CN102185540A - Magnetic suspension supporting system for main reflecting mirror of large-caliber parallel light tubes - Google Patents
Magnetic suspension supporting system for main reflecting mirror of large-caliber parallel light tubes Download PDFInfo
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- CN102185540A CN102185540A CN2011101201822A CN201110120182A CN102185540A CN 102185540 A CN102185540 A CN 102185540A CN 2011101201822 A CN2011101201822 A CN 2011101201822A CN 201110120182 A CN201110120182 A CN 201110120182A CN 102185540 A CN102185540 A CN 102185540A
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- China
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- reflection mirror
- reflecting mirror
- principal reflection
- magnetic suspension
- main reflecting
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Abstract
The invention discloses a magnetic suspension supporting system for a main reflecting mirror of large-caliber parallel light tubes, relating to a detection system for large-caliber parallel light tubes, having the schematic diagram shown in an attaching figure in the abstract, and belonging to the technical field of photoelectric detection. In a large-caliber long-focal-distance optical system, the influence of the dead weight of a large-caliber main mirror on a surface shape is great and is difficult to overcome. In the invention, the magnetic suspension principle is applied to supporting of the main reflecting mirror. The system consists of a control circuit, a signal conditioning circuit, a sensor, a power amplifier and a positioning magnet. The main mirror needs to be manufactured specially. The system is an ideal nonlinear system in which electromagnetic force is changed by changing current. When the main reflecting mirror is stable, a deviation signal between each reference point position and an ideal reference point position is detected by using a position sensor, the deviation signal is compared with an ideal reference position signal through feedback, adjustment is performed by an adjustment controller according to a surface shape deviation signal, and the current of an electromagnet is changed by the power amplifier, so that the electromagnetic force between the electromagnet and the main reflecting mirror is changed until each reference point of the main reflecting mirror is superposed with the ideal reference position under the action of the electromagnetic force.
Description
Technical field
The present invention relates to the principal reflection mirror support system of heavy caliber parallel light tube, belong to photoelectric detection technology field.
Background technology
In the large-aperture long-focus optical system, the support system of primary mirror is very big to the performance impact of whole optical system, face shape variable quantity under gravity and thermal environment influence should satisfy the requirement of optical design to its precision, therefore, the selection of principal reflection mirror support system plays a very important role to the performance that improves whole optical system.
The supporting way of at present main large-scale speculum has: mercury suspender belt supporting way, frame-type supporting way, six point type supporting way.Though wherein mercury suspender belt supporting way can improve the shortcoming of gallus-type supporting way speculum unbalance stress, still can not reduce the influence of the deformation of speculum deadweight, general to more large-scale speculum effect.Frame-type supporting way complex structure, cost height generally only are used on the high accuracy speculum, and substantially no longer dismounting after once debuging.Six point type supporting way are limited to the compensation ability of the influence of speculum deadweight, are difficult to reach the surface precision requirement of large-scale speculum, and are difficult for debuging once more calibration.
Along with the development of aerospace industry, the space suspension technology under the simulated microgravity environment has become the important means of the high-tech research of being correlated with.Magnetic levitation technology is theoretical and Automatic Control Theory based on magnetic suspension, utilizes magnetic field force to make object along an axle or the several new and high technologies that keep certain position." zero contact " theory can make device not contact any element in air because maglev, have no friction, noiseless, contactless, overcome advantage such as deadweight, in various aspects such as machinery, electronics, space flight and aviation very big development prospect is arranged.
Summary of the invention
The present invention proposes a kind of heavy caliber parallel light tube principal reflection mirror support system based on magnetic levitation technology.
This support system is made up of controller, power amplifier, phase magnet, principal reflection mirror.By the deviation signal of each point position on the sensor principal reflection mirror, and, compare with reference signal by feedback; Adjuster is regulated according to position error signal, and changes current of electromagnet by power amplifier; Thereby change the magnetic force of phase magnet, make the principal reflection mirror stable suspersion.
Its effect of the present invention is, principal reflection mirror by the magnetic suspension support system firm after, because inner each particle own all is subjected to corresponding magnetic force, offset with the gravity of himself, be in " agravic " suspended state, so just reduced the face shape deformation that produces owing to self excessive gravity to greatest extent; Simultaneously, distortion and internal stress that the extraneous factor effect produces down are delivered to primary mirror deflection and the distortion that causes on the primary mirror by supporting construction, also can avoid because of this " agravic " suspends; And, can be at any time the variation of environment and the principal reflection mirror positional misalignment that produces readjust to external world.
Description of drawings
Fig. 1 is the present invention's heavy caliber parallel light tube principal reflection mirror magnetic suspension support system schematic diagram.
Fig. 2 is the diagrammatic side views of magnetic suspension support system principal reflection mirror and phase magnet relative position.
Among the figure: 1-reflects primary mirror, 2-phase magnet, 3-displacement transducer, 4-power amplifier, 5-position signalling change-over circuit, 6-controller.
