CN102130118B - 螺旋状电感结构及其制备方法 - Google Patents
螺旋状电感结构及其制备方法 Download PDFInfo
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- CN102130118B CN102130118B CN 201010027332 CN201010027332A CN102130118B CN 102130118 B CN102130118 B CN 102130118B CN 201010027332 CN201010027332 CN 201010027332 CN 201010027332 A CN201010027332 A CN 201010027332A CN 102130118 B CN102130118 B CN 102130118B
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CN 201010027332 CN102130118B (zh) | 2010-01-20 | 2010-01-20 | 螺旋状电感结构及其制备方法 |
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CN 201010027332 CN102130118B (zh) | 2010-01-20 | 2010-01-20 | 螺旋状电感结构及其制备方法 |
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CN102130118A CN102130118A (zh) | 2011-07-20 |
CN102130118B true CN102130118B (zh) | 2013-03-13 |
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Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
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CN1377071A (zh) * | 2001-03-23 | 2002-10-30 | 华邦电子股份有限公司 | 具有高q值电感组件的半导体技术制造方法及其结构 |
CN1635637A (zh) * | 2003-12-29 | 2005-07-06 | 北京大学 | 立体集成电感及其制造方法 |
CN101055869A (zh) * | 2006-04-11 | 2007-10-17 | 联华电子股份有限公司 | 电感器结构 |
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Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
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CN1377071A (zh) * | 2001-03-23 | 2002-10-30 | 华邦电子股份有限公司 | 具有高q值电感组件的半导体技术制造方法及其结构 |
CN1635637A (zh) * | 2003-12-29 | 2005-07-06 | 北京大学 | 立体集成电感及其制造方法 |
CN101055869A (zh) * | 2006-04-11 | 2007-10-17 | 联华电子股份有限公司 | 电感器结构 |
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Owner name: SHANGHAI HUAHONG GRACE SEMICONDUCTOR MANUFACTURING Free format text: FORMER OWNER: HUAHONG NEC ELECTRONICS CO LTD, SHANGHAI Effective date: 20140108 |
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Free format text: CORRECT: ADDRESS; FROM: 201206 PUDONG NEW AREA, SHANGHAI TO: 201203 PUDONG NEW AREA, SHANGHAI |
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Effective date of registration: 20140108 Address after: 201203 Shanghai city Zuchongzhi road Pudong New Area Zhangjiang hi tech Park No. 1399 Patentee after: Shanghai Huahong Grace Semiconductor Manufacturing Corporation Address before: 201206, Shanghai, Pudong New Area, Sichuan Road, No. 1188 Bridge Patentee before: Shanghai Huahong NEC Electronics Co., Ltd. |