CN102197454B - Remote access gateway for semiconductor processing equipment - Google Patents
Remote access gateway for semiconductor processing equipment Download PDFInfo
- Publication number
- CN102197454B CN102197454B CN200980142493.XA CN200980142493A CN102197454B CN 102197454 B CN102197454 B CN 102197454B CN 200980142493 A CN200980142493 A CN 200980142493A CN 102197454 B CN102197454 B CN 102197454B
- Authority
- CN
- China
- Prior art keywords
- interface
- local computer
- access
- computer subsystem
- subsystem
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 238000012545 processing Methods 0.000 title claims abstract description 34
- 239000004065 semiconductor Substances 0.000 title claims abstract description 26
- 238000000034 method Methods 0.000 claims description 24
- 230000006870 function Effects 0.000 claims description 16
- 238000003860 storage Methods 0.000 claims description 15
- 230000007246 mechanism Effects 0.000 claims description 13
- 238000012546 transfer Methods 0.000 claims description 13
- 230000008859 change Effects 0.000 claims description 11
- 230000008569 process Effects 0.000 claims description 6
- 238000012937 correction Methods 0.000 claims description 4
- 230000000007 visual effect Effects 0.000 claims description 4
- 238000005520 cutting process Methods 0.000 claims description 3
- 238000012958 reprocessing Methods 0.000 claims description 3
- 230000000694 effects Effects 0.000 claims description 2
- 241000699670 Mus sp. Species 0.000 abstract 1
- 238000004891 communication Methods 0.000 description 16
- 238000004364 calculation method Methods 0.000 description 10
- 239000000758 substrate Substances 0.000 description 10
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 238000009434 installation Methods 0.000 description 3
- 230000003993 interaction Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000003044 adaptive effect Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000003032 molecular docking Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 208000003164 Diplopia Diseases 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 230000006399 behavior Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- WYEMLYFITZORAB-UHFFFAOYSA-N boscalid Chemical compound C1=CC(Cl)=CC=C1C1=CC=CC=C1NC(=O)C1=CC=CN=C1Cl WYEMLYFITZORAB-UHFFFAOYSA-N 0.000 description 1
- 238000011278 co-treatment Methods 0.000 description 1
- 230000003750 conditioning effect Effects 0.000 description 1
- 238000013480 data collection Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000001152 differential interference contrast microscopy Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 208000029444 double vision Diseases 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 230000007717 exclusion Effects 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 238000013507 mapping Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 231100000614 poison Toxicity 0.000 description 1
- 230000007096 poisonous effect Effects 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 230000004224 protection Effects 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
- G05B19/409—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by using manual data input [MDI] or by using control panel, e.g. controlling functions with the panel; characterised by control panel details or by setting parameters
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/01—Input arrangements or combined input and output arrangements for interaction between user and computer
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F3/00—Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
- G06F3/14—Digital output to display device ; Cooperation and interconnection of the display device with other functional units
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Theoretical Computer Science (AREA)
- Human Computer Interaction (AREA)
- Manufacturing & Machinery (AREA)
- General Engineering & Computer Science (AREA)
- Automation & Control Theory (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Computer And Data Communications (AREA)
- User Interface Of Digital Computer (AREA)
Abstract
An apparatus for providing an interface for semiconductor processing equipment is disclosed. In some embodiments, an apparatus for providing an interface for semiconductor processing equipment having an interface card includes a display logic subsystem to provide an interface to one or more devices such as video and information displays, light pens, keyboards, computer mice, and warning light networks and alarms via a data and control bus; a bridge to provide access to the data and control bus; and a local computer subsystem coupled to the bridge and the display logic subsystem, wherein the local computer subsystem provides access to one or more remote devices.
Description
the cross reference of association request
The U.S. Provisional Patent Application sequence number 61/108,308 that the application submitted based on October 24th, 2008, be incorporated into this by it by reference.
Technical field
Generally speaking embodiments of the invention are about semiconductor processing equipment, and in more specific words, are to set up interface (interfacing) about the processing controller of equipment therewith.
Background technology
Along with technological progress, need the upgrading obsolete equipment providing sooner, better and operation more reliably.Yet the upgrading of equipment usually be take operating environment and must be re-constructed as cost.Usually, change operating environment inadvisable, because change, to the vital system component of overall task, will have inevitable risk.This danger is especially obvious in the semiconductor processes field, and wherein minor alteration also may confuse the system through careful structure, thereby causes output to reduce and other manufacturing defect.This risk causes many terminal users still irresolute to its system of upgrading, contrary problem and the restriction of selecting to accept outmoded hardware.Particularly, there is this type of restriction in the input of this semiconductor processing equipment and output interface.The change of input and output interface requires systems soft ware is upgraded, and this will cause great risk to the careful user who has constructed system.
