CN102193325A - System for controlling active vibration isolation device - Google Patents
System for controlling active vibration isolation device Download PDFInfo
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- CN102193325A CN102193325A CN 201010128760 CN201010128760A CN102193325A CN 102193325 A CN102193325 A CN 102193325A CN 201010128760 CN201010128760 CN 201010128760 CN 201010128760 A CN201010128760 A CN 201010128760A CN 102193325 A CN102193325 A CN 102193325A
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- micropositioner
- voice coil
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- coil motor
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Abstract
The invention provides a system for controlling an active vibration isolation device, wherein a split-type designed air gravity compensator and a voice coil motor are adopted and the air gravity compensator is used for supporting the gravity of a micropositioner to ensure that the voice coil motor is only used for providing a positioning function for the micropositioner and providing a driving force to generate acceleration to realize the ascending motion of the micropositioner. By utilizing the control system design, the dissipated power of a conventional voice coil motor, caused by resisting the gravity of the micropositioner, is greatly reduced; the calorific value of the voice coil motor is decreased to a great extent; in the mean time, as the voice coil motor is only used for providing the positioning function and the ascending motion for the micropositioner, the positioning accuracy of the micropositioner is improved to a certain degree.
Description
Technical field
The present invention relates to the technical field of lithographic equipment, and particularly relevant for a kind of control system of active earthquake isolating equipment.
Background technology
Along with improving constantly of large scale integrated circuit device integrated level, the continuous enhancing of photolithography resolution, to the characteristic line breadth index request of litho machine also in continuous lifting.At present, litho machine has developed into the combination in the external world of other structures such as the separate internal world of several respectively vibration damping and vibration isolations and basic framework.
Work stage system with litho machine is an example, and it is most important how to make micropositioner (Chuck) avoid the interference of work stage system and basic framework vibration in exposure process, needs to adopt effective scheme carry out vibration damping and vibration isolation to the micropositioner module.The gravity compensator structure is exactly the new structure that grows up under this background, by the mode that active damping combines with passive vibration isolation, makes the work stage system form an independently built-in system.
On american documentation literature (patent No.: US6473161B2, open date: the gravity compensation apparatus that discloses a kind of annular generator and piston push rod type on October 29th, 2002).Be passed to micropositioner and keep its static weight through piston push rod by the constant voltage chamber pressure, by the vertical deviation of annular generator real-time regulated micropositioner.This patent scheme is to the control strictness of constant voltage chamber air pressure, and is very high to the accuracy requirement of air pressure probe; In addition, manufacturing and designing of annular generator also is technology barriers.Wherein, the gravity compensation apparatus of annular generator and piston push rod type is the integral type design, more complicated on the corresponding control strategy.
On american documentation literature (patent No.: US6388733B1, open date: disclose a kind of technical scheme on May 14th, 2002): work stage marble module is isolated into the inner world by three voice coil motors of surface level, four air bag passive vibration isolation systems and four vertical voice coil motors of marble platform bottom surface.The material of its four air bags is comparatively special in this scheme, and rubber pneumatic bag influences serviceable life easily because front and back pressure reduction is excessive.Wherein, used four vertical voice coil motors in the technique scheme, structure is complicated, and relative control strategy is also complicated, and the power that vertical voice coil motor consumes is big, the thermal value height, and voice coil motor also is affected to the control accuracy of micropositioner thus.
Summary of the invention
The present invention proposes the control system of the moving device of a kind of active shock insulation, it is used in the moving device of active shock insulation of work stage system micropositioner, comprise weight of air compensator and voice coil motor in the moving device of this active shock insulation, the control system of this active earthquake isolating equipment comprises the desired locations generator, is used to produce the desired locations signal of micropositioner on specific direction; Comparer is connected with the desired locations generator, and the actual position signal on this specific direction compares in desired locations signal on the specific direction and micropositioner with described desired locations micropositioner that generator produces, and obtains an error signal; Controller is connected with comparer, and the error signal that described comparer is obtained converts corresponding force signal to; The feedforward compensation device is connected with controller, forms an anchorage force to the weight of air compensator with a part that receives in the force signal that described controller is converted to, and is supported most of gravity of micropositioner by the weight of air compensator.Wherein, the other part of the force signal that described controller was converted to offers voice coil motor, to drive the motion of micropositioner on this specific direction.
