isolation device of an electron microscope, which has the advantages of simple structure, small volume and convenience in assembly and maintenance.
The purpose of the invention is realized by the following technical scheme:
an embodiment of the present invention provides an observation chamber isolation device for an electron microscope, including:
the device comprises a supporting shell, a chassis assembly, a sliding guide rail assembly, a valve body assembly and a driving cylinder;
the middle part of the supporting shell is provided with an annular groove, the supporting shell at the bottom of the annular groove is provided with a through hole, and the through hole is communicated with the inside of the annular groove;
the chassis component is embedded in an annular groove in the middle of the supporting shell, a through hole is formed in the middle of the chassis component, a through groove for installing the valve body component is formed in the side wall of the chassis component, and the through groove is communicated with the through hole in the middle of the chassis component;
the sliding guide rail assembly is arranged in the through groove in the side wall of the chassis assembly, and the sliding guide rail assembly is provided with a valve body assembly which can slide along the sliding guide rail assembly and extend out of or retract into the through groove in the side wall of the chassis assembly so as to block or open the through hole of the chassis assembly;
and a cylinder mounting through hole is formed in the side wall of the supporting shell corresponding to the through groove in the side wall of the chassis assembly, a driving cylinder passes through the cylinder mounting through hole and is mounted on the side wall of the supporting shell, a piston rod at the front end of the driving cylinder is connected with the valve body assembly to drive the valve body assembly to extend out of or retract from the through groove in the middle of the chassis assembly from the through groove in the side wall of the chassis assembly.
In addition, the supporting shell is of a cylindrical structure, a plurality of annular concave platforms are arranged in the annular groove in the middle of the supporting shell, and the annular concave platforms form a stepped structure;
the cylinder mounting through hole arranged on the side wall of the supporting shell is a strip-shaped through hole with two arc-shaped sides, and the cylinder mounting through hole is communicated with the annular groove in the middle of the supporting shell.
3. The apparatus of claim 1, wherein the base plate assembly is a cylindrical structure, and an annular groove is formed at the periphery of the through hole at the middle part of the base plate assembly;
the through groove is arranged at the bottom of the chassis component, the middle part of the through groove is communicated with the through hole in the middle part of the chassis component, one side of the through groove penetrates through the side wall of the chassis component, and steps playing a role of a guide rail are arranged on two sides of the through groove.
Further, the sliding guide rail assembly includes:
a guide vane and a limiting component; wherein,
the guide vane is arranged at a through groove on one side of the chassis component penetrating through the side wall of the chassis component;
the limiting part is arranged in a through groove at the other side of the chassis assembly and is opposite to the guide sheet, the limiting part is composed of a pressing sheet and a roller, the pressing sheet is arranged in the through groove at the other side of the chassis assembly corresponding to the guide sheet, and the movable roller is arranged in the pressing sheet.
Further, the valve body assembly includes: the valve body, the sliding sheet, the bracket, the sliding shaft, the sliding block, the spring hook nail, the tension spring and the sealing ring; wherein,
the valve body is of a square structure, a protrusion is arranged on one side wall of the valve body, a connecting shaft connected with a piston rod of a driving cylinder is arranged on the protrusion, a rectangular through hole is formed in the middle of the valve body, a limiting groove is formed in each of the valve body on two sides of the rectangular through hole, and one side face of each limiting groove is in a slope shape;
one end of the sliding piece is arranged on the valve body, and the free end of the sliding piece is arranged in the rectangular through hole of the valve body;
the support is arranged in the rectangular through hole of the valve body, the bottom of the support is provided with a movable sliding shaft, the support and the sliding shaft are matched and penetrated on the free end of the sliding sheet in the rectangular through hole, and the support can slide along the sliding sheet relatively through the sliding shaft;
the sliding block is fixedly arranged on the bracket and covers the valve body, and the contact parts of the sliding block and the groove of the valve body are respectively provided with a positioning boss, and the shape of the positioning boss is matched with that of the limiting groove of the valve body; spring hook nails are respectively arranged on two sides of the sliding block and are connected with tension springs arranged on the valve body; a sealing ring groove is arranged on the sliding block, and a sealing ring is arranged in the sealing ring groove.
