CN102202895B - Electrostatic liquid-ejection actuation mechanism and electrostatic liquid-ejection device - Google Patents
Electrostatic liquid-ejection actuation mechanism and electrostatic liquid-ejection device Download PDFInfo
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- CN102202895B CN102202895B CN200880131785.9A CN200880131785A CN102202895B CN 102202895 B CN102202895 B CN 102202895B CN 200880131785 A CN200880131785 A CN 200880131785A CN 102202895 B CN102202895 B CN 102202895B
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- 230000007246 mechanism Effects 0.000 title claims abstract description 53
- 239000007788 liquid Substances 0.000 claims abstract description 94
- 239000012530 fluid Substances 0.000 claims description 68
- 238000002347 injection Methods 0.000 claims description 16
- 239000007924 injection Substances 0.000 claims description 16
- 239000007921 spray Substances 0.000 claims description 15
- 230000004044 response Effects 0.000 claims description 10
- RVSGESPTHDDNTH-UHFFFAOYSA-N alumane;tantalum Chemical compound [AlH3].[Ta] RVSGESPTHDDNTH-UHFFFAOYSA-N 0.000 claims description 3
- 239000000463 material Substances 0.000 claims 4
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000012528 membrane Substances 0.000 abstract 2
- 238000010586 diagram Methods 0.000 description 8
- 238000007641 inkjet printing Methods 0.000 description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 230000002349 favourable effect Effects 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 230000010358 mechanical oscillation Effects 0.000 description 3
- 238000005507 spraying Methods 0.000 description 3
- 230000008859 change Effects 0.000 description 2
- 230000001419 dependent effect Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 239000000049 pigment Substances 0.000 description 2
- 238000003079 width control Methods 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000001413 cellular effect Effects 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 239000000975 dye Substances 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
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- 238000000034 method Methods 0.000 description 1
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
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- PBCFLUZVCVVTBY-UHFFFAOYSA-N tantalum pentoxide Inorganic materials O=[Ta](=O)O[Ta](=O)=O PBCFLUZVCVVTBY-UHFFFAOYSA-N 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2/14314—Structure of ink jet print heads with electrostatically actuated membrane
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- Particle Formation And Scattering Control In Inkjet Printers (AREA)
- Micromachines (AREA)
Abstract
An electrostatic liquid-ejection actuation mechanism includes a membrane, a frame, and one or more deformable beams. The frame has two sides and a number of cross members that are non-parallel to the two sides. The two sides and the cross members define one or more areas individually corresponding to one or more liquid chambers. The deformable beams are disposed between the membrane and the frame. The deformable beams individually correspond to the liquid chambers, and define a number of slits. Each slit is adjacent to one of the two sides of the frame. The deformable beams have a width that is less than a width of the liquid chambers, due at least to the slits.
Description
Background technology
Inkjet-printing device, such as ink-jet printer, be can by by ink jet to the device that forms image on the dieelctric sheet such as paper on described dieelctric sheet.Drip as required inkjet-printing device and mainly comprise actuating (actuation) mechanism based on heat generation, piezoelectricity merit or electrostatic attraction.Thermal inkjet-printing device carrys out ink jet by heating ink, and described heating causes and in ink, forms bubble and cause ink injected.Piezoelectric ink jet printing equipment is by being out of shape piezoelectric board to carry out ink jet, and described distortion forces ink injected.Electrostatic inkjet printing equipment is by utilizing two electrostatic charges between electrode to make film be out of shape to operate.In the time of discharge electrostatic charges, film is forced from described device ink jet.
Brief description of the drawings
Fig. 1 is according to the detailed diagram of the perspective view of a part for an embodiment of the present disclosure, electrostatic liquid-ejection actuation mechanism.
Fig. 2,3 and 4 is according to the diagram of the perspective view of the individual course of this part of the electrostatic liquid-ejection actuation mechanism of embodiment, a Fig. 1 of the present disclosure.
Fig. 5 A and 5B are respectively according to the diagram of the front cross sectional view of this part of the electrostatic liquid-ejection actuation mechanism of embodiment, a Fig. 1 of the present disclosure and sectional view.
Fig. 6 is that diagram is according to the diagram of beam (beam) distortion that how can make electrostatic liquid-ejection actuation mechanism of an embodiment of the present disclosure.
Fig. 7 is according to the detailed diagram of the perspective view of another embodiment of the present disclosure, partial electrostatic liquid injection actuation mechanism.
Fig. 8 is according to the diagram of the sectional view of this part of the electrostatic liquid-ejection actuation mechanism of embodiment, a Fig. 7 of the present disclosure.
Fig. 9 is according to the diagram of an embodiment of the present disclosure, basic electrophotographic liquid injection apparatus.