Compared with prior art, because the present invention adopts the weight of air compensator to support the gravity of micropositioner, and the motion that makes voice coil motor only provide positioning function for micropositioner and provide driving force with the generation acceleration micropositioner to be risen, such Control System Design, greatly reduce present voice coil motor and need resist the power that gravity dissipated of micropositioner, reduced the thermal value of voice coil motor dramatically, simultaneously because of voice coil motor only for micropositioner provides positioning function and upward movement, improved the bearing accuracy of micropositioner to a certain extent.
Description of drawings
Figure 1 shows that the structural representation of weight of air compensator.
Figure 2 shows that weight of air compensator and voice coil motor combined differential layout realizes the distribution plan of leveling and focusing vibration isolation function.
Figure 3 shows that the initiatively synoptic diagram of the control system of earthquake isolating equipment.
Figure 4 shows that the location loop synoptic diagram of weight of air compensator and voice coil motor combined differential leveling and focusing device.
Embodiment
In order more to understand technology contents of the present invention, especially exemplified by specific embodiment and cooperate appended graphic being described as follows.
As Fig. 1 to Fig. 4, in the control system of the present invention's active earthquake isolating equipment, it is used for comprising weight of air compensator 201 and voice coil motor 202 in the moving device of this active shock insulation in the moving device of active shock insulation of work stage system micropositioner 101.The control system of active earthquake isolating equipment of the present invention adopts the gravity of micropositioner (Chuck) 101 in the weight of air compensator 201 supporting workpiece platform systems, simultaneously the air-flotation type structure of weight of air compensator 201 also provides vertical (Z to) vibration damping and vibration isolation of micropositioner (Chuck) 101, and has the fine adjustment function of vertical (Z to).Because most of weight that weight of air compensator 201 has carried micropositioner 101 makes the power of motor of adjusting vertical height reduce greatly, thermal value reduces greatly, has guaranteed the vertical Nano grade bearing accuracy of micropositioner.And, adopted weight of air compensator 201 after, make micropositioner 101 in exposure process, avoid the interference of work stage system and basic framework vibration (vertical), the micropositioner module is carried out vibration damping and vibration isolation.
In the prior art, motor both provided positioning function for micropositioner, self provide simultaneously power to support and drive the upward movement of micropositioner again, the power that motor provided support and drove the micropositioner upward movement comprises two parts, wherein a part provides the gravity that anchorage force supports micropositioner, and a part provides the driving force that the micropositioner upward movement need produce acceleration in addition.
Provide support the gravity that power supports micropositioner 101 by weight of air compensator 201 among the present invention, to offset the gravity of micropositioner 101, like this, voice coil motor 202 among the present invention self does not provide support the gravity that power supports micropositioner 101, only provide positioning function and provide driving force to produce the motion that acceleration rises micropositioner 101 for micropositioner 101, such Control System Design, greatly reduce voice coil motor 202 because the power that gravity dissipated of opposing micropositioner 101, reduced the thermal value of voice coil motor 202 dramatically, simultaneously because of voice coil motor 202 only for micropositioner 101 provides positioning function and upward movement, improved the bearing accuracy of micropositioner 101 to a certain extent.
As shown in Figure 1, be the structural representation of weight of air compensator, weight of air compensator 201 is mainly used in the static vibration isolation of micropositioner.As shown in Figure 1, weight of air compensator 201 is positioned at the below of micropositioner 101.Whole weight of air compensator 201 is connected on the external system platform by base 101, and joint flange 107a and 107b are joined together to form air cavity by welding manner and corrugated tube.When pressurized air enters in the corrugated tube cavity by the air intake opening on the base 101,, corrugated tube 108 under the pressurized air effect, produces vertical deformation displacement because having elasticity.
