CN102134705B - Bearing device and coating device using same - Google Patents
Bearing device and coating device using same Download PDFInfo
- Publication number
- CN102134705B CN102134705B CN201010300588.4A CN201010300588A CN102134705B CN 102134705 B CN102134705 B CN 102134705B CN 201010300588 A CN201010300588 A CN 201010300588A CN 102134705 B CN102134705 B CN 102134705B
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- China
- Prior art keywords
- absorptive element
- bolster stake
- bogey
- screw
- film coating
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Abstract
The invention relates to a bearing device which is used for fixing a ferromagnetic object. The bearing device comprises a supporting column, a bearing column arranged on the supporting column and a magnetic absorption element movably connected with the bearing column, wherein the magnetic absorption element is used for absorbing the ferromagnetic object so as to fix the ferromagnetic object. The absorption component can move relative to the bearing column so as to adjust the distance from the ferromagnetic object to the bearing column. The bearing device is convenient to fix and remove the ferromagnetic object by arranging the magnetic absorption element. Moreover, by movably connecting the absorption element and the bearing column, the distance from the ferromagnetic object to the bearing column can be adjusted. The invention also provides a coating device using the bearing device.
Description
Technical field
The present invention relates to the film coating apparatus of a kind of bogey and use bogey.
Background technology
At present, on some ferromagnetic metal goods, need to plate protective membrane in the mode of sputter.Existing film coating equipment adopts hook to fix metal products to be coated conventionally, makes when fixing and taking off metal products, and some inconvenience all seems.In addition, adopt the fixing metal products to be coated of hook, be difficult for regulating the distance between metal products and target, thereby need to design the hook of different size, both increased cost, also make procedure for producing more complicated.
Summary of the invention
In view of this, be necessary to provide a kind of fixing bogey with taking off carried article of being convenient to.
Also be necessary to provide a kind of film coating apparatus of being convenient to fix and take off the bogey of carried article that has.
, for fixing ferromegnetism object.The magnetic absorption element that described bogey comprises pillar stiffener, is located at the bolster stake on pillar stiffener and is flexibly connected with bolster stake.Described absorptive element is used for adsorbing described ferromegnetism object, to fix described ferromegnetism object.Described absorptive element can move with respect to described bolster stake, to regulate ferromegnetism object with respect to the distance of described bolster stake.
, the film coating equipment that it comprises vacuum chamber and is positioned at vacuum chamber.Described film coating equipment comprises for carrying the target bogey of target and for carrying the substrate bears device of ferromegnetism base material, described substrate bears device and target bogey are oppositely arranged.The magnetic absorption element that described substrate bears device comprises pillar stiffener, is located at the bolster stake on pillar stiffener and is connected with bolster stake.Described absorptive element is used for adsorbing described ferromegnetism base material, to fix described ferromegnetism base material.
Above-mentioned bogey and film coating apparatus, by the absorptive element of magnetic is set, thereby be convenient to fix and take off ferromegnetism object.And described bogey is by absorptive element is flexibly connected with bolster stake, thereby can regulate the distance between ferromegnetism object and bolster stake.
Accompanying drawing explanation
Fig. 1 is the structural representation of the film coating apparatus of a preferred embodiments.
Fig. 2 is the decomposed figure of the substrate bears device of the film coating apparatus in Fig. 1.
Main element nomenclature
Target bogey 22
Substrate bears device 23
Pillar stiffener 24
Bolster stake 25
Screw 250
Absorptive element 26
Screw thread 260
Adjusting portion 262
Scale portion 264
Embodiment
Below in conjunction with accompanying drawing, be described in further detail.
Figure 1 shows that the schematic diagram of the film coating apparatus 100 of a preferred embodiments.This film coating apparatus 100 comprises vacuum chamber 10, is positioned at the film coating equipment 20 of vacuum chamber 10 and the drive unit 30 being connected with film coating equipment 20.This film coating apparatus 100 can also comprise the (not shown) such as pumped vacuum systems, cooling system and ion source.
Refer to Fig. 2, substrate bears device 23 comprises pillar stiffener 24, the magnetic absorption element 26 that is vertically fixed on the bolster stake 25 on pillar stiffener 24 and is flexibly connected with bolster stake 25.Absorptive element 26 is for adsorbing ferromegnetism base material 500, with fixing substrate 500.In the present embodiment, the one end away from pillar stiffener 24 on bolster stake 25 offers screw 250, and one end of absorptive element 26 is provided with outside screw 260, so that absorptive element 26 is screwed together in the screw 250 of bolster stake 25.By making absorptive element 26 with respect to bolster stake 25 rotations, can regulate absorptive element 26 ends to the distance of pillar stiffener 24, thereby can adjust base material 500 to the distance between target 400.Be appreciated that absorptive element 26 also can otherwise be flexibly connected with bolster stake 25, for example cam structure.
In order to regulate more accurately absorptive element 26 ends to the distance of pillar stiffener 24, absorptive element 26 is provided with adjusting portion 262, between adjusting portion 262 and screw thread 260, is provided with scale portion 264.Scale portion 264 is provided with along the first corresponding scale of the spacing with screw thread 260 of screw 250 axial distribution, for the distance that represents that absorptive element 26 moves with respect to bolster stake 25.Adjusting portion 262 is provided with the second corresponding scale of circumferential direction spacing equally distributed and screw thread 260 along screw 250, for representing the position of adjusting portion 262 between every two the first scales, to calculate more accurately the distance that absorptive element 26 moves with respect to bolster stake 25.User, by reading the first scale and the second scale, can know the distance that adjusting portion 262 moves with respect to bolster stake 25.Be appreciated that when the distance moving with respect to bolster stake 25 when absorptive element 26 does not need very accurately, can omit the second scale.
