CN102118095A - Energy acquisition device, vibrating device used for energy acquisition and manufacturing method - Google Patents
Energy acquisition device, vibrating device used for energy acquisition and manufacturing method Download PDFInfo
- Publication number
- CN102118095A CN102118095A CN200910215849XA CN200910215849A CN102118095A CN 102118095 A CN102118095 A CN 102118095A CN 200910215849X A CN200910215849X A CN 200910215849XA CN 200910215849 A CN200910215849 A CN 200910215849A CN 102118095 A CN102118095 A CN 102118095A
- Authority
- CN
- China
- Prior art keywords
- wire coil
- group
- vibration
- insulation film
- magnetic material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K35/00—Generators with reciprocating, oscillating or vibrating coil system, magnet, armature or other part of the magnetic circuit
- H02K35/04—Generators with reciprocating, oscillating or vibrating coil system, magnet, armature or other part of the magnetic circuit with moving coil systems and stationary magnets
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K35/00—Generators with reciprocating, oscillating or vibrating coil system, magnet, armature or other part of the magnetic circuit
Abstract
The invention discloses an energy acquisition device. The energy acquisition device comprises a first vibrating unit and a second vibrating unit, wherein the first vibrating unit is used for vibrating under the trigger of low-frequency vibration generated by a peripheral environment and transferring the vibration to the second vibrating unit positioned below the first vibrating unit; and the second vibrating unit is used for performing high-frequency vibration under the trigger of the vibration generated by the first vibrating unit to generate electric energy. The invention also discloses a vibrating device used for energy acquisition and a manufacturing method thereof. By using the energy acquisition device, high-power output can be realized in a wide environment vibration frequency range without any additional electric energy input.
Description
Technical field
The present invention relates to the energy acquisition technology, particularly a kind of electricity energy harvester that utilizes the vibrational energy generation electric energy of surrounding environment more particularly, relates to the micro electromagnetic electricity energy harvester with compact double-deck vibrational structure.
Background technology
Demand to wireless senser constantly increases, and has strengthened the interest that industry further develops this technology and corollary equipment thereof.Most of wireless sensers are battery-powered at present, though battery can provide a large amount of electric power, the life-span is limited, need frequently to change.Because increasing wireless senser is deployed to and is difficult to reach or unapproachable place, change battery or will become a time-consuming and expensive maintenance task of ten minutes labourer for battery charge.Therefore, be necessary by on wireless senser integrated one can extract energy and convert the energy collecting system of useful electric energy to from peripheral energy source (such as light, the temperature difference, vibration etc.), realize having the self-powered ability, non-maintaining wireless senser.In available energy sources, vibration is hopeful to be used most, because they are ubiquitous.Other energy sources are limited often, or do not exist, or may sunlight and thermal gradient deficiency.
All are all followed similarly from vibrating the transfer principle to electric energy based on the electricity energy harvester of vibration, this principle can adopt general " quality spring damping (spring-mass-damper) " model to describe, wherein the energy that consumes in the resistance Buddhist nun is equivalent to the electric energy that generated, is expressed as formula (1).
Wherein, m is the quality of vibrating object, and ζ is total damping ratio, and Y is a vibration displacement, and ω is the frequency of ambient vibration, ω
nIt is the natural frequency of electricity energy harvester.
According to this model, the energy that collects is and square being directly proportional of the cube of vibration frequency and vibration displacement.When resonance took place on its natural frequency equipment, its vibration displacement was maximum; When the natural reonant frequency of ambient vibration frequency departure equipment, the vibration displacement of this equipment sharply reduces.Therefore, when the traditional electricity energy harvester based on vibration of design, should make its natural reonant frequency approach the ambient vibration frequency, to improve power output to greatest extent.But different vibration sources has different vibration frequencies, and in some cases, even the frequency characteristic of same vibration source all might change in time.Therefore, wideless based on the traditional design range of application of single narrow resonance frequency, may when changing, lose environment its performance.
In order to enlarge operating frequency range, the researcher is exploring different modes, to realize the frequency adaptability based on the electricity energy harvester of vibration.Its basic ideas are: according to the frequency change of ambient vibration, adjust the natural frequency of electricity energy harvester so that with the frequency match of different vibration sources.These Tuning mechanism roughly are divided into initiatively tuning, passive tuning and partly initiatively tuning.
Initiatively tuning methods need be to the harvester continued power, and to realize the variation of resonance frequency, its representative design is opened (Yang Zhang) by Roundy Shad and poplar and finished in 2005.In this design, the piezoelectricity bender that is installed to be cantilever beam becomes based on the generator model machine that vibrates.It is initiatively tuning that this model machine of two electrode pairs can be set by the surface at cantilever beam, and one is used to extract energy in these two electrodes, and another is used for tuning.In addition, the surperficial rigidity of piezoelectric depends on: the elastic constant of material and the electric field that is distributed on the material.Therefore, by controlling the voltage on the tuning electrode, natural frequency that can control system.Yet,, cantilever beam is carried out the efficient that the tuning required continued power of active will reduce electricity energy harvester though that this design allows resonance frequency is carried out is tuning.