What be positioned at joint flange 107a top is guidepost 106, is used for corrugated tube distortion carrying out vertical position guiding.Centering on 106 1 weeks of guidepost is lining 105, lining 105 and guidepost 106 sides all are processed with the high pressure throttle orifice, make between guidepost 106 and the lining 105 and can realize the friction free relative displacement, lining 105 supports by 3 poles 109, the upper end of pole 109 is fixed on lining 105, and the lower end is fixed on base 110.
The top of guidepost 106 connects firmly air supporting plate 103, be furnished with the high pressure throttle orifice on the air supporting plate 103, be used for thrust bearing 102 is floated, the upper end of thrust bearing 102 is bonded in micropositioner 101 bottoms, form air film between lower surface and the air supporting plate 103, freedom of motion with X/Y, thus, this thrust bearing has in vertical and the level effect to decoupling zero.Because thrust bearing 102 tops have the special construction of flexible hinge, thrust bearing has the freedom of motion of RX/RY.
In the weight of air compensator, thrust bearing 102, air supporting plate 103, O-ring seal 104, guidepost 106, joint flange 107 and corrugated tube 108 component movement modules; Lining 105, pole 109 and base 110 are formed static module.Wherein, motion module makes micropositioner 101 have Z to degree of freedom, and the air film that forms between the thrust bearing 102 gentle kickboards 103 makes micropositioner 101 have X/Y to degree of freedom, and the flexible hinge structure of thrust bearing 102 makes micropositioner 101 have Rx/Ry to degree of freedom.
Figure 2 shows that weight of air compensator 201 and voice coil motor (VCM) 202 combined differentials layout realize the distribution plan of leveling and focusing vibration isolation function.As shown in the figure, 3 weight of air compensator 201a, 201b, 201c and 3 voice coil motors (VCM) 202a, 202b, 202c are the distribution of equilateral triangle or isosceles triangle, as can be seen from Figure 3, weight of air compensator 201 and voice coil motor 202 are split type distributed architecture, simple in structure, favourable processing and manufacturing.
In the present embodiment, the barycenter of 3 weight of air compensator 201 formed barycenter, 3 voice coil motor 202 formation and the barycenter of Chuck micropositioner 101 must be in same point (or as far as possible in very among a small circle), promptly forming with the barycenter is the center of circle, and R is a distribution mode uniform on the circumference of radius.
The present invention is directed to above-mentioned structure and method, designed corresponding control strategies, solved following problem: (1) informs main control loop with servo-valve (not shown) gravity supported in the weight of air compensator 201 as feedforward, and main gravity is born by weight of air compensator 201; (2) control accuracy of the servo-valve (not shown) in the raising weight of air compensator 201 makes Z can carry out high-precision positioning control to motor.
As Fig. 3, the design of corresponding control strategy is as follows: by desired locations generator 301 produce micropositioners 101 on specific direction (as Rx to, Ry to or Z to) the desired locations signal, the micropositioner 101 measured with module 305 compares by comparer 306 in the feedback signal of this specific direction physical location, the gained error signal is given controller 302, convert the error signal that comparer 306 produces to corresponding force signal by controller 302, wherein be decomposed into two-part force signal, the force signal of a part is given feedforward compensation device 303, promptly receive a part in the force signal that controllers 302 are converted to weight of air compensator 201 by feedforward compensation device 303, to be provided support most of gravity of power support micropositioner by weight of air compensator 201, gravity compensator 201 is the physical entity part of feedforward compensation device 303; The anchorage force signal that a part of in addition driving force signal 307 is provided in conjunction with aforementioned feedforward compensation device 303 passes through totalizer 308 to controlling object 304, support and the upward movement of drive controlling object 304 (micropositioner 101), the feedback signal that records micropositioner 101 physical locations by module 305 repeats to feed back to comparer 306 more afterwards.In addition, above-mentioned desired locations generator 301 also can be connected to feedforward compensation device 303, can directly send a signal to feedforward compensation device 303, and this function is mainly used in more default initial values and gives feedforward compensation device 303.Certainly, in other embodiments, also can not establish desired locations generator 301 and be connected to feedforward compensation device 303, or on desired locations generator 301 and feedforward compensation device 303 connecting lines, be provided with controllable switch.
