CN102220557A - Coating bracket and coating machine - Google Patents
Coating bracket and coating machine Download PDFInfo
- Publication number
- CN102220557A CN102220557A CN2010101476214A CN201010147621A CN102220557A CN 102220557 A CN102220557 A CN 102220557A CN 2010101476214 A CN2010101476214 A CN 2010101476214A CN 201010147621 A CN201010147621 A CN 201010147621A CN 102220557 A CN102220557 A CN 102220557A
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- CN
- China
- Prior art keywords
- film coating
- coating bracket
- connection section
- chovr body
- hanger
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Abstract
The invention discloses a coating bracket and a coating machine comprising the same. The coating bracket comprises a main shaft, a hanger and an adaptor, wherein one end of the adaptor is connected with the main shaft; the hanger is movably connected with the other end of the adaptor. The coating bracket and the coating machine are respectively provided with the adaptor; the length of a part of the hanger, which is exposed out of the adaptor, is changed by moving the hanger relative to the adaptor; and thus, the space between the hanger and a target material can be adjusted in real time, and the uniformity of a coating can be improved.
Description
Technical field
The present invention relates to the film coating apparatus field, relate in particular to a film coating bracket and comprise the coating equipment of this film coating bracket.
Background technology
Sputter is to utilize high energy particle (as ion) bombardment sputter target surface, makes the particle (as atom, ion etc.) that is pounded be deposited on the plating piece surface.Sputter is widely used in industrial because of having preferable sedimentation effect, accurately controlling composition and low manufacture cost and other advantages.
In sputtering process, adopt fixedly plating piece of support usually.This support comprises main shaft and a plurality of hanger of being located at main shaft along the main shaft axially spaced-apart.This main shaft one end links to each other with drive unit.Each hanger extends along being parallel to main shaft radial direction from main shaft, and wherein axis normal is in the axis of main shaft.The end that this hanger does not link to each other with main shaft, promptly suspending part is relative with sputter target, is used for the fixing plating piece.During sputter, this main shaft under the driving of drive unit is the center rotation with the sputter target, thus drive be immobilizated in the hanger suspending part plating piece around the sputter target rotation, realize a plurality of plating pieces plated films in batches.
In the existing film coating bracket, the suspending part of each hanger and the constant distance of sputter target.And the distance affects coating effects of the suspending part of sputter target and hanger.Distance is excessive, because the sputter target sputter is limited in scope, the thickness of coating may not reach prescribed value; Distance is too small, coating may not be formed at the surface whole to be plated of plating piece or appearance and sputter target over against the coating on plating piece surface thicker and thinner from the coating on sputter target plating piece surface far away slightly, cause the thickness of coating inequality.
Therefore, be necessary to provide a kind of sputter support and the coating equipment that can adjust hanger suspending part and sputter target spacing flexibly to improve coating uniformity.
Summary of the invention
Below be a kind of film coating bracket and coating equipment that improves coating uniformity of example explanation with the embodiment.
A kind of film coating bracket comprises main shaft, hanger and chovr body.This chovr body one end links to each other with main shaft.This hanger links to each other with the other end of this chovr body movably.
A kind of coating equipment, it comprises above-mentioned film coating bracket.
Compared to prior art, the film coating bracket and the coating equipment of the technical program are provided with chovr body, change the length that hanger exposes chovr body by moving this hanger, realize the spacing Adjustable real-time of hanger and target, thereby can improve coating uniformity with respect to this chovr body.
Description of drawings
Fig. 1 is the vertical view of the film coating bracket that provides of the technical program one embodiment.
Fig. 2 is the sectional view after film coating bracket shown in Figure 1 is cut open along the II-II line.
Fig. 3 is the sectional view of the coating equipment that provides of another embodiment of the technical program.
The main element nomenclature
Sliding part 120
Card-bit part 140
Sleeve 121
First end 1221
Second end 1222
Periphery 1211
Host cavity 1223
Otch 1224
Suspending part 132
Draw-in groove 133
Target 220
Embodiment
Below in conjunction with the drawings and the specific embodiments film coating bracket and the coating equipment that the technical program provides is elaborated.
