CN102135628B - Diagnostic probe and diagnostic method for electron beam plasmas in atmospheric environment - Google Patents
Diagnostic probe and diagnostic method for electron beam plasmas in atmospheric environment Download PDFInfo
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- CN102135628B CN102135628B CN 201010620044 CN201010620044A CN102135628B CN 102135628 B CN102135628 B CN 102135628B CN 201010620044 CN201010620044 CN 201010620044 CN 201010620044 A CN201010620044 A CN 201010620044A CN 102135628 B CN102135628 B CN 102135628B
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Abstract
The invention relates to a diagnostic probe and diagnostic method for electron beam plasmas in an atmospheric environment, wherein the diagnostic probe comprises a Langmuir probe and is characterized by also comprising a titanium nitride film arranged on the surface of the Langmuir probe. The invention overcomes the problem that the existing plasma diagnostic technique is difficult to obtain the characteristics of the electron beam plasmas accurately and reliably in the atmospheric environment. The diagnostic probe and diagnostic method for the electron beam plasmas in the atmospheric environment, which are provided by the invention, can be used for measuring high-energy electron beams in any interval in the atmospheric environment and obtaining an electron spectrum, thereby realizing the characteristic diagnosis of the plasmas.
Description
Technical field
The present invention relates to diagnostic device and the diagnostic method of plasma under a kind of atmospheric environment, be particularly useful for the characteristic diagnosis of atmospheric environment electron beam plasma.
Background technology
Atmospheric environment electron beam plasma is to be produced by high-power electron beam and the collision of atmospheric environment air, and the characteristic of high energy electron and parameter will directly determine the character of plasma.Therefore, must adopting accurately and reliably, the electron beam plasma diagnostic method obtains its parameters.
Under atmospheric environment, high-power electron beam is via after transporting ejector and inciding in the denser air, ionize, excite, compound, the complicated physical process such as adhere to, produce the electron beam plasma.Because atmospheric environment atmospheric density is very high, so the secondary electron that produces of high energy beam electronics (primary electron) ionization is 4～5 times of beam electrons density, brought difficulty for the diagnosis of beam electrons characteristic.
Because the impact of secondary electron, the Faraday cylinder method can not be used for the beam diagnostics of beam electrons.In addition, because the high energy characteristic of beam electrons, common Langmuir (Langmuir) probe also will be difficult to use in the high energy beam current diagnosis.Because beam energy is very high, the general diagnostic method is difficult to competent.
Adopt the film coated probe that the high energy electron energy of diverse location is scanned, can realize the diagnosis of high energy electron line between any energy range, thereby can depict the electronic energy spectrum at different cross section place on the atmospheric environment high-power electron beam transmission path.The method has solved the difficult problem of high energy electron beam energy and beam diagnostics.
Summary of the invention
The present invention overcomes that existing Plasma Diagnostics is difficult to accurately, the reliable difficult problem of electron gain bundle plasma characteristics under atmospheric environment, a kind of diagnostic probe and diagnostic method for electron beam plasma under the atmospheric environment is provided, can under atmospheric environment, measure by the high-power electron beam stream to any interval, and the electron gain power spectrum, thereby the characteristic that realizes plasma is diagnosed.
Technical solution of the present invention:
Be used for the diagnostic probe of electron beam plasma under the atmospheric environment, comprise Langmuir probe, it is characterized in that: also comprise the titanium nitride membrane that is arranged on the Langmuir probe surface.
The thickness of above-mentioned titanium nitride membrane is not more than 800 microns.
Above-mentioned titanium nitride membrane is the surface vacuum splash-proofing sputtering metal nickel at the copper probe, and then sputtered titanium forms under nitrogen environment again.
Above-mentioned titanium nitride membrane is to adopt nanometer technique to form at the surface deposition titanium nitride of copper probe by vapour deposition process.
Be used for the diagnostic method of electron beam plasma under the atmospheric environment, may further comprise the steps:
1] gets the Langmuir probe that a plurality of surfaces are provided with the titanium nitride membrane of different-thickness;
2] translation is by same line xsect respectively with same speed perpendicular to the electron beam transmission direction to make each Langmuir probe, and the stream of energetic electrons that the real time record Langmuir probe is collected obtains the power spectrum of stream of energetic electrons.
