CN102230161A - Hydroelectric end connecting device for rotating target - Google Patents
Hydroelectric end connecting device for rotating target Download PDFInfo
- Publication number
- CN102230161A CN102230161A CN 201110177155 CN201110177155A CN102230161A CN 102230161 A CN102230161 A CN 102230161A CN 201110177155 CN201110177155 CN 201110177155 CN 201110177155 A CN201110177155 A CN 201110177155A CN 102230161 A CN102230161 A CN 102230161A
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- China
- Prior art keywords
- coupling device
- water power
- conducting rod
- power termination
- rotary target
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Abstract
The invention relates to a hydroelectric end connecting device for a rotating target; and the hydroelectric end connecting device for the rotating target comprises a seat core and is characterized in that a water pipe and an electric-conductive rod are respectively mounted on the seat core and the seat core is connected with a shell module. Moreover, a shaft retainer ring is arranged at one end of the shell module; and a sealing cover is arranged at the other end of the shell module. A framework type oil seal module is arranged at the tail end of the shaft retainer ring. Meanwhile, an electric-conductive rod head is sleeved on the periphery of the framework type oil seal module. Therefore, while a target material is replaced, the assembling and disassembling steps can be effectively reduced. More importantly, the shaft retainer ring is mutually matched with a base closing piece so that the rotation force of the driving can be effectively transmitted to facilitate the smooth working of the target material.
Description
Technical field
The present invention relates to a kind of termination coupling device, relate in particular to a kind of water power termination coupling device that is used for rotary target.
Background technology
Adopt plane sputter cathode target mostly in the equipment of production coated glass at present, its principle of work is: it is indoor to need the glass of plated film to send into vacuum plating, a certain amount of high-purity process gas of the indoor feeding of vacuum plating is just like oxygen, nitrogen or argon gas, process gas forms the plasma body of positively charged under the effect of electromagnetic field and free electron, plasma body is under the attraction of the negative electrode that is loaded with high negative voltage, under the control in magnetic field, bombard the plated film material that is fixedly mounted on the indoor planar cathode target of vacuum plating according to certain track and dynamics, Coating Materials is come out by gas molecule collision, is deposited on the certain thickness rete of formation on glass according to certain orientation.
But existing water power end structure complexity can't adapt to different targets and replace needs, can not effectively rotate adjustment.Like this, in case occur easily being connected unstable after replacing target, influence the maintenance in later stage and the coating quality of product.
Summary of the invention
The objective of the invention is to overcome the above problem that prior art exists, a kind of water power termination coupling device that is used for rotary target is provided.
For realizing that purpose of the present invention is used for the water power termination coupling device of rotary target, include a core, wherein: be separately installed with water pipe and conducting rod on the described seat core; Described seat core is connected with housing unit; Described housing unit one end is provided with shaft block ring, and the described housing unit the other end is provided with capping; Described shaft block ring tail end is provided with skeleton Oil sealing assembly; Described skeleton Oil sealing assembly outer race is provided with the conducting rod head.
Further, the above-mentioned water power termination coupling device that is used for rotary target, wherein, described seat core outer periphery is equipped with the pedestal component.
Further, the above-mentioned water power termination coupling device that is used for rotary target, wherein, described conducting rod top is provided with ply-yarn drill.
Further, the above-mentioned water power termination coupling device that is used for rotary target, wherein, described conducting rod periphery is distributed with sleeve pipe, is provided with the elastic buffer assembly between described conducting rod and the sleeve pipe.
Further, the above-mentioned water power termination coupling device that is used for rotary target, wherein, described elastic buffer assembly is a spring.
Again further, the above-mentioned water power termination coupling device that is used for rotary target, wherein, described shaft block ring outer periphery is equipped with bearing.
Adopt technical solution of the present invention, when target is replaced, can effectively reduce the dismounting step.What is more important by cooperatively interacting of shaft block ring and pedestal component, can effectively be transmitted the revolving force of driving, helps the smooth work of target.
Purpose of the present invention, advantage and characteristics will illustrate by the non-limitative illustration of following preferential embodiment and explain that these embodiment only provide as an example with reference to accompanying drawing.
Description of drawings
Fig. 1 is the organigram that is used for the water power termination coupling device of rotary target.
Embodiment
The water power termination coupling device that is used for rotary target as shown in Figure 1 includes a core 1, its unusual part: be separately installed with water pipe 2 and conducting rod 3 on the seat core 1 of the present invention.Simultaneously, present core 1 is connected with housing unit 4, and these housing unit 4 one ends are provided with shaft block ring 5, and housing unit 4 the other ends are provided with capping 6.And, being provided with skeleton Oil sealing assembly 7 at shaft block ring 5 tail ends, skeleton Oil sealing assembly 7 outer race are provided with conducting rod head 8.
