CN102175326A - Optical distance doubled dynamic collimation interferometer - Google Patents
Optical distance doubled dynamic collimation interferometer Download PDFInfo
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- CN102175326A CN102175326A CN2011100239818A CN201110023981A CN102175326A CN 102175326 A CN102175326 A CN 102175326A CN 2011100239818 A CN2011100239818 A CN 2011100239818A CN 201110023981 A CN201110023981 A CN 201110023981A CN 102175326 A CN102175326 A CN 102175326A
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- interferometer
- dynamic collimation
- beam splitter
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- connecting rod
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Abstract
The invention provides an optical distance doubled dynamic collimation interferometer. The optical distance doubled dynamic collimation interferometer comprises a beam splitter, a motion bearing is arranged at one side of the beam splitter, the beam splitter and the motion bearing are arranged in a manner of forming a 45-degree included angle, two ends of the motion bearing are respectively connected with a connecting rod, and two corner reflectors are respectively arranged on the connecting rods; a dynamic collimation reflector is arranged in a manner of forming the 45-degree included angle with the beam splitter, a transmission light of the dynamic collimation reflector is reflected to the corner reflector below, corresponding movable reflector is combined, and the corner reflector over the movable reflector is used as a fixed reflector. The optical distance doubled dynamic collimation interferometer provided by the invention has the benefit that effective optical distance of the dynamic collimation interferometer is doubled without adding the scanning stroke of the movable reflector, and the resolution ratio of a FTIR is improved; structure of the interferometer is greatly simplified to be more compact, the volume and the weight of the interferometer can be greatly reduced, and implementation of miniaturization of the interferometer is facilitated; a dynamic collimation control system is used, the dynamic collimation reflector continuously adjust the posture according to the returned information, so that the interference can be always in the best status, and requirement on accuracy of guide rails is reduced. The optical distance doubled dynamic collimation interferometer implements the perfect match of the cost and the benefit.
Description
Technical field
The present invention relates to a kind of interferometer, a kind of times light path dynamic collimation interferometer that is applied to Fourier transformation infrared spectrometer (FTIR) also can be used for the Fourier transform spectrometer.
Background technology
Interferometer is the core component of Fourier transformation infrared spectrometer, and it is equivalent to the scanning mechanism of conventional spectrometers, and it obtains all band spectrum interferogram by the scanning of control index glass, and interferogram is carried out the infrared spectrum that Fourier transform just can obtain sample.
In order to obtain desirable spectrogram, necessarily require interferogram that higher degree of modulation is arranged.Just transversal displacement and angular deflection in the process of walking all has strict requirement to index glass for this.The index glass stroke of the resolution of Fourier transformation infrared spectrometer and interferometer is closely related, and this is for high-resolution FTIR, owing to needing long light path scanning, so higher to the requirement of guide rail.The conventional interference instrument is generally taked the air track structure in early days, and voice coil motor drives.This mode can be mentioned instrumental resolution very high, but this apparatus structure complexity, heaviness and volume are big, and operation and maintenance is all inconvenient, eliminates gradually.
Existing market main flow interferometer as shown in Figure 1, incident light is divided into two-beam through beam splitter 1, separately through horizontal glass 2 and index glass 3 reflections, the interference light that forms of stack then.Its general structure that adopts precision optical machinery guide rail, angle mirror or opal mirror to make catoptron (index glass and horizontal glass), this mode can effectively overcome index glass and tilt to bring influence, can relax requirement a little to the guide rail transverse precision, but axial traversing deviation requires harsher to hanging down, and adopt this mechanical guide rail generally all to need to use lubricating oil, bring certain trouble for the cleaning ambient of optical system.The general FTIR resolution of this structure that adopts is difficult for accomplishing very high.
Summary of the invention
Deficiency at existing interferometer, the purpose of this invention is to provide a kind of times of light path dynamic collimation interferometer: can be issued to the double light path effect of conventional interference instrument at same guide rail stroke, can double resolution in theory, and employing dynamic collimation catoptron can significantly reduce the requirement to guide precision, effectively reduces cost.