Be used for the diagnostic method of electron beam plasma under the atmospheric environment, may further comprise the steps:
1] gets the Langmuir probe that a plurality of surfaces are provided with the titanium nitride membrane of different-thickness;
2] translation is by same line xsect respectively with same speed perpendicular to the electron beam transmission direction to make each Langmuir probe, and the stream of energetic electrons that the real time record Langmuir probe is collected obtains the relation curve of a stream of energetic electrons and this line xsect radius;
3] get another line xsect, repeating step 2], obtain a plurality of relation curves of stream of energetic electrons and different line xsect radiuses;
4] three-dimensional density that obtains high energy electron by stream of energetic electrons and a plurality of relation curves of different line xsect radiuses distributes;
5] the theoretical three-dimensional electronic Density Distribution of calculating atmospheric environment electron beam plasma;
6] three-dimensional density and the distribution of deriving secondary electron by three-dimensional density distribution and the atmospheric environment electron beam plasma three-dimensional electronic Density Distribution of high energy electron.
The present invention's beneficial effect compared with prior art is:
1, film coated probe of the present invention is easy to processing.
2, the inventive method distributes by power spectrum and the line that one-shot measurement can obtain high energy electron simultaneously, convenient data processing, quick.
3, the present invention has improved the order of accuarcy of probe diagnostics greatly.
Description of drawings
Fig. 1 is the structural representation of diagnostic probe of the present invention;
Fig. 2 a to Fig. 2 d is the process schematic diagram that probe translation of the present invention was swept away beam cross section;
Fig. 3 probe of the present invention and a plurality of beam cross sections concern schematic diagram;
Fig. 4 is the relation curve of stream of energetic electrons of the present invention and some line xsect radiuses.
Wherein Reference numeral is: 1-probe matrix, 2-film.
Embodiment
Fig. 1 is film coated scan-probe schematic diagram.This Langmuir probe is take metallic copper (Cu) as material; Coating is titanium nitride (TiN); Film thickness is determined according to the parameter of actual electronic beam current, generally is not more than 800 microns.Surface vacuum splash-proofing sputtering metal nickel (Ni) at the copper probe, sputtered titanium (Ti) more afterwards, then under nitrogen environment, form dielectric material titanium nitride (TiN) coating, also can be by methods such as vapour depositions at metal surface depositing titanium nitride (TiN).Because the singularity of experiment must propose higher requirement to thin film technology, except even compact, high temperature resistant, zero defect, good with metallic cohesion, also want accurately to obtain required thicknesses of layers, and adopt micro-nano deposition technique can obtain the film of desired thickness.
Can obtain Energy Spectrum of Relativistic Electrons with probe of the present invention, concrete steps are as follows:
1] gets the Langmuir probe that a plurality of surfaces are provided with the titanium nitride membrane of different-thickness;
2] translation is by same line xsect respectively with same speed perpendicular to the electron beam transmission direction to make each Langmuir probe, and the stream of energetic electrons that the real time record Langmuir probe is collected obtains the power spectrum of stream of energetic electrons.
Also can draw density and the distribution thereof of secondary electron (being low-energy electron) with probe of the present invention, specific as follows:
1] gets the Langmuir probe that a plurality of surfaces are provided with the titanium nitride membrane of different-thickness;
2] translation is by same line xsect respectively with same speed perpendicular to the electron beam transmission direction to make each Langmuir probe, and the stream of energetic electrons that the real time record Langmuir probe is collected obtains the relation curve of a stream of energetic electrons and this line xsect radius;
3] get another line xsect, repeating step 2], obtain a plurality of relation curves of stream of energetic electrons and different line xsect radiuses;
4] three-dimensional density that obtains high energy electron by stream of energetic electrons and a plurality of relation curves of different line xsect radiuses distributes;
5] the theoretical three-dimensional electronic Density Distribution of calculating atmospheric environment electron beam plasma;
6] three-dimensional density and the distribution of deriving secondary electron by three-dimensional density distribution and the atmospheric environment electron beam plasma three-dimensional electronic Density Distribution of high energy electron.
The principle of the invention:
Make probe perpendicular to the electron beam transmission direction, with the quick inswept electron beam xsect of the mode of translation, collect namely beam electrons of high energy electron by probe, thereby obtain the power spectrum of high energy electron, obtain simultaneously the relation curve of high energy electron electric current and line cross-sectional diameter, thereby obtain beam electrons Density Distribution diametrically.Calculate atmospheric environment electron beam plasma electron density according to theory again and distribute, the beam electrons density that records in conjunction with test, and derivation draws density and the distribution thereof of secondary electron (being low-energy electron).