Fig. 4 is a location loop, be used to locate current weight of air compensator and voice coil motor combined differential leveling and focusing device, each 3 weight of air compensator 201 and voice coil motor (VCM) 202 that it is used to control split type distribution make micropositioner to move on degree of freedom at Rx, Ry and Z.
As Fig. 4, module 501, module 502 and module 503 be respectively Z to, Rx and Ry to the desired locations generator, separately through as described in Figure 3 control loop, export corresponding data to coordinate transformation matrix 510 separately and remove the coordinate transform signal that produces, decoupling zero afterwards, obtain the control signal 524 of each physical axis of 3 voice coil motors (VCM) respectively, 525,526 and each control signal 533 of obtaining 3 weight of air compensators, 534,535, to control servo-valve (not shown) motion in 3 voice coil motors and 3 the weight of air compensators.
Wherein, 501-Z is to the desired locations generator; 502-Rx is to the desired locations generator; 503-Ry is to the desired locations generator; 504-Z is to controller; 505-Rx is to controller; 506-Ry is to controller; 507-Z is to compensating controller; 508-Rx is to compensating controller; 509-Ry is to compensating controller; The 510-coordinate conversion matrix; 511-voice coil motor and micropositioner; 512-air supporting driver (corrugated tube 108); 513-coordinate transformation matrix; 514-Z is to physical location; 515-Rx is to physical location; 516-Ry is to physical location; 517-Z is to the feedforward balancing force; 518-Rx is to the feedforward balancing force; 519-Ry is to the feedforward balancing force; The gravity of 520-micropositioner; 521-Z is to comparer; 522-Rx is to comparer; 523-Ry is to comparer; The control signal of 524-physical axis Z1; The control signal of 525-physical axis Z2; The control signal of 526-physical axis Z3; 527-physical axis Z1 measuring-signal; 528-physical axis Z2 measuring-signal; 529-physical axis Z3 measuring-signal; 530-Z axle totalizer; 531-Rx axle totalizer; 532-Ry axle totalizer; 533-servo-valve 1 physical axis driving force; 534-servo-valve 2 physical axis driving forces; 535-servo-valve 3 physical axis driving forces; 536-Z axle major loop gravity compensation node; 537-Rx axle major loop gravity compensation node; 538-Ry axle major loop gravity compensation node.
The present invention adopts weight of air compensator 201 to provide support the gravity that power supports micropositioner 101, and voice coil motor 202 only provides positioning function for micropositioner 101 and provide driving force to produce the motion that acceleration rises micropositioner 101, such Control System Design, greatly reduce present voice coil motor 202 and need resist the power that gravity dissipated of micropositioner 101, reduced the thermal value of voice coil motor 202 dramatically, simultaneously because of voice coil motor 202 only for micropositioner 101 provides positioning function and upward movement, improved the bearing accuracy of micropositioner 101 to a certain extent.
Claims (4)
1. control system of the moving device of shock insulation initiatively, it is used in the moving device of active shock insulation of work stage system micropositioner, the moving device of this active shock insulation comprises weight of air compensator and voice coil motor, it is characterized in that the control system of this active earthquake isolating equipment comprises:
The desired locations generator is used to produce the desired locations signal of micropositioner on specific direction,
Comparer is connected with the desired locations generator, and the actual position signal on this specific direction compares in desired locations signal on the specific direction and micropositioner with described desired locations micropositioner that generator produces, and obtains an error signal;
Controller is connected with comparer, and the error signal that described comparer is obtained converts corresponding force signal to;
The feedforward compensation device is connected with controller, to receive a part in the force signal that described controller is converted to the weight of air compensator, to be supported most of gravity of micropositioner by the weight of air compensator;
Wherein, the other part of the force signal that described controller was converted to offers voice coil motor, to drive the motion of micropositioner on this specific direction.
2. the control system of active earthquake isolating equipment according to claim 1 is characterized in that, it comprises the weight of air compensator and the voice coil motor of split type distribution.
3. the control system of active earthquake isolating equipment according to claim 1, it is characterized in that, it comprises 3 weight of air compensators and 3 voice coil motors, and 3 weight of air compensators and 3 voice coil motors are in triangular distribution separately, and described 2 leg-of-mutton barycenter are in same point.
4. according to the control system of claim 1 or 2 or 3 described active earthquake isolating equipments, it is characterized in that, it comprise Z to, Rx to and Ry to the desired locations generator, be respectively applied for set micropositioner Z to, Rx to and Ry to the desired locations signal.
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| Application Number | Priority Date | Filing Date | Title |
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| CN 201010128760 CN102193325B (en) | 2010-03-19 | 2010-03-19 | System for controlling active vibration isolation device |
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| CN 201010128760 CN102193325B (en) | 2010-03-19 | 2010-03-19 | System for controlling active vibration isolation device |
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| CN102193325A true CN102193325A (en) | 2011-09-21 |
| CN102193325B CN102193325B (en) | 2013-04-10 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103366063A (en) * | 2013-07-15 | 2013-10-23 | 哈尔滨工业大学 | Method for workpiece platform micro moving part mechanical parameter estimation |
| CN111966136A (en) * | 2020-08-31 | 2020-11-20 | 上海大学 | Low-frequency active vibration suppression hybrid controller |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6388733B1 (en) * | 1995-04-14 | 2002-05-14 | Nikon Corporation | Exposure apparatus with an anti-vibration structure |
| US6473161B2 (en) * | 2000-06-02 | 2002-10-29 | Asml Netherlands B.V. | Lithographic projection apparatus, supporting assembly and device manufacturing method |
| JP2004063653A (en) * | 2002-07-26 | 2004-02-26 | Nikon Corp | Vibration isolator, stage apparatus, and aligner |
| CN101290477A (en) * | 2008-05-20 | 2008-10-22 | 上海微电子装备有限公司 | Balancing damping station |
| CN101398636A (en) * | 2008-09-17 | 2009-04-01 | 华中科技大学 | Precision vibration damping assembly and vibration damping platform composed of the assembly |
-
2010
- 2010-03-19 CN CN 201010128760 patent/CN102193325B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6388733B1 (en) * | 1995-04-14 | 2002-05-14 | Nikon Corporation | Exposure apparatus with an anti-vibration structure |
| US6473161B2 (en) * | 2000-06-02 | 2002-10-29 | Asml Netherlands B.V. | Lithographic projection apparatus, supporting assembly and device manufacturing method |
| JP2004063653A (en) * | 2002-07-26 | 2004-02-26 | Nikon Corp | Vibration isolator, stage apparatus, and aligner |
| CN101290477A (en) * | 2008-05-20 | 2008-10-22 | 上海微电子装备有限公司 | Balancing damping station |
| CN101398636A (en) * | 2008-09-17 | 2009-04-01 | 华中科技大学 | Precision vibration damping assembly and vibration damping platform composed of the assembly |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103366063A (en) * | 2013-07-15 | 2013-10-23 | 哈尔滨工业大学 | Method for workpiece platform micro moving part mechanical parameter estimation |
| CN103366063B (en) * | 2013-07-15 | 2016-01-20 | 哈尔滨工业大学 | A kind of workpiece platform micro-motion some mechanical method for parameter estimation |
| CN111966136A (en) * | 2020-08-31 | 2020-11-20 | 上海大学 | Low-frequency active vibration suppression hybrid controller |
| CN111966136B (en) * | 2020-08-31 | 2021-06-08 | 上海大学 | Low-frequency active vibration suppression hybrid controller |
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| CN102193325B (en) | 2013-04-10 |
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Address after: 1525 Zhang Dong Road, Shanghai, No. 201203 Patentee after: Shanghai microelectronics equipment (Group) Limited by Share Ltd Address before: 1525 Zhang Dong Road, Shanghai, No. 201203 Patentee before: Shanghai Micro Electronics Equipment Co., Ltd. |