For achieving the above object, the technical solution used in the present invention provides a kind of times of light path dynamic collimation interferometer, this interferometer includes beam splitter, wherein: this interferometer also includes two corner reflectors, connecting rod, motion bearings, the dynamic collimation catoptron of upper and lower, side at described beam splitter is provided with motion bearings, the 45 degree angles that are of described beam splitter and motion bearings are put, and the two ends of motion bearings are connected with connecting rod respectively, and described two corner reflectors are installed on the connecting rod respectively; Described dynamic collimation catoptron and beam splitter are 45 degree angles to be put, and the transmitted light of dynamic collimation catoptron reflexes on the corner reflector of below, and makes up suitable index glass, and the corner reflector of described top is as horizontal glass.
Effect of the present invention is that this times light path dynamic collimation interferometer can be under the prerequisite that does not increase the index glass swash width, effective light path that doubles, thereby the resolution of raising FTIR; And the structure of interferometer simplify greatly, compacter, can obviously reduce the interferometer volume and weight, help realizing the miniaturization of instrument; Adopt the dynamic collimation control system, the dynamic collimation catoptron is constantly adjusted attitude according to return message, makes interference be in optimum condition always, thereby reduces the accuracy requirement to guide rail.Realized the perfect adaptation of cost and benefit.
Description of drawings
Fig. 1 conventional interference instrument schematic diagram;
Of the present invention times of light path dynamic collimation of Fig. 2 interferometer schematic diagram;
The core texture figure of Fig. 3 motion bearings of the present invention;
The structure principle chart of Fig. 4 dynamic collimation catoptron of the present invention;
The vertical view of Fig. 5 dynamic collimation catoptron of the present invention coil groups.
Among the figure:
1, beam splitter 2, horizontal glass 3, index glass 4, corner reflector 5, connecting rod 6, motion bearings
7, dynamic collimation catoptron 8, connecting rod cover 9, quartz ampoule 10, graphite bushing
11, support ring 12, rubber spring 13, guidance magnets 14, guiding iron staff
15, plane mirror 16, coil groups 17, magnet base
Embodiment
In conjunction with the accompanying drawings of the present invention times of light path dynamic collimation interferometer structure is illustrated.
Of the present invention times of light path dynamic collimation interferometer is the improvement on traditional classical michelson interferometer optical path architecture basics, and the optical path difference of this interferometer is the twice of index glass guide rail scanning distance.
Of the present invention times of light path dynamic collimation interferometer, this interferometer includes beam splitter, this interferometer also includes two corner reflectors 4, connecting rod 5, motion bearings 6, the dynamic collimation catoptron 7 of upper and lower, side at described beam splitter 1 is provided with motion bearings 6, described beam splitter 1 is put with the 45 degree angles that are of motion bearings 6, the two ends of motion bearings 6 are connected with connecting rod 5 respectively, and described two corner reflectors 4 are installed in respectively on the connecting rod 5; Described dynamic collimation catoptron 7 is 45 degree angles with beam splitter 1 to be put, and the transmitted light of dynamic collimation catoptron 7 reflexes on the corner reflector 4 of below, and makes up suitable index glass, and the corner reflector 4 of described top is as horizontal glass.Described beam splitter 1 center to the distance at corner reflector 4 centers of top equal beam splitter 1 center to dynamic collimation mirror 7 centers again to corner reflector 4 centers of below apart from sum.
Described motion bearings 6 includes graphite bushing 10, quartz ampoule 9 and guidance magnets 13, graphite bushing 10 is installed in the quartz ampoule 9, guidance magnets 13 is embedded on graphite bushing 10 outer walls, the outer wall of being close to quartz ampoule 9 is provided with guiding iron staff 14, middle part in the graphite bushing 10 is provided with connecting rod cover 8, middle part at graphite bushing 10 embeds rubber spring 12, forms wringing fit with connecting rod cover 8, is respectively equipped with support ring 11 in the both sides of connecting rod cover 8.
Of the present invention times of light path dynamic collimation interferometer is achieved in that
As shown in Figure 2, two corner reflectors 4 install on the connecting rod 5, and one of them is equivalent to horizontal glass, and another is equivalent to index glass with the combined effect with dynamic collimation catoptron 7.Connecting rod 5 is installed on the motion bearings 6.Light resolves into two-beam and arrives at two corner reflectors 4 respectively through beam splitter 1, if the displacement of motion bearings 6 is constant, optical path difference is compared then with the conventional interference instrument and doubled, the origin of Here it is times light path.Perhaps can reduce making FTIR keep same resolution under the half stroke situation at guide rail, can reduce the volume of interferometer so greatly, be easy to realize instrument miniaturization.