Detailed description of the invention
Fig. 1 illustrates according to a part embodiment of the present disclosure, electrostatic liquid-ejection actuation mechanism 100.This actuating mechanism 100 comprises rete 102, deformable beam layer 104 and ccf layer 106.Fig. 2,3 and 4 shows separately respectively this rete 102, deformable beam layer 104 and ccf layer 106.Below explanation should be read with reference to the whole of figure 1-4 thus.Notice, clear and convenient in order to illustrate, in Fig. 1-4, actuating mechanism 100 and layer 102,104 and 106 are not proportionally drawn.
Rete 102 can be manufactured by tantalum-aluminium, and thickness is 0.1 micron in one embodiment.This rete 102 also can be referred to as film, and is flexible.This deformable beam layer 104 also can be manufactured by tantalum-aluminium, and thickness is 3.0 microns in one embodiment.This ccf layer 106 can be manufactured by silicon.
In the embodiment of Fig. 1-4, deformable beam layer 104 comprises single deformable beam 110.This deformable beam 110 is deformable, because it can be bending up and/or down.As being described in more detail in detailed description after a while, this deformable beam 110 is as an electrode of electrostatic liquid-ejection actuation mechanism 100.This deformable beam 110 is in response to the attraction of the electrostatic charge of setting up between another electrode of himself and actuating mechanism 100 and be out of shape.This distortion is towards this another electrode.In the time of discharge electrostatic charges, deformable beam 110 is replied and is turned back to the configuration shown in Fig. 1 and 3.
Fig. 5 A and 5B illustrate respectively according to front cross sectional view and sectional view an embodiment of the present disclosure, electrostatic liquid-ejection actuation mechanism 100.In one embodiment, width-namely width in the region 302 of Fig. 4 between the limit 304 of the framework 108 of ccf layer 106-equal the width of fluid chamber 502, but in other embodiments, the width in region 302 is different from the width of fluid chamber 502.Further notice, the width of the deformable beam 110 of deformable beam layer 104 is less than the width of fluid chamber 502.This at least causes because the both sides of deformable beam 110 exist 112 and 114, gap.In one embodiment, the width of deformable beam 110 can be 50 microns.
Liquid in fluid chamber 502 is separated via rete 102 and deformable beam 110.This fluid chamber 502 comprises liquid ejecting nozzle 504, and also has liquid-inlet 514.In the time that deformable beam 110 is out of shape in response to electrostatic charge, via liquid-inlet 514, additional liquid is drawn in fluid chamber 502.In the time of discharge electrostatic charges, deformable beam 110 is returned to its configuration shown in Fig. 5, and as response, forces liquid droplet to spray from fluid chamber 502 by liquid ejecting nozzle 504.
In this respect, as mentioned above, deformable beam 110 is as an electrode of electrostatic liquid-ejection actuation mechanism 100.Actuating mechanism 100 also comprises supplemantary electrode 506 and the dielectric 512 such as silicon nitride or tantalum pentoxide.Between beam 110 and electrode 506, define electrostatic gap 508, and this electrostatic gap 508 comprises dielectric 512 and the air space between dielectric 512 and beam 110 thus.The thickness of electrostatic gap 508 can be 0.6 micron.This dielectric 512 can have the dielectric constant between the thickness and 3 to 28 of 0.4 micron.
Notice, in Fig. 5 A and 5B, by the micro-processing framework 108 of silicon wafer.Silicon wafer thickness is different, but 750 microns is typical.Can be by silicon etching ink feed throughs to be connected to liquid-inlet, such as liquid-inlet 514.And, to notice, rete 102 has typical case than the thickness of 10 to 30 times of the thin thickness of deformable beam 110.
Width between the limit 304 of the width of deformable beam 110 and framework 108 is irrelevant, and the width in the region 302 defining with the framework 108 shown in Fig. 4 is thus irrelevant, and also irrelevant with the width of fluid chamber 502.This independence of the width of deformable beam 110 is at least caused by 112 and 114, defined gap.That is to say, no matter the width (the namely width in the region 302 of Fig. 4) between width and/or the limit 304 of fluid chamber 502 is how, can be by making as required gap 112 and 114 greater or lesser to guarantee that the desired width of beam 110 controls the width of deformable beam 110 independently.
It is favourable making other width in width and the electrostatic liquid-ejection actuation mechanism 100 of deformable beam 110 irrelevant.How to be out of shape to control in response to applying with discharge electrostatic charges by deformable beam 110 with the electrostatic liquid-ejection actuation of the deformable beam 110 as in Fig. 1-5.The deformation characteristic of deformable beam 110 can be only part be controlled by the variable relevant to electrostatic charge self, described variable such as the quantity of electric charge, apply and discharge electric charge and how soon have etc.On the contrary, the deformation characteristic of deformable beam 110 is more by the physical descriptor control relevant to deformable beam 110, described physical descriptor such as its modulus, thickness, length and importantly, width.
