CN102221430A - Method for bonding foil gauge with micro melting - Google Patents
Method for bonding foil gauge with micro melting Download PDFInfo
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- CN102221430A CN102221430A CN2010101507674A CN201010150767A CN102221430A CN 102221430 A CN102221430 A CN 102221430A CN 2010101507674 A CN2010101507674 A CN 2010101507674A CN 201010150767 A CN201010150767 A CN 201010150767A CN 102221430 A CN102221430 A CN 102221430A
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Abstract
The invention provides a method for bonding a foil gauge with micro melting which comprises the following steps: (1) putting a sensor structure bearing part in a heating furnace for heating, wherein the sensor structure bearing part is provided with a pressure film, the pressure film is coated with fixing glue, and the fixing glue is pasted with a foil gauge; (2) heating melting the fixing glue on the sensor structure bearing part, wherein the foil gauge on the fixing glue sinks into the fixing glue to a required depth; (3) stopping heating, cooling the fixing glue, thus the foil gauge is fixed on the sensor structure bearing part permanently with micro melting. By employing the above technical scheme, the foil gauge is firmly pasted on the fixing glue. Compared with the prior art that a worker pastes a foil gauge to a pressure film with epoxy resin manually, the foil gauge pressure sensor produced in the invention has the characteristics of high precision, good performance, good consistency and high reliability. And the foil gauge pressure sensor has high yield, which is in favor of mass industrial production of it.
Description
Technical field
The invention belongs to the semiconductor silicon strain-ga(u)ge transducer and make the field, relate in particular to a kind of method of little molten bonding foil gauge.
Background technology
The principle of work of foil gauge is when factor affecting foil gauges such as external environment condition is strong, light, temperature, humidity, can cause the variation of the resistance, inductance, electric capacity etc. of foil gauge, produce corresponding electricity output, thereby the variation of external environment condition is measured accurately.
In reality, using more widely, foil gauge mainly is to be made by pressure resistance type strain sensing material, be called as strain gauge pressure sensor, its groundwork principle is: be pressed onto on diaphragm, elastic beam or the strain tube that is pasted with pressure resistance type strain sensing material by measuring pressure and make it to produce and be out of shape, the electric bridge of being made up of pressure resistance type strain sensing material has unbalance voltage output, this voltage with act on sensor on be directly proportional by measuring pressure, therefore, can reach by the variation of measuring output voltage by the accurate measurement of measuring pressure.In addition, in the time of advantages such as strain gauge pressure sensor has the precision height, volume is little, in light weight, measurement range is wide, natural frequency is high, dynamic response is fast, also have vibration resistance, the good characteristics of shock resistance, be applicable to and measure hyperpressure, change or pressure, the acceleration of huge pulsation fast, be widely used in fields such as pressure-measuring instrument, automotive electronics, aeronautical product.
Current, the manufacture method of strain gauge pressure sensor generally is to cut out foil gauge with mechanical means from stamper earlier, and the back pastes foil gauge on the pressure film with epoxy resin by the workman is manual.Because foil gauge is less and as thin as a wafer, relies on the workman to operate by rule of thumb fully and is difficult to utilize mechanical means exactly foil gauge to be cut out from stamper, be difficult to foil gauge is pasted assigned address on the pressure film accurately; Because the precision of strain gauge pressure sensor is high, rely on above method to be difficult to produce qualified strain gauge pressure sensor fully, even create, have also usually that precision is low, performance is not good, consistance is bad, reliability is not high and problem such as yield rate is lower; Moreover the workman is meeting misoperation unavoidably in manufacture process, and any misoperation of workman also can have a direct impact the quality of strain gauge pressure sensor.
Summary of the invention
The object of the present invention is to provide a kind of method of little molten bonding foil gauge, described method is for making a step of strain gauge pressure sensor, solved in the strain gauge pressure sensor manufacturing technical matters that how foil gauge is bonded on the fixing glue.