Therefore, inventor of the present invention provides a kind of device to wafer-process equipment, to provide remote access gateway, and this device contributes to provide transparent upgrading path to the terminal user of device.
Summary of the invention
The present invention has disclosed the device and method that interface is provided for semiconductor processing equipment.In certain embodiments, for the semiconductor processing equipment with adapter provides the device of interface, comprise: the display logic subsystem, its in order to via control bus to one or more device (such as video and information display, light pen, keyboard, computer mouse and emergency warning lamp network and siren), to provide interface; Bridger, it is in order to provide the access to control bus; And the local computer subsystem, it is connected to this bridger and this display logic subsystem, and wherein this local computer subsystem provides the access to one or more remote-control device.
In certain embodiments, for providing the device of interface, the semiconductor processing equipment with European general module (VME) adapter can comprise: the display logic subsystem, it is in order to provide interface via the VME bus to one or more device (comprising video and information display, light pen, keyboard, computer mouse and emergency warning lamp network and siren), this display logic subsystem comprises the light pen internal memory, is used to the local computer subsystem to provide in light pen buffer, offset correction or slider position one or many persons' access; And further comprise video memory, be used to the local computer subsystem that the access to Visual Display Data is provided; The one VME bridger, it is connected to this display logic subsystem so that the access to the VME bus to be provided; The local computer subsystem, it is connected to this VME bridger and this display logic subsystem, wherein this local computer subsystem provides the access to one or more remote-control device, and wherein these remote-control devices comprise local video display, high speed message and send in service interface, network interface, the second keyboard and mouse interface or outside storage interface at least one; The 2nd VEM bridger, it is connected to this local computer subsystem so that the access to this VEM bus to be provided; Switching mechanism, it is connected to this local computer subsystem so that fault secure and local cutting function to be provided, and wherein this switching mechanism is in the situation that hardware fault automatic disconnection remote access; And video interface, for video output is provided; And the light pen interface, provide the input access for the light pen instrument for being connected to the display logic subsystem.
In certain embodiments, a kind ofly for providing the method for interface, the semiconductor processing equipment with adapter comprises: use in the input of local computer subsystem processes and output at least one, and access display logic subsystem inputs or outputs to carry out at least one.Hereinafter will more discuss other and further embodiment of the present invention in detail.
The accompanying drawing explanation
So the feature of the present invention of above-mentioned brief introduction can further be understood and narration with reference to the embodiment that the present invention is more specifically described, part embodiment is illustrated in accompanying drawing.Yet it is to be noted, accompanying drawing only illustrates exemplary embodiments of the present invention, therefore should not be regarded as the restriction of its scope, the present invention also is applicable to other embodiment with equal effect.
Fig. 1 illustrates the calcspar that the system controller that uses embodiments of the invention and semiconductor processes instrument is set up the system of interface.
Fig. 2 illustrates the calcspar of embodiments of the invention and data and control bus.
Fig. 3 illustrates the calcspar of the embodiment of local computer system assembly of the present invention.
Fig. 4 illustrates the flow chart of the embodiment of the method that makes it possible to the remote access semiconductor processing equipment.
Simplified for clarity and the not drawn on scale accompanying drawing.For the ease of understanding, in the situation that possible, use identical element numbers to indicate assembly identical in each figure., the assembly that disclosed in one embodiment also can be advantageously used in other embodiment to meaning.
Embodiment
This paper describes the device that remote access gateway is provided for semiconductor processing equipment.Device of the present invention advantageously provides interface for video, light pen and remote access capability.In addition, the less power of previous effort phase specific consumption in device of the present invention and this field and produce less heat takies similar card footprint area simultaneously when old-fashioned (legacy) equipment of replacement.This installs behavior and the communication of the old-fashioned video of also emulation and light pen interface, thereby makes when with this device, replacing old-fashioned hardware without system controller is carried out to software change.Although this paper is described in conjunction with legacy system, the present invention also can implement on the system of coming of new and/or existing non-retrospective installation.
The present invention can be used for interface and the incompatible all multiprocessing systems of traditional remote access solution.For example, reach one or many persons in other unique proprietary project relevant with control, interface and accessibility owing to non-standard card interface, video format, video connection, user's input method, cable, monitor and input unit, video distribution hardware, light pen or equivalent, disc drives (odd) disc formats, client operating system, before making great efforts in this field is not enough to provide can provide for this type for the treatment of system the interface solution of remote access and control.But the double vision that at least some embodiment of the present invention have advantageously provided Cross talk frequently and unique identification of operator interface, long-range connectivity, each device and long-distance structural components to the direct driving of light pen buffer and logic.