In addition, the extension spring that sets up on the valve body through the spring hook nail that the valve body both sides set up.
Further, the driving cylinder includes:
the cylinder comprises a cylinder body, a cylinder cover, a piston rod, a fixed seat and a fixed block; wherein,
one end of the cylinder body is provided with a cylinder cover, and the cylinder cover is provided with a first air inlet and outlet pipe communicated with the cylinder body;
the other end of the cylinder body is provided with a fixed seat, the fixed seat is provided with a second air inlet and outlet pipe communicated with the inside of the cylinder body, the front end of the fixed seat is provided with a fixed block, the piston is arranged in the cylinder body, the piston rod is connected to the piston, and the front end of the piston rod extends out of the fixed seat and the fixed block arranged at one end of the cylinder body.
According to the technical scheme provided by the embodiment of the invention, the observation chamber isolation device of the electron microscope drives the chassis assembly and the valve body assembly in the supporting shell through the driving cylinder, so that the movement of the valve body is matched with mechanical limit, the slide block is driven to move through the grooves and the steps matched with the contact surfaces, the through hole in the middle of the chassis assembly can be conveniently isolated and closed, and the isolation device can be opened or closed. The isolation device is simple in structure, and the isolation function is achieved under the condition that the occupied volume is limited.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings needed to be used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on the drawings without creative efforts.
Fig. 1 is a schematic perspective view of an observation chamber isolation device of an electron microscope according to an embodiment of the present invention;
FIG. 2 is a schematic front view of an isolation device for an observation chamber of an electron microscope according to an embodiment of the present invention;
FIG. 3 is a schematic cross-sectional view taken along line A-A of FIG. 2;
FIG. 4 is a schematic structural diagram of a support housing of an isolation device according to an embodiment of the present invention;
FIG. 5 is a schematic structural diagram of a chassis assembly of an isolation device provided in an embodiment of the present invention;
FIG. 6 is a schematic view of another angle structure of the chassis assembly of the isolation device according to the embodiment of the present invention;
FIG. 7 is a schematic view of a rail groove of a sliding rail assembly of an isolation device according to an embodiment of the present invention;
FIG. 8 is a schematic view of a sliding guide assembly mounted on a chassis assembly of an isolation device according to an embodiment of the present invention;
FIG. 9 is a schematic structural view of a valve body assembly of an isolation device provided in an embodiment of the invention;
FIG. 10 is a schematic view of a back side of a valve body assembly of an isolation device provided in accordance with an embodiment of the present invention;
FIG. 11 is a schematic structural view of a valve body and its upper components of a valve body assembly of an isolation device according to an embodiment of the present invention;
FIG. 12 is a schematic front view of a slider of a valve body assembly of an isolation device according to an embodiment of the present invention;
FIG. 13 is a schematic view of a back side of a slider of a valve body assembly of an isolation device according to an embodiment of the present invention;
fig. 14 is a schematic perspective view of a driving cylinder of the isolation device according to the embodiment of the invention;
FIG. 15 is a schematic diagram of a forward structure of a driving cylinder of the isolation device according to the embodiment of the invention;
FIG. 16 is a schematic view of the cross-sectional structure along the line B-B in FIG. 15;
the parts in the figure are: 1-supporting a housing; 11-an annular groove; 12-an annular recessed land; 13-a through hole supporting the housing; 14-cylinder mounting through holes;
2-a chassis assembly; 21-a through hole of the chassis assembly; 22-an annular groove; 23-a through groove; 24-steps;
3-a valve body assembly; 31-a slide block; 3101-a seal ring groove of the slider; 3102-the pan head screw slot of the slider; 3103-positioning bosses of the slider; 32-a valve body; 33-a protrusion; 34-a connecting shaft; 35-a sealing ring; 36-spring hook nail; 37-a tension spring; 38-a scaffold; 39-a slide shaft; 310-a slide sheet; 311-pan head screw; 312-a rectangular via; 313-a limit groove; 314-spring hook pin of valve body;
4-driving the cylinder; 41-cylinder body; 42-cylinder cover; 43-a fixed seat; 44-fixing the block; 45-a piston rod; 46-a first air inlet and outlet pipe; 47-inlet and exhaust pipe II; 48-a piston;
5-a sliding guide rail assembly; 51-a guide vane; 511-projections on both sides of the guide rail groove; 52-briquetting; 53-roller.
