KR100242157B1 - Ink jet printer head with an electrostatic micro actuator - Google Patents

Ink jet printer head with an electrostatic micro actuator Download PDF

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Publication number
KR100242157B1
KR100242157B1 KR1019970074291A KR19970074291A KR100242157B1 KR 100242157 B1 KR100242157 B1 KR 100242157B1 KR 1019970074291 A KR1019970074291 A KR 1019970074291A KR 19970074291 A KR19970074291 A KR 19970074291A KR 100242157 B1 KR100242157 B1 KR 100242157B1
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South Korea
Prior art keywords
ink
electrostatic
pressure chamber
printer head
stator
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KR1019970074291A
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Korean (ko)
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KR19990054470A (en
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김승한
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김덕중
사단법인고등기술연구원연구조합
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14314—Structure of ink jet print heads with electrostatically actuated membrane
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/015—Ink jet characterised by the jet generation process
    • B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
    • B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
    • B41J2/04576—Control methods or devices therefor, e.g. driver circuits, control circuits controlling heads of electrostatic type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/1433—Structure of nozzle plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/015—Ink jet characterised by the jet generation process
    • B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2002/043—Electrostatic transducer
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14387—Front shooter
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/03—Specific materials used

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  • Particle Formation And Scattering Control In Inkjet Printers (AREA)

Abstract

본 발명은 정전구동형 잉크젯 프린터 헤드에 관한 것으로, 빗형상체(102)에 n개의 핑거(104)가 하방으로 돌출되는 고정자(110)와, 빗형상체(122)에 n + 1개의 핑거(124)가 상방으로 돌출되고, 빗형상체(122)에 연결된 외부 프레임(130)으로 이루어진 이동자(120)로 구성된 정전구동기(100)와, 헤드 몸체(210)의 일측부에 잉크 유입구(212)가 형성되고, 다이어프램(220)이 상기 정전구동기(100)의 외부 프레임(130)에 연결되고, 잉크분사판(230)에 잉크 분사노즐(232)이 형성되어, 내부에 압력챔버(240)가 형성된 프린터 헤드부(200)로 구성되어, 상기 정전구동기(100)의 고정자 및 이동자(110)(120)에 전압을 인가하면, 상호간에 끌어당기는 방향으로 발생되는 정전력에 의해 상기 프린터 헤드부(200)에 압력을 가함으로서, 상기 압력챔버(240)내의 잉크를 상기 잉크 분사판(230)의 잉크 분사노즐(232)을 통해 분사하고, 상기 정전구동기(100)의 복원에 의해 상기 잉크 유입구(212)를 통해 잉크가 유입되어 상기 압력챔버(240)에 채워지는 것으로, 정전구동기의 고정자 및 이동자사이의 간격이 불과 수 μm( 10-6 m)이하이므로, 프린터 헤드의 노즐 한 개에 대한 압력챔버 및 다이아프램 등을 구성하는 프린터 헤드부의 크기를 수백 μm로 제작가능하게 되므로, 전체적인 헤드구조를 소형화 하고, 발생되는 변위를 크게할 수 있는 이점을 가진다.BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electrostatically driven inkjet printer head, comprising: a stator 110 in which n fingers 104 protrude downwardly on a comb shape 102 and n + 1 fingers 124 on a comb shape 122. Is protruded upward, the electrostatic driver 100 consisting of a mover 120 made of an outer frame 130 connected to the comb 122 and the ink inlet 212 is formed on one side of the head body 210 The diaphragm 220 is connected to the outer frame 130 of the electrostatic driver 100, and the ink jet nozzle 232 is formed on the ink jet plate 230, so that the pressure chamber 240 is formed therein. When the voltage is applied to the stator and the mover 110, 120 of the electrostatic driver 100, the electrostatic actuator 100 is formed by the electrostatic force generated in the mutually attracting direction to the printer head 200 By applying pressure, ink in the pressure chamber 240 ejects ink from the ink ejection plate 230. It is injected through the bla 232, the ink is introduced through the ink inlet 212 by the restoration of the electrostatic driver 100 is filled in the pressure chamber 240, between the stator and the mover of the electrostatic actuator Only a few μm apart 10 -6 m) or less, it is possible to manufacture the size of the print head portion constituting the pressure chamber and diaphragm, etc. for one nozzle of the print head to several hundred μm, so that the overall head structure can be reduced and the displacement generated can be increased Has an advantage.