Referring to Fig. 1 and Fig. 2, the film coating bracket 100 that the technical program one embodiment provides comprises main shaft 110, a plurality of sliding part 120, a plurality of hanger 130 and a plurality of card-bit part 140 that is shaft-like.
See also Fig. 2, each sliding part 120 comprises a sleeve 121 and four chovr bodies 122.Sleeve 121 covers main shaft 110, be fixed in the appropriate location of main shaft 110 by retaining elements commonly used such as screws, if turn on this retaining element, under the external force effect, sleeve 121 can slide along main shaft 110, and can be fixed in the appropriate location of main shaft 110 by this retaining element once more.So, the spacing of adjacent two sliding parts 120 can be regulated.Sleeve 121 has periphery 1211.Each chovr body 122 in a tubular form, its have first end 1221 and with first end, 1221 second opposed end 1222.First end 1221 is directly connected in the periphery 1211 of sleeve 121.Chovr body 122 extends perpendicular to sleeve 121 axial directions from periphery 1211 courts.See also Fig. 1 and Fig. 2, four chovr bodies 122 are positioned at same circumference in the projection of periphery 1211, and every adjacent two chovr bodies 122 form roughly an angle of 90 degrees.The otch 1224 that each chovr body 122 is provided with opening host cavity 1223 and communicates with host cavity 1223.Otch 1224 extends along being parallel to chovr body 122 axial directions, and ends at second end, 1222 places near chovr body 122.
See also Fig. 1 and Fig. 2, card-bit part 140 removably is located in the otch 1224 of chovr body 122.Card-bit part 140 is a screw, and the one end screws in draw-in groove 133, is used for connection section 131 is positioned in a specified location of chovr body 122.
In addition, the structure of film coating bracket 100 is not limited thereto, for example, the otch 1224 of chovr body 122 can change be made as a plurality of along the axial arrays through holes of arranging linearly of chovr body 122; Or suspending part 132 and connection section 131 between by threaded engagement, can realize that by relative connection section 131 these suspending parts 132 of rotation part connection section 131 is positioned at outside this chovr body 122; Perhaps chovr body 122 inwalls are provided with along its axially extended chute, and connection section 131 is sticked in this chute slidably; Perhaps save this card-bit part 140, connection section 131 directly is located in the connection section 131 slidably; Perhaps omit sleeve 121, chovr body 122 is directly fixed on the side face of main shaft 110.Generally speaking, as long as this connection section 131 can change its length that are positioned at outside this chovr body 122 and get final product by these chovr body 122 motions relatively.
See also Fig. 1 to Fig. 3, one uses the coating equipment 200 of above-mentioned film coating bracket 100 to comprise: a vacuum vessel 210 with plated film cavity, be fixed in the intravital at least one target 220 in these vacuum vessel 210 chambeies, film coating bracket 100 and rotating disk 230.This film coating bracket 100 is oppositely arranged with target 220, and its main shaft 110 1 ends link to each other with rotating disk 230.Rotating disk 230 can be understood around self axis rotation, and film coating bracket 100 will rotate around rotating disk 230 axis with rotating disk 230.Film coating bracket 100 also links to each other with drive unit (figure does not show), and under the driving of this drive unit, film coating bracket 100 also with rotation, promptly centers on self axis rotation when rotating around rotating disk 230 axis.
When using coating equipment 200, consult Fig. 2 and Fig. 3 in the lump, regulate the spacing of suspending part 132 and target 220, promptly turn on card-bit part 140, move connection section 131 to the appropriate location, tighten card-bit part 140, connection section 131 is fixed in this position along chovr body 122.Then, drive rotating disk 230 and film coating bracket 100, film coating bracket 100 rotations are also rotated around the axis of rotating disk 230, can carry out plated film.
In addition, if finish behind the small size plating piece plated film, need large size plating piece plated film, the spacing of regulating adjacent two sliding parts 120 along main shaft 110 sliding sleeves 121 is not then blocked mutually with the plating piece of the suspending part 132 that is immobilizated in hanger 130 and to be advisable.
Compared to prior art, the coating equipment 200 that present embodiment provides is provided with chovr body 122, hanger 130 1 ends are contained in this chovr body 122 movably, change the length that hanger 130 exposes chovr body 122 by in this chovr body 122, moving this hanger 130, realize the spacing Adjustable real-time of hanger 130 and target 220, this film coating bracket 100 can with different target 220 supporting uses, improve coating uniformity.In addition, the spacing of adjacent two sleeves 121 is also adjustable, the spacing that is adjacent two row's hangers 130 is adjustable, make this coating equipment 200 applicable to plating piece plated film to different size, range of application is wider, need not different film coating brackets to be set, saved production cost undoubtedly at the plating piece correspondence of different size.
Be understandable that those skilled in the art also can do other variation etc. and be used for design of the present invention in spirit of the present invention, as long as it does not depart from technique effect of the present invention and all can.The variation that these are done according to spirit of the present invention all should be included in the present invention's scope required for protection.
Claims (8)
1. a film coating bracket comprises main shaft and hanger, it is characterized in that, this film coating bracket also comprises chovr body, and this chovr body one end links to each other with main shaft, and this hanger links to each other with the other end of this chovr body movably.
2. film coating bracket as claimed in claim 1 is characterized in that this chovr body has host cavity, and this hanger comprises connection section and be used for the suspending part of fixing workpiece to be plated, and this connection section one end is contained in this host cavity movably, and the other end links to each other with this suspending part.
3. film coating bracket as claimed in claim 2 is characterized in that this film coating bracket also comprises sleeve, and this sleeve covers this main shaft slidably, and this chovr body one end is fixed in this sleeve outer wall.
4. film coating bracket as claimed in claim 3, it is characterized in that this film coating bracket also comprises card-bit part, this chovr body is provided with the otch that communicates with this host cavity, this connection section surface is provided with a plurality of draw-in grooves along this connection section axial arranging, and this card-bit part one end passes this otch and engages with this draw-in groove.
5. film coating bracket as claimed in claim 3, it is characterized in that, this film coating bracket also comprises card-bit part, this chovr body is provided with a plurality of through holes that communicate with this host cavity, these a plurality of through holes are along the axial arranging of this chovr body, this connection section surface is provided with a plurality of draw-in grooves along this connection section axial arranging, and this card-bit part one end passes through hole in these a plurality of through holes and engages with the draw-in groove corresponding with this through hole.
6. film coating bracket as claimed in claim 1 is characterized in that this chovr body is provided with chute, and this hanger comprises connection section and be used for the suspending part of fixing workpiece to be plated, and this connection section one end is located in this chute slidably, and the other end links to each other with this suspending part.
7. film coating bracket as claimed in claim 2 is characterized in that, this connection section one end and this chovr body threaded engagement.
8. coating equipment comprises a plated film cavity, is arranged at intravital at least one target in this plated film chamber and one as each described film coating bracket of claim 1 to 7, and this film coating bracket and this at least one target are oppositely arranged.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010101476214A CN102220557A (en) | 2010-04-15 | 2010-04-15 | Coating bracket and coating machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010101476214A CN102220557A (en) | 2010-04-15 | 2010-04-15 | Coating bracket and coating machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102220557A true CN102220557A (en) | 2011-10-19 |
Family
ID=44777255
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010101476214A Pending CN102220557A (en) | 2010-04-15 | 2010-04-15 | Coating bracket and coating machine |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102220557A (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2454327Y (en) * | 2000-11-16 | 2001-10-17 | 茅金声 | Rotary rack for wastebasket |
| CN101294270A (en) * | 2008-06-06 | 2008-10-29 | 东北大学 | Equipment and method for producing nichrome composite plate with vacuum arc ion plating |
-
2010
- 2010-04-15 CN CN2010101476214A patent/CN102220557A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2454327Y (en) * | 2000-11-16 | 2001-10-17 | 茅金声 | Rotary rack for wastebasket |
| CN101294270A (en) * | 2008-06-06 | 2008-10-29 | 东北大学 | Equipment and method for producing nichrome composite plate with vacuum arc ion plating |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20111019 |