Detailed Description
The technical solutions in the embodiments of the present invention are clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments of the present invention without making any creative effort, shall fall within the protection scope of the present invention.
Embodiments of the present invention will be described in further detail below with reference to the accompanying drawings.
An embodiment of the present invention provides an isolation device for an observation chamber of an electron microscope, which can be used as an isolation valve in the observation chamber of the electron microscope, as shown in fig. 1 to 3, the isolation device includes: the device comprises a supporting shell 1, a chassis assembly 2, a sliding guide rail assembly 5, a valve body assembly 3 and a driving cylinder 4;
wherein, the middle part of the supporting shell 1 is provided with an annular groove 11, the supporting shell at the bottom of the annular groove 11 is provided with a through hole 12, and the through hole 12 is communicated with the inside of the annular groove 11; in practice, the through hole at the bottom of the support shell is usually sealed by a sealing cover and can be opened during installation or disassembly, so that a hand can extend from the lower part to assist in installation or disassembly.
The chassis component 2 is embedded in the annular groove 11 in the middle of the supporting shell 1, a through hole 21 is formed in the middle of the chassis component, a through groove 23 for installing a valve body component is formed in the side wall of the chassis component, and the through groove 23 is communicated with the through hole 21 in the middle of the chassis component;
the sliding guide rail assembly 5 is arranged at a through groove 23 on the side wall of the chassis assembly 2, the valve body assembly 3 is arranged on the sliding guide rail assembly 5, and the valve body assembly 3 can slide along the sliding guide rail assembly 5, extend out of the through hole 21 for blocking the chassis assembly from the through groove 23 on the side wall of the chassis assembly 2 and slide along the sliding guide rail assembly 5 and retract into the through groove 23 on the side wall of the chassis assembly 2;
the side wall of the supporting shell 1 corresponding to the through groove 23 in the side wall of the chassis component 2 is provided with a cylinder mounting through hole 14, the driving cylinder 4 is mounted in the cylinder mounting through hole 14 in the side wall of the supporting shell, a piston rod 45 at the front end of the driving cylinder 4 is connected with the valve body component 3, and the driving cylinder 4 can drive the valve body component 3 to extend out of or retract from the through hole 21 from the side wall of the chassis component to the through hole 21 in the middle of the chassis component along the sliding guide rail component 5.
As shown in fig. 4, the supporting housing 1 in the above-mentioned isolating device is a cylindrical structure, a plurality of annular concave stages 12 are arranged in the annular groove 11 at the middle part thereof, the plurality of annular concave stages 12 form a stepped structure, the supporting housing at the bottom of the annular groove 11 is provided with through holes 12, that is, two through holes are respectively arranged on the side wall below the annular concave stage at the bottom, and the two through holes are communicated with the inside of the annular groove 11;
the cylinder mounting through hole 14 arranged on the side wall of the support shell 1 is an arc-shaped strip-shaped through hole on two sides, and the cylinder mounting through hole 14 is communicated with the annular groove 11 in the middle of the support shell 1. While the supporting shell 1 supports the driving cylinder 4 and the sliding guide rail assembly 5, the upper end of the supporting shell 1 can be hermetically connected with a middle lens of an electron microscope and the lower end can be hermetically connected with an observation chamber of the electron microscope. In practice, the support housing may also serve as a second sample chamber housing for the electron microscope.
As shown in fig. 5 to 6, the chassis assembly 2 in the above-mentioned isolation device is a cylindrical structure, and an annular groove 22 is arranged on the periphery of the through hole 21 at the middle part thereof for arranging a sealing ring;
the through groove on the side wall of the chassis component 2 is arranged at the bottom of the chassis component, the middle part of the through groove is communicated with the through hole in the middle part of the chassis component, one side of the through groove penetrates through the side wall of the chassis component, and steps 24 playing a role of a guide rail are arranged on two sides of the through groove.