Description

정전구동형 잉크젯 프린터 헤드Capacitive Inkjet Printer Head

본 발명은 정전구동형 잉크젯 프린터 헤드에 관한 것으로, 특히 전체적인 헤드 구조를 소형화하면서 발생되는 변위를 크게할 수 있는 정전구동형 잉크젯 프린터 헤드에 관한 것이다.BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electrostatically driven inkjet printer head, and more particularly, to an electrostatically driven inkjet printer head capable of increasing the displacement generated while miniaturizing the overall head structure.

잘 알려진 바와 같이, 잉크젯 프린터 헤드에는 열전사(thermal) 방식 또는 압전 방식으로 나누어지며, 이러한 터멀 방식은 헤드의 챔버내에 열을 공급할 수 있는 히터를 장착하여 매우 짧은 시간안에 상당히 큰 열에너지를 공급함에 따라, 챔버내의 잉크에 기포(bubble)가 형성되고, 이에의해 잉크가 노즐을 통해 분사되는 것이지만, 터멀 방식은 열에너지에 의해 발생되는 기포의 압력으로 인한 연속적인 충격 때문에 내구성에 문제가 있으며, 잉크 방울의 크기를 조절하기 어렵고, 속도의 증가에 한계가 있었다.As is well known, inkjet printer heads are divided into thermal or piezoelectric methods, which are equipped with a heater capable of supplying heat into the chamber of the head, thereby providing a considerable amount of thermal energy in a very short time. Bubbles are formed in the ink in the chamber, and ink is ejected through the nozzle, but the thermal method has a problem in durability due to the continuous impact due to the pressure of the bubble generated by thermal energy. Difficult to scale and limited in speed increase.

이에 반하여 압전 방식은 헤드의 챔버에 압력을 가할 수 있도록, 다이아프램에 압전물질을 부착하여 전압이 인가되면 힘을 발생시키는 압전특성을 이용하여 챔버에 압력을 제공하여 잉크를 밀어내는 방식으로, 인가되는 전압에 따라 힘을 발생시켜 챔버내에 압력을 전달하는 방식이므로 속도 측면에서 성능이 우수하여 널리 사용되고 있다.On the other hand, the piezoelectric method is a method in which a piezoelectric material is attached to a diaphragm so as to apply pressure to the chamber of the head so as to push the ink by providing pressure to the chamber using a piezoelectric property that generates a force when a voltage is applied. It is widely used because of its excellent performance in terms of speed because it generates a force in accordance with the voltage to transfer the pressure in the chamber.

이러한 압전형 잉크젯 프린터 헤드는 종래에는 도 1에 도시된 바와 같이, 잉크분사구멍(2)이 형성된 바닥의 바닥판(10)과, 잉크흐름구멍(12)(14)이 형성된 금속판(20)과, 상부의 덮개판(30)이 순차로 적층된다. 바닥판(10)과 금속판(20)사이에는 잉크 공급통로 유지부(40)가 개재되어 잉크공급통로(50)가 형성되는 한편, 금속판(20)과 덮개판(30)사이에 간격유지판(60)이 개재되어, 잉크공급통로(50)로 공급된 잉크가 잉크흐름구멍(12)을 통해 압력챔버(70)에 공급된다.As shown in FIG. 1, the piezoelectric inkjet printer head includes a bottom plate 10 having a bottom portion 10 formed with ink ejection holes 2, a metal plate 20 having ink flow holes 12, 14 formed therein; The upper cover plate 30 is sequentially stacked. An ink supply passageway 50 is formed between the bottom plate 10 and the metal plate 20 to form an ink supply passageway 50, while a gap maintaining plate is formed between the metal plate 20 and the cover plate 30. 60 is interposed, the ink supplied to the ink supply passage 50 is supplied to the pressure chamber 70 through the ink flow hole 12.

또한, 공급통로 유지부(40)에는 금속판(20)의 잉크흐름구멍(14)과 바닥판(10)의 잉크분사구멍(2)을 통해 압력챔버(70)에 공급된 잉크를 분사하는 분사통로(42)가 형성된다.In addition, the supply passage holding portion 40 is an injection passage for injecting the ink supplied to the pressure chamber 70 through the ink flow hole 14 of the metal plate 20 and the ink injection hole 2 of the bottom plate 10. 42 is formed.