The power consumption that continues in the active tunable technology is attracted in many ways based on passive tuning electricity energy harvester and pays close attention to.Malkin, Matthew C. and Davis, Chrisopher L. have proposed a kind of multi-frequency piezo-electricity energy harvester in 2005, and this device comprises a plurality of cantilever beams that stretch out from fixed pedestal.(Micro-Electro-Mechanical System, MEMS) beam has different resonance frequencys to these MEMS (micro electro mechanical system), and these MEMS beams are in dynamo-electric connection the between the end of fixed pedestal, constitutes the MEMS beam array of associating.The force side of each MEMS beam can free bend, to produce electric current.Correspondingly, this device is set to different unit, and each unit has the MEMS beam of variable number, and each array comprises a plurality of unit, thereby guarantees can access large-scale electric current under multifrequency vibration.Yet, this project organization complexity, and the subclass that can not guarantee these beams also can produce resonance and makes contributions for the generation of electric energy.
Recently, a kind of half initiatively technology when triggering initiatively or is only proposed again, breaking through the constraint structurally of passive tuning methods, and and the active tuning methods compare and only consume part energy.V.R.Challa, M.G.Prasad etc. designed one in 2008 can realize frequency resonance, tunable, the electricity energy harvester that adopts the magnetic force technology.This device comprises a piezoelectric cantilever that is provided with the tungsten piece at free end.For be tuned to resonance frequency, this device has used four blocks of magnet, its effect is respectively as follows: two blocks of magnet are fixed on the free end of cantilever beam, and other two blocks of magnet are fixed on the top and the bottom of device housings, with the magnet vertical arrangement on the cantilever beam.Apply magnetic attraction and magnetic repulsion by each end,, and then changed the resonance frequency of cantilever beam for vibration unit provides extra rigidity at cantilever beam.Though this equipment does not need excess power when characteristic frequency resonates, but still need input power to adjust distance between the magnet, to change its resonance frequency.In addition, consider that the frequency characteristic of ambient vibration may change in time, feedback loop system need be set, be used to monitor these variations and the distance between the magnet is optimized, this is also with consumed power, and the complexity of increase whole system, brings inevitable cost.
In a word, existing Tuning mechanism or need extra power consumption, or complex structure, thereby in actual applications this Tuning mechanism to extract the efficient of energy from ambient vibration widely not high.Particularly, passive adaptive approach is very complicated on structure realizes; And method initiatively needs bigger power consumption, thereby has reduced efficient.
Better a kind of method is to adopt frequency to improve conversion or frequency adjustment, the operational frequency bandwidth of expend energy harvester at present.The basic principle of this method is when producing electric energy, and low-frequency ambient vibration is converted to high-frequency internal vibration, to improve the efficient of power conversion.Herein, ambient vibration just improves the driving of conversion as frequency, rather than the direct sources of the power conversion of conduct from mechanical energy to the electric energy, and this makes the resonance between electricity energy harvester and the ambient vibration require to reduce.
The first application that frequency improves conversion principle is by Carman, Gregory P. and Lee, Dong G. made in 2007, the electricity energy harvester that is proposed is included in the frequency inverse rectifier (inverse frequency rectifier) that first frequency obtains mechanical energy, and the solid state machine electric transducer that is connected with the frequency inverse rectifier (solid state electromechanical transducer).Wherein, it is the higher-order of oscillation/motion that the frequency inverse rectifier is used for low-frequency oscillation/movement conversion, and the solid state machine electric transducer is used for obtaining power from the frequency inverse rectifier.The power that the frequency inverse rectifier provides will cause the solid state machine electric transducer to obtain second frequency, and this second frequency is higher than first frequency, thereby produce electric energy.With the frequency inverse rectifier that operates in the system with piezoelectric cantilever is example, and this rubber rectifier will make cantilever beam be bent downwardly, and after cantilever beam is discharged by the rubber rectifier, this cantilever beam will begin to vibrate on its natural frequency.The problem that the frequency inverse rectifier exists is its reliability.The frictional resistance that Mechanical Contact produced between rubber rectifier and the cantilever beam brings potential threat for the integrality of total.Another problem of this design is that its efficient is low, because in micro fabrication, piezoelectric coupling coefficient will reduce greatly, and the conversion efficiency that finally causes mechanical energy to arrive electric energy worsens.
In addition, Haluk Kulah and Khalil Najafi also designed an electromagnetic energy harvester that improves conversion based on frequency in 2008.This design is suspended on a large amount of Nd-Fe-B permanent magnet (PM) on the planar flexible spring system, so that resonate on low frequency.When PM moves, catch and discharge the end of less cantilever by its magneticaction, encourage less cantilever on than high natural frequency, to vibrate.In case the cantilever starting oscillation, the winding on the cantilever will be coupled with the magnetic field that PM produces.The result of the test that draws based on the model machine of millimeter magnitude shows: for frequency is the inputted vibration of 1Hz, and can improve conversion by frequency be the cantilever resonance of 50Hz with frequency, thereby makes equipment produce the power of 190nW and the voltage of 7.5mV.Wherein, this model machine comprises: the styrene of single 50 millimeters long (styrene) cantilever, three circle copper coils and a vibration PM.Obviously, the power output of a cantilever design is very little, can not directly be the wireless senser power supply.In order to improve power, the technical staff further proposes to use the structure of a plurality of cantilevers.This mode will cause equipment comparatively heavy, and topmost problem is: each cantilever not only can be different on resonance frequency, and its oscillation phase is also different.In the worst case, this equipment even may not export only.In view of the uncertainty of this design, also can't verify at present the complexity and the feasibility of this system.