The sliding guide assembly 5 in the above-described spacer device includes: a guide piece 51 and a limit member; the structure of the guide sheet 51 is as shown in fig. 7, and is specifically formed by arranging protrusions 511 on two sides of a sheet-shaped body, wherein a groove-shaped structure is formed in the middle of the sheet-shaped body, a fixing bolt hole is formed in one end of the guide sheet 51, the guide sheet is arranged at an opening of a through groove 23 on one side wall of the chassis assembly 2 through the bolt hole, the guide sheet 51 is closely connected with a guide rail formed by a through groove step on the bottom of the chassis and used as an extension of the guide rail of the through groove on the bottom of the chassis, the through groove is matched to form a structural space for the valve body assembly 2 to pass through, and.
The limiting component is arranged at the opening of the through groove 23 at the other side wall of the chassis assembly 6 and is opposite to the through groove at one side of the guide vane 51, the limiting component is composed of a pressing block 52 and a roller 53 (see figure 8), the pressing block 52 is of a square structure, and the roller 53 is movably arranged at one end of the pressing block 52 and can roll on the pressing block 52. The sliding guide rail assembly 6 is mounted at the bottom of the base plate assembly 2 as shown in fig. 8, and a platform for bearing the movement of the valve body assembly 2 is formed after mounting, so that the valve body assembly 2 can move more stably under the driving of the driving cylinder 4 while the valve body assembly 2 is supported. And the limiting component can limit the sliding block 31 of the valve body assembly 2 through the roller 53 when the valve body assembly 2 moves inwards to be contacted with the driving cylinder 4.
As shown in fig. 9 to 13, the valve body assembly 2 of the isolation device includes: the sliding block 31, the valve body 32, the bracket 38, the sliding shaft 39, the sliding sheet 310, the sealing ring 35, the spring hook nail 36 and the tension spring 37;
the valve body 32 is of a square structure, a protrusion 33 is arranged on one side wall of the valve body 32, a connecting shaft 34 connected with a piston rod 45 of the driving cylinder 4 is arranged on the protrusion 33, a hole is formed at the tail end of the piston rod 45 of the driving cylinder 4 and can be sleeved on the connecting shaft 34, so that the driving cylinder 4 is connected with the valve body assembly 3, a rectangular through hole 312 is formed in the middle of the valve body 32, a limiting groove 313 is respectively arranged on the valve body on each of two sides of the rectangular through hole 312, and one side surface of each limiting groove 313 is in a slope shape 3131;
one end of the sliding sheet 310 is arranged on the valve body 32, and the free end of the sliding sheet 310 is arranged in the rectangular through hole 312 of the valve body 32;
the support 38 is arranged in the rectangular through hole 312 of the valve body 32, the movable sliding shaft 39 is arranged at the bottom of the support 38, a certain gap is formed between the support 38 and the sliding shaft 39, the support 38 and the sliding shaft 39 are matched and arranged on the free end of the sliding sheet 310 in the rectangular through hole 312 in a penetrating manner, and the support 38 can slide along the sliding sheet 310 relatively through the sliding shaft 39;
the slide block 31 is fixedly arranged on the bracket 38 and covers the valve body 32, the slide block 31 can relatively slide along the slide sheet 310 along the bracket 38 through the slide shaft 39, the contact parts of the slide block 31 and the groove of the valve body 32 are respectively provided with a positioning boss 3103, the shape of the positioning boss 3103 is matched with that of the limiting groove of the valve body, and one side wall of the positioning boss is also in a slope shape; spring hook nails 36 are respectively arranged on two sides of the sliding block 31, and spring hook nails 314 are also arranged on the valve body 32, so that two ends of the tension spring 37 are respectively connected with the spring hook nails 36 on the sliding block 31 and the spring hook nails 314 on the valve body 32, namely two ends of the tension spring 37 are respectively hooked on the spring hook nails of the valve body and the sliding block; the spring hook nails arranged on the valve body can be perpendicular to the spring hook nails 36 arranged on two sides of the sliding block 31, the sliding block 31 is provided with a sealing ring groove 3101, and a sealing ring 35 is arranged in the sealing ring groove 3101.
In the structure of the valve body assembly 2, the sliding sheet is fixed on the valve body, the sliding block is fixed on the bracket through the pan head screw 311, the bracket is provided with the sliding shaft, when the sliding block and the valve body move relatively, the sliding sheet and the sliding shaft also move relatively, and the sliding sheet is clamped between the bracket and the sliding shaft, so that the sliding block and the valve body are not separated from each other in the vertical direction.