한편, 압력챔버(70)상부의 덮개판(30)위에는 압력챔버(70)에 압력을 가하기 위해 상하의 전극(82)(84)과 그 사이의 압전체(86)로 이루어진 압전 액튜에이터(80)가 부착되어, 압력챔버(70)에 압력을 가하게 된다.On the other hand, a piezoelectric actuator 80 composed of upper and lower electrodes 82 and 84 and a piezoelectric element 86 therebetween is attached on the cover plate 30 of the upper portion of the pressure chamber 70 to apply pressure to the pressure chamber 70. Thus, pressure is applied to the pressure chamber 70.

이와 같이 구성된 종래의 압전형 잉크젯 프린터 헤드는 압력챔버(70)와 잉크 공급통로(50)에 잉크가 차 있다가 외부에서 전기신호가 인가되면, 인가된 전압에 따라 압전체(86)가 수축하게 된다. 이때, 압전체(86)의 하부 전극(84)이 덮개판(30)에 부착되어 있기 때문에, 덮개판(30)이 하부로 휘어져서 압력챔버(70)에 압력을 가하게 된다. 압력챔버(70)가 압력을 받게 되면, 압력챔버(70)내에 있는 잉크는 금속판(20)의 잉크흐름구멍(14)과 분사통로(42)와 잉크분사구멍(2)을 통해 분사된다. 이후, 덮개판(30)이 원래의 위치로 복원되면, 잉크 공급통로(50)에 있는 잉크는 압력챔버(70)로 흡입되고, 잉크 공급통로(50)에는 다시 잉크가 채워진다.In the conventional piezoelectric inkjet printer head configured as described above, when the ink is filled in the pressure chamber 70 and the ink supply passage 50 and an electric signal is applied from the outside, the piezoelectric element 86 contracts according to the applied voltage. . At this time, since the lower electrode 84 of the piezoelectric body 86 is attached to the cover plate 30, the cover plate 30 is bent downward to apply pressure to the pressure chamber 70. When the pressure chamber 70 is pressurized, the ink in the pressure chamber 70 is injected through the ink flow hole 14, the injection passage 42, and the ink injection hole 2 of the metal plate 20. Then, when the cover plate 30 is restored to its original position, the ink in the ink supply passage 50 is sucked into the pressure chamber 70, and the ink supply passage 50 is filled with ink again.

하지만, 이러한 종래의 압전형 잉크젯 프린터 헤드는 발생되는 변위가 적다는 문제점이 있었다.However, such a conventional piezoelectric inkjet printer head has a problem of less displacement.

본 발명은 이러한 문제들을 해결하기 위해 안출된 것으로, 그 목적은 전체적인 헤드구조를 소형화 하고, 발생되는 변위를 크게할 수 있는 정전구동형 잉크젯 프린터 헤드를 제공하는 것이다.SUMMARY OF THE INVENTION The present invention has been made to solve these problems, and an object thereof is to provide an electrostatically driven inkjet printer head capable of miniaturizing the overall head structure and increasing the displacement generated.