As can be seen, because the restriction of design and structure, still there is inefficient problem in existing design based on frequency raising conversion, therefore can't provide available energy for wireless senser in actual applications.That is to say, be extraordinary though frequency improves conversion principle itself, because the restriction of design and structure, still has problems such as poor reliability, efficient are low based on the existing energy acquisition mode of this principle.Therefore, improved miniature electricity energy harvester need be designed, above-mentioned shortcoming can be overcome effectively based on this principle, more economical and be operated in effectively widely in the vibration environment, so that have wide commercial application prospect.
Summary of the invention
In view of this, main purpose of the present invention is to provide a kind of electricity energy harvester, is used for the manufacture method of vibrating device and this vibrating device of energy acquisition.
For achieving the above object, technical scheme of the present invention specifically is achieved in that
A kind of electricity energy harvester comprises:
First vibration unit is used for vibrating under the triggering of the low-frequency vibration that surrounding enviroment produce, and gives second vibration unit that is positioned at described first vibration unit below with this transfer of vibration;
Described second vibration unit is used for carrying out dither in magnetic field under the vibrative triggering of described first vibration unit institute, generates electric energy.
Described second vibration unit comprises: insulation film, one group or wire coil and the soft magnetic material that is connected in series of organizing more;
Wherein, described wire coil and soft magnetic material are attached on the described insulation film.
Described first vibration unit comprises: plane spring and first magnet that is attached to described plane spring bottom surface;
Described plane spring is used to catch the low-frequency vibration that surrounding enviroment produce, and drives described first magnet and vibrate;
Described first magnet, be used for suction size according to the distance between this first magnet and the described soft magnetic material, this first magnet, and the rigidity power of described second vibration unit, attract or discharge described soft magnetic material, thereby drive a group on the described insulation film or organize wire coil more and carry out dither.
Described one group or organize wire coil more and be distributed on one or more layer, every layer is used insulation film as supporting plane, and the through hole that connects wire coil on the different layers is set; And
Described soft magnetic material is attached on the nearest supporting plane of described first vibration unit of distance.
This device further comprises: be arranged on described one group or organize second magnet of wire coil below more;
The wire coil that described one group or many groups are connected in series has two solder joint taps, is used for exporting the induced current that produces in the magnetic field motion that described second magnet produces.
This device further comprises: be used to place the substrate of described second magnet, and the protecting sheathing that is used for fixing described insulation film.
Described first magnet is Nd-Fe-B permanent magnet, and described soft magnetic material is an iron-nickel alloy, and described insulation film is a polyimide film.
Described first magnet is arranged on the bottom center of described plane spring, and described soft magnetic material is arranged on the center of described supporting plane.
A kind of vibrating device that is used for energy acquisition comprises:
Insulation film, one group or wire coil and the soft magnetic material that is connected in series of organizing more; Wherein, described wire coil and soft magnetic material are attached on the described insulation film;
Described soft magnetic material is used for externally magneticaction vibration down, drives a group on the described insulation film or organizes wire coil more;
Described one group or the wire coil that is connected in series of organizing are used for carrying out dither in magnetic field more, generate electric energy.
Described one group or organize more wire coil be distributed in one or more the layer on, every layer comprises at least one group of wire coil;
Described every layer is used insulation film as supporting plane, and the through hole that connects wire coil on the different layers is set; And
Described soft magnetic material is attached on the nearest supporting plane of the outside magneticaction of distance.
The wire coil that described one group or many groups are connected in series has two solder joint taps, is used for exporting the induced current that produces in the magnetic field motion.
Described soft magnetic material is an iron-nickel alloy, and described insulation film is a polyimide film.
A kind of manufacture method that is used for the vibrating device of energy acquisition comprises:
Spraying first Seed Layer on first insulation film;
With one group or organize first wire coil more and electroplate on described first Seed Layer, and soft magnetic material is attached on described first Seed Layer;
For described first Seed Layer, one group or organize first wire coil and soft magnetic material covers second insulation film, form described vibrating device more.
Before forming described vibrating device, this method further comprises:
Spraying second Seed Layer on described second insulation film;
With one group or organize second wire coil more and electroplate on described second Seed Layer, and electroplate out and be used for more more described one group or organize first wire coil and described one group or organize one or more through hole that second wire coil is connected in series;
For described second Seed Layer and one group or organize second wire coil more and cover the 3rd insulation film.
This method further comprises: form described first insulation film on sacrifice layer, and remove described sacrifice layer after described vibrating device forms.
As seen from the above technical solution, electricity energy harvester of the present invention and vibration transpose configuration are simple, can be passively realize constant high power output and need not any extra electric energy input in wider frequency.Simultaneously, compare with the electricity energy harvester of realizing based on general frequency raising conversion principle in the prior art, this new design of the present invention can avoid existing problem, the problem includes: problems such as reliability and efficient.
Description of drawings
To make the clearer above-mentioned and other feature and advantage of the present invention of those of ordinary skill in the art by describe exemplary embodiment of the present invention in detail with reference to accompanying drawing below, in the accompanying drawing:
Fig. 1 is the schematic cross-section of electromagnetic vibration energy harvester in the one embodiment of the invention;
Fig. 2 is the schematic top view of copper plane spring in the one embodiment of the invention;
Fig. 3 is the schematic top view of one of them layer of second vibrational structure in the one embodiment of the invention;
Fig. 4 utilizes the ANSYS emulation platform polyimides supporting plane to be carried out the schematic diagram of model analysis;
Fig. 5 is the connection diagram between the copper coil of bottom and top layer;
Fig. 6 is illustrated in the technical process of making double-deck copper coil on the polyimide film.
Embodiment
For making purpose of the present invention, technical scheme and advantage clearer, below with reference to the accompanying drawing embodiment that develops simultaneously, the present invention is described in more detail.
The present invention discloses a kind of new electromagnetic energy harvester based on vibration, this device comprises the plane vibration structure of two compactnesses, and by the magnetic interaction between these two vibrational structures, realizes that transfer of vibration and frequency improve conversion.Particularly, this harvester converts ambient vibration to the dither of harvester inside by the magnetic interaction between the double-deck vibrational structure.Therefore, even the electricity energy harvester that the present invention proposes also can obtain electric energy effectively from ambient vibration under the off-resonance attitude, therefore can be applied at an easy rate in any environment with vibration and do not have a mis-behave.
Wherein, the function of first vibrational structure is the low-frequency vibration of catching in the surrounding environment, and causes the high frequency self-vibration of second vibrational structure.In one embodiment of the invention, first vibrational structure adopts plane spring to realize, have lower natural frequency (such as: be approximately 100Hz), it is triggered by the vibration in the surrounding environment easily.It may be noted that the unnecessary summation ambient vibration of this first vibrational structure resonates, this makes electricity energy harvester can be operated in widely in the vibration environment.The function of second vibrational structure comprises: carry out the high frequency self-vibration after being triggered by first vibrational structure, thereby generate electric energy in contiguous magnetic field.In one embodiment of the invention, high-frequency structure (i.e. second vibrational structure) is to be made by the high rigidity material (polyimides) that is provided with the multiple layer metal coil, and two ends are fixed solidly, and its natural frequency is about 1000Hz.In order to realize the magnetic interaction between low-frequency vibration structure and the dither structure, can on these two vibrational structures, assemble magnet or ferromagnetic material.When low-frequency vibration structural response ambient vibration starting oscillation, may by being assemblied in the magnetic interaction of two material production on the vibrational structure, hold the dither structure sometime near the dither structure in certain position.Equally, because the oscillating characteristic of ambient vibration, the low-frequency vibration structure subsequently will be away from the dither structure, thereby discharges the dither structure in the another location.After this, the dither structure will starting of oscillation on its high natural frequency, thereby realizes that transfer of vibration and frequency improve conversion.
Improve the electricity energy harvester of conversion based on frequency in prior art, the structure of the embodiment of the invention has following characteristics:
A, the present invention adopt high rigidity material (such as polyimides) in the dither structure.High rigidity material makes structure of the present invention have higher natural frequency (about 1000Hz is far above 50Hz), and this is for realizing that high power output is vital.In addition, the high rigidity that structure of the present invention has makes it can carry bigger weight, thereby total may be done more to place more multi-thread circle.Therefore, use single dither structure that enough power output just can be provided, also fundamentally eliminate the stationary problem that exists in the design in the past.
B, the present invention adopt the fixing dither structure in both sides.The cantilever design design of adopting compared to existing technology, the fixing natural frequency that can improve this dither structure in both sides, and support bigger weight (vibrational structure is big, to place the many situations of coil be useful for requiring for this), with the higher power of output.
Fig. 1 is the schematic cross-section of electromagnetic vibration energy harvester in the one embodiment of the invention.As shown in Figure 1, the micro electromagnetic electricity energy harvester comprises two vibrational structures.First vibrational structure has lower natural frequency, and (fl＜100Hz), comprise neodymium iron boron (NdFeB) permanent magnet (PM) 102 of a copper plane spring 101 and a perpendicular polarization, this permanent magnet is fixed on the bottom face of copper plane spring 101.Second vibrational structure has higher natural frequency, and (fh＞1000Hz), for example than the high 1-2 of a natural frequency order of magnitude of first vibrational structure, this structure comprises polyimide film 103, copper coil 104, and iron nickel (FeNi) alloy 105.Wherein, polyimide film 103 can be divided into one or more layers, every layer of one or more groups copper coil that distributes, and the number of turn of every group of copper coil can be provided with and adjust according to actual needs.In an embodiment of the present invention, polyimide film 103 is divided into two-layer, every layer end face both sides distributing respectively have certain pattern, highdensity one group of copper coil 104, and FeNi alloy 105 is fixed on the end face center of the top layer of polyimide film 103.Because polyimide film 103 has relatively low Young's modulus (about 3GPa), therefore can provide good flexibility, be suitable for forming the main body flexible portion of second vibrational structure.In addition, the substrate when polyimide film 103 not only can be used as electro-coppering coil 104 guarantees can not be short-circuited between the multiple layer of copper coil 104 simultaneously.
When not beginning to vibrate as yet, first vibrational structure and second vibrational structure all are positioned at equilbrium position separately.Initial distance between the two is adjusted, made that permanent magnet 102 can not hold iron-nickel alloy 105 under poised state.When first vibrational structure response environment vibration starting oscillation, permanent magnet 102 moves to the position near iron-nickel alloy 105, hold iron-nickel alloy 105 in certain position, make that whole second vibrational structure is all picked up, and when moving to the another location, discharge second vibrational structure.Correspondingly, second vibrational structure after being released begins to vibrate on its high natural frequency.Therefore, can realize vibration conversion from the low frequency to the high frequency by magnetic interaction.The Nd-Fe-Bo permanent magnet material 106 of two perpendicular polarizations is placed under second vibrational structure, and is fixed on the protecting sheathing of being made by aluminium alloy 107.When vibration took place second vibrational structure, copper coil 104 will reciprocating motion in the magnetic field that magnet 106 produces, thereby causes the magnetic flux of copper coil 104 to change.Therefore, according to Faraday's law of induction, will on copper coil 104, produce induced current and voltage.
According to architectural feature shown in Figure 1, the electricity energy harvester that the present invention proposes has inherent frequency self-adaption ability, can effectively be operated in the have wider frequency range vibration environment of (in the low frequency).When being 80-120Hz, the natural frequency of first vibrational structure being designed to 100Hz just can being triggered by ambient vibration such as the ambient vibration frequency.
At first, no matter how low the ambient vibration frequency is, as long as copper coil is energized out the high frequency self-excited oscillation, electricity energy harvester of the present invention just can provide high power output.Though exist mechanical energy dissipative may make the vibration displacement of copper coil reduce in the vibration transmission process, because the vibration frequency of copper coil is higher, the electricity energy harvester that the present invention proposes remains effective.Can utilize formula (1) to explain this reason, that is: cube being directly proportional of the energy of collection and vibration frequency, but only with square being directly proportional of vibration displacement.
Secondly, even electricity energy harvester of the present invention under the off-resonance condition, also can keep constant high power output, therefore be applicable in the vibration environment with big frequency bandwidth.In this design, the low-frequency vibration structure on top is used to encourage the self-excited oscillation of copper coil, if move to enough near and hold the dither structure of bottom, so required displacement and not requiring as big under the resonance condition.
Fig. 2 is the top view of the copper plane spring 101 that uses among Fig. 1, and wherein dash area is the hollow out zone.Find out that from top view this copper plane spring 101 comprises four spring beams 202,204,206 and 208, and a center rectangle platform 210.Each spring beam one of them from four corners stretched out, and converges to center rectangle platform 210 at last.Fix a cube magnet at the lower bottom part of center rectangle platform 210, obtain the first low-frequency vibration structure.According to this setting, when whole low-frequency vibration structure was encouraged by an ambient vibration, the displacement of cube magnet position was maximum.It is enough near the iron-nickel alloy in second vibrational structure 105 in vibration processes that this structure is beneficial to cube magnet, and by magnetic attraction iron-nickel alloy 105, particularly ambient vibration passes to the vibrational energy of first vibrational structure when very little under the off-resonance state.
Fig. 3 is the schematic top view of top layer in second vibrational structure of one embodiment of the invention.This top layer mainly comprises: supporting plane 302 that made by polyimide material, bendable; Two groups of copper coils 304 and 306 of electroplating are distributed in the both lateral sides (along X-axis) of supporting plane 302 symmetrically; And, the iron-nickel alloy 308 in the center of supporting plane 302, between above-mentioned two groups of copper coils 304 and 306.Iron-nickel alloy 308 is sitting at the below of permanent magnet in above-mentioned first vibrational structure, so that be attracted when the two is close.Vertical both sides of supporting plane 302 (along the Z axle) are fixed on the inwall 318 and 320 of protecting sheathing; after permanent magnet release iron-nickel alloy 308 causes the second vibrational structure starting oscillation, will be away from the horizontal plane displacement of these two stiff ends greater than horizontal plane displacement near these two stiff ends.
The schematic diagram of Fig. 4 for using ANSYS emulation that supporting plane 302 is carried out model analysis.As can be seen from Figure 4, least displacement 401 occurs in two stiff ends, and maximum displacement 405 appears at the central plane away from stiff end.Different gray scale bands are represented different displacements, and between 57.229-114.457, the displacement of gray scale band 403 is between 228.914-286.143 such as the displacement of gray scale band 402, and the displacement of gray scale band 404 is between 400.6-457.829.Therefore, copper coil 304 and 306 is placed on central plane, when copper coil vibrates with supporting plane 302, will presents big displacement, thereby produce big electric current.By two connection welding 310 and 312 copper coil and bottom is connected in series, to improve dynamo-electric conversion performance.Two other solder joint tap 314 and 316 is in order to be electrically connected reservation with external loading (for example wireless senser).
Fig. 5 illustrates a group of bottom 500 or organizes copper coil and one group of top layer 502 or organize the relation of being connected in series between the copper coil more more.It may be noted that bottom has and the similar structure of top layer, and directly be assemblied under the top layer.As can be seen from Figure 5, the connection of copper coil is slightly different on these two layers.One of them is not both: two copper coils 504 on the bottom 500 and 506 are direct-connected, but top layer 502
On two copper coils 508 and 510 between directly do not connect, but be connected with 506 with the copper coil 504 of bottom with 518 by four solder joints 512,514,516.Another is not both: bottom 500 is not provided with the solder joint tap, because the copper coil group on all layers all is connected in series, two the solder joint taps 520 and 522 that are arranged on top layer can have been exported the electric energy that second vibrational structure produces.What deserves to be mentioned is, because polyimide material has insulation characterisitic, can short circuit between the copper coil of bottom and top layer.The inductive current direction that copper coil generates will be according to the period of motion property variation of second vibrational structure.For example, when the direction of motion of second vibrational structure was magnet 106 away from perpendicular polarization shown in Figure 1, the sense of current was shown in the arrow among Fig. 5.
Further, the present invention proposes a kind of vibrating device that is used for energy acquisition, comprising: insulation film,
One group or wire coil and the soft magnetic material that is connected in series of organizing more.Wherein, described wire coil and soft magnetic material are attached on the described insulation film; This soft magnetic material is used for externally magneticaction vibration down, drives a group on the described insulation film or organizes wire coil more; The wire coil that described one group or many groups are connected in series is used for carrying out dither in magnetic field, generates electric energy.Particularly, this vibrating device is second vibrational structure shown in Figure 1, first vibrational structure or other can the capturing ambient vibration the outside magneticaction of structure under vibrate.Perhaps, can be coupled by other modes between first vibrational structure and second vibrational structure,, and be not limited to outside magneticaction so that the ambient vibration that first vibrational structure is captured passes to second vibrational structure.
Wherein, described one group or organize more wire coil be distributed in one or more the layer on, every layer comprises at least one group of wire coil; Described every layer is used insulation film as supporting plane, and the through hole that connects wire coil on the different layers is set; And described soft magnetic material is attached on the nearest supporting plane of the outside magneticaction of distance.
Wherein, the wire coil that described a group or many groups are connected in series has two solder joint taps, is used for exporting the induced current that produces in the magnetic field motion.
It may be noted that described soft magnetic material can be iron-nickel alloy, described insulation film can be polyimide film.
Further, Fig. 6 illustrates the manufacture process of this vibrating device, and how double-deck copper coil promptly is set on polyimide film.
At first, at step (a), copper seed layer 602 is sprayed on the polyimide film 604, this film is to form on the sacrifice layer of being made by dimethyl silicone polymer (PDMS) 606, and sacrifice layer 606 is arranged on the glass substrate 608.
Secondly, at step (b), copper coil 610 on top layer is electroplated.
The 3rd, at step (c), iron-nickel alloy 612 is attached to the center of Seed Layer 602.
The 4th, at step (d), electroplate out 2 copper vias 614 and 616, as the passage that connects top layer and bottom coil.Subsequently, Seed Layer 602 is carried out etching, and for the copper coil 610 of top layer is coated with last layer second polyimide film 618, as insulation and supporting layer.
The 5th, at step (e), second copper seed layer 620 is sprayed on second polyimide film 618, and bottom copper coil 622 is electroplated.
At last, at step (f), second Seed Layer 620 is carried out etching, and coat the 3rd polyimide film 624.Afterwards, sacrifice layer 606 is removed from glass substrate 608, obtained a two-layer copper coil.
It is pointed out that the thickness and the width that can when electroplating, change copper coil, to adjust its track density (track density) or series resistance (series resistance).Certainly, also can create two copper coils by repeating above-mentioned steps, thereby optimize the performance of electricity energy harvester according to actual needs with the upper strata.In addition, if only need the individual layer copper coil in actual applications, can just sacrifice layer 606 be removed from glass substrate 608 in execution in step (a)-(c) back.
That is to say that the present invention also provides a kind of manufacturing process that is easy to expand of vibrating device, make to produce copper coil on the polyimide film with different-thickness, width, number of plies.Because the power output and the coil number of electricity energy harvester are directly proportional, can adjust power output by the number of plies that changes track density and copper coil, to adapt to different application.
As can be seen, the present invention proposes a kind of electricity energy harvester improved, that raising is changed based on frequency, can both work effectively under ambient vibration excitation widely.Compare with other electricity energy harvesters, the present invention has following one or more advantage:
1, efficient height.Miniature electricity energy harvester of the present invention adopts high rigidity material, makes only to adopt single dither structure just can realize frequency inverted, makes frequency be improved.In other words, the low-frequency vibration (tens Hz) of surrounding environment can be converted to inner dither (about 1000Hz), be used for generating.Because the output of the energy of harvester is directly proportional with the cube of vibration frequency, this design can improve the efficient based on the electricity energy harvester of vibration greatly, guarantees high power output, to support the operation of wireless senser.
2, can free vibration, have inherent adaptability and do not have power consumption for large-scale vibration.As previously mentioned, to the electricity energy harvester based on vibration, its energy output and vibration displacement are directly proportional, and therefore traditional harvester only just can provide high power output under resonance state.In miniature electricity energy harvester of the present invention, the extraction of periphery vibration separates with generating.Ambient vibration just improves the driving of conversion as frequency, rather than as the direct sources of energy converting between mechanical.Power output depends on the displacement of dither structure, rather than the displacement of low-frequency vibration structure.The low-frequency vibration structure only need provide a less displacement, gets final product to evoke the dither structural vibrations.This has greatly reduced the resonance requirement between ambient vibration and the electricity energy harvester.Therefore, this equipment is not subjected to the constraint of resonance frequency, all has the adaptability of inherence for the low-frequency vibration of big frequency range, and does not have power consumption.
3, be easy to expansion.Miniature electricity energy harvester that the present invention proposes and vibrating device adopt the manufacturing process that is easy to expand to realize, make and can make the copper coil group with different-thickness, width and number of plies on polyimide film.Therefore, electricity energy harvester not only can adapt to different application with series resistance by the track density of adjusting the copper coil group, and the number of plies of polyimide film that can also be electroplate with copper coil by adjustment is tackled higher application requirements to produce more electric energy.
The above is preferred embodiment of the present invention only, is not to be used to limit protection scope of the present invention.All any modifications of being done within the spirit and principles in the present invention, be equal to replacement, improvement etc., all should be included within protection scope of the present invention.
Claims (15)
1. an electricity energy harvester is characterized in that, comprising:
First vibration unit is used for vibrating under the triggering of the low-frequency vibration that surrounding enviroment produce, and gives second vibration unit that is positioned at described first vibration unit below with this transfer of vibration;
Described second vibration unit is used for carrying out dither in magnetic field under the vibrative triggering of described first vibration unit institute, generates electric energy.
2. device according to claim 1 is characterized in that, described second vibration unit comprises: insulation film, one group or wire coil and the soft magnetic material that is connected in series of organizing more;
Wherein, described wire coil and soft magnetic material are attached on the described insulation film.
3. device according to claim 2 is characterized in that, described first vibration unit comprises: plane spring and first magnet that is attached to described plane spring bottom surface;
Described plane spring is used to catch the low-frequency vibration that surrounding enviroment produce, and drives described first magnet and vibrate;
Described first magnet, be used for suction size according to the distance between this first magnet and the described soft magnetic material, this first magnet, and the rigidity power of described second vibration unit, attract or discharge described soft magnetic material, thereby drive a group on the described insulation film or organize wire coil more and carry out dither.
4. device according to claim 2 is characterized in that, described one group or organize wire coil more and be distributed on one or more layer, every layer is used insulation film as supporting plane, and the through hole that connects wire coil on the different layers is set; And
Described soft magnetic material is attached on the nearest supporting plane of described first vibration unit of distance.
5. according to each described device of claim 1-4, it is characterized in that, further comprise: be arranged on described one group or organize second magnet of wire coil below more;
The wire coil that described one group or many groups are connected in series has two solder joint taps, is used for exporting the induced current that produces in the magnetic field motion that described second magnet produces.
6. according to each described device of claim 1-4, it is characterized in that, further comprise: be used to place the substrate of described second magnet, and the protecting sheathing that is used for fixing described insulation film.
7. according to each described device of claim 1-4, it is characterized in that described first magnet is Nd-Fe-B permanent magnet, described soft magnetic material is an iron-nickel alloy, and described insulation film is a polyimide film.
8. according to each described device of claim 1-4, it is characterized in that described first magnet is arranged on the bottom center of described plane spring, described soft magnetic material is arranged on the center of described supporting plane.
9. a vibrating device that is used for energy acquisition is characterized in that, comprising:
Insulation film, one group or wire coil and the soft magnetic material that is connected in series of organizing more; Wherein, described wire coil and soft magnetic material are attached on the described insulation film;
Described soft magnetic material is used for externally magneticaction vibration down, drives a group on the described insulation film or organizes wire coil more;
Described one group or the wire coil that is connected in series of organizing are used for carrying out dither in magnetic field more, generate electric energy.
10. device according to claim 9 is characterized in that, described one group or organize more wire coil be distributed in one or more the layer on, every layer comprises at least one group of wire coil;
Described every layer is used insulation film as supporting plane, and the through hole that connects wire coil on the different layers is set; And
Described soft magnetic material is attached on the nearest supporting plane of the outside magneticaction of distance.
11., it is characterized in that the wire coil that described a group or many groups are connected in series has two solder joint taps, is used for exporting the induced current that produces in the magnetic field motion according to claim 9 or 10 described devices.
12., it is characterized in that described soft magnetic material is an iron-nickel alloy according to claim 9 or 10 described devices, described insulation film is a polyimide film.
13. a manufacture method that is used for the vibrating device of energy acquisition is characterized in that, comprising:
Spraying first Seed Layer on first insulation film;
With one group or organize first wire coil more and electroplate on described first Seed Layer, and soft magnetic material is attached on described first Seed Layer;
For described first Seed Layer, one group or organize first wire coil and soft magnetic material covers second insulation film, form described vibrating device more.
14. method according to claim 13 is characterized in that, before forming described vibrating device, further comprises:
Spraying second Seed Layer on described second insulation film;
With one group or organize second wire coil more and electroplate on described second Seed Layer, and electroplate out and be used for more more described one group or organize first wire coil and described one group or organize one or more through hole that second wire coil is connected in series;
For described second Seed Layer and one group or organize second wire coil more and cover the 3rd insulation film.