Embodiment
Principal reflection mirror magnetic suspension support system embodiment is as follows, and system is made up of the two large divisions: control section and operating part.Control section comprises displacement transducer (3), position signalling change-over circuit (5) and controller (6).Operating part has power amplifier (4) and phase magnet (2).Principal reflection mirror (1) material require is special, is mixed and made into by traditional carbofrax material (SiC) and magnetic material, and plates needed reflecting material at the reflecting surface of principal reflection mirror.6 pairs of position transducers (3) and phase magnet (2) are installed around principal reflection mirror, installation site such as Fig. 2, three pairs are mutually 120 ° and place principal reflection (1) the mirror back side; Other three pairs are mutually 120 ° and place around principal reflection mirror (1) outline, and such 6 transducer sensing points just can be determined the deviation of principal reflection mirror with respect to the desired reference position fully; Realized that six phase magnets can control the principal reflection mirror six-freedom degree.
We can change electromagnetic force by changing electric current.When principal reflection mirror (1) when stablizing, by displacement transducer (3) read-out position signal, and detect the deviation signal of each reference point locations and desired reference position, by feedback, compare with the desired reference position signalling, through Computer Processing, controller (6) is regulated according to face type deviation signal, and, convert control signal to Control current by power amplifier (4), change the electric current in the phase magnet (2), thereby change the electromagnetic force between phase magnet and the principal reflection mirror (1), the variation of this power will change principal reflection mirror (1) and reference point locations, when each reference point of principal reflection mirror (1) overlaps with the desired reference position, arrive required precision.
Claims (2)
1. the principal reflection mirror of heavy caliber parallel light tube principal reflection mirror magnetic suspension support system needs special manufacturing, is mixed and made into traditional carbofrax material and permeability magnetic material, and plates reflecting material on reflecting surface.
2. principal reflection mirror magnetic suspension support system, according to magnetic suspension principle, principal reflection mirror is suspended in the air, is in " agravic " state, and principal reflection mirror is regulated with respect to the reference position by control circuit, signal conditioning circuit and transducer and power amplifier, phase magnet.Six transducers are converted into the signal of telecommunication with six reference points with respect to the difference of desired reference position, feed back to control circuit, through computational analysis and power amplification, with conversion of signals is the variation of electric current, thereby the power that changes between magnet and the primary mirror is regulated the position of six reference points on the principal reflection mirror, realizes the installation accuracy requirement.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011101201822A CN102185540A (en) | 2011-05-11 | 2011-05-11 | Magnetic suspension supporting system for main reflecting mirror of large-caliber parallel light tubes |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011101201822A CN102185540A (en) | 2011-05-11 | 2011-05-11 | Magnetic suspension supporting system for main reflecting mirror of large-caliber parallel light tubes |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102185540A true CN102185540A (en) | 2011-09-14 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011101201822A Pending CN102185540A (en) | 2011-05-11 | 2011-05-11 | Magnetic suspension supporting system for main reflecting mirror of large-caliber parallel light tubes |
Country Status (1)
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| CN (1) | CN102185540A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104020788A (en) * | 2014-04-25 | 2014-09-03 | 中北大学 | Method for pinpointing target through multi-degree of freedom adjusting supporting device |
| CN104019431A (en) * | 2014-04-25 | 2014-09-03 | 中北大学 | Multi-degree of freedom adjusting and supporting device for placing medium and large collimators |
| CN105324721A (en) * | 2013-06-17 | 2016-02-10 | 卡尔蔡司Smt有限责任公司 | EUV imaging apparatus |
| CN114435957A (en) * | 2021-12-22 | 2022-05-06 | 北京空间机电研究所 | Magnetic suspension type gravity unloading mechanism and method for ultra-large-diameter light reflector |
-
2011
- 2011-05-11 CN CN2011101201822A patent/CN102185540A/en active Pending
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105324721A (en) * | 2013-06-17 | 2016-02-10 | 卡尔蔡司Smt有限责任公司 | EUV imaging apparatus |
| US9904175B2 (en) | 2013-06-17 | 2018-02-27 | Carl Zeiss Smt Gmbh | EUV imaging apparatus |
| CN105324721B (en) * | 2013-06-17 | 2018-07-10 | 卡尔蔡司Smt有限责任公司 | EUV imaging devices |
| CN104020788A (en) * | 2014-04-25 | 2014-09-03 | 中北大学 | Method for pinpointing target through multi-degree of freedom adjusting supporting device |
| CN104019431A (en) * | 2014-04-25 | 2014-09-03 | 中北大学 | Multi-degree of freedom adjusting and supporting device for placing medium and large collimators |
| CN104020788B (en) * | 2014-04-25 | 2017-02-08 | 中北大学 | Method for pinpointing target through multi-degree of freedom adjusting supporting device |
| CN104019431B (en) * | 2014-04-25 | 2017-02-22 | 中北大学 | Multi-degree of freedom adjusting and supporting device for placing medium and large collimators |
| CN114435957A (en) * | 2021-12-22 | 2022-05-06 | 北京空间机电研究所 | Magnetic suspension type gravity unloading mechanism and method for ultra-large-diameter light reflector |
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| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20110914 |