이러한 목적들을 달성하기 위한 수단으로서 본 발명의 정전구동형 잉크젯 프린터 헤드는 빗형상체에 n개의 핑거가 하방으로 돌출되는 고정자와, 빗형상체에 n + 1개의 핑거가 상방으로 돌출되고, 빗형상체에 연결된 외부 프레임으로 이루어진 이동자로 구성된 정전구동기와, 헤드 몸체의 일측부에 잉크 유입구가 형성되고, 다이어프램이 상기 정전구동기의 외부 프레임에 연결되고, 잉크분사판에 잉크 분사노즐이 형성되어, 내부에 압력챔버가 형성된 프린터 헤드부로 구성되어, 상기 정전구동기의 고정자 및 이동자에 전압을 인가하면, 상호간에 끌어당기는 방향으로 발생되는 정전력에 의해 상기 프린터 헤드부에 압력을 가함으로서, 상기 압력챔버내의 잉크를 상기 잉크 분사판의 잉크 분사노즐을 통해 분사하고, 상기 정전구동기의 복원에 의해 상기 잉크 유입구를 통해 잉크가 유입되어 상기 압력챔버에 채워지는 것을 특징으로 한다.As a means for achieving the above objects, the electrostatically driven inkjet printer head of the present invention has a stator with n fingers protruding downwardly into a comb shape, n + 1 fingers protruding upward from a comb shape, and connected to a comb shape. An electrostatic driver composed of a mover made of an outer frame, an ink inlet is formed at one side of the head body, a diaphragm is connected to the outer frame of the electrostatic actuator, an ink jet nozzle is formed in the ink jet plate, and a pressure chamber therein. And a printer head portion having a shape, and applying pressure to the stator and the mover of the electrostatic driver, by applying pressure to the print head portion by electrostatic force generated in a mutually attracting direction, the ink in the pressure chamber Spraying through an ink jetting nozzle of an ink jetting plate, and restoring the electrostatic driver Ink is introduced through the ink inlet to fill the pressure chamber.

본 발명에 따른 정전구동방식은 열전사방식또는 압전방식보다 수십 kHz이상의 더 높은 주파수에서 작동할 수 있고, 제조공정도 간단하므로, 생산성 측면에서 유리한 효과를 가진다.The electrostatic drive method according to the present invention can operate at higher frequencies of several tens of kHz or more than the thermal transfer method or the piezoelectric method, and the manufacturing process is simple, and thus has an advantageous effect in terms of productivity.

도 1은 종래의 압전형 잉크젯 프린터 헤드의 구성을 나타내는 단면도이고,1 is a cross-sectional view showing the configuration of a conventional piezoelectric inkjet printer head,

도 2는 본 발명의 바람직한 일 실시예에 따른 정전구동형 잉크젯 프린터 헤드의 구성을 나타내는 개략 단면도이고,2 is a schematic cross-sectional view showing the configuration of an electrostatically driven inkjet printer head according to an embodiment of the present invention;

도 3은 도 2의 정전 구동기의 상세도이다.3 is a detailed view of the electrostatic driver of FIG. 2.

< 도면의 주요부분에 대한 부호의 설명 ><Description of Symbols for Major Parts of Drawings>

2 : 잉크분사구멍 10 : 금속 분사구멍판2: ink ejection hole 10: metal ejection hole plate

12,14 : 잉크흐름구멍 20 : 금속판12,14: ink flow hole 20: metal plate

30 : 덮개판 40 ; 잉크 공급통로 유지부30: cover plate 40; Ink Supply Path Holder

42 : 분사통로 50 : 잉크공급통로42: injection passage 50: ink supply passage

60 : 간격유지판 70 : 압력챔버60: space maintaining plate 70: pressure chamber

80 : 압전 액튜에이터 82,84 : 상하부 전극80: piezoelectric actuator 82,84: upper and lower electrodes

86 : 압전체 100 : 정전작동기86: piezoelectric 100: electrostatic actuator

102 : 빗형상체 104 : 핑거102: comb shaped body 104: finger

110 : 고정자 120 : 이동자110: stator 120: mover

122 : 빗형상체 124 : 핑거122: comb shaped body 124: finger

130 : 외부 프레임 200 : 프린터 헤드부130: outer frame 200: print head portion

210 : 헤드 몸체 212 : 잉크 유입구210: head body 212: ink inlet

220 : 다이어프램 230 : 잉크 분사판220: diaphragm 230: ink jet plate

232 : 잉크 분사노즐 240 : 압력챔버232: ink jet nozzle 240: pressure chamber

본 발명의 상기 및 기타 목적과 여러 가지 장점은 이 기술분야에 숙련된 사람들에 의해 첨부된 도면을 참조하여 하기에 기술되는 발명의 바람직한 실시예로부터 더욱 명확하게 될 것이다.The above and other objects and various advantages of the present invention will become more apparent from the preferred embodiments of the invention described below with reference to the accompanying drawings by those skilled in the art.

이하 첨부된 도면에 의해 본 발명에 따른 정전구동형 잉크젯 프린터 헤드를 상세히 설명하면 다음과 같다.Hereinafter, the electrostatically driven inkjet printer head according to the present invention will be described in detail with reference to the accompanying drawings.

