CN102129145A - 一种带有电容测量电路的微机电系统设备驱动器 - Google Patents
一种带有电容测量电路的微机电系统设备驱动器 Download PDFInfo
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- CN102129145A CN102129145A CN2011100046497A CN201110004649A CN102129145A CN 102129145 A CN102129145 A CN 102129145A CN 2011100046497 A CN2011100046497 A CN 2011100046497A CN 201110004649 A CN201110004649 A CN 201110004649A CN 102129145 A CN102129145 A CN 102129145A
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- 238000005259 measurement Methods 0.000 claims abstract description 126
- 230000008859 change Effects 0.000 claims abstract description 33
- 238000007599 discharging Methods 0.000 claims abstract description 19
- 238000000034 method Methods 0.000 claims description 10
- 238000000691 measurement method Methods 0.000 claims description 3
- 238000006073 displacement reaction Methods 0.000 description 14
- 239000003990 capacitor Substances 0.000 description 8
- 238000010586 diagram Methods 0.000 description 8
- 238000005516 engineering process Methods 0.000 description 3
- 230000004913 activation Effects 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000000630 rising effect Effects 0.000 description 2
- 239000004576 sand Substances 0.000 description 2
- 238000010998 test method Methods 0.000 description 2
- 230000003213 activating effect Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B21/00—Projectors or projection-type viewers; Accessories therefor
- G03B21/14—Details
- G03B21/53—Means for automatic focusing, e.g. to compensate thermal effects
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
- G02B7/04—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification
- G02B7/08—Mountings, adjusting means, or light-tight connections, for optical elements for lenses with mechanism for focusing or varying magnification adapted to co-operate with a remote control mechanism
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B13/00—Viewfinders; Focusing aids for cameras; Means for focusing for cameras; Autofocus systems for cameras
- G03B13/32—Means for focusing
- G03B13/34—Power focusing
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B3/00—Focusing arrangements of general interest for cameras, projectors or printers
- G03B3/10—Power-operated focusing
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
- G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
- G01R27/26—Measuring inductance or capacitance; Measuring quality factor, e.g. by using the resonance method; Measuring loss factor; Measuring dielectric constants ; Measuring impedance or related variables
- G01R27/2605—Measuring capacitance
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Micromachines (AREA)
- Measurement Of Resistance Or Impedance (AREA)
Abstract
Description
Claims (21)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12/685,992 | 2010-01-12 | ||
US12/685,992 US8188755B2 (en) | 2010-01-12 | 2010-01-12 | Electrostatic MEMS driver with on-chip capacitance measurement for autofocus applications |
Publications (2)
Publication Number | Publication Date |
---|---|
CN102129145A true CN102129145A (zh) | 2011-07-20 |
CN102129145B CN102129145B (zh) | 2015-02-11 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201110004649.7A Active CN102129145B (zh) | 2010-01-12 | 2011-01-11 | 一种带有电容测量电路的微机电系统设备驱动器 |
Country Status (3)
Country | Link |
---|---|
US (1) | US8188755B2 (zh) |
CN (1) | CN102129145B (zh) |
DE (1) | DE102010055396A1 (zh) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103733721A (zh) * | 2011-08-09 | 2014-04-16 | Lg伊诺特有限公司 | 便携式终端及用于检测该便携式终端的姿势的方法 |
CN103809125A (zh) * | 2014-02-13 | 2014-05-21 | 清华大学 | 锂离子电池的剩余放电容量估计方法及系统 |
CN103901348A (zh) * | 2014-03-05 | 2014-07-02 | 清华大学 | 适用于动态电流工况的电池剩余放电容量的估计方法 |
CN108918977A (zh) * | 2018-05-02 | 2018-11-30 | 沈阳工业大学 | 一种低温条件下电介质气固界面闪络特性测量装置及方法 |
TWI652896B (zh) | 2016-12-01 | 2019-03-01 | 瑞士商Ams國際有限公司 | 微機電系統感測器 |
CN111551792A (zh) * | 2020-05-27 | 2020-08-18 | 哈尔滨理工大学 | 一种绝缘电介质无穷高频相对介电常数测量原理 |
CN113030585A (zh) * | 2021-03-18 | 2021-06-25 | 美钻深海能源科技研发(上海)有限公司 | 一种电容测量装置及方法 |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6829132B2 (en) * | 2003-04-30 | 2004-12-07 | Hewlett-Packard Development Company, L.P. | Charge control of micro-electromechanical device |
US8063622B2 (en) * | 2009-10-02 | 2011-11-22 | Power Integrations, Inc. | Method and apparatus for implementing slew rate control using bypass capacitor |
FR2985251B1 (fr) * | 2012-01-04 | 2016-09-30 | Agilent Technologies Inc | Systeme pour detecter des reponses d'un dispositif resonateur micro-electromecanique ( mems) |
US8947107B2 (en) | 2012-09-17 | 2015-02-03 | Semtech Corporation | Capacitance measurement of high voltage device |
US8988586B2 (en) * | 2012-12-31 | 2015-03-24 | Digitaloptics Corporation | Auto-focus camera module with MEMS closed loop compensator |
US9097748B2 (en) * | 2013-03-14 | 2015-08-04 | DigitalOptics Corporation MEMS | Continuous capacitance measurement for MEMS-actuated movement of an optical component within an auto-focus camera module |
CN103675469B (zh) * | 2013-12-31 | 2016-04-13 | 西安兴汇电力科技有限公司 | 一种高压线路分布电容测量装置及其测量方法 |
CN104833858A (zh) * | 2015-05-21 | 2015-08-12 | 遵义长征电器防爆设备有限责任公司 | 开关检波电路 |
US9939476B2 (en) * | 2015-09-25 | 2018-04-10 | Analog Devices Global | Capacitance measurement |
US11820649B2 (en) | 2018-05-18 | 2023-11-21 | Lawrence Livermore National Security, Llc | Position sensing circuit for an electrostatically driven MEMS device |
Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4737706A (en) * | 1984-08-24 | 1988-04-12 | Eilersen Nils Age J | Capacitance measuring circuit |
WO1994006002A1 (en) * | 1992-09-10 | 1994-03-17 | David Sarnoff Research Center, Inc. | Capacitive sensor and method of measuring changes in capacitance |
US6275047B1 (en) * | 1999-03-12 | 2001-08-14 | Fluke Corporation | Capacitance measurement |
US20010054937A1 (en) * | 2000-06-27 | 2001-12-27 | Lassi Hyvonen | Matching circuit |
US6975123B1 (en) * | 2000-12-20 | 2005-12-13 | Maxtor Corporation | Method and apparatus for calibrating piezoelectric driver in dual actuator disk drive |
JP2006038645A (ja) * | 2004-07-27 | 2006-02-09 | Sumitomo Precision Prod Co Ltd | 容量型memsセンサ用の信号検出回路 |
US20060267599A1 (en) * | 2005-05-18 | 2006-11-30 | Pooranakaran Pooranampillai S | Measuring capacitance |
US20110001832A1 (en) * | 2009-07-02 | 2011-01-06 | Summit Microelectronics, Inc. | Circuits and methods for calibrating lens displacement |
KR101063047B1 (ko) * | 2010-06-23 | 2011-09-07 | 엘지이노텍 주식회사 | 멤즈 엑츄에이터가 구비된 카메라 모듈 및 그의 구동 방법 |