But the width of deformable beam 110 typically and non-independent variable, but often depends on the width in region 302 and/or the width of fluid chamber 502 between the limit 304 of framework 108.One of creativeness understanding of the inventor is, the width that should remove deformable beam 110 is for the width in region 302 and/or for the dependence of the width of fluid chamber 502.So, inventor creatively adds gap 112 and 114 to the limit of deformable beam 110.Because can be according to expecting to make gap 112 and 114 greater or lesser, the width of deformable beam 110 be no longer dependent on the width in region 302 and/or the width of fluid chamber 502.Advantageously, the independence of the width of the deformable beam 110 of this interpolation provides more multi-control for the characteristic of the distortion of beam 110, and thus to realizing more control via liquid ejecting nozzle 504 from fluid chamber 502 atomizing of liquids droplets.
Therefore,, aspect this, the inventor's creative contribution is at least double.First, inventor recognizes that the width of deformable beam 110 has limited the deformation characteristic of deformable beam 110 undeservedly for the dependence of the width in region 302 and/or the width of fluid chamber 502, and has limited thus how from fluid chamber 502 atomizing of liquids droplets.The second, inventor innovates and has invented a kind of ad hoc approach, and this ad hoc approach is via the introducing gap, both sides 112 and 114 to deformable beam 110, to make the width of deformable beam 110 be independent of the width in region 302 and/or the width of fluid chamber 502.
In addition, electrostatic liquid-ejection actuation mechanism 100 is being creative to reducing a lot aspect other.For example, this type of advantage relates to together with rete 102 and uses deformable beam 110 as actuator, and this is contrary with the layer of only single uniform thickness that is not divided into beam 110 and rete 102.It can be identical that the volume of all equate-chamber, every other aspect size, gap size, the voltage that applies etc.-be shifted by deformable beam 110 and rete 102 is compared the volume being shifted by the layer that is not divided into beam 110 and rete 102 of single uniform thickness.But, in order to realize this, the thickness of single uniform thickness layer must than the thin thickness of deformable beam 110 many.
Result is that the mechanical oscillation frequency of the actuator being made up of deformable beam 110 and rete 102 is higher than the mechanical oscillation frequency of the actuator being made up of single uniform thickness layer.This is favourable, because in the time that electrostatic charge exhausts, actuator can turn back to unstressed (namely deactivated) state quickly.Therefore, actuator can be sooner by again in order to spray additional liquid.Result is the time of minimizing between the fluid drips of spraying, to provide higher liquid injection rate.
The pressure distribution of the pressure distribution (profile) of the actuator being formed with rete 102 by deformable beam 110 in addition, and the actuator being formed by single uniform thickness layer identical or compare narrower.This is because the actuator being made up of deformable beam 110 and rete 102 is returned to uncharged state quickly.In addition, replace and optimize the design of deformable beam 110 for higher frequency, as indicated in previous paragraphs formerly, this design can change into and be optimized for more low-voltage to accumulate electrostatic charge (it can reduce mechanical oscillation frequency).
Fig. 6 illustrate according to an embodiment of the present disclosure, in drawing in the representative distortion of deformable beam 110 of deformable beam layer 104 of (snap-down) state.Clear in order to illustrate, in Fig. 6, illustrate the distortion of deformable beam 110 with respect to Fig. 5 " reversedly ".That is to say, in fact deformable beam 110 is out of shape away from the fluid chamber 502 in Fig. 5, while setting up electrostatic charge, additional liquid is drawn in chamber 502 with box lunch between the electrode 506 of Fig. 5 and beam 110.
Therefore,, when set up electrostatic charge between deformable beam 110 and electrode 506 time, beam 110 is deformed into the second configuration as shown in Figure 6 from the first configuration as shown in Fig. 1,3 and 5.This causes the import that the liquid volume in fluid chamber 502 is coupled to liquid delivery member by fluid to increase.In the time of discharge electrostatic charges, deformable beam 110 from Fig. 6 second configuration reply turn back to Fig. 1,3 and 5 first configuration.This causes the liquid ejecting nozzle 504 atomizing of liquids droplets from fluid chamber 502.