Collaborative the present invention of making between the subfunction provided is unusual and be better than the previous trial in this field.Essential light pen buffer, offset correction and the slider position buffer of easily access of inside of the present invention on the display logic subsystem.Therefore, local computer subsystem (remote access) module in the card can these resources of direct access be very favorable.Owing to relating to conversion or backplane bus, interact, for example, so processing is " lossless " (, not having external data or signal conversion) and more faster than conventional apparatus.Locally or remotely the ability of (by rule and restriction) increase covering (overlay) and extra human nature interface function can reduce the chance of generation personnel or mechanical hazard.The example that is applicable to handling implement comprises PRECISION 5000
treatment system, 200mm CENTURA
and ENDURA
treatment system and some PRODUCER
treatment system, it all can be purchased from Santa Clara, the Applied Materials of California, Inc..
Fig. 1 illustrates the schematic diagram of exemplary integrated semiconductor base plate processing system ((cluster) instrument of for example gathering together) 100, this system and 200mm CENTURA
treatment system is similar and have a remote access gateway according to some embodiments of the present invention.In icon, system 100 comprises vacuum tightness processing platform 101, input/output module 102 and system controller 140.Platform 101 generally includes and is connected to the processing module 110,112,114 of sharing vacuum base plate transfer chamber 128 and 116 and at least one load lock chamber (showing load lock chamber 121 and 122).
Input/output module 102 comprises at least one docking station (docking) and transmits box (FOUP) (illustrating FOUPs 106 and 107) and at least one substrate robot (illustrating two robots 108 and 120) to accept one or more front open type wafer.In certain embodiments, input/output module 102 can further comprise the measurement module 126 that is applicable to measure the key dimension that is formed at the structure on pending substrate.Robot 108 and 120 transfers the substrate through preliminary treatment and reprocessing between FOUPs 106, measuring tool 104 and load lock chamber 121,122.In described embodiment, measurement module 126 is used as by type (pass-through) module.In other embodiments, measurement module 126 can be the peripheral unit of input/output module 102.
Fig. 2 is the calcspar that is connected to the remote access gateway adapter 148 of data and control bus 202.Remote access gateway adapter 148 comprises two processing subsystems: display logic subsystem 204 and local computer subsystem 206.Each subsystem is connected to bridger (the first bridger 222 for example that data and control bus is provided to access
1and the second bridger 222
2, be collectively referred to as bridger 222).In the embodiment that is vme card at remote access gateway adapter 148, bridger 222 can be the VME bridger.In certain embodiments, two processing subsystems are embodied as one or more programmable system or two virtual machines of device, for example field programmable gate array (FPGA) be positioned on remote access gateway adapter 148.By with FPGA, implementing processing subsystem, the operation lifetime of this device can extend and no longer be connected to specific hardware or special processing environment.Communication between bridger 222 permission local computer subsystems 206 and host computer system controller (CPU 142) and the independent communication path between display logic system 204 and host computer system controller (CPU 142).These two menus that remote gateway interface 148 contains are internal memory and the input/output space for separating fully with host computer system controller (CPU142) now.In certain embodiments, two bridgers 222 can be combined to the single gateway (for example single bridger) of imitating two independent logical paths.Because two bridgers 222 take the identical I/O pin on same bus connector and shared bus connector, so only there is the one can be via data and control bus 202 communications in arbitrary moment two interfaces.
In certain embodiments, remote access gateway adapter 148 can comprise the unique identifier (such as silicon ID) that terminal user must not change.In certain embodiments, silicon ID can be the logic identification symbol, at Ethernet or world-wide web communication, identifying uniquely particular card.Otherwise, if all jigs have identical ID, the message on communication network can not correctly be delivered.In certain embodiments, silicon ID also can be and authorizes ID to enable enabling device and (for example, can not blocking for another for the password of a card, thereby make it possible to carry out rights management of device and/or firm feature structure locking and password.MacID on this and NICs and other network available apparatus is similar).Therefore, remote access gateway adapter 148 makes to meet and enables remote access and control required specific safety and conditioning equipment and agreement.Specific company and operationlocation that these standards are present in SEMI (semiconductor-equipment maker association) and operate this equipment.
In certain embodiments, remote access gateway adapter 148 can comprise switching mechanism 215.Switching mechanism 215 can comprise cipher key locker, discharge cock or other security mechanism with restriction, enable or stop telecommunication, inspect, control and data transfer.Switching mechanism 215 can be embodied as hardware or software mechanism.