도 2에는 본 발명에 따른 정전구동형 잉크젯 프린터 헤드의 구성을 나타내고, 도 3에는 정전구동기의 상세한 구성을 나타내는 것으로, 본 발명의 잉크젯 프린터 헤드의 특징적 구성은, 정전구동기(100)를 이용하여 프린터 헤드부(200)에 압력을 가하는 것이다.Figure 2 shows the configuration of the electrostatically driven inkjet printer head according to the present invention, Figure 3 shows the detailed configuration of the electrostatic driver, the characteristic configuration of the inkjet printer head of the present invention, the electrostatic driver 100 using the printer The pressure is applied to the head 200.

도 3에 도시된 바와 같이, 정전구동기(100)는 빗형상체(102)에 n개의 핑거(104)가 하방으로 돌출되는 고정자(110)와, 빗형상체(122)에 n + 1개의 핑거(124)가 상방으로 돌출되고, 빗형상체(122)에 연결된 외부 프레임(130)으로 이루어진 이동자(120)로 구성되며, 이러한 고정자(110) 및 이동자(120)는 도핑(doping)처리된 다결정실리콘(polysilicon)과 같은 물질로 이루어 지므로서, 고정자 및 이동자(110)(120)에 전압을 인가하면, 상호간에 끌어당기는 방향의 정전력을 발생시키며, 인가된 전압(V)과 발생되는 정전력(Fe) 및 변위(y)의 관계는 다음과 같다.As shown in FIG. 3, the electrostatic actuator 100 includes a stator 110 in which n fingers 104 protrude downward from the comb shape 102, and n + 1 fingers 124 in the comb shape 122. ) Protrudes upward and is composed of a mover (120) consisting of an outer frame (130) connected to the comb body (122), and the stator (110) and the mover (120) are doped (polysilicon). Since it is made of a material such as), when a voltage is applied to the stator and the mover (110, 120), it generates a constant power in the direction of mutual attraction, the applied voltage (V) and the generated electrostatic power (Fe) And the relationship of the displacement y is as follows.

Figure 1019970074291_B1_M0001
Figure 1019970074291_B1_M0001

여기서, n1 은 두 빗형상체간의 간격g의 개수이고, n2 는 두 빗형상체간의 간격 g1 의 개수이며, εo 는 공기중에서 8.854× 10-12 인 공기의 유전상수이고, V는 전압이고, t는 핑거의 두께이고, g는 양 빗형상체의 각 측면사이의 간격이고, y는 양 빗형상체간에 전압이 인가되었을 때 수축되는 변위량이고, g1 는 상부 빗형상체와 하부 빗형상체 핑거의 상부부분 또는 하부 빗형상체와 상부 빗형상체 핑거의 하부부분의 간격이고, lf는 핑거의 각각의 폭길이이다.here, n 1 Is the number of spacings g between two combs n 2 Is the spacing between two combs g 1 Is the number of ε o 8.854 × in the air 10 -12 Is the dielectric constant of air, V is the voltage, t is the thickness of the finger, g is the spacing between each side of both combs, y is the amount of displacement that contracts when voltage is applied between the combs, g 1 Is the distance between the upper portion of the upper comb and lower comb fingers or the lower portion of the lower comb and upper comb fingers, and lf is the respective width of the fingers.

이와 같은 빗살형 정전구동기는 모든 구조를 MEMS(micro - electro - mechanical systems)공정에 의해 제작하므로 고정자(110) 및 이동자(120)사이의 간격이 불과 수 μm( 10-6 m)이하로 제작가능하게 된다.Since the comb-type electrostatic actuator is manufactured by the micro-electro-mechanical systems (MEMS) process, the spacing between the stator 110 and the mover 120 is only several μm ( 10 -6 m) It becomes possible to manufacture below.

한편, 프린터 헤드부(200)는, 도 2에 도시된 바와 같이, 헤드 몸체(210)의 일측부에 잉크 유입구(212)가 형성되고, 다이어프램(220)이 정전구동기(100)의 외부 프레임(130)에 연결되고, 잉크분사판(230)에 잉크 분사노즐(232)이 형성되어, 내부에 압력챔버(240)가 형성되어 있다.On the other hand, the printer head 200, as shown in Figure 2, the ink inlet 212 is formed on one side of the head body 210, the diaphragm 220 is the outer frame of the electrostatic driver 100 ( 130, an ink jetting nozzle 232 is formed on the ink jet plate 230, and a pressure chamber 240 is formed therein.