The slider is located the valve body, and one side of the spacing recess that the valve body set up on the contact surface with the slider is vertical step, and the opposite side is the slope, and the shape of the location boss that sets up on the slider is the same with spacing recess, and the step height of spacing recess and location boss is the same, and the slope also can coincide completely, and when slider and valve body produced relative motion like this, the relative motion between slider and the valve body can be restricted to the step of spacing recess and location boss.
Because the two ends of the tension springs are respectively hooked on the valve body and the spring hook nails of the sliding block, when the sliding block and the valve body generate relative motion, the two tension springs are stretched or compressed. The extension spring can play buffering and the effect that resets, also can make slider and valve body fix a position in the direction of perpendicular to drawing.
The valve body assembly 3 is a main isolation component of the observation chamber isolation device, and the opening and closing of the isolation device are realized through the movement of the valve body assembly.
The valve body assembly 3 is driven by the driving cylinder 4, and the movement process is as follows: when the piston rod 45 of the driving cylinder 4 drives the valve body assembly 3 to move inwards, when the sliding block 31 touches the roller 53 (the roller of the limiting component), the valve body stops, the valve body continues to move forwards under the pushing of the piston rod 45, at the moment, because the sliding block 31 does not move, the sliding block 31 and the valve body 32 move relatively, the sliding block 31 slides upwards relative to the valve body along the slope of the limiting groove at the contact position between the sliding block 31 and the valve body 32, so that the contact surface between the sliding block 31 and the chassis assembly at the upper end is sealed through the sealing ring, and the valve body 32 also stops moving when the step at one side of the valve;
when the piston rod 45 of the driving cylinder 4 drives the valve body assembly 3 to move outwards, the valve body 32 moves outwards under the driving of the piston rod 45, the sliding block 31 is firstly fixed, the sliding block 31 slides downwards relative to the valve body 32 along the slope of the limiting groove of the contact surface until the step on the other side of the contact surface is touched, the valve body 32 drives the sliding block 31 to move along with the sliding block through the step, the isolating device is opened (namely, the through hole in the middle of the chassis assembly is opened), and the valve body 32 stops moving when one side of the valve body 32 touches the fixed block 44 of the driving cylinder 4.
As shown in fig. 14 to 16, the driving cylinder 4 of the isolation device includes: the cylinder body 41, the cylinder cover 42, the piston 48, the piston rod 45, the fixed seat 43 and the fixed block 44;
one end of the cylinder body 41 is provided with a cylinder cover 42, and the cylinder cover is provided with a second air inlet and outlet pipe 47 communicated with the cylinder body;
the other end of cylinder body 41 sets up fixing base 43, fixing base 43 plays the effect of the cylinder cap of cylinder body 41, be equipped with on the fixing base 43 with cylinder body 41 in the intercommunication advance exhaust pipe 46, fixing base 43 front end sets up fixed block 44, the shape of locating piece 44 and the shape phase-match of the cylinder mounting hole 14 on the support housing 1, thereby can be convenient with cylinder assembly location install support housing 1 on, piston 48 sets up in cylinder body 41, connect piston rod 45 on the piston 41, stretch out in fixing base 43 and the fixed block 44 that connecting axle 45 front end set up from cylinder body 41 one end. The driving cylinder 4 is a driving device for moving the valve body assembly 3, and can conveniently control the valve body assembly 3 to move, thereby controlling the opening and closing of the isolating device.
In the isolating device, in order to realize better sealing, a sealing ring can be arranged between two parts needing sealing, and end face sealing and radial sealing are realized through the arranged sealing ring.
When the isolating device works, the piston in the driving cylinder is controlled to drive the piston rod connected with the piston to move by passing gas into the driving cylinder, so that the valve body component at the front end of the piston rod is driven to move on the sliding guide rail component and extend out of or retract from the through hole in the middle of the chassis component,
when the valve body assembly extends out, the through hole in the middle of the chassis assembly is isolated and sealed, and when the valve body assembly retracts, the through hole in the middle of the chassis assembly is opened.