In certain embodiments, switching mechanism further comprises that but a series of state lampposts or signal the structural sign pattern are (by formation such as LED, light, LCD, emergency warning lamp system for example), it can be arranged on the top of system main frame and sub-component carriage, or long-range nearby.These positioning indicators to the National Officer indicate remote access function disabled, enable but inactive or enable and movable.In one embodiment, positioning indicator is comprised of a plurality of three lampposts, and it is by driving with the institute that is connected of adapter.
In certain embodiments, when closing the local access switch, indicating device bright green (or other color) or perhaps at all do not work.For example, when the local access switch opens but while occurring without communication, positioning indicator can bright () blueness.When active remote controls that the line is busy, positioning indicator can bright (for example) amber and sparkling.Other embodiment of these positioning indicators can comprise special sign pattern, video display and analog thereof.
In certain embodiments, display logic subsystem 204 can be video driver 208 and light pen interface 210 provides interface.Video driver 208 further exports video interface 220 to.Display logic subsystem 204 provides the function for example, with video/light pen/User's Interface logic card (old-fashioned adapter) identical.In this way, through structure to send data to be presented at external system on old-fashioned adapter without in order with new equipment, to set up interface and change.This device is replaced for old-fashioned adapter advantageously provides fully, and this old-fashioned adapter makes it replace difficulty and expensive further because it is outmoded.
Video memory 224 in display logic subsystem 204 includes the data that remain to be exported to video driver 208.In certain embodiments, video memory 224 can comprise the memory block of 4 kilobytes, and it reads to export to video interface 220 by video driver 208 subsequently.Video interface 220 comprises display unit.Display logic subsystem 204 comes with video driver 208 moving by changing data contained in this memory block.
Display logic subsystem 204 also provides light pen interface 210.The position that light pen interface 210 is responsible for following the trail of light pen unit.The level of light pen and upright position are kept in a pair of core position, are provided in the light pen internal memory 226 in display logic subsystem 204.These core positions of display logic subsystem 204 accesses are to determine the current location of light pen unit.In certain embodiments, display logic subsystem 204 can for example, provide interface via the rear connector of the bottom of () card for light pen unit and old-fashioned video display.
In addition, local computer subsystem 206 can be directly and the moving data that belong to video driver 208 and light pen interface 210 with access of display logic subsystem 204.Local video display 212 can comprise any video interface, such as the standard VGA display.But the interior contained video memory 224 of local computer subsystem 206 access display logic subsystem 204 is to export local video display 212 to.Local computer subsystem 206 can be converted into these data the form that is suitable for exporting to local video display 212 subsequently.In this way, system no longer closely be connected to must with the display of display logic subsystem 204 compatibilities.Local computer subsystem 206 also can write video memory 224, and affects in this way the output to video interface 220.But the local computer subsystem is access light pen internal memory 226 also.By reading light pen internal memory 226, but the current location of local computer subsystem 206 access light pen units.Local computer subsystem 206 also can change the interior contained data of light pen internal memory 226 and not require light pen unit is carried out to the entity access so that remote interface to be provided.
In certain embodiments, local video display 212 is not connected directly to display logic subsystem 204.Local computer subsystem 206 can show excessive data to the local video display 212 be not contained in video memory 224.For example, but local video display 212 display patterns imitate the convenience of the interface screen of " net " page with increase and system controller 140 interactions, perhaps this display can be through structure to show diagnostic data, with this locality of display systems and internal data, buffer, Storage Media and debug data and without being connected to, changing or disturb responsive local built-in system controller data bus and hardware.
In one embodiment, remote access gateway adapter 148 further comprises the HSMS interface 213 that is connected to local computer subsystem 206.HSMS is the message agreement that obtains the based semiconductor device talk agreement (SECS-I) sent of industry approval on the Ethernet cable.HSMS interface 213 is used this agreement to provide input and output for device.Local computer subsystem 206 is accepted this type of HSMS communication and is propagated communication via data and control bus 202.The solution that previous effort require in this field independently blocks enables (enable) HSMS interface, thereby makes it can not be in the situation that in being installed on system without idle adaptive draw-in groove.By provide the solution of single deck tape-recorder, this device advantageously to allow system upgrade without idle adaptive draw-in groove to the HSMS interface and without larger card holder is installed for video and external interface, this install expensive, destructiveness is arranged, and sometimes be impossible processing.