In addition, substrate bears device 23 also can be for carrying other ferromegnetism object.
Above-mentioned film coating apparatus 100, by the absorptive element 26 of magnetic is set at substrate bears device 23, thereby is convenient to fix and take off ferromegnetism base material 500.And, by absorptive element 26 is flexibly connected with bolster stake 25, thereby can regulate the distance between base material 500 and target 400.
Be understandable that, for the person of ordinary skill of the art, can make other various corresponding changes and distortion by technical conceive according to the present invention, and all these change and distortion all should belong to the protection domain of the claims in the present invention.
Claims (9)
1. a bogey, be used for fixedly ferromegnetism object, described bogey comprises pillar stiffener and is located at the bolster stake on pillar stiffener, it is characterized in that, described bogey also comprises the magnetic absorption element being flexibly connected with bolster stake, described absorptive element is used for adsorbing described ferromegnetism object, to fix described ferromegnetism object, described absorptive element is flexibly connected with described bolster stake, described absorptive element can move with respect to described bolster stake, to regulate ferromegnetism object with respect to the distance of described bolster stake.
2. bogey as claimed in claim 1, is characterized in that, described bolster stake is provided with screw, and one end of described absorptive element is provided with the screw thread matching with described screw, so that described absorptive element is threaded with described bolster stake.
3. bogey as claimed in claim 2, it is characterized in that, described absorptive element is provided with first scale corresponding with the spacing of described screw thread, and described the first scale is along the axial distribution of described screw, for the distance that represents that described absorptive element moves with respect to described bolster stake.
4. bogey as claimed in claim 3, it is characterized in that, described absorptive element is provided with adjusting portion, and described adjusting portion is provided with the second corresponding scale of the spacing with screw distributing along the circumferential direction of described screw, for representing the position of described adjusting portion between every two the first scales.
5. a film coating apparatus, the film coating equipment that it comprises vacuum chamber and is positioned at vacuum chamber, described film coating equipment comprises for carrying the target bogey of target and for carrying the substrate bears device of ferromegnetism base material, described substrate bears device and target bogey are oppositely arranged, it is characterized in that, described substrate bears device comprises pillar stiffener, the magnetic absorption element of being located at the bolster stake on pillar stiffener and being connected with bolster stake, described absorptive element is used for adsorbing described ferromegnetism base material, to fix described ferromegnetism base material, described absorptive element is flexibly connected with described bolster stake, described absorptive element can move with respect to described bolster stake, to regulate ferromegnetism base material with respect to described distance.
6. film coating apparatus as claimed in claim 5, is characterized in that, described bolster stake is provided with screw, and one end of described absorptive element is provided with the screw thread matching with described screw, so that described absorptive element is threaded with described bolster stake.
7. film coating apparatus as claimed in claim 6, it is characterized in that, described absorptive element is provided with first scale corresponding with the spacing of described screw thread, and described the first scale is along the axial distribution of described screw, for the distance that represents that described absorptive element moves with respect to described bolster stake.
8. film coating apparatus as claimed in claim 7, it is characterized in that, described absorptive element is provided with adjusting portion, and described adjusting portion is provided with the second corresponding scale of the spacing with screw distributing along the circumferential direction of described screw, for representing the position of described adjusting portion between every two the first scales.
9. film coating apparatus as claimed in claim 5, it is characterized in that, described substrate bears device comprises at least two described absorptive elements, described film coating apparatus also comprises the drive unit being connected with film coating equipment, for driving described pillar stiffener to rotate around the central axis of pillar stiffener, so that described absorptive element rotates with respect to target bogey.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201010300588.4A CN102134705B (en) | 2010-01-22 | 2010-01-22 | Bearing device and coating device using same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201010300588.4A CN102134705B (en) | 2010-01-22 | 2010-01-22 | Bearing device and coating device using same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102134705A CN102134705A (en) | 2011-07-27 |
| CN102134705B true CN102134705B (en) | 2014-02-19 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201010300588.4A Expired - Fee Related CN102134705B (en) | 2010-01-22 | 2010-01-22 | Bearing device and coating device using same |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102134705B (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201089789Y (en) * | 2007-09-25 | 2008-07-23 | 金梁 | Clipper for vacuum coating and paint spraying to lock body |
| CN201169617Y (en) * | 2008-01-14 | 2008-12-24 | 金汉忠 | Chucking appliance performing vacuum coating and spray painting for lock body |
| CN101084326B (en) * | 2004-10-22 | 2011-05-25 | 阿德文泰克全球有限公司 | Substrate-to-mask alignment and securing system |
-
2010
- 2010-01-22 CN CN201010300588.4A patent/CN102134705B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101084326B (en) * | 2004-10-22 | 2011-05-25 | 阿德文泰克全球有限公司 | Substrate-to-mask alignment and securing system |
| CN201089789Y (en) * | 2007-09-25 | 2008-07-23 | 金梁 | Clipper for vacuum coating and paint spraying to lock body |
| CN201169617Y (en) * | 2008-01-14 | 2008-12-24 | 金汉忠 | Chucking appliance performing vacuum coating and spray painting for lock body |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102134705A (en) | 2011-07-27 |
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| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140219 Termination date: 20170122 |