Notice, become the some place of the strong spring strength (spring strength) that must be enough to overcome beam and film in electric-field intensity, draw in.Interval between beam 110 and dielectric 512 becomes zero, the surface of the Surface Contact comparative electrode of beam.So the contact portion of beam is flat.In Fig. 6, the shape of illustrated deformable beam 110 has been used finite element analysis computation to draw.At certain electric pressure point place,, draw at about 28 volts of places such as in one embodiment.Actuator is finally discharged from drawing in state.
Further notice, as described so far, in the framework 108 of ccf layer 106, have two crossing members 306, in Fig. 4, to there is the single region 302 being defined by crossing members 306 and the limit 304 of framework 108, as in Fig. 3.Similarly, in Fig. 5, there is the corresponding single fluid chamber 502 in this single region 302.Further there are only two gaps 112 and 114, as in Fig. 1,3 and 5, and only single deformable beam 110 between these two gaps 112 and 114, wherein, the left side of single beam 110 and the right are not attached to framework 108, as shown in Figure 3 as in.But, in other embodiments, can there is the crossing members 306 more than two, to can have more than one region 302 and can have more than one fluid chamber 502; Similarly, can there is more than one deformable beam 110 and the gap 112 and 114 more than two.Such additional exemplary embodiment is described now.
Fig. 7 illustrates according to the perspective view of a part this type of additional embodiment of the present disclosure, electrostatic liquid-ejection actuation mechanism 100.In addition, Fig. 8 illustrates according to the sectional view of a part for electrostatic liquid-ejection actuation mechanism 100 embodiment of the present disclosure, Fig. 7.Should read following explanation with reference to figure 7 and Fig. 8 thus.Notice, clear and convenient in order to illustrate, Fig. 7 and Fig. 8 proportionally do not draw.
As front, actuating mechanism 100 comprises rete 102, deformable beam layer 104 and ccf layer 106.In this embodiment, this deformable beam layer 104 comprises two deformable beam 110A and 110B, is generically and collectively referred to as deformable beam 110.The framework 108 of ccf layer 106 has three crossing members 306: except crossing members 306A and 306B, also have crossing members 306C.Crossing members 306A and 306B are respectively top crossing members and end crossing members, and crossing members 306C is intermediate interdigitated member.
Each deformable beam 110 is as electrode.In the electrostatic gap between given deformable beam 110 and another electrode, maintain electrostatic charge.For example, in Fig. 8, there is electrode 506A and 506B corresponding to deformable beam 110A and 110B.Between deformable beam 110A and electrode 506A, define electrostatic gap 508A, and define electrostatic gap 508B between deformable beam 110B and electrode 506B.Electrode 506A and 506B are generically and collectively referred to as electrode 506, and electrostatic gap 508A and 508B are generically and collectively referred to as electrostatic gap 508.In another embodiment, only can there is other electrode 506 but not two electrodes 506, so that each electrostatic gap 508 is defined between corresponding deformable beam 110 and this single other electrodes 506.Notice, in Fig. 8, electrostatic gap 508 is not illustrated as and comprises dielectric as shown at Fig. 5 A and 5B, but in another embodiment, gap 508 can comprise dielectric.
In the embodiment of Fig. 7, there is two deformable beam 110 and two fluid chamber 502 and compare and there is like that as claimed in the embodiment described before a deformable beam 110 and a fluid chamber 502 is favourable, as described below.Especially, liquid can spray from more than one fluid chamber 502 in the mode of coordinating, and sprays from identical liquid ejecting nozzle 504 to have the single liquid droplet of desired characteristic.That is to say, in the situation that deformable beam 110 is as one man out of shape, in the time that they loosen subsequently, beam 110 causes liquid also in basically identical mode, sprays from the fluid chamber 502 of their correspondences the identical liquid ejecting nozzle 504 that chamber 502 fluids are connected to.So, provide the more multi-control of volume, size etc. to the gained liquid droplet by forming from the liquid of all these fluid chamber 502.
For example, suppose following situation: wherein have N fluid chamber 502, wherein N is greater than 1, and wherein, it is the liquid of V that each fluid chamber 502 can provide volume.In one embodiment, by exciting N the M in fluid chamber 502, wherein M is less than or equal to N, can atomizing of liquids volume equal K and be multiplied by liquid droplet that V is multiplied by M (having supposed to exceed the minimum threshold of the volume that liquid sprays), wherein K is the percentage of the liquid that is shifted by given actuator mechanism.Because M can change, the volume that this means sprayed liquid droplet can be multiplied by V taking K to be controlled as increment.So, larger liquid droplet can be sprayed when needed, and less liquid droplet can be sprayed when needed.
Notice, this scene is different from and has simply the different liquids chamber that sprays different droplets from different liquid ejecting nozzles.In this case, each fluid chamber is sprayed its oneself droplet.As a comparison, in the situation that describing, fluid chamber 502 is by as one man in order to liquid ejecting nozzle 504 atomizing of liquids from identical.The quantity of the deformable beam 110 of being out of shape by increase, is increased in the amount of liquid spraying from identical liquid ejecting nozzle 504 in identical liquid droplet.
In addition, this is favourable, because except the quantity of deformable beam to be deformed 110, without making other changes.That is to say, be placed on the electrostatic charge in each deformable beam 110, and control its dependent variable of the distortion of each deformable beam 110, revise without the quantity of the deformable beam 110 based on to be deformed.So, this embodiment provides the big or small excellent process that is used for controlling or regulate the liquid droplet that the liquid ejecting nozzle 504 that is coupled to from all liq chamber 502 fluids sprays.There are the multiple fluid chamber 502 with suitable series of operations, and multiple deformable beam 110, can also realize and prevent from occurring the advantages such as liquid interruption between liquid injection period.
Another this type of advantage is, compared with the chamber of suitable size that has individual layer actuator mechanism, can obtain larger droplet size in higher frequency with utilization.That is to say to there are multiple deformable beam 110 and allow to regulate gained actuator to come to obtain with expected frequency droplet size and the liquid drop speed expected.In addition, individually actuating device (namely independent deformable beam 110) is without measure-alike.In addition, independent fluid chamber 502 is also without measure-alike.
Finally, Fig. 9 shows according to a static embodiment of the present disclosure, basic and drips as required liquid injection apparatus 800.This liquid injection apparatus 800 is shown in Figure 9 for and comprises one or more liquid delivery member 802, and one or more electrostatic liquid-ejection actuation mechanism 100.Except liquid delivery member 802 and actuating mechanism 100 and/or replace liquid delivery member 802 and actuating mechanism 100, this liquid injection apparatus 800 can comprise and typically really comprise other members.
This liquid sprays accurate dispensing device accurately to be printed or distributes liquid, because mainly or substantially do not spray the gas such as air.But term liquid comprises at least basic for liquid can comprise the liquid of certain solid matter (such as pigment) etc.The example of this class I liquid I is included in the ink in the situation of inkjet-printing device.Other examples of liquid comprise medicine, cell products (cellular product), organism, fuel etc.
Finally, provide a certain exemplary embodiments of the present disclosure.In this embodiment, there are 10 actuators (namely 10 electrostatic liquid-ejection actuation mechanisms).Liquid ejecting nozzle radius is 10 microns, and nozzle depth is 20 microns.Also have two liquid-inlets, each liquid-inlet width is 20 microns, and the degree of depth is 26 microns, and length is 300 microns.The viscosity of liquid (for example ink) is 10 centipoises.Dark 26 microns of this fluid chamber self, long 1850 microns, wide 100 microns.
This certain exemplary embodiments provides following Performance Characteristics.The each liquid droplet volume spraying from liquid ejecting nozzle is 3.3 skin liters, and has the speed of 8.8 meter per seconds.For constant liquid drop speed, drop tranmitting frequency can be 0 to 15kHz.Finally, the fluid natural resonance frequency of this embodiment of the present disclosure is 70kHz.
Claims (15)
1. an electrostatic liquid-ejection actuation mechanism, comprising:
Film;
Have two limits and be not parallel to the framework of multiple crossing members on these two limits, described two limits and the definition of described crossing members correspond respectively to one or more regions of one or more fluid chamber; And
Be arranged on the one or more deformable beam between described film and described framework, described deformable beam is separately corresponding to described fluid chamber, and described deformable beam defines multiple gaps, one of two limits of the contiguous described framework in each gap,
Wherein, at least due to described gap, described deformable beam has the width of the width that is less than fluid chamber.
2. electrostatic liquid-ejection actuation mechanism according to claim 1, wherein, two limits of described framework comprise the left side and the right, and for each deformable beam, the plurality of gap comprises first gap on the left side of contiguous framework and second gap on the right of contiguous framework
Wherein, the width of each deformable beam equals the distance between the first gap of deformable beam and the second gap of deformable beam, and
Wherein, at least due to gap, the width of each deformable beam and the width of each fluid chamber are irrelevant.
3. electrostatic liquid-ejection actuation mechanism according to claim 1, wherein, described crossing members quantitatively equals 2, and comprises top crossing members and end crossing members, and described two limits comprise the left side and the right, and
Wherein, the region defining between fluid chamber and on the left side, the right, top crossing members and end crossing members quantitatively equals 1, and comprises the single region corresponding to single fluid chamber.