In certain embodiments, remote access gateway adapter 148 can further comprise the network interface 214 that is connected to local computer subsystem 206.Network interface 214 provides the interface with system controller 140 interactions for one or more telecommunication network computer.Owing to having HSMS interface 213, local computer subsystem 206 is responsible for translating and transmitting the order received on data and control bus via network interface 214.In certain embodiments, network interface 214 can provide the Ethernet port of many IP address to connect via integrated router/switch.
In certain embodiments, remote access gateway adapter 148 further comprises keyboard and mouse interface 216.The instruction received via keyboard and mouse interface 216 is conveyed to local computer subsystem 206 then.
In certain embodiments, remote access gateway adapter 148 further comprises storage interface 218.Local computer subsystem 206 can make data flow to storage interface 218 for storing and processing.Storage interface 218 can comprise the interface that is suitable for the media that external data stores (such as hard disk, USB flash drives, magnetic tape drive, can write CD and analog thereof) for any.
The detailed block diagram that Fig. 3 is local computer subsystem 206.Local computer subsystem 206 usually comprises CPU (CPU) 300, internal memory 304 and supports circuit 302.CPU 300 can be the one in any type of general-purpose computer processor available in industrial setting.Support that circuit 302 is connected to traditionally CPU 300 and can comprises high-speed cache, clock circuit, input/output subsystem, power supply and analog thereof.Internal memory 304 can comprise random access memory, read-only memory, movable holder, optical disk storage, disc driver holder and combination thereof.Internal memory 304 contains some software common programs, comprises operating system 306, remote access software 308 and world-wide web applet (applet) 310.In operation, CPU 300 carries out one or more operating system 306 (such as DOS, WINDOWS, LINUX or proprietary operating systems), to control general using and the function of local computer subsystem 206.In certain embodiments, but the also execution profile of one or more operating system 306 of emulation of local computer subsystem 206 is carried out in non-standard operating environment to allow the software that is designed for particular architectures.
In certain embodiments, remote access software 308 can be system controller " network " interface or another local resident software application is provided, and to allow long-range user to carry out remote access, control and data, transfers.
In a special limiting examples, the remote access gateway adapter can comprise calculation element, the framework of this calculation element, operating system and feature arrange will provide the very specifically combination of entity and computing capability, it includes, but is not limited to following at least some:
1. take the VME 6U card profile factor of single groove
2. be fully loaded with connectivity and the ability of bus master controller
3. old-fashioned video and light pen connectivity
4. the subsystem of video of two independence and mutual exclusion
5. with the light pen interface of hardware or implement software
6. the Ethernet port of many IP address connects (integral type router/switch)
7. calculating core, it allows a plurality of operating system for operating airborne hardware simultaneously, this operating system includes but not limited to: DOS, Windows, Linux and other (such as the proprietary OS of Applied Materials) wherein have that at least both will use simultaneously usually
8. integral type mass storage member, such as the non-voltile memory of rotary magnetic disk drive, flash memory or other form
9. very thereby the high speed communication port causes the external device (ED) that can use similar capabilities to carry out the extended capability of co-treatment and teleprocessing generation
10. whole imitations of old-fashioned video capability, comprise use, installation and the peripheral hardware (such as old-fashioned operator interface terminal) that are suitable for uniquely old-fashioned instrument: the internal memory mapping figure of enhancing, screen attribute, the light pen of synchronizeing with raster image, vernier produce and distinct line driver and receiver function
11. the whole VME memory headroom of addressing and its part is transferred to remote location or receive the ability of its part from remote location under slave mode
12. the local resident software application of the browser based on world-wide web (also being called " network ") or other, it allows to carry out remote access, control and data and transfer function by actually existing in user Anywhere of the world (it may install away from calculation element described herein and the inside the processing substrate instrument of this calculation element)
13. world-wide web (also being called " network ") browser applet, the present invention can send it via long-range connection, thereby allows to carry out remote access, control and data and transfer function by actually existing in user Anywhere of the world (it may install away from calculation element described herein and the inside the processing substrate instrument of this calculation element)
14. external hardware devices, it can carry out local and proprietary communication with calculation element
15. as the device in 12, it has a remote control function at calculation element the line is busy the ability of emergency warning lamp, attention device or other indicating device of one group of this locality of drive
16. as the device in 12, it has on the wafer-process instrument carries out to local display the ability that video from translucent to opaque scope covers (including but not limited to communication, information display, safe interface and warning and security purpose)
17. as the device in 12, it has to the fault secure of world-wide web or other data communication network and connects switching member, thereby makes the communication of come in and go out calculation element and local data network automatically to recover when breaking down
18. as the device in 12, its have cipher key locker, discharge cock or other safety member with restriction, enable or stop telecommunication, inspect, control and data transfer
19. silicon ID or other unique identification means, terminal user can not change, skips or eliminate.