The electronics of controlling different-energy by the thickness of the titanium nitride coating adjusted arrives the metal probe surface, and the beam electrons that energy is higher than the coating energy threshold can pass through coating and arrive detecting probe surface and be collected, and obtains the high energy electron line; The electronics that is lower than energy threshold is coated stopping then, can't arrive detecting probe surface.
Principle of the present invention: particle transports the certain free path of Shi Douyou in material, this free path is proportional to the energy of particle.In the electron beam plasma, the free path of high energy beam electronics is in micron dimension, and the free path of secondary electron is in nanometer scale.Therefore, the film of probe matrix surface micron dimension is transparent for beam electrons, and beam electrons can arrive detecting probe surface by film fully, and secondary electron is completely blocked.By changing film thickness, just can diagnose the Energy Spectrum of Relativistic Electrons in different-energy interval.
Claims (2)
1. be used for the diagnostic method of electron beam plasma under the atmospheric environment, it is characterized in that: may further comprise the steps:
1] gets the Langmuir probe that a plurality of surfaces are provided with the titanium nitride membrane of different-thickness;
2] translation is by same line xsect respectively with same speed perpendicular to the electron beam transmission direction to make each Langmuir probe, and the stream of energetic electrons that the real time record Langmuir probe is collected obtains the power spectrum of stream of energetic electrons.
2. be used for the diagnostic method of electron beam plasma under the atmospheric environment, it is characterized in that: may further comprise the steps:
1] gets the Langmuir probe that a plurality of surfaces are provided with the titanium nitride membrane of different-thickness;
2] translation is by same line xsect respectively with same speed perpendicular to the electron beam transmission direction to make each Langmuir probe, and the stream of energetic electrons that the real time record Langmuir probe is collected obtains the relation curve of a stream of energetic electrons and this line xsect radius;
3] get another line xsect, repeating step 2], obtain a plurality of relation curves of stream of energetic electrons and different line xsect radiuses;
4] three-dimensional density that obtains high energy electron by stream of energetic electrons and a plurality of relation curves of different line xsect radiuses distributes;
5] the theoretical three-dimensional electronic Density Distribution of calculating atmospheric environment electron beam plasma;
6] three-dimensional density and the distribution of deriving secondary electron by three-dimensional density distribution and the atmospheric environment electron beam plasma three-dimensional electronic Density Distribution of high energy electron.
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| CN 201010620044 CN102135628B (en) | 2010-12-31 | 2010-12-31 | Diagnostic probe and diagnostic method for electron beam plasmas in atmospheric environment |
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| CN 201010620044 CN102135628B (en) | 2010-12-31 | 2010-12-31 | Diagnostic probe and diagnostic method for electron beam plasmas in atmospheric environment |
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| CN102135628A CN102135628A (en) | 2011-07-27 |
| CN102135628B true CN102135628B (en) | 2013-01-16 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102543788A (en) * | 2011-11-29 | 2012-07-04 | 上海华力微电子有限公司 | Device for plasma detection |
| CN103017820A (en) * | 2012-11-25 | 2013-04-03 | 中国航天科技集团公司第五研究院第五一〇研究所 | Test system for distribution characteristics of artificial plasmas |
| CN104422478B (en) * | 2013-08-23 | 2017-05-17 | 中国科学院空间科学与应用研究中心 | Method for measuring parameters of transient plasmas in high-speed impact |
| CN103617348B (en) * | 2013-11-13 | 2016-08-17 | 中国航天科技集团公司第六研究院第十一研究所 | Atmospheric environmental electron beam plasma parameter acquisition method |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN101614606A (en) * | 2009-07-30 | 2009-12-30 | 中国科学院力学研究所 | A kind of measurement mechanism and method that detects the space plasma thruster thrust vectoring |
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| JPS63939A (en) * | 1986-06-19 | 1988-01-05 | Nec Corp | Collector of traveling wave tube |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN101614606A (en) * | 2009-07-30 | 2009-12-30 | 中国科学院力学研究所 | A kind of measurement mechanism and method that detects the space plasma thruster thrust vectoring |
Non-Patent Citations (4)
| Title |
|---|
| J.-P. Lebreton等.The ISL Langmuir probe experiment processing onboard DEMETER.《Planetary and Space Science》.2006,第54卷 * |
| JP昭63-939A 1988.01.05 |
| M.K.Wahlstrom等.Improved Langmuir probe surface coatings for the Cassini satellite.《Thin Solid Films》.1992,第220卷 * |
| W. E. Amatucci等.Contamination-free sounding rocket Langmuir probe.《REVIEW OF SCIENTIFIC INSTRUMENTS》.2004,第72卷(第4期), * |
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