이와 같이 구성된 본 발명에 따른 정전구동형 잉크젯 프린터 헤드는 고정자(110) 및 이동자(120)에 전압이 인가되면, 인가되는 전압의 제곱에 비례하여 생성되는 정전기력(electrostatic force)에 의해 이동자(120)가 고정자(110)쪽으로 끌려가게된다. 이 결과 이동자(120)의 외부 프레임(130)에 연결된 다이어프램(220)에 압력이 가해지게 되어, 압력챔버(240)에 채워져 있는 잉크가 잉크분사판(230)의 잉크 분사노즐(232)을 통해 분사된다. 이동자(120)가 원래의 위치로 복원되면, 잉크공급원(도시하지 않음)으로부터 잉크 유입구(212)를 통해 잉크가 공급되어 압력챔버(240)내에 채워진다.In the electrostatically driven inkjet printer head according to the present invention configured as described above, when voltage is applied to the stator 110 and the mover 120, the mover 120 is formed by an electrostatic force generated in proportion to the square of the applied voltage. Is pulled toward the stator 110. As a result, pressure is applied to the diaphragm 220 connected to the outer frame 130 of the mover 120, so that the ink filled in the pressure chamber 240 passes through the ink jet nozzle 232 of the ink jet plate 230. Sprayed. When the mover 120 is restored to its original position, ink is supplied from the ink supply source (not shown) through the ink inlet 212 and filled in the pressure chamber 240.

이상에서 설명한 바와 같이, 본 발명의 정전구동형 잉크젯 프린터 헤드는 정전구동기의 고정자 및 이동자사이의 간격이 불과 수 μm( 10-6 m)이하이므로, 프린터 헤드의 노즐 한 개에 대한 압력챔버 및 다이아프램 등을 구성하는 프린터 헤드부의 크기를 수백 μm로 제작가능하게 되므로, 전체적인 헤드구조를 소형화 하고, 발생되는 변위를 크게할 수 있는 이점을 가진다.As described above, the electrostatically driven inkjet printer head of the present invention has a distance of only a few μm between the stator and the mover of the electrostatic actuator. 10 -6 m) or less, it is possible to manufacture the size of the print head portion constituting the pressure chamber and diaphragm, etc. for one nozzle of the print head to several hundred μm, so that the overall head structure can be reduced and the displacement generated can be increased Has an advantage.

Claims (4)