In conjunction with the present invention's one preferred implementation, in order to promote whole firm degree, present core 1 outer periphery is equipped with pedestal component 9.And, for the ease of effective combing, be convenient to the normal operation of conducting rod 3 to the electric wire wire harness, be provided with ply-yarn drill 10 on conducting rod 3 tops.
Further, consider the bulk strength that can strengthen conducting rod 3, adapt to the running and the replacement of follow-up target, the present invention is distributed with sleeve pipe 11 in conducting rod 3 peripheries.Simultaneously, between conducting rod 3 and sleeve pipe 11, be provided with the elastic buffer assembly.Certainly, convenient for processing and manufacturing, the elastic buffer assembly is a spring 12.Like this, can effectively promote the work-ing life of conducting rod 3.
Moreover, cooperate the installation of target need carry out suitable unique adjustment for the ease of water power termination coupling device, be equipped with bearing 13 in shaft block ring 5 outer periphery.
By above-mentioned character express also in conjunction with the accompanying drawings as can be seen, behind employing the present invention, when target is replaced, can effectively reduce the dismounting step.What is more important by cooperatively interacting of shaft block ring and pedestal component, can effectively be transmitted the revolving force of driving, helps the smooth work of target.
Certainly, more than only be concrete exemplary applications of the present invention, protection scope of the present invention is not constituted any limitation.In addition to the implementation, the present invention can also have other embodiment.All employings are equal to the technical scheme of replacement or equivalent transformation formation, all drop within the present invention's scope required for protection.
Claims (6)
1. be used for the water power termination coupling device of rotary target, include a core, it is characterized in that: be separately installed with water pipe and conducting rod on the described seat core; Described seat core is connected with housing unit; Described housing unit one end is provided with shaft block ring, and the described housing unit the other end is provided with capping; Described shaft block ring tail end is provided with skeleton Oil sealing assembly; Described skeleton Oil sealing assembly outer race is provided with the conducting rod head.
2. the water power termination coupling device that is used for rotary target according to claim 1 is characterized in that: described seat core outer periphery is equipped with the pedestal component.
3. the water power termination coupling device that is used for rotary target according to claim 1, it is characterized in that: described conducting rod top is provided with ply-yarn drill.
4. the water power termination coupling device that is used for rotary target according to claim 1, it is characterized in that: described conducting rod periphery is distributed with sleeve pipe, is provided with the elastic buffer assembly between described conducting rod and the sleeve pipe.
5. the water power termination coupling device that is used for rotary target according to claim 1, it is characterized in that: described elastic buffer assembly is a spring.
6. the water power termination coupling device that is used for rotary target according to claim 1, it is characterized in that: described shaft block ring outer periphery is equipped with bearing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201110177155 CN102230161B (en) | 2011-06-28 | 2011-06-28 | Hydroelectric end connecting device for rotating target |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201110177155 CN102230161B (en) | 2011-06-28 | 2011-06-28 | Hydroelectric end connecting device for rotating target |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102230161A true CN102230161A (en) | 2011-11-02 |
| CN102230161B CN102230161B (en) | 2012-12-19 |
Family
ID=44842762
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201110177155 Expired - Fee Related CN102230161B (en) | 2011-06-28 | 2011-06-28 | Hydroelectric end connecting device for rotating target |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102230161B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104357802B (en) * | 2014-11-06 | 2017-03-15 | 深圳市纳为金属技术有限公司 | A kind of ultra-thin rotating cathode termination of fluoride axle envelope |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1182805A (en) * | 1997-04-30 | 1998-05-27 | 浙江大学 | Rotary target column type magnetic controlled sputtering device |
| US20060096855A1 (en) * | 2004-11-05 | 2006-05-11 | Richard Newcomb | Cathode arrangement for atomizing a rotatable target pipe |
| CN101956169A (en) * | 2009-07-20 | 2011-01-26 | 北儒精密股份有限公司 | Rotating target for vacuum sputtering equipment |
-
2011
- 2011-06-28 CN CN 201110177155 patent/CN102230161B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1182805A (en) * | 1997-04-30 | 1998-05-27 | 浙江大学 | Rotary target column type magnetic controlled sputtering device |
| US20060096855A1 (en) * | 2004-11-05 | 2006-05-11 | Richard Newcomb | Cathode arrangement for atomizing a rotatable target pipe |
| CN101956169A (en) * | 2009-07-20 | 2011-01-26 | 北儒精密股份有限公司 | Rotating target for vacuum sputtering equipment |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102230161B (en) | 2012-12-19 |
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Granted publication date: 20121219 Termination date: 20140628 |
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| EXPY | Termination of patent right or utility model |