CN102181937B - 一种制作太阳能多晶硅绒面的腐蚀液的激活方法 - Google Patents
一种制作太阳能多晶硅绒面的腐蚀液的激活方法 Download PDFInfo
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- CN102181937B CN102181937B CN2010105583925A CN201010558392A CN102181937B CN 102181937 B CN102181937 B CN 102181937B CN 2010105583925 A CN2010105583925 A CN 2010105583925A CN 201010558392 A CN201010558392 A CN 201010558392A CN 102181937 B CN102181937 B CN 102181937B
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- 229910021420 polycrystalline silicon Inorganic materials 0.000 title claims abstract description 61
- 238000000034 method Methods 0.000 title claims abstract description 43
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 12
- 239000007788 liquid Substances 0.000 title abstract description 9
- 230000003213 activating effect Effects 0.000 title abstract 4
- 210000002268 wool Anatomy 0.000 title abstract 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 29
- 238000002360 preparation method Methods 0.000 claims abstract description 25
- 230000008569 process Effects 0.000 claims abstract description 25
- 230000004913 activation Effects 0.000 claims abstract description 7
- 239000012530 fluid Substances 0.000 claims description 85
- 238000005530 etching Methods 0.000 claims description 34
- 229920005591 polysilicon Polymers 0.000 claims description 28
- 239000002253 acid Substances 0.000 claims description 16
- 239000004744 fabric Substances 0.000 claims description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 3
- 238000009776 industrial production Methods 0.000 abstract description 4
- 239000003637 basic solution Substances 0.000 abstract 2
- 230000035484 reaction time Effects 0.000 abstract 1
- 238000006243 chemical reaction Methods 0.000 description 18
- 229910052710 silicon Inorganic materials 0.000 description 15
- 239000010703 silicon Substances 0.000 description 15
- 238000005260 corrosion Methods 0.000 description 12
- 230000007797 corrosion Effects 0.000 description 12
- 238000001994 activation Methods 0.000 description 9
- 230000000694 effects Effects 0.000 description 7
- 238000006555 catalytic reaction Methods 0.000 description 5
- IOVCWXUNBOPUCH-UHFFFAOYSA-M Nitrite anion Chemical compound [O-]N=O IOVCWXUNBOPUCH-UHFFFAOYSA-M 0.000 description 4
- 241000084978 Rena Species 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000004140 cleaning Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000004506 ultrasonic cleaning Methods 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 2
- 230000001590 oxidative effect Effects 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 230000002000 scavenging effect Effects 0.000 description 2
- 241001307307 Corilla Species 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- IOVCWXUNBOPUCH-UHFFFAOYSA-N Nitrous acid Chemical compound ON=O IOVCWXUNBOPUCH-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229920004933 Terylene® Polymers 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 239000006117 anti-reflective coating Substances 0.000 description 1
- 230000003667 anti-reflective effect Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000004568 cement Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000001351 cycling effect Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 239000012634 fragment Substances 0.000 description 1
- 235000015073 liquid stocks Nutrition 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 239000007800 oxidant agent Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 229920000915 polyvinyl chloride Polymers 0.000 description 1
- 239000004800 polyvinyl chloride Substances 0.000 description 1
- 230000036632 reaction speed Effects 0.000 description 1
- 238000006722 reduction reaction Methods 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 239000005060 rubber Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 229920002994 synthetic fiber Polymers 0.000 description 1
- 239000004758 synthetic textile Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
- 238000004383 yellowing Methods 0.000 description 1
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Photovoltaic Devices (AREA)
Abstract
Description
Claims (8)
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CN2010105583925A CN102181937B (zh) | 2010-11-24 | 2010-11-24 | 一种制作太阳能多晶硅绒面的腐蚀液的激活方法 |
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CN2010105583925A CN102181937B (zh) | 2010-11-24 | 2010-11-24 | 一种制作太阳能多晶硅绒面的腐蚀液的激活方法 |
Publications (2)
Publication Number | Publication Date |
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CN102181937A CN102181937A (zh) | 2011-09-14 |
CN102181937B true CN102181937B (zh) | 2012-12-12 |
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CN2010105583925A Expired - Fee Related CN102181937B (zh) | 2010-11-24 | 2010-11-24 | 一种制作太阳能多晶硅绒面的腐蚀液的激活方法 |
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Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
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CN103643304A (zh) * | 2013-12-18 | 2014-03-19 | 上饶光电高科技有限公司 | 一种激活多晶硅制绒药液的方法 |
CN104465872A (zh) * | 2014-11-28 | 2015-03-25 | 浙江鸿禧能源股份有限公司 | 一种提高se工艺正刻槽新配药液激活效率的方法 |
CN112802744B (zh) * | 2020-12-30 | 2023-05-12 | 长春长光圆辰微电子技术有限公司 | 硅腐蚀液激活方法 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5843322A (en) * | 1996-12-23 | 1998-12-01 | Memc Electronic Materials, Inc. | Process for etching N, P, N+ and P+ type slugs and wafers |
JP2001085385A (ja) * | 1999-07-14 | 2001-03-30 | Nisso Engineering Co Ltd | シリコンのエッチング方法及び装置 |
CN101409313A (zh) * | 2008-11-19 | 2009-04-15 | 张根发 | 磁场下制备硅太阳能电池绒面的方法 |
CN101586239A (zh) * | 2009-06-08 | 2009-11-25 | 江苏林洋新能源有限公司 | 多晶硅酸蚀化学绒面制备添加剂 |
CN101717937A (zh) * | 2009-12-24 | 2010-06-02 | 浙江向日葵光能科技股份有限公司 | 一种用于制备单晶硅绒面的酸腐蚀溶液及其使用方法 |
-
2010
- 2010-11-24 CN CN2010105583925A patent/CN102181937B/zh not_active Expired - Fee Related
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5843322A (en) * | 1996-12-23 | 1998-12-01 | Memc Electronic Materials, Inc. | Process for etching N, P, N+ and P+ type slugs and wafers |
JP2001085385A (ja) * | 1999-07-14 | 2001-03-30 | Nisso Engineering Co Ltd | シリコンのエッチング方法及び装置 |
CN101409313A (zh) * | 2008-11-19 | 2009-04-15 | 张根发 | 磁场下制备硅太阳能电池绒面的方法 |
CN101586239A (zh) * | 2009-06-08 | 2009-11-25 | 江苏林洋新能源有限公司 | 多晶硅酸蚀化学绒面制备添加剂 |
CN101717937A (zh) * | 2009-12-24 | 2010-06-02 | 浙江向日葵光能科技股份有限公司 | 一种用于制备单晶硅绒面的酸腐蚀溶液及其使用方法 |
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Address after: Shen Gang Town Cheng Road Jiangyin city Jiangsu Province, Wuxi City, No. 1011, 214443 Patentee after: CNBM JETIONSOLAR TECHNOLOGY Co.,Ltd. Address before: Shen Gang Town Cheng Road Jiangyin city Jiangsu Province, Wuxi City, No. 1011, 214443 Patentee before: JETION SOLAR CHINA Co.,Ltd. |
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Address after: Shen Gang Town Cheng Road Jiangyin city Jiangsu Province, Wuxi City, No. 1011, 214443 Patentee after: JETION SOLAR (JIANGSU) Co.,Ltd. Address before: Shen Gang Town Cheng Road Jiangyin city Jiangsu Province, Wuxi City, No. 1011, 214443 Patentee before: CNBM JETIONSOLAR TECHNOLOGY Co.,Ltd. |
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