정전구동형 잉크젯 프린터 헤드에 있어서,In the electrostatically driven inkjet printer head, 빗형상체(102)에 n개의 핑거(104)가 하방으로 돌출되는 고정자(110)와, 빗형상체(122)에 n + 1개의 핑거(124)가 상방으로 돌출되고, 빗형상체(122)에 연결된 외부 프레임(130)으로 이루어진 이동자(120)로 구성된 정전구동기(100)와,The stator 110 in which n fingers 104 protrude downward from the comb shape 102, and n + 1 fingers 124 protrude upward from the comb shape 122, and are connected to the comb shape 122. Electrostatic driver 100 composed of a mover 120 made of an outer frame 130, 헤드 몸체(210)의 일측부에 잉크 유입구(212)가 형성되고, 다이어프램(220)이 상기 정전구동기(100)의 외부 프레임(130)에 연결되고, 잉크분사판(230)에 잉크 분사노즐(232)이 형성되어, 내부에 압력챔버(240)가 형성된 프린터 헤드부(200)로 구성되어,An ink inlet 212 is formed at one side of the head body 210, the diaphragm 220 is connected to the outer frame 130 of the electrostatic actuator 100, and the ink jet nozzles are formed on the ink jet plate 230. 232 is formed, and consists of a printer head portion 200 is formed with a pressure chamber 240 therein, 상기 정전구동기(100)의 고정자 및 이동자(110)(120)에 전압을 인가하면, 상호간에 끌어당기는 방향으로 발생되는 정전력에 의해 상기 프린터 헤드부(200)에 압력을 가함으로서, 상기 압력챔버(240)내의 잉크를 상기 잉크 분사판(230)의 잉크 분사노즐(232)을 통해 분사하고, 상기 정전구동기(100)의 복원에 의해 상기 잉크 유입구(212)를 통해 잉크가 유입되어 상기 압력챔버(240)에 채워지는 것을 특징으로 하는 정전구동형 잉크젯 프린터 헤드.When voltage is applied to the stator and the movers 110 and 120 of the electrostatic driver 100, the pressure chamber is applied by applying pressure to the print head 200 by electrostatic power generated in a mutually attracting direction. Ink in the 240 is injected through the ink jetting nozzle 232 of the ink jetting plate 230, and ink is introduced through the ink inlet 212 by restoring the electrostatic actuator 100, so that the pressure chamber An electrostatically driven inkjet printer head, characterized in that it is filled in (240). 제 1 항에 있어서,The method of claim 1, 상기 정전구동기(100)의 고정자(110) 및 이동자(120)는 도핑(doping)처리된 다결정실리콘(polysilicon)과 같은 물질로 만들어지는 것을 특징으로 하는 정전구동형 잉크젯 프린터 헤드.The stator 110 and the mover 120 of the electrostatic actuator 100 are made of a material such as doped polycrystalline silicon. 제 1 항에 있어서,The method of claim 1, 상기 정전구동기(100)의 고정자(110) 및 이동자(120) 상호간에 발생되는 정전력(Fe)과, 인가된 전압(V) 및 변위(y)의 관계는 다음과 같은 것을 특징으로 하는 정전구동형 잉크젯 프린터 헤드.The relationship between the electrostatic force (Fe) generated between the stator 110 and the mover 120 of the electrostatic driver 100, the applied voltage (V) and the displacement (y) is as follows. Type inkjet printer head.
Figure 1019970074291_B1_M0001
Figure 1019970074291_B1_M0001
 여기서, n1 은 두 빗형상체간의 간격g의 개수이고, n2 는 두 빗형상체간의 간격 g1 의 개수이며, εo 는 공기중에서 8.854× 10-12 인 공기의 유전상수이고, V는 전압이고, t는 핑거의 두께이고, g는 양 빗형상체의 각 측면사이의 간격이고, y는 양 빗형상체간에 전압이 인가되었을 때 수축되는 변위량이고, g1 는 상부 빗형상체와 하부 빗형상체 핑거의 상부부분 또는 하부 빗형상체와 상부 빗형상체 핑거의 하부부분의 간격이고, lf는 핑거의 각각의 폭길이이다.here, n 1 Is the number of spacings g between two combs n 2 Is the spacing between two combs g 1 Is the number of ε o 8.854 × in the air 10 -12 Is the dielectric constant of air, V is the voltage, t is the thickness of the finger, g is the spacing between each side of both combs, y is the amount of displacement that contracts when voltage is applied between the combs, g 1 Is the distance between the upper portion of the upper comb and lower comb fingers or the lower portion of the lower comb and upper comb fingers, and lf is the respective width of the fingers. 제 1 항에 있어서,The method of claim 1, 상기 정전구동기(100)는 모든 구조를 MEMS(micro - electro - mechanical systems)공정에 의해 제작하는 것을 특징으로 하는 정전구동형 잉크젯 프린터 헤드.The electrostatic driver 100 is a electrostatically-driven inkjet printer head, characterized in that all structures are manufactured by a MEMS (micro-electro-mechanical systems) process.
KR1019970074291A 1997-12-26 1997-12-26 Ink jet printer head with an electrostatic micro actuator KR100242157B1 (en)

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Publication number Priority date Publication date Assignee Title
US7506967B2 (en) 2005-03-11 2009-03-24 Samsung Electro-Mechanics Co., Ltd Ink jet head having an electrostatic actuator, ink cartridge, and inkjet printer

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7506967B2 (en) 2005-03-11 2009-03-24 Samsung Electro-Mechanics Co., Ltd Ink jet head having an electrostatic actuator, ink cartridge, and inkjet printer
US7910010B2 (en) 2005-03-11 2011-03-22 Samsung Electro-Mechanics Co., Ltd. Ink jet head having an electrostatic actuator and manufacturing method of the same

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