Of the present invention times of light path dynamic collimation interferometer adopts novel motion bearings 6, and its central core texture as shown in Figure 3.Graphite bushing 10 motion in the quartz ampoule 9 of polishing with extraordinary machining graphite substitutes present widely used precision optical machinery guide rail, because graphite and quartzy low friction and low-expansion characteristic, this guide rail have advantages such as light weight, low friction, low-loss, good temp characteristic.
Because adopt this structure, the error of guide rail can be put and is twice, so catoptron 4 is not selected level crossing for use, has adopted corner reflector.Two corner reflectors are respectively installed on two connecting rods 5, and connecting rod 5 is installed to graphite bushing 10, and it is in the key components of motion bearings 6, for keeping balance, distribute about both.The guiding iron prop 14 that guidance magnets 13 and quartz ampoule 9 outer walls are installed on this external graphite wall cooperates, and can make motion bearings 6 be in certain suspended state, has further reduced friction, improves sweep velocity.
Connecting rod 5 is installed to the two ends of connecting rod cover 8, the intermediate groove of connecting rod cover 8 is embedded in a rubber spring 12, rubber spring 12 is bitten protruding little in the middle of the graphite bushing 10 again, play the effect of certain damping and isolated dither, both sides at connecting rod cover 8 are respectively equipped with support ring 11, support ring 11 usefulness seccotines adhere to the inwall of the graphite bushing 10 of tubulose, play the effect of firm connecting rod 5.There is an elongated slot central authorities of graphite bushing 10 position up, in a guidance magnets 13 is arranged, with guiding iron staff 14 mating reactions of quartz ampoule 9 outer walls, play guiding and suspension effect, and prevent graphite bushing 10 rotations.
The realization principle of dynamic collimation catoptron 7 is as shown in Figure 4: catoptron 15 is installed on the magnet base 17, and a coil groups 16 is arranged around the magnet base 17, this coil groups in pairs, as the coil groups vertical view of Fig. 5.Control system is surveyed (figure does not show) interference signal to laser according to 4 quadrant detector, come synchronous micro-adjusting plane mirror 15 angle of inclination up and down by the electric current of adjusting two pairs of coils in the coil groups 16, to guarantee the interference signal maximum, reach the purpose of dynamic adjustment catoptron.
In a word, of the present invention times of light path dynamic collimation interferometer structure can significantly reduce the volume of conventional interference instrument and not influence the resolution of FTIR, even can also improve resolution, and this is to miniaturization of high-end FTIR and intelligent significant.
Claims (3)
1. one kind of times of light path dynamic collimation interferometer, this interferometer includes beam splitter, it is characterized in that: this interferometer also includes two corner reflectors (4), connecting rod (5), motion bearings (6), the dynamic collimation catoptron (7) of upper and lower, side at described beam splitter (1) is provided with motion bearings (6), described beam splitter (1) is put with the 45 degree angles that are of motion bearings (6), the two ends of motion bearings (6) are connected with connecting rod (5) respectively, and described two corner reflectors (4) are installed in respectively on the connecting rod (5); Described dynamic collimation catoptron (7) is 45 degree angles with beam splitter (1) to be put, and the transmitted light of dynamic collimation catoptron (7) reflexes on the corner reflector (4) of below, and makes up suitable index glass, and the corner reflector of described top (4) is as horizontal glass.
2. according to claim 1 times of light path dynamic collimation interferometer, it is characterized in that: described motion bearings (6) includes graphite bushing (10), quartz ampoule (9) and guidance magnets (13), graphite bushing (10) is installed in the quartz ampoule (9), guidance magnets (13) is embedded on graphite bushing (10) outer wall, the outer wall of being close to quartz ampoule (9) is provided with guiding iron staff (14), middle part in the graphite bushing (10) is provided with connecting rod cover (8), middle part at graphite bushing (10) embeds rubber spring (12), form wringing fit with connecting rod cover (8), be respectively equipped with support ring (11) in the both sides of connecting rod cover (8).