Fig. 4 is the flow chart that the semiconductor processing equipment of the long-range adapter for using local computer subsystem and display logic subsystem to form provides the method 400 of remote access gateway.Method 400 starts from step 402, is afterwards to receive to input or output order.In step 404, local computer subsystem 206 receives from the input of the remote-control device that is connected to semiconductor processing equipment or to its output.This input or output can comprise the order that is received from keyboard/mouse interface 216, from the high speed message send the message of service interface 213 or network interface 214, to the writing out of outside storage interface 218, for new demonstration and the analog thereof of local video display 212.
In step 406, local computer subsystem 206 is carried out and is inputed or outputed operation by the mode access display logic subsystem 204 above to describe with reference to figure 2 and Fig. 3.For example, if receive the mouse input, local computer subsystem 206 can be handled buffer in light pen internal memory 226 so that the mouse input is translated to the light pen input.Export local video display 212 to if be operating as, local computer subsystem 206 can read video memory 224 and deal with data to export local video display 212 to.After completing input/output operations, the method ends at step 408.
Therefore, provide method and the device that remote access gateway is provided for semiconductor processing equipment.Device of the present invention, by providing the function of old-fashioned video card and light pen and whole imitations of connection, has advantageously been processed outmoded problem associated with it.Device of the present invention has advantageously provided additional capabilities without system controller is carried out to any software change for retrospective installation.
Although, above for embodiments of the invention, in the situation that do not break away from base region of the present invention, can design other and other embodiment of the present invention.
Claims (15)
1. a device that is used to the semiconductor processing equipment with adapter that interface is provided, described adapter comprises:
The display logic subsystem, it is in order to provide interface via data and control bus to light pen and one or more video and information display;
The first bridger, it is connected to described display logic subsystem so that the access to described data and control bus to be provided;
The local computer subsystem, it is connected to described the first bridger and described display logic subsystem, and wherein, described local computer subsystem provides the access to one or more remote-control device; And
The second bridger, it is connected to described local computer subsystem so that the access to described data and control bus to be provided.
2. device according to claim 1, it further comprises:
Video interface, provide video output; And the light pen interface, for described light pen provides the input access; Wherein, described video interface and described light pen interface are connected to described display logic subsystem.
3. device according to claim 1, wherein, described one or more remote-control device further comprises:
The local video display, high speed message that is connected to described local computer subsystem sends in service interface, network interface, the second keyboard and mouse interface or outside storage interface at least one.
4. device according to claim 1, wherein said display logic subsystem further comprise following at least one:
The light pen internal memory, it is used to described local computer subsystem that the access to one or many persons in light pen buffer, offset correction or slider position is provided; Or
Video memory, it is used to described local computer subsystem that the access to Visual Display Data is provided.
5. device according to claim 4, wherein, described local computer subsystem is carried out the video reprocessing and is covered and extra human nature interface function to provide to described Visual Display Data.
6. device according to claim 1, wherein, described local computer subsystem provide following at least one:
Based on network browser or other local resident software application, transfer function to allow remote access, control and data; Or
Applet, it can carry out on remote-control device, thereby makes the user via the described local computer subsystem of network connection access can carry out remote access, control and data handover function.
7. device according to claim 1, its further comprise following at least one:
Switching mechanism, it is connected to described local computer subsystem so that fault secure and local cutting function to be provided; Or
One or more emergency warning lamp, its in order to indicate remote access function in the forbidding, enable but inactive or enable and activity at least one situation.
8. device according to claim 1, wherein, described data and control bus are European general module (VME) bus.
9. device according to claim 1, wherein, described interface is arranged on European general module (VME) adapter, and wherein:
Described data and control bus are the VME bus;
Described display logic subsystem provides interface via the VME bus to one or more device, and described one or more device comprises: video and information display, light pen, keyboard, computer mouse and emergency warning lamp network and siren;
The light pen internal memory, be used to described local computer subsystem that the access to one or many persons in light pen buffer, offset correction or slider position is provided;
Video memory, be used to described local computer subsystem that the access to Visual Display Data is provided;
Described the first bridger is a VME bridger, and it is connected to described display logic subsystem so that the access to described VME bus to be provided;
Described local computer subsystem is connected to described VME bridger and described display logic subsystem;
Wherein, described local computer subsystem provides the access to described one or more remote-control device, and described one or more remote-control device comprises local video display, high speed message and sends in service interface, network interface, the second keyboard and mouse interface or outside storage interface at least one;
Described the second bridger is the 2nd VME bridger, and it is connected to described local computer subsystem so that the access to described VME bus to be provided;
Switching mechanism, it is connected to described local computer subsystem so that fault secure and local cutting function to be provided, and wherein, described switching mechanism is in the situation that hardware fault automatic disconnection remote access; And
Video interface, provide video output and light pen interface, for the light pen instrument that is connected to described display logic subsystem provides the input access.
