CN102206806B - 生产平板太阳能吸热镀膜板的方法及立式镀膜装置 - Google Patents
生产平板太阳能吸热镀膜板的方法及立式镀膜装置 Download PDFInfo
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- CN102206806B CN102206806B CN 201010137288 CN201010137288A CN102206806B CN 102206806 B CN102206806 B CN 102206806B CN 201010137288 CN201010137288 CN 201010137288 CN 201010137288 A CN201010137288 A CN 201010137288A CN 102206806 B CN102206806 B CN 102206806B
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- 238000000576 coating method Methods 0.000 title claims abstract description 126
- 239000011248 coating agent Substances 0.000 title claims abstract description 123
- 238000010521 absorption reaction Methods 0.000 title claims abstract description 98
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 65
- 239000000758 substrate Substances 0.000 claims abstract description 112
- 229910052751 metal Inorganic materials 0.000 claims abstract description 68
- 239000002184 metal Substances 0.000 claims abstract description 67
- 238000004544 sputter deposition Methods 0.000 claims abstract description 49
- 230000007246 mechanism Effects 0.000 claims abstract description 14
- 239000012528 membrane Substances 0.000 claims description 83
- 238000001755 magnetron sputter deposition Methods 0.000 claims description 55
- 239000007888 film coating Substances 0.000 claims description 50
- 238000009501 film coating Methods 0.000 claims description 50
- 239000002131 composite material Substances 0.000 claims description 37
- 238000000034 method Methods 0.000 claims description 32
- 239000007789 gas Substances 0.000 claims description 30
- 239000004065 semiconductor Substances 0.000 claims description 23
- 239000012298 atmosphere Substances 0.000 claims description 22
- 239000000463 material Substances 0.000 claims description 22
- 238000000151 deposition Methods 0.000 claims description 20
- 230000033764 rhythmic process Effects 0.000 claims description 17
- 238000005516 engineering process Methods 0.000 claims description 12
- 230000008569 process Effects 0.000 claims description 12
- 238000007747 plating Methods 0.000 claims description 11
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 10
- 229910052757 nitrogen Inorganic materials 0.000 claims description 8
- 229910052786 argon Inorganic materials 0.000 claims description 3
- 230000002452 interceptive effect Effects 0.000 claims description 3
- 150000002927 oxygen compounds Chemical class 0.000 claims description 3
- 230000001413 cellular effect Effects 0.000 claims description 2
- 230000005540 biological transmission Effects 0.000 abstract description 14
- 238000005477 sputtering target Methods 0.000 abstract description 12
- 230000008901 benefit Effects 0.000 abstract description 5
- 239000003638 chemical reducing agent Substances 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 84
- 238000010586 diagram Methods 0.000 description 18
- 230000008021 deposition Effects 0.000 description 8
- 229910001220 stainless steel Inorganic materials 0.000 description 8
- 239000004411 aluminium Substances 0.000 description 7
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 7
- 229910052782 aluminium Inorganic materials 0.000 description 7
- 238000012545 processing Methods 0.000 description 6
- 239000010935 stainless steel Substances 0.000 description 6
- 238000012546 transfer Methods 0.000 description 6
- 230000008859 change Effects 0.000 description 5
- 238000005086 pumping Methods 0.000 description 5
- 239000000376 reactant Substances 0.000 description 4
- 238000007789 sealing Methods 0.000 description 4
- 239000011521 glass Substances 0.000 description 3
- 230000001020 rhythmical effect Effects 0.000 description 3
- 238000004062 sedimentation Methods 0.000 description 3