3. according to claim 1 times of light path dynamic collimation interferometer is characterized in that: described beam splitter (1) center to the distance at corner reflector (4) center of top equal beam splitter (1) center to dynamic collimation mirror (7) center again to corner reflector (4) center of below apart from sum.
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102564587A (en) * | 2012-01-11 | 2012-07-11 | 天津港东科技发展股份有限公司 | Rotary multi-optical-path interferometer |
| CN105242386A (en) * | 2015-10-30 | 2016-01-13 | 吴凡 | Passive type optical transmission apparatus and method of signals |
| CN106018344A (en) * | 2016-05-16 | 2016-10-12 | 中国电子科技集团公司第四十研究所 | Miniaturized Fourier spectrometer based on linear reciprocation lead screw |
| WO2020147625A1 (en) * | 2019-01-14 | 2020-07-23 | 上海禾赛光电科技有限公司 | Scanning device and laser radar |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101413783A (en) * | 2008-07-23 | 2009-04-22 | 中国航空工业第一集团公司北京长城计量测试技术研究所 | Double-frequency laser interferometry apparatus |
| US20100265512A1 (en) * | 2009-04-17 | 2010-10-21 | Si-Ware Systems | Opto-mechanical optical path retardation multiplier for optical mems applications |
| CN201909671U (en) * | 2011-01-27 | 2011-07-27 | 天津港东科技发展股份有限公司 | Multiplied optical distance dynamic collimation interferometer |
-
2011
- 2011-01-21 CN CN201110023981A patent/CN102175326B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101413783A (en) * | 2008-07-23 | 2009-04-22 | 中国航空工业第一集团公司北京长城计量测试技术研究所 | Double-frequency laser interferometry apparatus |
| US20100265512A1 (en) * | 2009-04-17 | 2010-10-21 | Si-Ware Systems | Opto-mechanical optical path retardation multiplier for optical mems applications |
| CN201909671U (en) * | 2011-01-27 | 2011-07-27 | 天津港东科技发展股份有限公司 | Multiplied optical distance dynamic collimation interferometer |
Non-Patent Citations (4)
| Title |
|---|
| 《中国激光》 20000531 赵美蓉 等 光程差倍增的纳米级精度激光干涉仪 第27卷, 第5期 * |
| 《现代科学仪器》 20100430 杨琨 等 基于定镜动态准直的傅里叶变换拉曼光谱仪 , 第4期 * |
| 杨琨 等: "基于定镜动态准直的傅里叶变换拉曼光谱仪", 《现代科学仪器》, no. 4, 30 April 2010 (2010-04-30) * |
| 赵美蓉 等: "光程差倍增的纳米级精度激光干涉仪", 《中国激光》, vol. 27, no. 5, 31 May 2000 (2000-05-31) * |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102564587A (en) * | 2012-01-11 | 2012-07-11 | 天津港东科技发展股份有限公司 | Rotary multi-optical-path interferometer |
| CN102564587B (en) * | 2012-01-11 | 2013-08-28 | 天津港东科技发展股份有限公司 | Rotary multi-optical-path interferometer |
| CN105242386A (en) * | 2015-10-30 | 2016-01-13 | 吴凡 | Passive type optical transmission apparatus and method of signals |
| CN106018344A (en) * | 2016-05-16 | 2016-10-12 | 中国电子科技集团公司第四十研究所 | Miniaturized Fourier spectrometer based on linear reciprocation lead screw |
| WO2020147625A1 (en) * | 2019-01-14 | 2020-07-23 | 上海禾赛光电科技有限公司 | Scanning device and laser radar |
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| CN102175326B (en) | 2012-09-26 |
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Address after: 300384 EF unit two, block G, Xinmao private science and Technology Park, Huayuan Industrial Area, Nankai District, Tianjin Patentee after: East Polytron Technologies Inc of Tianjin port Address before: 300384 EF unit two, block G, Xinmao private science and Technology Park, Huayuan Industrial Area, Nankai District, Tianjin Patentee before: Tianjin Gangdong Technology Development Co., Ltd. |
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