4. electrostatic liquid-ejection actuation mechanism according to claim 3, wherein, described one or more deformable beam quantitatively equals 1, and comprise there is top margin, the single deformable beam on base, the left side and the right, described top margin is close to and is attached to top crossing members, described base is close to and is attached to end crossing members, and
Wherein, described multiple gap quantitatively equals 2, and comprises the first gap and the second gap, and described the first gap is between the left side of single deformable beam and the left side of framework, and described the second gap is between the right of single deformable beam and the right of framework
So that the left side of described single deformable beam and the right are not attached to described framework.
5. electrostatic liquid-ejection actuation mechanism according to claim 1, wherein, described crossing members is quantitatively greater than 2, and comprises top crossing members, end crossing members and one or more intermediate interdigitated member, and described two limits comprise the left side and the right, and
Wherein, described fluid chamber and region quantitatively equal intermediate interdigitated member and add one, between each zone definitions on the left side, the right and at least one intermediate interdigitated member.
6. electrostatic liquid-ejection actuation mechanism according to claim 5, wherein, described one or more deformable beam quantitatively equals fluid chamber, each deformable beam has top margin, base, the left side and the right, described top margin is close to and is attached to one of them crossing members, described base is close to and is attached to another crossing members, and
Wherein, for each deformable beam, described multiple gaps comprise the first gap and the second gap, and described the first gap is between the left side of deformable beam and the left side of framework, and described the second gap is between the right of deformable beam and the right of framework,
So that the left side of each deformable beam and the right are not attached to framework.
7. electrostatic liquid-ejection actuation mechanism according to claim 6, wherein, liquid can spray from fluid chamber in the mode of coordinating, to spray the single liquid droplet of expecting from fluid chamber.
8. electrostatic liquid-ejection actuation mechanism according to claim 1, wherein, described deformable beam is deformed into the second configuration in response to electrostatic charge from the first configuration, thereby is increased in the liquid volume in fluid chamber, and
Wherein, described deformable beam is replied and is turned back to the first configuration from the second configuration in response to electrostatic charge is released, thereby causes from fluid chamber atomizing of liquids.
9. electrostatic liquid-ejection actuation mechanism according to claim 1, wherein, each deformable beam is as the first electrode, described electrostatic liquid-ejection actuation mechanism also comprises the second electrode, described the second electrode is located to define electrostatic gap between the first and second electrodes with respect to the first electrode, and described the first and second electrodes for keep electrostatic charge temporarily in electrostatic gap between it.
10. electrostatic liquid-ejection actuation mechanism according to claim 1, wherein, described film and described deformable beam are made up of the first material, and described the first material is different from one or more materials for manufacturing framework.
11. electrostatic liquid-ejection actuation mechanisms according to claim 10, wherein, described the first material is tantalum-aluminium.
12. 1 kinds of electrostatic liquid-ejection actuation mechanisms, comprising:
Film;
Have two limits and be not parallel to the framework of multiple crossing members on these two limits, described two limits and the definition of described crossing members correspond respectively to one or more regions of one or more fluid chamber;
Be arranged on the one or more deformable beam between described film and described framework, described deformable beam is separately corresponding to described fluid chamber, and described deformable beam defines multiple gaps, one of two limits of the contiguous described framework in each gap,
Wherein, at least due to described gap, described deformable beam has the width that is less than and is independent of the width of fluid chamber,
Wherein, described deformable beam is deformed into the second configuration in response to electrostatic charge from the first configuration, thereby is increased in the liquid volume in fluid chamber, and
Wherein, described deformable beam is replied and is turned back to the first configuration from the second configuration in response to electrostatic charge is released, thereby causes from fluid chamber atomizing of liquids; And
The second electrode, each deformable beam is as the first electrode, described the second electrode is located to define electrostatic gap between the first and second electrodes with respect to the first electrode, and described the first and second electrodes for keeping provisionally electrostatic charge in electrostatic gap between it.
13. 1 kinds of electrophotographic liquid injection apparatus, comprising:
One or more liquid delivery member; And
Fluid is coupled to one or more electrostatic liquid-ejection actuation mechanisms of described liquid delivery member, and each electrostatic liquid-ejection actuation mechanism comprises:
Film;
Have two limits and be not parallel to the framework of multiple crossing members on these two limits, described two limits and the definition of described crossing members correspond respectively to one or more regions of one or more fluid chamber; And
Be arranged on the one or more deformable beam between described film and described framework, described deformable beam is separately corresponding to described fluid chamber, and described deformable beam defines multiple gaps, one of two limits of the contiguous described framework in each gap,
Wherein, at least due to described gap, described deformable beam has the width that is less than and is independent of the width of fluid chamber.