In summary, the isolation device provided by the embodiment of the invention has the advantages that: (1) the driving cylinder is adopted as a driving device, and the pneumatic driving has the advantages of small volume, large acting force, reliable work, no pollution and the like; (2) the motion limit of the piston of the air cylinder is mechanical limit, when the motion of the piston is subjected to resistance, the pressure difference between two cavities of the air cylinder changes, when the piston stops moving after changing to a certain value, and at the moment, the isolating device is opened or closed; the mechanical limit is safe and reliable and is easy to realize; (3) the valve body assembly slides on the guide sheet of the sliding guide rail assembly, so that the valve body assembly moves stably without being firmly clamped; (4) the sliding block of the valve body assembly is provided with the spring, and the spring plays a role in buffering when the valve body assembly touches the mechanical limiting device, so that the valve body assembly moves more stably and reliably. (5) The motion of the valve body assembly of the isolating device is matched with mechanical limit, and the sliding block is driven to move through the mutually matched groove and step of the contact surface, so that the isolating valve is opened or closed. The structure mode is simple and ingenious, and the function of the isolation valve is well realized under the condition of limited occupied volume.
The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope of the present invention are included in the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.
Claims (7)
1. An observation chamber isolation apparatus for an electron microscope, comprising:
the device comprises a supporting shell, a chassis assembly, a sliding guide rail assembly, a valve body assembly and a driving cylinder;
the middle part of the supporting shell is provided with an annular groove, the supporting shell at the bottom of the annular groove is provided with a through hole, and the through hole is communicated with the inside of the annular groove;
the chassis component is embedded in an annular groove in the middle of the supporting shell, a through hole is formed in the middle of the chassis component, a through groove for installing the valve body component is formed in the side wall of the chassis component, and the through groove is communicated with the through hole in the middle of the chassis component;
the sliding guide rail assembly is arranged in the through groove in the side wall of the chassis assembly, and the sliding guide rail assembly is provided with a valve body assembly which can slide along the sliding guide rail assembly and extend out of or retract into the through groove in the side wall of the chassis assembly so as to block or open the through hole of the chassis assembly;
and a cylinder mounting through hole is formed in the side wall of the supporting shell corresponding to the through groove in the side wall of the chassis assembly, a driving cylinder passes through the cylinder mounting through hole and is mounted on the side wall of the supporting shell, a piston rod at the front end of the driving cylinder is connected with the valve body assembly to drive the valve body assembly to extend out of or retract from the through groove in the middle of the chassis assembly from the through groove in the side wall of the chassis assembly.
2. The apparatus of claim 1, wherein the support housing is a cylindrical structure, and a plurality of annular recessed platforms are disposed in the annular groove at the middle part of the support housing, and the plurality of annular recessed platforms form a stepped structure;
the cylinder mounting through hole arranged on the side wall of the supporting shell is a strip-shaped through hole with two arc-shaped sides, and the cylinder mounting through hole is communicated with the annular groove in the middle of the supporting shell.
3. The apparatus of claim 1, wherein the base plate assembly is a cylindrical structure, and an annular groove is formed at the periphery of the through hole at the middle part of the base plate assembly;
the through groove is arranged at the bottom of the chassis component, the middle part of the through groove is communicated with the through hole in the middle part of the chassis component, one side of the through groove penetrates through the side wall of the chassis component, and steps playing a role of a guide rail are arranged on two sides of the through groove.
4. The observation room isolation apparatus of an electron microscope according to claim 1, wherein the slide rail assembly comprises:
a guide vane and a limiting component; wherein,
the guide vane is arranged at a through groove on one side of the chassis component penetrating through the side wall of the chassis component;
the limiting part is arranged in a through groove at the other side of the chassis assembly and is opposite to the guide sheet, the limiting part is composed of a pressing sheet and a roller, the pressing sheet is arranged in the through groove at the other side of the chassis assembly corresponding to the guide sheet, and the movable roller is arranged in the pressing sheet.