The present invention is achieved in that a kind of method of little molten bonding foil gauge, may further comprise the steps:
1. the sensor construction bearing part being put into heating furnace heats;
2. the fixing glue melted by heat on the sensor construction bearing part, the foil gauge on the fixing glue sinks among the fixing glue of fusing;
3. stop heating, allow fixing glue cool off, described foil gauge is adhered among the fixing glue.
Wherein, step 1. in, be provided with the air intake opening and the gas outlet of input and output gas in the described heating furnace, described gas is imported from air intake opening, exports from the gas outlet.
Wherein, step 1. in, be pressure gas at described gas.
Wherein, step 1. in, be to prevent that the sensor construction bearing part is subjected to the protective gas of thermal oxide at described pressure gas.
Wherein, described protective gas is a nitrogen.
Wherein, the manufacture method of a kind of strain gauge pressure sensor as claimed in claim 1, it is characterized in that: step 3. after, also has a step B, in step B, foil gauge and fixing glue are put into pot arch heat, keep the temperature 5～20 hours in the pot arch, to improve the stability of the little molten element of sensor to 200～300 ℃.
After adopting above technical scheme, technical scheme provided by the invention can be with firm being bonded on the fixing glue of foil gauge, with epoxy resin foil gauge is pasted on the pressure film by the workman is manual with prior art, use the invention provides little molten semiconductor silicon strain-ga(u)ge transducer that step produces, and not only precision height, performance are good, high conformity and high reliability features, and yield rate also higher, help commercial production in enormous quantities.
Description of drawings
Fig. 1 is first synoptic diagram from stamper separation foil gauge step that the embodiment of the invention provides.
Fig. 2 is second synoptic diagram from stamper separation foil gauge step that the embodiment of the invention provides.
Fig. 3 is the 3rd synoptic diagram from stamper separation foil gauge step that the embodiment of the invention provides.
Fig. 4 be the embodiment of the invention provide on pressure film, be coated with first synoptic diagram in the seal fixing glue step.
Fig. 5 be the embodiment of the invention provide on pressure film, be coated with second synoptic diagram in the seal fixing glue step.
Fig. 6 be the embodiment of the invention provide with viscose glue foil gauge is pasted synoptic diagram in the fixing glue step.
Fig. 7 is the little synoptic diagram that is fused in the structural fixing glue step of sensor metal of foil gauge that the embodiment of the invention provides.
Embodiment
In order to make purpose of the present invention, technical scheme and advantage clearer,, the present invention is further elaborated below in conjunction with drawings and Examples.Should be appreciated that specific embodiment described herein only in order to explanation the present invention, and be not used in qualification the present invention.
The invention provides a kind of method of using little molten technology manufacturing strain-ga(u)ge transducer, may further comprise the steps:
(1) from the stamper that is carved with foil gauge, isolates foil gauge;
(2) on the sensor metal structure that supports foil gauge, add the fixedly fixing glue of foil gauge;
(3) foil gauge is aligned be positioned over fixedly colloid;
(4) fixing glue is heated fusing, foil gauge are sunk in the fixing glue of fusing to the degree of depth of setting, treat the fixing glue cooling after, foil gauge just for good and all is fixed on the sensor construction bearing part.
After adopting above technical scheme, be coated with on the sensor construction bearing part that is printed on fixing glue, adopt microscope to operate, guarantee that foil gauge pastes the assigned address on the fixing glue owing to foil gauge is separated to paste from stamper; By melting fixing glue, foil gauge sinks among the fixing glue of fusing, treat the fixing glue cooling after, foil gauge just firmly is adhered on the fixing glue.Compared with prior art, scribble one deck fixing glue in the technical program on the sensor construction bearing part, foil gauge and fixing glue are firmly bonded together by the fusing fixing glue; Overcome in the prior art that the workman is manual to paste foil gauge on the sensor construction bearing part with epoxy resin one by one, the precision that the strain-ga(u)ge transducer of being produced exists is low, performance is not good, consistance is bad, reliability is not high and the low problem of yield rate.Practice has proved that also the strain-ga(u)ge transducer that utilizes the technical program to produce not only has precision height, stable performance, high conformity and high reliability features, and yield rate is also higher, also helps large batch of commercial production.