10. one kind for the semiconductor processing equipment with adapter provides the method for interface, and described adapter comprises local computer subsystem and display logic subsystem, and described method comprises the following step:
At least one inputs or outputs to use described local computer subsystem processes, and described local computer subsystem provides the access between described semiconductor processing equipment and one or more remote-control device; And
Use the described display logic subsystem of described local computer subsystem access with carry out described at least one input or output, wherein, described display logic subsystem comprises video memory and light pen internal memory.
11. method according to claim 10, it further comprises the step that receives described input from described one or more remote-control device, wherein, described one or more remote-control device comprises the high speed message and sends in service interface, outside storage interface, keyboard interface, mouse interface or network interface at least one.
12. method according to claim 10, it further comprises provides the described step that exports described one or more remote-control device to, wherein, described one or more remote-control device comprises the high speed message and sends in service interface, outside storage interface, video display or network interface at least one.
13. method according to claim 10, wherein, described access step further comprises to be used described local computer subsystem to change described light pen internal memory to provide the step of described input with the system controller to being connected to described semiconductor processing equipment.
14. method according to claim 10, wherein, described access step further comprises uses described local computer subsystem to read described video memory so that the step of described output to be provided.
15. method according to claim 10, it further comprises the following step:
Via described local computer subsystem, provide the web application interface with the remote access for described semiconductor processing equipment.
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10830808P | 2008-10-24 | 2008-10-24 | |
| US61/108,308 | 2008-10-24 | ||
| US12/603,333 | 2009-10-21 | ||
| US12/603,333 US8255606B2 (en) | 2008-10-24 | 2009-10-21 | Remote access gateway for semiconductor processing equipment |
| PCT/US2009/061630 WO2010048379A2 (en) | 2008-10-24 | 2009-10-22 | Remote access gateway for semiconductor processing equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102197454A CN102197454A (en) | 2011-09-21 |
| CN102197454B true CN102197454B (en) | 2013-12-18 |
Family
ID=42119976
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200980142493.XA Expired - Fee Related CN102197454B (en) | 2008-10-24 | 2009-10-22 | Remote access gateway for semiconductor processing equipment |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US8255606B2 (en) |
| KR (1) | KR101286132B1 (en) |
| CN (1) | CN102197454B (en) |
| TW (1) | TWI403907B (en) |
| WO (1) | WO2010048379A2 (en) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8135560B2 (en) | 2009-01-30 | 2012-03-13 | Applied Materials, Inc. | Sensor system for semiconductor manufacturing apparatus |
| WO2013025557A1 (en) | 2011-08-16 | 2013-02-21 | Plasmability, Llc | Crt light pen interface for flat panel displays |
| JP6176633B2 (en) * | 2012-02-21 | 2017-08-09 | アプライド マテリアルズ インコーポレイテッドＡｐｐｌｉｅｄ Ｍａｔｅｒｉａｌｓ，Ｉｎｃｏｒｐｏｒａｔｅｄ | Enhanced rehosting performance for legacy hardware and software |
| JP2014010857A (en) * | 2012-06-29 | 2014-01-20 | Hitachi-Lg Data Storage Inc | Optical disk drive and disk magazine |
| KR101548345B1 (en) * | 2014-04-10 | 2015-09-01 | 피에스케이 주식회사 | Substrate treating apparatus, substrate treating method, and recording media |
| US10067905B2 (en) | 2015-05-26 | 2018-09-04 | Plasmability, Llc | Digital interface for manufacturing equipment |
| US20220121542A1 (en) * | 2020-10-20 | 2022-04-21 | Nvidia Corporation | Techniques for testing semiconductor devices |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6952656B1 (en) * | 2000-04-28 | 2005-10-04 | Applied Materials, Inc. | Wafer fabrication data acquisition and management systems |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6068703A (en) * | 1997-07-11 | 2000-05-30 | Applied Materials, Inc. | Gas mixing apparatus and method |
| CA2311548A1 (en) * | 1997-12-02 | 1999-06-10 | Cash Technologies, Inc. | Multi-transactional network architecture |