5. The electron microscope observation chamber isolation apparatus of claim 1, wherein the valve body assembly comprises: the valve body, the sliding sheet, the bracket, the sliding shaft, the sliding block, the spring hook nail, the tension spring and the sealing ring; wherein,
the valve body is of a square structure, a protrusion is arranged on one side wall of the valve body, a connecting shaft connected with a piston rod of a driving cylinder is arranged on the protrusion, a rectangular through hole is formed in the middle of the valve body, a limiting groove is formed in each of the valve body on two sides of the rectangular through hole, and one side face of each limiting groove is in a slope shape;
one end of the sliding piece is arranged on the valve body, and the free end of the sliding piece is arranged in the rectangular through hole of the valve body;
the support is arranged in the rectangular through hole of the valve body, the bottom of the support is provided with a movable sliding shaft, the support and the sliding shaft are matched and penetrated on the free end of the sliding sheet in the rectangular through hole, and the support can slide along the sliding sheet relatively through the sliding shaft;
the sliding block is fixedly arranged on the bracket and covers the valve body, and the contact parts of the sliding block and the groove of the valve body are respectively provided with a positioning boss, and the shape of the positioning boss is matched with that of the limiting groove of the valve body; spring hook nails are respectively arranged on two sides of the sliding block and are connected with tension springs arranged on the valve body; a sealing ring groove is arranged on the sliding block, and a sealing ring is arranged in the sealing ring groove.
6. The device for isolating the observation chamber of an electron microscope according to claim 5, wherein the tension spring provided on the valve body is provided on the valve body by spring hooks provided on both sides of the valve body.
7. The observation room isolation apparatus of an electron microscope according to claim 1, wherein the driving cylinder comprises:
the cylinder comprises a cylinder body, a cylinder cover, a piston rod, a fixed seat and a fixed block; wherein,
one end of the cylinder body is provided with a cylinder cover, and the cylinder cover is provided with a first air inlet and outlet pipe communicated with the cylinder body;
the other end of the cylinder body is provided with a fixing seat, a second air inlet and outlet pipe communicated with the inside of the cylinder body is arranged on the fixing seat, the front end of the fixing seat is provided with a fixing block, the piston is arranged in the cylinder body, the piston rod is connected to the piston, and the front end of the piston rod extends out of the fixing seat and the fixing block arranged at one end of the cylinder body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201110134583 CN102231355B (en) | 2011-05-23 | 2011-05-23 | Isolation device for observation room of electron microscope |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201110134583 CN102231355B (en) | 2011-05-23 | 2011-05-23 | Isolation device for observation room of electron microscope |
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| Publication Number | Publication Date |
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| CN102231355A CN102231355A (en) | 2011-11-02 |
| CN102231355B true CN102231355B (en) | 2012-12-12 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN 201110134583 Expired - Fee Related CN102231355B (en) | 2011-05-23 | 2011-05-23 | Isolation device for observation room of electron microscope |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110886900B (en) * | 2019-11-29 | 2021-01-15 | 中国科学院化学研究所 | Miniature gate valve device for high vacuum |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4950901A (en) * | 1989-11-06 | 1990-08-21 | Gatan, Incorporated | Specimen cooling holder for side entry transmission electron microscopes |
| JP3020944B2 (en) * | 1999-02-22 | 2000-03-15 | 株式会社日立製作所 | Semiconductor integrated circuit |
| JP2002221472A (en) * | 2001-01-25 | 2002-08-09 | Jeol Ltd | Sample preparing device |
| CN1510318A (en) * | 2002-11-28 | 2004-07-07 | �ٲ�� �ҵ��ʽ���� | Vibrating separating tables |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0320944A (en) * | 1989-06-16 | 1991-01-29 | Matsushita Electric Ind Co Ltd | Sample bed for electron scanning microscope |
-
2011
- 2011-05-23 CN CN 201110134583 patent/CN102231355B/en not_active Expired - Fee Related
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4950901A (en) * | 1989-11-06 | 1990-08-21 | Gatan, Incorporated | Specimen cooling holder for side entry transmission electron microscopes |
| JP3020944B2 (en) * | 1999-02-22 | 2000-03-15 | 株式会社日立製作所 | Semiconductor integrated circuit |
| JP2002221472A (en) * | 2001-01-25 | 2002-08-09 | Jeol Ltd | Sample preparing device |
| CN1510318A (en) * | 2002-11-28 | 2004-07-07 | �ٲ�� �ҵ��ʽ���� | Vibrating separating tables |
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| CN102231355A (en) | 2011-11-02 |
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