CN102166575B - Cleaning process of beryllium oxide ceramic - Google Patents
Cleaning process of beryllium oxide ceramic Download PDFInfo
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- CN102166575B CN102166575B CN 201010597324 CN201010597324A CN102166575B CN 102166575 B CN102166575 B CN 102166575B CN 201010597324 CN201010597324 CN 201010597324 CN 201010597324 A CN201010597324 A CN 201010597324A CN 102166575 B CN102166575 B CN 102166575B
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Abstract
The invention discloses a cleaning process of beryllium oxide ceramic. The process has the following process flow of: preparing oil-removing solution, removing oil with ultrasonic waves, filtering the solution and treating scrap materials, cleaning with flowing water, cleaning with the ultrasonic waves, drying, and taking the beryllium oxide ceramic out. The cleaning process is simple, easy to realize and low in cost; toxic dust attached to the beryllium oxide can be effectively washed off; and the hurt to a human body caused by the beryllium oxide is reduced.
Description
Technical field
The present invention relates to microwave electrovacuum technique and electrovacuum material technology field, relate in particular to a kind of cleaning of beryllium oxide ceramics.
Background technology
Electrovacuum ceramics comprises oxide ceramics, silicate ceramics, nitride ceramics etc.Comprise again aluminium oxide (Al in the oxide ceramics
2O
3) porcelain, beryllium oxide (BeO) porcelain, magnesia (MgO) porcelain, zirconia (ZrO
2) porcelain etc.The main component of oxide porcelain is the single oxide crystallization, and crystalline phase purity is high, contains glassy phase few.Material purity is high, and sintering temperature is also high, so the electricity of porcelain, heat and mechanical performance are all better.
Beryllium oxide ceramics is take the beryllium oxide powder as raw material, adds micro Mg O, Al
2O
3Form Deng the additive sintering, sintering temperature reaches 1800 ℃～1850 ℃.The mechanical strength of beryllium oxide ceramics is a little less than Al
2O
3Porcelain, but be enough to satisfy the requirement of electron tube, its coefficient of expansion, dielectric strength, dielectric loss all with Al
2O
3Porcelain approaches.The characteristics of beryllia ceramics maximum are to have the capacity of heat transmission that can compare with metal, and its thermal conductivity factor and fine aluminium approach, and are Al
2O
310 times of 95 porcelain.As seen beryllium oxide is the insulating materials of a kind of low-loss, high heat conduction, is the ideal material of making high-power delivery of energy window, high power travelling wave tube collector insulating heat-conductive porcelain and helix supporting rod etc.
But the dust of beryllium oxide has severe toxicity, sucks behind the human body together upper respiratory tract pathology and berylliosis of lung, the skin contact of wound is arranged after, can cause skin ulcer, therefore produce and the factory of processing beryllium oxide, must take strict safeguard procedures.But the general contact of beryllia ceramics that direct purchase has been made can't cause poisoning.Each electrovacuum producer all more or less meeting buy to use beryllia ceramics, therefore must formulate the related process of strict beryllium oxide ceramics.
Summary of the invention
The object of the invention provides a kind of cleaning of beryllium oxide ceramics, the problem that the toxic dust of having with beryllium oxide in the solution prior art damages human body.
In order to achieve the above object, the technical solution adopted in the present invention is:
A kind of cleaning of beryllium oxide ceramics is characterized in that: may further comprise the steps successively:
(1) preparation beryllium oxide ceramics degreasing solution: at first measure deionized water with graduated cylinder, and the deionized water that measures is poured in the beaker, then beaker is put on the electric furnace; Next takes by weighing sodium oxalate, sodium tartrate, OP emulsifying agent at counter balance, the sodium oxalate, sodium tartrate, the OP emulsifying agent that take by weighing is poured into respectively in the deionized water in the described beaker again and constantly stirred to make its dissolving, obtains degreasing solution;
(2) by electric furnace the degreasing solution in the beaker is heated to 60-65 ℃, again beryllium oxide ceramics to be cleaned is put into the degreasing solution of beaker, then will put into the beaker of beryllium oxide ceramics and put into ultrasonic cleaner;
(3) generator power of connection ultrasonic cleaner carries out the ultrasonic wave processing to the beryllium oxide ceramics that is placed in the beaker degreasing solution, and ultrasonic treatment time is no less than 15min, and ultrasonic frequency vibratory is no more than 20kHz;
(4) liquid in the beaker after step (3) ultrasonic wave is processed is poured out, and the liquid of beaker being poured out with the funnel that filter paper is housed filters, and the residual substances that leaches is packed in the returnable;
(5) with the beryllium oxide ceramics in the beaker behind the hot water cleaning completing steps (4) of 35-40 ℃ of temperature current downflow, scavenging period is 10-15min; Beryllium oxide ceramics in the beaker after cleaning with the cold water cleaning hot water that flows again, scavenging period is 10-15min;
(6) with the beryllium oxide ceramics behind the washed with de-ionized water completing steps (5), scavenging period is 10-15min, and the deionization resistivity of water that cleans usefulness should be not less than 5M Ω; When washed with de-ionized water beryllium oxide ceramics is carried out ultrasonic wave simultaneously and process, ultrasonic frequency vibratory is no more than 20kHz, and ultrasonic wave is processed duration 15min.