| US6360685B1 (en) * | 1998-05-05 | 2002-03-26 | Applied Materials, Inc. | Sub-atmospheric chemical vapor deposition system with dopant bypass |
| KR100279941B1 (en) | 1999-01-29 | 2001-01-15 | 정문술 | Apparatus and Method for Managing Semiconductor Manufacture Process |
| US6345239B1 (en) * | 1999-08-31 | 2002-02-05 | Accenture Llp | Remote demonstration of business capabilities in an e-commerce environment |
| US6622286B1 (en) * | 2000-06-30 | 2003-09-16 | Lam Research Corporation | Integrated electronic hardware for wafer processing control and diagnostic |
| US6618628B1 (en) * | 2000-10-05 | 2003-09-09 | Karl A. Davlin | Distributed input/output control systems and methods |
| GB2385438A (en) * | 2002-02-19 | 2003-08-20 | Mitel Knowledge Corp | Remote programming of serialised semiconductor devices |
| US7306696B2 (en) * | 2002-11-01 | 2007-12-11 | Applied Materials, Inc. | Interferometric endpoint determination in a substrate etching process |
| KR100514104B1 (en) | 2003-04-10 | 2005-09-09 | 한미반도체 주식회사 | SECS controller and system for networking a semiconductor apparatus using the SECS controller |
| JP4384093B2 (en) * | 2004-09-03 | 2009-12-16 | 株式会社東芝 | Process state management system, management server, process state management method, and process state management program |
| KR20060064095A (en) | 2004-12-08 | 2006-06-13 | 삼성전자주식회사 | System for managing semiconductor manufacturing equipment |
| US8821099B2 (en) * | 2005-07-11 | 2014-09-02 | Brooks Automation, Inc. | Load port module |
| JP2007052501A (en) * | 2005-08-15 | 2007-03-01 | Canon Inc | Communication controller, communication control method, exposure apparatus, and device manufacturing method |
| KR100719375B1 (en) * | 2005-10-12 | 2007-05-17 | 삼성전자주식회사 | Failover system and failover method of semiconductor manufacturing equpment |
| TWI330027B (en) * | 2006-07-17 | 2010-09-01 | Acer Inc | Remote data transmission system and method thereof |
| US8527080B2 (en) * | 2008-10-02 | 2013-09-03 | Applied Materials, Inc. | Method and system for managing process jobs in a semiconductor fabrication facility |
-
2009
- 2009-10-21 US US12/603,333 patent/US8255606B2/en active Active
- 2009-10-22 CN CN200980142493.XA patent/CN102197454B/en not_active Expired - Fee Related
- 2009-10-22 WO PCT/US2009/061630 patent/WO2010048379A2/en active Application Filing
- 2009-10-22 KR KR1020117011785A patent/KR101286132B1/en active IP Right Grant
- 2009-10-23 TW TW098135983A patent/TWI403907B/en active
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6952656B1 (en) * | 2000-04-28 | 2005-10-04 | Applied Materials, Inc. | Wafer fabrication data acquisition and management systems |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2010048379A2 (en) | 2010-04-29 |
| US8255606B2 (en) | 2012-08-28 |
| WO2010048379A3 (en) | 2010-07-15 |
| TW201030522A (en) | 2010-08-16 |
| TWI403907B (en) | 2013-08-01 |
| CN102197454A (en) | 2011-09-21 |
| US20100138583A1 (en) | 2010-06-03 |
| KR20110081303A (en) | 2011-07-13 |
| KR101286132B1 (en) | 2013-07-15 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102197454B (en) | Remote access gateway for semiconductor processing equipment | |
| US10452111B2 (en) | Enhanced re-hosting capability for legacy hardware and software | |
| CN202421873U (en) | Distributed control system supporting function safety and information safety | |
| US20080191849A1 (en) | Parts history management system of information processing apparatus | |
| CN109324818A (en) | Virtualized server master system and related upgrade technique | |
| CN102253845A (en) | Server system | |
| CN115686575A (en) | Edge controller firmware updating method, system, storage medium and server | |
| CN107515830B (en) | Semiconductor process control system and semiconductor processing control system | |
| US10067905B2 (en) | Digital interface for manufacturing equipment | |
| CN104135646B (en) | On-site mixed explosives truck technology controlling and process and dynamic monitoring and controlling method | |
| CN115543273A (en) | Suspension controller debugging and diagnosing system | |
| JP2003079072A (en) | Electric power system protection control system | |
| TWI439080B (en) | System and method for data exchange between application software and distributed control system | |
| CN116880266A (en) | High-level waste liquid glass solidification field control system and field device signal simulation device | |
| CA2097560A1 (en) | Device dependent layer of windowing system for a process control system display |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20131218 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |