CN102134705A - Bearing device and coating device using same - Google Patents
Bearing device and coating device using same Download PDFInfo
- Publication number
- CN102134705A CN102134705A CN2010103005884A CN201010300588A CN102134705A CN 102134705 A CN102134705 A CN 102134705A CN 2010103005884 A CN2010103005884 A CN 2010103005884A CN 201010300588 A CN201010300588 A CN 201010300588A CN 102134705 A CN102134705 A CN 102134705A
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- absorptive element
- bolster stake
- film coating
- bogey
- screw
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Abstract
The invention relates to a bearing device which is used for fixing a ferromagnetic object. The bearing device comprises a supporting column, a bearing column arranged on the supporting column and a magnetic absorption element movably connected with the bearing column, wherein the magnetic absorption element is used for absorbing the ferromagnetic object so as to fix the ferromagnetic object. The absorption component can move relative to the bearing column so as to adjust the distance from the ferromagnetic object to the bearing column. The bearing device is convenient to fix and remove the ferromagnetic object by arranging the magnetic absorption element. Moreover, by movably connecting the absorption element and the bearing column, the distance from the ferromagnetic object to the bearing column can be adjusted. The invention also provides a coating device using the bearing device.
Description
Technical field
The present invention relates to the film coating apparatus of a kind of bogey and use bogey.
Background technology
At present, need plate protective membrane in the mode of sputter on some ferromagnetic metal goods.Existing film coating equipment adopts hook to fix metal products to be coated usually, makes that some inconvenience all seems when fixing and taking off metal products.In addition, adopt the fixing metal products to be coated of hook, be difficult for regulating the distance between metal products and the target, thereby need the hook of design different size, both increased cost, also make procedure for producing more complicated.
Summary of the invention
In view of this, be necessary to provide a kind of being convenient to fix and take off by the bogey of bearing article.
Also be necessary to provide a kind of have be convenient to fixing with take off by the film coating apparatus of the bogey of bearing article.
A kind of bogey is used for fixing the ferromegnetism object.The magnetic absorptive element that described bogey comprises pillar stiffener, is located at the bolster stake on the pillar stiffener and flexibly connects with bolster stake.Described absorptive element is used to adsorb described ferromegnetism object, with fixing described ferromegnetism object.Described absorptive element can move with respect to described bolster stake, to regulate the distance of ferromegnetism object with respect to described bolster stake.
A kind of film coating apparatus, the film coating equipment that it comprises vacuum chamber and is positioned at vacuum chamber.Described film coating equipment comprises the substrate bears device that is used to carry the target bogey of target and is used to carry the ferromegnetism base material, and described substrate bears device and target bogey are oppositely arranged.The magnetic absorptive element that described substrate bears device comprises pillar stiffener, is located at the bolster stake on the pillar stiffener and is connected with bolster stake.Described absorptive element is used to adsorb described ferromegnetism base material, with fixing described ferromegnetism base material.
Above-mentioned bogey and film coating apparatus by the absorptive element of magnetic is set, thereby is convenient to fixing and is taken off the ferromegnetism object.And described bogey flexibly connects by making absorptive element and bolster stake, thereby can regulate the distance between ferromegnetism object and the bolster stake.
Description of drawings
Fig. 1 is the structural representation of the film coating apparatus of a better embodiment.
Fig. 2 is the part exploded view of the substrate bears device of the film coating apparatus among Fig. 1.
The main element nomenclature
Embodiment
Below in conjunction with accompanying drawing, be described in further detail.
Figure 1 shows that the synoptic diagram of the film coating apparatus 100 of a better embodiment.This film coating apparatus 100 comprises vacuum chamber 10, is positioned at the film coating equipment 20 of vacuum chamber 10 and the drive unit 30 that is connected with film coating equipment 20.This film coating apparatus 100 can also comprise pumped vacuum systems, cooling system and ion source etc. (figure does not show).
See also Fig. 2, substrate bears device 23 comprises pillar stiffener 24, vertical fixing bolster stake 25 on pillar stiffener 24 and the magnetic absorptive element 26 that flexibly connects with bolster stake 25.Absorptive element 26 is used to adsorb ferromegnetism base material 500, with fixing substrate 500.In the present embodiment, the end away from pillar stiffener 24 on the bolster stake 25 offers screw 250, and an end of absorptive element 26 is provided with outside screw 260, so that absorptive element 26 is screwed together in the screw 250 of bolster stake 25.By making absorptive element 26, can regulate the distance of absorptive element 26 ends, thereby can adjust base material 500 to the distance between the target 400 to pillar stiffener 24 with respect to bolster stake 25 rotations.Be appreciated that absorptive element 26 also can otherwise flexibly connect with bolster stake 25, for example cam structure.
In order to regulate the distance of absorptive element 26 ends to pillar stiffener 24 more accurately, absorptive element 26 is provided with adjusting portion 262, is provided with scale portion 264 between adjusting portion 262 and the screw thread 260.Scale portion 264 is provided with along corresponding first scale of the spacing with screw thread 260 of screw 250 axial distribution, is used to the distance of representing that absorptive element 26 moves with respect to bolster stake 25.Adjusting portion 262 is provided with equally distributed along the circumferential direction of screw 250 and corresponding second scale of spacing screw thread 260, be used to represent the position of adjusting portion 262 between per two first scales, so that calculate the distance that absorptive element 26 moves with respect to bolster stake 25 more accurately.The user promptly knows the distance that adjusting portion 262 moves with respect to bolster stake 25 by reading first scale and second scale.Be appreciated that when the distance that moves with respect to bolster stake 25 when absorptive element 26 does not need very accurately, can omit second scale.