(7) beryllium oxide ceramics that is contained in behind the completing steps (6) in the beaker is taken out, dry up with dried compressed air;
(8) beryllium oxide ceramics after completing steps (7) is dried up is put into baking oven and is toasted, and baking temperature is 50 ℃, and stoving time is 10min;
(9) take out clean beryllium oxide ceramics in the rear baking oven of completing steps (8).
The cleaning of described a kind of beryllium oxide ceramics is characterized in that: in the described step (1), the weight proportion of each component of degreasing solution is:
Sodium oxalate 3,
Sodium tartrate 2,
OP emulsifying agent 1.5,
Deionized water 1000.
Technique of the present invention is simple, is easy to realize, cost is lower, the toxic dust had of flush away beryllium oxide effectively, reduce beryllium oxide to the injury that human body causes, made beryllium oxide can be widely used in microwave electrovacuum field, greatly improved the working environment in microwave electrovacuum field.
Description of drawings
Fig. 1 is process chart of the present invention.
The specific embodiment
As shown in Figure 1.A kind of cleaning of beryllium oxide ceramics is characterized in that: may further comprise the steps successively:
(1) preparation beryllium oxide ceramics degreasing solution: at first measure 1000 ml deionized water with graduated cylinder, and the deionized water that measures is poured in the beaker, then beaker is put on the electric furnace; Secondly take by weighing sodium oxalate 3 grams, sodium tartrate 2 grams, OP emulsifying agent 1.5 grams at counter balance, again the sodium oxalate, sodium tartrate, the OP emulsifying agent that take by weighing are poured into respectively in the deionized water in the beaker and constantly stirred and make its dissolving, obtain degreasing solution;
(2) by electric furnace the degreasing solution in the beaker is heated to 63 ℃, again beryllium oxide ceramics to be cleaned is put into the degreasing solution of beaker, then will put into the beaker of beryllium oxide ceramics and put into ultrasonic cleaner;
(3) generator power of connection ultrasonic cleaner carries out ultrasonic wave processing, ultrasonic treatment time 25min, ultrasonic frequency vibratory 15kHz to the beryllium oxide ceramics that is placed in the beaker degreasing solution;
(4) liquid in the beaker after step (3) ultrasonic wave is processed is poured out, and the liquid of beaker being poured out with the funnel that filter paper is housed filters, and the residual substances that leaches is packed in the returnable;
(5) with the beryllium oxide ceramics in the beaker behind the hot water cleaning completing steps (4) of 37 ℃ of temperature current downflow, scavenging period is 13min; Beryllium oxide ceramics in the beaker after cleaning with the cold water cleaning hot water that flows again, scavenging period is 13min;
(6) with the beryllium oxide ceramics behind the washed with de-ionized water completing steps (5), scavenging period is 13min, and the deionization resistivity of water that cleans usefulness is 7M Ω; When washed with de-ionized water, beryllium oxide ceramics is carried out ultrasonic wave simultaneously and process, ultrasonic frequency vibratory 15kHz, ultrasonic wave is processed duration 15min.
(7) beryllium oxide ceramics that is contained in behind the completing steps (6) in the beaker is taken out, dry up with dried compressed air;
(8) beryllium oxide ceramics after completing steps (7) is dried up is put into baking oven and is toasted, and baking temperature is 50 ℃, and stoving time is 10min;
(9) take out clean beryllium oxide ceramics in the rear baking oven of completing steps (8).
Points for attention in the technique of the present invention:
1, must put on work clothes before the work, wear protective gloves, glasses and mouth mask.
2, forbid not working under the condition of air draft having.
If 3 pickles splash on the skin because of carelessness, should wipe with cotton immediately, and wash with a large amount of running water.