- 238000001228 spectrum Methods 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 230000000740 bleeding effect Effects 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 238000003912 environmental pollution Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 238000012856 packing Methods 0.000 description 2
- 230000000087 stabilizing effect Effects 0.000 description 2
- 239000002699 waste material Substances 0.000 description 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000003667 anti-reflective effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000001680 brushing effect Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000009841 combustion method Methods 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000010924 continuous production Methods 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004134 energy conservation Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 239000002346 layers by function Substances 0.000 description 1
- 230000033001 locomotion Effects 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000007670 refining Methods 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 238000005057 refrigeration Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000013535 sea water Substances 0.000 description 1
- 230000002459 sustained effect Effects 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- MEYZYGMYMLNUHJ-UHFFFAOYSA-N tunicamycin Natural products CC(C)CCCCCCCCCC=CC(=O)NC1C(O)C(O)C(CC(O)C2OC(C(O)C2O)N3C=CC(=O)NC3=O)OC1OC4OC(CO)C(O)C(O)C4NC(=O)C MEYZYGMYMLNUHJ-UHFFFAOYSA-N 0.000 description 1
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CN 201010137288 CN102206806B (zh) | 2010-03-31 | 2010-03-31 | 生产平板太阳能吸热镀膜板的方法及立式镀膜装置 |
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Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
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CN103147053B (zh) * | 2012-12-14 | 2015-04-22 | 广东志成冠军集团有限公司 | 多功能连续式磁控溅射镀膜装置 |
CN103820762B (zh) * | 2014-02-20 | 2016-07-20 | 江西沃格光电股份有限公司 | 磁控溅射镀膜系统 |
CN106676467B (zh) * | 2016-11-15 | 2018-12-18 | 江苏特丽亮镀膜科技有限公司 | 一种自动进出料的真空镀膜箱设备 |
CN107385409A (zh) * | 2017-08-03 | 2017-11-24 | 福建新越金属材料科技有限公司 | 选择性太阳能热吸收产品的镀膜方法和涂层膜系 |
CN110116927A (zh) * | 2019-06-11 | 2019-08-13 | 张家港市和瑞创先智能光学有限公司 | 一种基于磁铁的镀膜稳定输送机构 |
CN110205596A (zh) * | 2019-06-12 | 2019-09-06 | 河北道荣新能源科技有限公司 | 内腔式磁控溅射设备的传动结构与方法 |
CN110195213B (zh) * | 2019-06-12 | 2023-10-13 | 河北道荣新能源科技有限公司 | 内腔式磁控溅射镀膜室的装配式结构与方法 |
CN111058009A (zh) * | 2019-09-25 | 2020-04-24 | 广东汇成真空科技股份有限公司 | 一种金属箔带卷绕式真空镀膜连续生产线 |
CN111621761A (zh) * | 2020-07-06 | 2020-09-04 | 苏州宏策光电科技有限公司 | 一种磁控溅射镀膜装置及方法 |
CN111961998A (zh) * | 2020-08-26 | 2020-11-20 | 重庆赛迪热工环保工程技术有限公司 | 一种热镀锌镀铝锌与彩涂联合高效生产的新工艺和系统 |
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CN200964435Y (zh) * | 2006-10-18 | 2007-10-24 | 甘国工 | 在晶体硅太阳能电池片上镀抗反射钝化膜的设备 |
CN101353782A (zh) * | 2008-09-05 | 2009-01-28 | 郭爱云 | 大面积抗反射导电膜连续磁控溅射镀膜生产线 |
CN201648514U (zh) * | 2010-03-31 | 2010-11-24 | 甘国工 | 生产平板太阳能吸热镀膜板的立式镀膜装置 |
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CN101598468B (zh) * | 2009-06-25 | 2011-11-23 | 兰州大成科技股份有限公司 | 高性能多层复合太阳选择性吸收涂层及其制备方法 |
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CN200964435Y (zh) * | 2006-10-18 | 2007-10-24 | 甘国工 | 在晶体硅太阳能电池片上镀抗反射钝化膜的设备 |
CN101353782A (zh) * | 2008-09-05 | 2009-01-28 | 郭爱云 | 大面积抗反射导电膜连续磁控溅射镀膜生产线 |
CN201648514U (zh) * | 2010-03-31 | 2010-11-24 | 甘国工 | 生产平板太阳能吸热镀膜板的立式镀膜装置 |
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Address after: 610200 Six Stages of Industrial Centralized Development Zone of Southwest Airport Economic Development Zone, Shuangliu District, Chengdu City, Sichuan Province Patentee after: Sichuan Jinshi Oriental New Material Technology Co., Ltd Address before: 610200 Six Stages of Industrial Centralized Development Zone of Southwest Airport Economic Development Zone, Shuangliu District, Chengdu City, Sichuan Province Patentee before: Chengdu Jinshi New Material Technology Co., Ltd. |