14. electrophotographic liquid injection apparatus according to claim 13, wherein, for each electrostatic liquid-ejection actuation mechanism, deformable beam is deformed to the second configuration in response to electrostatic charge from the first configuration, thereby increases the liquid volume in fluid chamber, and
Wherein, deformable beam is replied and is turned back to the first configuration from the second configuration in response to electrostatic charge is released, thereby causes from fluid chamber atomizing of liquids.
15. electrophotographic liquid injection apparatus according to claim 13, wherein, for each electrostatic liquid-ejection actuation mechanism, each deformable beam is as the first electrode, described electrostatic liquid-ejection actuation mechanism also comprises the second electrode, described the second electrode is located to define electrostatic gap between the first and second electrodes with respect to the first electrode, and described the first and second electrodes for keep electrostatic charge temporarily in electrostatic gap between it.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/US2008/082144 WO2010050982A1 (en) | 2008-10-31 | 2008-10-31 | Electrostatic liquid-ejection actuation mechanism |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102202895A CN102202895A (en) | 2011-09-28 |
| CN102202895B true CN102202895B (en) | 2014-06-25 |
Family
ID=42129136
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200880131785.9A Expired - Fee Related CN102202895B (en) | 2008-10-31 | 2008-10-31 | Electrostatic liquid-ejection actuation mechanism and electrostatic liquid-ejection device |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US8573747B2 (en) |
| EP (1) | EP2342081B1 (en) |
| CN (1) | CN102202895B (en) |
| TW (1) | TWI485071B (en) |
| WO (1) | WO2010050982A1 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8684500B2 (en) * | 2012-08-06 | 2014-04-01 | Xerox Corporation | Diaphragm for an electrostatic actuator in an ink jet printer |
| US9016835B1 (en) * | 2013-11-08 | 2015-04-28 | Xerox Corporation | MEMS actuator pressure compensation structure for decreasing humidity |
| CN106218223B (en) * | 2016-07-26 | 2018-06-22 | 珠海纳金科技有限公司 | A kind of method and apparatus of on-demand electrostatic spraying |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6386682B1 (en) * | 1998-01-23 | 2002-05-14 | Fuji Photo Film Co., Ltd. | Ink-jet head and driving method of the same |
| CN1681658A (en) * | 2002-08-06 | 2005-10-12 | 株式会社理光 | Electrostatic actuator formed by a semiconductor manufacturing process |
| JP3902716B2 (en) * | 2000-03-15 | 2007-04-11 | 株式会社リコー | Droplet ejection head, inkjet recording apparatus, image forming apparatus, and apparatus for ejecting droplets |
Family Cites Families (33)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5171132A (en) * | 1989-12-27 | 1992-12-15 | Seiko Epson Corporation | Two-valve thin plate micropump |
| US6113218A (en) * | 1990-09-21 | 2000-09-05 | Seiko Epson Corporation | Ink-jet recording apparatus and method for producing the head thereof |
| US5465108A (en) | 1991-06-21 | 1995-11-07 | Rohm Co., Ltd. | Ink jet print head and ink jet printer |
| DE69310022T2 (en) * | 1992-06-05 | 1997-08-21 | Seiko Epson Corp | Ink jet recording head |
| DE69506306T2 (en) * | 1994-04-20 | 1999-06-10 | Seiko Epson Corp., Tokio/Tokyo | Ink jet recording apparatus and method for manufacturing an ink jet head |
| EP0933213B1 (en) * | 1995-04-20 | 2002-07-24 | Seiko Epson Corporation | An ink jet printing apparatus and a method of controlling it |
| JP3503386B2 (en) * | 1996-01-26 | 2004-03-02 | セイコーエプソン株式会社 | Ink jet recording head and method of manufacturing the same |
| JPH1016210A (en) | 1996-07-05 | 1998-01-20 | Fuji Xerox Co Ltd | Ink jet recorder |
| KR100505514B1 (en) * | 1996-12-20 | 2005-10-19 | 세이코 엡슨 가부시키가이샤 | Electrostatic Actuator and Manufacturing Method |
| JP4141523B2 (en) * | 1997-03-19 | 2008-08-27 | セイコーエプソン株式会社 | Ink supply flow path valve device |
| US6447107B1 (en) * | 1997-03-26 | 2002-09-10 | Seiko Epson Corporation | Printing head and ink jet recording apparatus using the same |