Claims (1)
1. the cleaning of a beryllium oxide ceramics is characterized in that: may further comprise the steps successively:
(1) preparation beryllium oxide ceramics degreasing solution: at first measure deionized water with graduated cylinder, and the deionized water that measures is poured in the beaker, then beaker is put on the electric furnace; Next takes by weighing sodium oxalate, sodium tartrate, OP emulsifying agent at counter balance, the sodium oxalate, sodium tartrate, the OP emulsifying agent that take by weighing is poured into respectively in the deionized water in the described beaker again and constantly stirred to make its dissolving, obtains degreasing solution;
(2) by electric furnace the degreasing solution in the beaker is heated to 60-65 ℃, again beryllium oxide ceramics to be cleaned is put into the degreasing solution of beaker, then will put into the beaker of beryllium oxide ceramics and put into ultrasonic cleaner;
(3) generator power of connection ultrasonic cleaner carries out the ultrasonic wave processing to the beryllium oxide ceramics that is placed in the beaker degreasing solution, and ultrasonic treatment time is no less than 15min, and ultrasonic frequency vibratory is no more than 20kHz;
(4) liquid in the beaker after step (3) ultrasonic wave is processed is poured out, and the liquid of beaker being poured out with the funnel that filter paper is housed filters, and the residual substances that leaches is packed in the returnable;
(5) with the beryllium oxide ceramics in the beaker behind the hot water cleaning completing steps (4) of 35-40 ℃ of temperature current downflow, scavenging period is 10-15min; Beryllium oxide ceramics in the beaker after cleaning with the cold water cleaning hot water that flows again, scavenging period is 10-15min;
(6) with the beryllium oxide ceramics behind the washed with de-ionized water completing steps (5), scavenging period is 10-15min, and the deionization resistivity of water that cleans usefulness should be not less than 5M Ω; When washed with de-ionized water beryllium oxide ceramics is carried out ultrasonic wave simultaneously and process, ultrasonic frequency vibratory is no more than 20kHz, and ultrasonic wave is processed duration 15min;
(7) beryllium oxide ceramics that is contained in behind the completing steps (6) in the beaker is taken out, dry up with dried compressed air;
(8) beryllium oxide ceramics after completing steps (7) is dried up is put into baking oven and is toasted, and baking temperature is 50 ℃, and stoving time is 10min;
(9) take out clean beryllium oxide ceramics in the rear baking oven of completing steps (8);
In the described step (1), the weight proportion of each component of degreasing solution is:
Sodium oxalate 3,
Sodium tartrate 2,
OP emulsifying agent 1.5,
Deionized water 1000.
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|---|---|---|---|
| CN 201010597324 CN102166575B (en) | 2010-12-21 | 2010-12-21 | Cleaning process of beryllium oxide ceramic |
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|---|---|---|---|
| CN 201010597324 CN102166575B (en) | 2010-12-21 | 2010-12-21 | Cleaning process of beryllium oxide ceramic |
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| CN102166575B true CN102166575B (en) | 2013-02-06 |
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Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102825031B (en) * | 2012-08-29 | 2014-12-10 | 宁波高发汽车控制系统股份有限公司 | Method and system for ultrasonically cleaning operating mandrel |
| CN103878133B (en) * | 2013-10-09 | 2016-03-09 | 桐乡锦瑞化纤有限公司 | A kind of clean method of effective removal ceramic disk impurity |
| CN104289495B (en) * | 2014-09-04 | 2016-01-27 | 安徽华东光电技术研究所 | Recycling and retreating process for beryllium oxide ceramic of collector of traveling wave tube |
| CN105642605B (en) * | 2014-11-14 | 2018-07-24 | 中国航空工业第六一八研究所 | A method of cleaning magnet steel class material electric machining galvanic corrosion layer |
| CN104538267B (en) * | 2014-11-18 | 2017-08-11 | 安徽华东光电技术研究所 | A kind of negative electrode filament potting compound removing method |
| CN108816870B (en) * | 2018-04-08 | 2021-05-25 | 苏州珮凯科技有限公司 | Regeneration method of ceramic annular part of WxZ process in thin film manufacturing process of semiconductor 8-inch wafer |
| CN112893389A (en) * | 2020-12-30 | 2021-06-04 | 中鸣(宁德)科技装备制造有限公司 | Method for recycling beryllium oxide ceramic waste |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0305827A1 (en) * | 1987-08-28 | 1989-03-08 | Henkel Kommanditgesellschaft auf Aktien | Process for the ultrasonic cleaning of hard parts |
| CN101217101A (en) * | 2007-01-04 | 2008-07-09 | 北京北方微电子基地设备工艺研究中心有限责任公司 | A method to rinse blots on surfaces of ceramics |
| CN101439341A (en) * | 2007-11-19 | 2009-05-27 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Method for cleaning components of semi-conductor processing equipment |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3914982B2 (en) * | 2001-09-27 | 2007-05-16 | 独立行政法人産業技術総合研究所 | Antibacterial material and antibacterial product using the same |
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2010
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0305827A1 (en) * | 1987-08-28 | 1989-03-08 | Henkel Kommanditgesellschaft auf Aktien | Process for the ultrasonic cleaning of hard parts |
| CN101217101A (en) * | 2007-01-04 | 2008-07-09 | 北京北方微电子基地设备工艺研究中心有限责任公司 | A method to rinse blots on surfaces of ceramics |
| CN101439341A (en) * | 2007-11-19 | 2009-05-27 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Method for cleaning components of semi-conductor processing equipment |
Non-Patent Citations (1)
| Title |
|---|
| JP特开2003-95805A 2003.04.03 |
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Address after: 241000 Emshan Road, Yijiang District, Wuhu City, Anhui Province Patentee after: ANHUI HUADONG PHOTOELECTRIC TECHNOLOGY INSTITUTE Co.,Ltd. Address before: 241002 Huaxia science and Technology Park, hi tech Development Zone, Yijiang District, Wuhu, Anhui Patentee before: Anhui Huadong Polytechnic Institute |
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