In addition, substrate bears device 23 also can be used to carry other ferromegnetism object.
Above-mentioned film coating apparatus 100 by the absorptive element 26 of magnetic is set at substrate bears device 23, thereby is convenient to fixing and is taken off ferromegnetism base material 500.And, flexibly connect by making absorptive element 26 and bolster stake 25, thereby can regulate base material 500 and remove from office the distance of clinging between the material 400.
Be understandable that, for the person of ordinary skill of the art, can make other various corresponding changes and distortion by technical conceive according to the present invention, and all these change the protection domain that all should belong to claim of the present invention with distortion.
Claims (10)
1. bogey, be used for fixing the ferromegnetism object, described bogey comprises pillar stiffener and is located at bolster stake on the pillar stiffener, it is characterized in that, described bogey also comprises the magnetic absorptive element that flexibly connects with bolster stake, and described absorptive element is used to adsorb described ferromegnetism object, with fixing described ferromegnetism object, described absorptive element can move with respect to described bolster stake, to regulate the distance of ferromegnetism object with respect to described bolster stake.
2. bogey as claimed in claim 1 is characterized in that described bolster stake is provided with screw, and an end of described absorptive element is provided with the screw thread that matches with described screw, so that described absorptive element is threaded with described bolster stake.
3. bogey as claimed in claim 2, it is characterized in that, described absorptive element is provided with and corresponding first scale of the spacing of described screw thread, and described first scale is used to the distance of representing that described absorptive element moves with respect to described bolster stake along the axial distribution of described screw.
4. bogey as claimed in claim 3 is characterized in that, described absorptive element is provided with corresponding second scale of the spacing with screw that distributes along the circumferential direction of described screw, is used to represent the position of adjusting portion between per two first scales.
5. film coating apparatus, the film coating equipment that it comprises vacuum chamber and is positioned at vacuum chamber, described film coating equipment comprises the substrate bears device that is used to carry the target bogey of target and is used to carry the ferromegnetism base material, described substrate bears device and target bogey are oppositely arranged, it is characterized in that, the magnetic absorptive element that described substrate bears device comprises pillar stiffener, is located at the bolster stake on the pillar stiffener and is connected with bolster stake, described absorptive element is used to adsorb described ferromegnetism base material, with fixing described ferromegnetism base material.
6. film coating apparatus as claimed in claim 5 is characterized in that, described absorptive element and described bolster stake flexibly connect, and described absorptive element can move with respect to described bolster stake, to regulate the distance of ferromegnetism base material with respect to described target.
7. film coating apparatus as claimed in claim 6 is characterized in that described bolster stake is provided with screw, and an end of described absorptive element is provided with the screw thread that matches with described screw, so that described absorptive element is threaded with described bolster stake.
8. film coating apparatus as claimed in claim 7, it is characterized in that, described absorptive element is provided with and corresponding first scale of the spacing of described screw thread, and described first scale is used to the distance of representing that described absorptive element moves with respect to described bolster stake along the axial distribution of described screw.
9. film coating apparatus as claimed in claim 8 is characterized in that, described absorptive element is provided with corresponding second scale of the spacing with screw that distributes along the circumferential direction of described screw, is used to represent the position of adjusting portion between per two first scales.
10. film coating apparatus as claimed in claim 5, it is characterized in that, described substrate bears device comprises at least two described absorptive elements, described film coating apparatus also comprises the drive unit that is connected with film coating equipment, be used to drive described pillar stiffener and rotate, so that described absorptive element rotates with respect to the target bogey around the central axis of pillar stiffener.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201010300588.4A CN102134705B (en) | 2010-01-22 | 2010-01-22 | Bearing device and coating device using same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201010300588.4A CN102134705B (en) | 2010-01-22 | 2010-01-22 | Bearing device and coating device using same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102134705A true CN102134705A (en) | 2011-07-27 |
| CN102134705B CN102134705B (en) | 2014-02-19 |
Family
ID=44294626
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201010300588.4A Expired - Fee Related CN102134705B (en) | 2010-01-22 | 2010-01-22 | Bearing device and coating device using same |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102134705B (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101084326A (en) * | 2004-10-22 | 2007-12-05 | 阿德文泰克全球有限公司 | Substrate-to-mask alignment and securing system |
| CN201089789Y (en) * | 2007-09-25 | 2008-07-23 | 金梁 | Clipper for vacuum coating and paint spraying to lock body |
| CN201169617Y (en) * | 2008-01-14 | 2008-12-24 | 金汉忠 | Chucking appliance performing vacuum coating and spray painting for lock body |
-
2010
- 2010-01-22 CN CN201010300588.4A patent/CN102134705B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101084326A (en) * | 2004-10-22 | 2007-12-05 | 阿德文泰克全球有限公司 | Substrate-to-mask alignment and securing system |
| CN201089789Y (en) * | 2007-09-25 | 2008-07-23 | 金梁 | Clipper for vacuum coating and paint spraying to lock body |
| CN201169617Y (en) * | 2008-01-14 | 2008-12-24 | 金汉忠 | Chucking appliance performing vacuum coating and spray painting for lock body |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102134705B (en) | 2014-02-19 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140219 Termination date: 20170122 |