A kind of method of using little molten technology to make strain-ga(u)ge transducer provided by the invention is divided into 4 big steps altogether, and each big step is realized suddenly by some small steps again, existing detailed description one by one.
Step (1): from the stamper that is carved with foil gauge, isolate foil gauge.Below the method for separating foil gauge is elaborated.
See also Fig. 1, in the present embodiment, described stamper is a silicon wafer 1, is carved with the foil gauge (not shown) on it, and described foil gauge is the semiconductor silicon foil gauge; Described silicon wafer 1 is the base stock that is widely used in the silicon semiconductor integrated circuit manufacturing field, and its principal ingredient is a silicon, by polysilicon is purified, made to the silicon dioxide ore through electric arc furnaces refinement, chlorination of hydrochloric acid, distillation; After passing through pull-rod, grinding, polishing, section again, become the silicon wafer finished product; On silicon wafer, scribe required foil gauge by semiconductor technologies such as oxidation, diffusion, photoetching development, etching, cleaning, thin film depositions again, can cut out thousands of foil gauges on the silicon wafer.Because the manufacturing process of silicon wafer and the manufacturing process of scribing foil gauge on silicon wafer are prior art, are not focused protection contents of the present invention, do not elaborate at this.
See also Fig. 1, from the stamper that is carved with foil gauge, isolate foil gauge and comprise following step:
The stamper that 1. will be carved with foil gauge fits on the paster anchor clamps 2 with bonding agent, and wherein, the stamper front that is carved with foil gauge contacts with the paster anchor clamps.
See also Fig. 1, offer a paster groove 21 on the described paster anchor clamps 2, described paster groove 21 sizes are suitable with silicon wafer 1; The stamper of foil gauge is fitted on the paster anchor clamps 2 securely by bonding agent.
During concrete operations, earlier bonding agent is applied to the front (mint-mark has the one side of foil gauge) of silicon wafer 1 and the inside surface of paster groove 21, again silicon wafer 1 is fitted in the paster groove 21 gently.Should prevent to move excessive breakdown strain sheet in above-mentioned applying process, note again with the stand of the bonding agent between silicon wafer 1 and the paster groove 21 evenly not producing bubble; In order to avoid influence subsequent operation.After finishing above-mentioned operation, treat adhesive cools, the paster groove 21 that silicon wafer 1 just is fixed on the paster anchor clamps 2 is interior.
2. with the reverse side of mordant corrosion stamper, the remainder of stamper except that foil gauge eroded,, separate foil gauge.
All be reserved with the groove (not shown) when scribing foil gauge on the described silicon wafer 1 between each foil gauge, the degree of depth of described groove is suitable with the thickness of foil gauge, helps adopting corrosion silicon wafer 1 method to separate foil gauge.
Separate foil gauge with the method for using machine cuts in the prior art and compare, utilize this step to separate and foil gauge is not caused damage the high foil gauge of precision, isolated foil gauge yield rate is higher; In addition, utilize this step can the foil gauge on the whole silicon wafer 1 be separated simultaneously, separation efficiency is higher.Specifically, the thickness of foil gauge has only tens microns to tens microns usually, utilize the method separation foil gauge of machine cuts accurately foil gauge to be separated from silicon wafer 1, even foil gauge is separated, also easily foil gauge is caused damage, reduce the yield rate of foil gauge greatly, in addition, utilizing machinery to separate foil gauge needs one by one foil gauge to be cut out from silicon wafer 1, and can not simultaneously foil gauge be cut, and production efficiency is lower.
3. plastering agent is removed from paster anchor clamps 2, taken out foil gauge.
When completing steps 2. the time, foil gauge is fixed on the paster anchor clamps 2 by bonding agent, and as with the bonding agent dissolving, foil gauge just is separated naturally.
See also Fig. 3, step 3. in, will utilize the lysate dissolved adhesive to separate foil gauge.
In the present embodiment, employing lysate steam dissolves and cleans bonding agent, and described lysate steam is produced by solvent 31 heating of solubilized bonding agent.Opening part at container 3 is placed with a condensation cap 4, is connected with the cooling water pipe (not shown) in the described condensation cap 4, and therefore this condensation cap 4 can keep lower temperature.When running into the lower condensation cap 4 of temperature in the process that lysate steam rises, can condense into liquid and drip, thereby avoid the evaporation of lysate steam from condensation cap 4.
After the whole dissolved liquid steam dissolvings of bonding agent, foil gauge has just been separated fully.
In this step, also provide a kind of equipment that separates foil gauge, the equipment of described separation foil gauge comprises paster anchor clamps and the container that is used for device solubilized bonding agent, offer on the described paster anchor clamps one with the suitable paster groove of silicon wafer size; Be placed with a condensation cap that is used for hot-cold lysis liquid steam on the opening of described container.
Step (2): be coated with the seal fixing glue being used to support on the strain-ga(u)ge transducer structural bearing spare of strain-ga(u)ge transducer.
See also Fig. 4 and Fig. 5, described sensor construction bearing part 53 is a metal parts, which is provided with a pressure film 54.Described pressure film 54 is a plane, and it can provide mounting platform for foil gauge.Below specifically the method that is coated with the seal fixing glue on the sensor construction bearing part is elaborated.
The manufacturing core of strain-ga(u)ge transducer is that semiconductor gauge is joined to the sensor construction bearing part, the position of the used foil gauge of this engaging process, and the thickness of fixing glue, shape etc. all directly influence the precision and the reliability of final strain-ga(u)ge transducer.On the sensor construction bearing part, be coated with the seal fixing glue and can adopt manual or mechanical form to carry out, in the present embodiment, adopt on the pressure film of mechanical mode in the sensor construction bearing part and be coated with the seal fixing glue.See also Fig. 4 and Fig. 5, the method that is coated with the seal fixing glue on the pressure film 54 in sensor construction bearing part 53 comprises following step:
1. fixing glue 55 is positioned over that to offer meshed silk-screen online, sensor construction bearing part 53 is placed under the silk-screen net.
See also Fig. 4 and Fig. 5, step 1. in, described silk-screen net 5 places on the bracing frame (not shown), is placed with sensor construction bearing part 53 below silk-screen net 5, the pressure film 54 on the sensor construction bearing part 53 also is positioned at the below of silk-screen net 5.
Described in the present embodiment fixing glue 55 is for being fit to the mobile slurry of silk-screen, and it can be glass or pottery.Described fixing glue 55 is positioned over silk-screen net 5, can easily it be scraped in the mesh 56 on the silk-screen net 5 with silk-screen scraper 51.The main effect that described fixing glue 55 is play in the present embodiment is to connect foil gauge and sensor construction bearing part 53 and make the foil gauge secure on the pressure film on the sensor construction bearing part 53 54.
See also Fig. 4 and Fig. 5, described silk-screen net 5 is provided with a plurality of mesh 56, in the present embodiment, described mesh 56 is divided into two rows at the length direction of silk-screen net 5, every row's mesh 56 is arranged in a linear, and the size of described mesh 56 is according to the size of sensor construction bearing part 53, determine in the multiple factors such as thickness of sensor construction bearing part 53 fixing glue that is coated with.The below of described mesh 56 is equipped with a sensor construction bearing part 53, between described sensor construction bearing part 53 and the mesh 56 certain intervals is arranged, when firmly pressing down silk-screen net 5, deformation takes place in silk-screen net 5, and the mesh 56 on it contacts with sensor construction bearing part 53; When removing downforce, 5 reinstatements of silk-screen net, mesh 56 is separated with sensor construction bearing part 53.
2. press down and scrape the online fixing glue of silk-screen with the silk-screen scraper, silk-screen net pressurized is close to the sensor construction bearing part 53 of its below, and fixing glue is passed mesh and is printed on the surface of sensor construction bearing part 53 under the pressure of silk-screen scraper.
See also Fig. 4 and Fig. 5, step 2. in, describedly make for the material of wear-resistant material with silk-screen scraper 51, avoid it in the process that scrapes fixing glue 55, to cross quick-wearing; This silk-screen scraper 51 is installed on the screen printer doctor blade holder (not shown).Described screen printer doctor blade holder can drive silk-screen scraper about 51 and move around, with about scrape fixing glue 55 back and forth.Described these silk-screen scraper 51 bottoms are scraper head 52, the main effect of described scraper head 52 is to scrape fixing glue 55 in the mesh 56 and be printed on the sensor construction bearing part 54, the both sides of this scraper head 52 are inclined-plane 521, when scraper head 52 scrapes fixing glue 55, described inclined-plane 521 not only promotes fixing glue 55 forward and moves, but also downward press fit glue 55 makes fixing glue 55 enter mesh 56 more smoothly and is printed on the pressure film 54 on the sensor construction bearing part 53.
See also Fig. 4 and Fig. 5, scrape fixing glue 55 when moving when the screen printer doctor blade holder drives silk-screen scraper 51 along straight line, the scraper head 52 of silk-screen scraper 51 promotes fixing glue 55 on the one hand and moves forward, and presses down fixing glue 55 and silk-screen net 5 on the one hand.Distortion downwards behind described silk-screen net 5 pressurizeds, the mesh 56 on it contacts with the pressure film 54 of below.Described fixing glue 55 is smoothly by mesh 56 and be printed on the pressure film 54.Because silk-screen scraper 51 moves along a straight line, mesh 56 also is arranged in a linear, so silk-screen scraper 51 once can be coated with seal to a plurality of pressure films 54, has improved work efficiency greatly.
3. after the silk-screen scraper was removed on the net from silk-screen, the reinstatement of silk-screen net also separated with the sensor construction bearing part, and fixing glue is printed on the surface of pressure film.
See also Fig. 4 and Fig. 5, described silk-screen scraper 51 just can be removed from silk-screen net 5 after finishing the step that is coated with the seal fixing glue, because silk-screen scraper 51 no longer presses down silk-screen net 5, therefore described silk-screen net 5 reinstatements, mesh 56 is separated with sensor construction bearing part 53.Treat fixing glue 55 after solidifying on the sensor construction bearing part 53, fixing glue 55 just very firm being coated with is imprinted on the sensor construction bearing part 53.
4. described sensor construction bearing part 53 is put into the heating furnace (not shown) and heat, make fixing glue 55 fusings on the pressure film 54, relief fixing glue 55 natural cooling, fixing glue 55 just is solidified as whole and firm sticking on the pressure film 54.
In the present embodiment, 1. described step also has a steps A before, in steps A, on sensor construction bearing part 53 upward pressure films 54 surfaces through pre-service, to obtain consistent rough surface, rough surface had both helped fixing glue 55 and had been coated with seal on the pressure film 54, helped strengthening the cohesive strength of fixing glue 55 and pressure film 54 again.
In this step, a kind of equipment that is coated with the seal fixing glue on the sensor construction bearing part also is provided, comprise bearing part anchor clamps, the silk-screen net that is used for clamping and fixation of sensor structural bearing spare and be used to be coated with the silk-screen scraper that prints fixing glue, wherein, described bearing part anchor clamps place the below of silk-screen net, and described silk-screen scraper places the top of silk-screen net.Wherein, described sensor construction bearing part is that metal material is made; The material that described silk-screen scraper is a wear-resistant material is made, and its underpart is a scraper head, and the two sides of described scraper head are the inclined-plane.
Step (3): foil gauge aligned be positioned on the fixing glue.In the present embodiment, be to paste fixing glue on viscose glue semiconductor gauge and align, certainly, foil gauge also can directly be positioned on the fixing glue without viscose glue.
With fixing glue 55 fusing and allow behind its natural cooling, will use subsides foil gauge instrument foil gauge to be pasted on the fixing glue that is put on the sensor construction bearing part, relative sensor construction bearing part of foil gauge and fixing glue have high status requirement, and whether the position that its subsides are put meets the quality that technological requirement directly determines strain gauge pressure sensor.In the present embodiment, comprise following step:
1. with foil gauge and be coated with in the fixing glue that is imprinted on the pressure film at least one coat viscose glue.
At first with foil gauge and be coated with in the fixing glue that is imprinted on the sensor construction bearing part at least one coat viscose glue, the main effect of described viscose glue is foil gauge temporarily to be fixed on do on the dried fixing glue.
In this step, available gluing instrument is coated viscose glue on foil gauge or fixing glue, described in the present embodiment gluing instrument front end is spherical, so both viscose glue can easily be coated onto foil gauge or fixing glue gets on, and can avoid scratch foil gauge or fixing glue in the process of gluing again.Certainly, described gluing instrument can also be other forms of instrument.
2. by viscose glue, foil gauge is positioned on the fixing glue, foil gauge is pasted mutually with fixing glue;
After coating viscose glue in foil gauge or the fixing glue, foil gauge is placed on the fixing glue, at this moment viscose glue is still wet, therefore can stir foil gauge on fixing glue.
2. also have a step C in step after, in step C, be provided with sensor construction bearing part anchor clamps, described sensor construction bearing part is put into the bearing part anchor clamps; Described solid bearing part anchor clamps are mainly used in fixation of sensor structural bearing spare, and it can not be moved freely.
3. foil gauge is toggled it to the assigned address on the fixing glue.
In the present embodiment, main subsides foil gauge instrument and the vision system of utilizing toggles it to assigned address on the fixing glue with foil gauge.See also Fig. 6, described subsides foil gauge equipment comprises digital micrograph camera lens 61, supports the support 6 of digital micrograph camera lens, TV box 62, display 63 and with reference to frame 64, described digital micrograph camera lens 61 is installed on the support 6, described bearing part anchor clamps 67 place in the range of observation of digital micrograph camera lens 61, be electrically connected between described digital micrograph camera lens 61, TV box 63 and the display 63, describedly need calibration and be pasted on the display with reference to frame 64.
See also Fig. 6, in the time will stirring foil gauge, the sensor construction bearing part put into bearing part anchor clamps 67 and the sensor construction bearing part is added and fasten with bearing part anchor clamps 67; Because bearing part anchor clamps 67 place in the range of observation of digital micrograph camera lens 61, so digital micrograph camera lens 61 can clearly be observed the relative position of foil gauge and fixing glue; Described digital micrograph camera lens 61 is electrically connected with display 63 by TV box, therefore this digital micrograph camera lens 61 can be converted into the relative position of foil gauge and fixing glue electric signal and be sent among the display 63, and therefore described display 63 can clearly demonstrate the relative position of foil gauge and fixing glue.
See also Fig. 6, be pasted with a foil gauge position on the screen of described display 63 with reference to frame 64, described with reference to offering posting 65 on the frame 64, when foil gauge was toggled it to described posting 65, foil gauge just toggled it to the assigned address of fixing glue accordingly.Specifically, described bearing part anchor clamps 67 are fixed on the support 6, described digital micrograph camera lens 61 relative fixed ground observation bearing part anchor clamps 67, therefore the position of bearing part anchor clamps 67 in display 63 also is relatively-stationary, on display 63, paste one offer posting 65 with reference to frame 64, by using the position of the adjustable school of standard model posting 65, the assigned address that itself and foil gauge should be toggled it on the fixing glue in theory coincides, in the time will holding sensor construction and carry foil gauge on the part and toggle it to the foil gauge position with reference to the posting 65 on the frame 64, foil gauge just toggles it to the assigned address of fixing glue accordingly.
With directly stir foil gauge at microscopically in the former technology and compare to the assigned address on the fixing glue, use subsides foil gauge equipment provided by the invention can greatly improve the foil gauge positional precision, made things convenient for workman's operation, shorten the time of group foil gauge, greatly improved work efficiency.
In this step, can adopt the plectrum instrument that foil gauge is toggled it to assigned address on the fixing glue, described plectrum tool head is soft, can accurately stir foil gauge on fixing glue, and foil gauge is stirred the assigned address on the fixing glue and do not damaged foil gauge.
A kind of subsides foil gauge equipment also is provided in this step, the support, TV box and the display that comprise digit microscope, support digital micrograph camera lens, described digit microscope is installed on the support, described bearing part anchor clamps place in the digit microscope range of observation, are electrically connected between described digit microscope, TV box and the display.Wherein, described subsides foil gauge equipment also comprises one with reference to frame, describedly is pasted on the display with reference to frame, and this is with reference to also offering posting on the frame.
Step (4): with the fixing glue fusing of heating, foil gauge sinks in the fixing glue of fusing to the degree of depth of setting, the cooling fixing glue, and foil gauge just is permanently affixed on the sensor construction bearing part.Method to the bonding foil gauge of slightly soluble elaborates below.
After foil gauge pastes assigned address on the fixing glue, the sensor construction bearing part is put into heating furnace heats with the fixing glue on little molten sensor construction bearing part, make foil gauge mutually bonding with fixing glue, the method for the bonding foil gauge of described slightly soluble comprises following step:
1. the sensor construction bearing part being put into heating furnace heats.
See also Fig. 7, step 1. in, described heating furnace 7 comprises air intake opening 71, gas outlet 72, charging aperture 73 and discharging opening 74, the sensor construction bearing part is put into the burner hearth 75 of heating furnace 7 from charging aperture through travelling belt 73, open heating furnace 7, the fixing glue on the sensor construction bearing part is heated.See also Fig. 7, when the fixing glue on 7 pairs of sensor construction bearing parts of heating furnace heated, to burner hearth 75 input pressurized air, described pressurized air was exported from gas outlet 72 from air intake opening 71.The beneficial effect of this step is: 1, to burner hearth 75 input pressurized air, pressurized air flows burner hearth 75 in, makes the more uniform temperature that burner hearth 75 is interior, is of value to the heat fused of fixing glue; 2, to burner hearth 75 input pressurized air, the harmful gas that produces in the time of can taking away or dilute the fixing glue fusing guarantees that effectively these harmful gases do not enter or seldom enter among the fixing glue; 3, compressed-air actuated input and output form a gas curtain, can effectively intercept getting in touch of the outer air of burner hearth 75 and heating furnace 7, prevent that hot stove 7 outer air from bringing dust and impurity into and entering in the burner hearth 75 and combine with the fixing glue of fusing, influence the quality of fixing glue.
2. the fixing glue melted by heat on the sensor construction bearing part, the foil gauge on the fixing glue sink to the fixing glue of fusing to the degree of depth of setting.
3. stop heating, described sensor construction bearing part is taken out from discharging opening 74, allow described fixing glue natural cooling, described foil gauge is adhered among the fixing glue with regard to little melting.In the present embodiment, step 3. after, also have a step B, in step B, the sensor construction bearing part is put into pot arch once more heats to 200～300 ℃, keep the temperature 5～20 hours in the pot arch, to eliminate the internal stress of fixing glue.
At last the sensor construction bearing part is taken out from pot arch, described sensor construction bearing part just is a semiconductor silicon strain-ga(u)ge transducer.Facts have proved that the semiconductor silicon strain-ga(u)ge transducer that utilizes above slightly soluble technical scheme to produce has not only that precision height, performance are good, high conformity and high reliability features, and yield rate also higher, help commercial production in enormous quantities.
The above only is preferred embodiment of the present invention, not in order to restriction the present invention, all any modifications of being done within the spirit and principles in the present invention, is equal to and replaces and improvement etc., all should be included within protection scope of the present invention.
Claims (6)
1. the method for a little molten bonding foil gauge is characterized in that, may further comprise the steps:
1. the sensor construction bearing part being put into heating furnace heats;
2. the fixing glue melted by heat on the sensor construction bearing part, the foil gauge on the fixing glue sinks among the fixing glue of fusing;
3. stop heating, allow fixing glue cool off, described foil gauge is adhered among the fixing glue.
2. the method for a kind of little molten bonding foil gauge as claimed in claim 1 is characterized in that: step 1. in, be provided with the air intake opening and the gas outlet of input and output gas in the described heating furnace, described gas is imported from air intake opening, exports from the gas outlet.
3. the method for a kind of little molten bonding foil gauge as claimed in claim 2 is characterized in that: step 1. in, be pressure gas at described gas.
4. the method for a kind of little molten bonding foil gauge as claimed in claim 3 is characterized in that: step 1. in, be to prevent that the sensor construction bearing part is subjected to the protective gas of thermal oxide at described pressure gas.
5. the method for a kind of little molten bonding foil gauge as claimed in claim 4, it is characterized in that: described protective gas is a nitrogen.
6. the method for a kind of little molten bonding foil gauge as claimed in claim 1, it is characterized in that: the manufacture method of a kind of strain gauge pressure sensor as claimed in claim 1, it is characterized in that: step 3. after, also has a step B, in step B, foil gauge and fixing glue are put into pot arch heat, keep the temperature 5～20 hours in the pot arch, to improve the stability of the little molten element of sensor to 200～300 ℃.
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| CN 201010150767 CN102221430B (en) | 2010-04-13 | 2010-04-13 | Method for bonding foil gauge with micro melting |
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| CN 201010150767 CN102221430B (en) | 2010-04-13 | 2010-04-13 | Method for bonding foil gauge with micro melting |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN107643133A (en) * | 2016-07-22 | 2018-01-30 | 上海域丰传感仪器有限公司 | Miniature micro- fusion pressure force snesor and preparation method thereof |
| CN108120369A (en) * | 2016-11-28 | 2018-06-05 | 梅特勒-托利多(常州)精密仪器有限公司 | The method and device of fixed foil gauge |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| RU2698554C1 (en) * | 2018-12-18 | 2019-08-28 | Федеральное государственное бюджетное образовательное учреждение высшего образования Балтийский государственный технический университет "ВОЕНМЕХ" им. Д.Ф. Устинова (БГТУ "ВОЕНМЕХ") | Method for installation of strain gauges |
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| CN1995926A (en) * | 2006-12-22 | 2007-07-11 | 西安森舍电子科技有限责任公司 | High-temperature-resistant high-pressure-resistant ceramic strain gauge sensor and its package curing method |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4705587A (en) * | 1985-10-15 | 1987-11-10 | Pitney Bowes Inc. | Method for curing adhesive in the manufacture of transducers |
| CN1648625A (en) * | 2004-01-27 | 2005-08-03 | 梅特勒-托莱多有限公司 | Bonding of strain gauges to the deformable body of a force-measuring cell |
| CN1995926A (en) * | 2006-12-22 | 2007-07-11 | 西安森舍电子科技有限责任公司 | High-temperature-resistant high-pressure-resistant ceramic strain gauge sensor and its package curing method |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107643133A (en) * | 2016-07-22 | 2018-01-30 | 上海域丰传感仪器有限公司 | Miniature micro- fusion pressure force snesor and preparation method thereof |
| CN108120369A (en) * | 2016-11-28 | 2018-06-05 | 梅特勒-托利多(常州)精密仪器有限公司 | The method and device of fixed foil gauge |
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