| EP0999934B1 (en) | 1997-07-15 | 2005-10-26 | Silver Brook Research Pty, Ltd | A thermally actuated ink jet |
| US6315400B1 (en) * | 1997-07-25 | 2001-11-13 | Seiko Epson Corporation | Ink jet recording head and ink jet recorder |
| US6322198B1 (en) * | 1998-04-07 | 2001-11-27 | Minolta Co., Ltd. | Electrostatic inkjet head having spaced electrodes |
| JPH11291488A (en) | 1998-04-13 | 1999-10-26 | Minolta Co Ltd | Ink jet head |
| JP3262078B2 (en) * | 1998-09-08 | 2002-03-04 | 日本電気株式会社 | Inkjet recording head |
| JP3381779B2 (en) * | 1998-09-17 | 2003-03-04 | セイコーエプソン株式会社 | Piezoelectric vibrator unit, method of manufacturing piezoelectric vibrator unit, and ink jet recording head |
| KR100373749B1 (en) * | 1998-11-16 | 2003-04-23 | 삼성전자주식회사 | Fluid injection device using electrostatic power |
| US6474784B1 (en) * | 1998-12-08 | 2002-11-05 | Seiko Epson Corporation | Ink-jet head, ink jet printer, and its driving method |
| JP3570495B2 (en) * | 1999-01-29 | 2004-09-29 | セイコーエプソン株式会社 | Ink jet recording head |
| US6578953B2 (en) * | 1999-03-29 | 2003-06-17 | Seiko Epson Corporation | Inkjet recording head, piezoelectric vibration element unit used for the recording head, and method of manufacturing the piezoelectric vibration element unit |
| EP1043161B1 (en) * | 1999-04-08 | 2007-06-13 | Seiko Epson Corporation | Ink jet recording apparatus and cleaning control method for recording head incorporated therein |
| JP2001270112A (en) | 2000-03-24 | 2001-10-02 | Seiko Epson Corp | Ink-jet recording head and ink-jet recorder |
| US6474785B1 (en) | 2000-09-05 | 2002-11-05 | Hewlett-Packard Company | Flextensional transducer and method for fabrication of a flextensional transducer |
| DE10196634T5 (en) * | 2000-09-18 | 2005-04-07 | Par Technologies Llc | Piezoelectric drive element and such a pump using |
| US6540339B2 (en) * | 2001-03-21 | 2003-04-01 | Hewlett-Packard Company | Flextensional transducer assembly including array of flextensional transducers |
| JP2004148509A (en) * | 2001-10-04 | 2004-05-27 | Seiko Epson Corp | Liquid injection head |
| WO2003097364A1 (en) | 2002-05-20 | 2003-11-27 | Ricoh Company, Ltd. | Electrostatic actuator and liquid droplet ejecting head having stable operation characteristics against environmental changes |
| JP3951997B2 (en) * | 2003-09-25 | 2007-08-01 | ブラザー工業株式会社 | Liquid transfer device |
| US7173641B2 (en) * | 2003-12-22 | 2007-02-06 | Pasch Nicholas F | Electrostatic printers using micro electro-mechanical switching elements |
| JP4622362B2 (en) | 2004-07-26 | 2011-02-02 | ブラザー工業株式会社 | Inkjet head |
| US7267043B2 (en) * | 2004-12-30 | 2007-09-11 | Adaptivenergy, Llc | Actuators with diaphragm and methods of operating same |
| JP4424331B2 (en) * | 2005-08-01 | 2010-03-03 | セイコーエプソン株式会社 | Electrostatic actuator, droplet discharge head, method for driving droplet discharge head, and method for manufacturing electrostatic actuator |
-
2008
- 2008-10-31 WO PCT/US2008/082144 patent/WO2010050982A1/en active Application Filing
- 2008-10-31 US US13/119,601 patent/US8573747B2/en active Active
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- 2008-10-31 CN CN200880131785.9A patent/CN102202895B/en not_active Expired - Fee Related
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6386682B1 (en) * | 1998-01-23 | 2002-05-14 | Fuji Photo Film Co., Ltd. | Ink-jet head and driving method of the same |
| JP3902716B2 (en) * | 2000-03-15 | 2007-04-11 | 株式会社リコー | Droplet ejection head, inkjet recording apparatus, image forming apparatus, and apparatus for ejecting droplets |
| CN1681658A (en) * | 2002-08-06 | 2005-10-12 | 株式会社理光 | Electrostatic actuator formed by a semiconductor manufacturing process |
Also Published As
| Publication number | Publication date |
|---|---|
| EP2342081B1 (en) | 2014-03-19 |
| TWI485071B (en) | 2015-05-21 |
| EP2342081A4 (en) | 2012-08-22 |
| WO2010050982A1 (en) | 2010-05-06 |
| US20110169894A1 (en) | 2011-07-14 |
| EP2342081A1 (en) | 2011-07-13 |
| CN102202895A (en) | 2011-09-28 |
| TW201018588A (en) | 2010-05-16 |
| US8573747B2 (en) | 2013-11-05 |
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