-
2010
- 2010-01-12 US US12/685,992 patent/US8188755B2/en active Active
- 2010-12-21 DE DE102010055396A patent/DE102010055396A1/de not_active Withdrawn
-
2011
- 2011-01-11 CN CN201110004649.7A patent/CN102129145B/zh active Active
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4737706A (en) * | 1984-08-24 | 1988-04-12 | Eilersen Nils Age J | Capacitance measuring circuit |
WO1994006002A1 (en) * | 1992-09-10 | 1994-03-17 | David Sarnoff Research Center, Inc. | Capacitive sensor and method of measuring changes in capacitance |
US6275047B1 (en) * | 1999-03-12 | 2001-08-14 | Fluke Corporation | Capacitance measurement |
US20010054937A1 (en) * | 2000-06-27 | 2001-12-27 | Lassi Hyvonen | Matching circuit |
US6975123B1 (en) * | 2000-12-20 | 2005-12-13 | Maxtor Corporation | Method and apparatus for calibrating piezoelectric driver in dual actuator disk drive |
JP2006038645A (ja) * | 2004-07-27 | 2006-02-09 | Sumitomo Precision Prod Co Ltd | 容量型memsセンサ用の信号検出回路 |
US20060267599A1 (en) * | 2005-05-18 | 2006-11-30 | Pooranakaran Pooranampillai S | Measuring capacitance |
US20110001832A1 (en) * | 2009-07-02 | 2011-01-06 | Summit Microelectronics, Inc. | Circuits and methods for calibrating lens displacement |
KR101063047B1 (ko) * | 2010-06-23 | 2011-09-07 | 엘지이노텍 주식회사 | 멤즈 엑츄에이터가 구비된 카메라 모듈 및 그의 구동 방법 |
Cited By (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103733721A (zh) * | 2011-08-09 | 2014-04-16 | Lg伊诺特有限公司 | 便携式终端及用于检测该便携式终端的姿势的方法 |
CN103733721B (zh) * | 2011-08-09 | 2018-04-27 | Lg伊诺特有限公司 | 便携式终端及用于检测该便携式终端的姿势的方法 |
CN103809125A (zh) * | 2014-02-13 | 2014-05-21 | 清华大学 | 锂离子电池的剩余放电容量估计方法及系统 |
CN103901348A (zh) * | 2014-03-05 | 2014-07-02 | 清华大学 | 适用于动态电流工况的电池剩余放电容量的估计方法 |
CN103901348B (zh) * | 2014-03-05 | 2016-06-01 | 清华大学 | 适用于动态电流工况的电池剩余放电容量的估计方法 |
TWI652896B (zh) | 2016-12-01 | 2019-03-01 | 瑞士商Ams國際有限公司 | 微機電系統感測器 |
US10972059B2 (en) | 2016-12-01 | 2021-04-06 | Ams International Ag | MEMS sensor |
CN108918977A (zh) * | 2018-05-02 | 2018-11-30 | 沈阳工业大学 | 一种低温条件下电介质气固界面闪络特性测量装置及方法 |
CN108918977B (zh) * | 2018-05-02 | 2024-02-06 | 沈阳工业大学 | 一种低温条件下电介质气固界面闪络特性测量装置及方法 |
CN111551792A (zh) * | 2020-05-27 | 2020-08-18 | 哈尔滨理工大学 | 一种绝缘电介质无穷高频相对介电常数测量原理 |
CN113030585A (zh) * | 2021-03-18 | 2021-06-25 | 美钻深海能源科技研发(上海)有限公司 | 一种电容测量装置及方法 |
CN113030585B (zh) * | 2021-03-18 | 2024-04-05 | 美钻深海能源科技研发(上海)有限公司 | 一种电容测量装置及方法 |
Also Published As
Publication number | Publication date |
---|---|
US20110169509A1 (en) | 2011-07-14 |
CN102129145B (zh) | 2015-02-11 |
US8188755B2 (en) | 2012-05-29 |
DE102010055396A1 (de) | 2011-07-14 |
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TR01 | Transfer of patent right |
Effective date of registration: 20180806 Address after: Ohio, USA Patentee after: Hanking Microelectronics Co.,Ltd. Address before: California, USA Patentee before: Maxim Integrated Products, Inc. |
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Effective date of registration: 20231109 Address after: Room A, 12th Floor, 300 Lockhart Road, Wan Chai, Hong Kong, China Patentee after: Hanwang Microelectronics Hong Kong Ltd. Address before: Ohio, USA Patentee before: Hanking Microelectronics Co.,Ltd. |
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