15. according to claim 13 or 14 described methods, it is characterized in that, further comprise: on sacrifice layer, form described first insulation film, and after described vibrating device forms, remove described sacrifice layer.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200910215849XA CN102118095A (en) | 2009-12-30 | 2009-12-30 | Energy acquisition device, vibrating device used for energy acquisition and manufacturing method |
| PCT/CN2010/000604 WO2011079486A1 (en) | 2009-12-30 | 2010-04-30 | Electromagnetic energy harvesting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200910215849XA CN102118095A (en) | 2009-12-30 | 2009-12-30 | Energy acquisition device, vibrating device used for energy acquisition and manufacturing method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN102118095A true CN102118095A (en) | 2011-07-06 |
Family
ID=44216729
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200910215849XA Pending CN102118095A (en) | 2009-12-30 | 2009-12-30 | Energy acquisition device, vibrating device used for energy acquisition and manufacturing method |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN102118095A (en) |
| WO (1) | WO2011079486A1 (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102545692A (en) * | 2012-01-18 | 2012-07-04 | 厦门大学 | Compound vibration energy collector based on piezoelectricity and static electricity |
| CN102570902A (en) * | 2012-01-18 | 2012-07-11 | 厦门大学 | Piezoelectric-static compound micro machine vibration energy collector and manufacture method thereof |
| CN103683795A (en) * | 2012-08-29 | 2014-03-26 | 北京嘉岳同乐极电子有限公司 | Vibration generation device and manufacturing method thereof |
| CN103916049A (en) * | 2013-01-07 | 2014-07-09 | 北京嘉岳同乐极电子有限公司 | Piezoelectric vibration generating set and manufacturing method thereof |
| CN105811728A (en) * | 2016-05-25 | 2016-07-27 | 西南交通大学 | Electromagnetic vibration electric generator of array structure |
| CN106487198A (en) * | 2016-12-07 | 2017-03-08 | 南京航空航天大学 | Electromagnetic type touches the raising frequency vibrational energy harvester that shakes |
| CN109312713A (en) * | 2016-04-07 | 2019-02-05 | 沃特克斯布莱德莱丝有限公司 | Generator |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113890300B (en) * | 2021-09-13 | 2023-06-16 | 国网湖北省电力有限公司电力科学研究院 | Wide range vibration energy harvester based on asymmetric-biplane springs |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2005069959A2 (en) * | 2004-01-21 | 2005-08-04 | The Regents Of The University Of Michigan | Method and micro power generator for generating electrical power from low frequency vibrational energy |
| CN101399484A (en) * | 2008-10-30 | 2009-04-01 | 上海交通大学 | Static coil type micromechanical electromagnetic vibration energy collector based on frequency boost conversion |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07170713A (en) * | 1993-12-15 | 1995-07-04 | Yaskawa Electric Corp | Minute generator |
| EP1938395A2 (en) * | 2005-09-23 | 2008-07-02 | Regents of the University of California | Energy harvesting using frequency rectification |
| CN101141093B (en) * | 2007-10-11 | 2010-08-25 | 上海交通大学 | Minisize electromagnetic low-frequency vibration energy collecting device |
-
2009
- 2009-12-30 CN CN200910215849XA patent/CN102118095A/en active Pending
-
2010
- 2010-04-30 WO PCT/CN2010/000604 patent/WO2011079486A1/en active Application Filing
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2005069959A2 (en) * | 2004-01-21 | 2005-08-04 | The Regents Of The University Of Michigan | Method and micro power generator for generating electrical power from low frequency vibrational energy |
| CN101399484A (en) * | 2008-10-30 | 2009-04-01 | 上海交通大学 | Static coil type micromechanical electromagnetic vibration energy collector based on frequency boost conversion |
Non-Patent Citations (1)
| Title |
|---|
| HALUK KULAH等: "Energy Scavenging From Low-Frequency Vibrations by Using Frequency Up-Conversion for Wireless Sensor Applications", 《IEEE SENSORS JOURNAL》 * |
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102570902A (en) * | 2012-01-18 | 2012-07-11 | 厦门大学 | Piezoelectric-static compound micro machine vibration energy collector and manufacture method thereof |
| CN102545692A (en) * | 2012-01-18 | 2012-07-04 | 厦门大学 | Compound vibration energy collector based on piezoelectricity and static electricity |
| CN102570902B (en) * | 2012-01-18 | 2014-09-24 | 厦门大学 | Piezoelectric-static compound micro machine vibration energy collector and manufacture method thereof |
| CN102545692B (en) * | 2012-01-18 | 2015-01-07 | 厦门大学 | Compound vibration energy collector based on piezoelectricity and static electricity |
| CN103683795B (en) * | 2012-08-29 | 2018-05-15 | 北京嘉岳同乐极电子有限公司 | Shaking generating set and its manufacture method |
| CN103683795A (en) * | 2012-08-29 | 2014-03-26 | 北京嘉岳同乐极电子有限公司 | Vibration generation device and manufacturing method thereof |
| CN103916049A (en) * | 2013-01-07 | 2014-07-09 | 北京嘉岳同乐极电子有限公司 | Piezoelectric vibration generating set and manufacturing method thereof |
| CN103916049B (en) * | 2013-01-07 | 2016-12-28 | 北京嘉岳同乐极电子有限公司 | Piezoelectric vibration generation device and manufacture method thereof |
| CN109312713A (en) * | 2016-04-07 | 2019-02-05 | 沃特克斯布莱德莱丝有限公司 | Generator |
| CN109312713B (en) * | 2016-04-07 | 2022-03-01 | 沃特克斯布莱德莱丝有限公司 | Generator |
| CN105811728A (en) * | 2016-05-25 | 2016-07-27 | 西南交通大学 | Electromagnetic vibration electric generator of array structure |
| CN106487198A (en) * | 2016-12-07 | 2017-03-08 | 南京航空航天大学 | Electromagnetic type touches the raising frequency vibrational energy harvester that shakes |
| CN106487198B (en) * | 2016-12-07 | 2023-10-27 | 南京航空航天大学 | Electromagnetic type bump vibration frequency-increasing vibration energy acquisition device |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2011079486A1 (en) | 2011-07-07 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Tan et al. | Review of MEMS electromagnetic vibration energy harvester | |
| CN102118095A (en) | Energy acquisition device, vibrating device used for energy acquisition and manufacturing method | |
| Annapureddy et al. | Magnetic energy harvesting with magnetoelectrics: an emerging technology for self-powered autonomous systems | |
| CN1950989B (en) | An electromagnetic device for converting mechanical vibrational energy into electrical energy | |
| US7579757B2 (en) | Method and micro power generator for generating electrical power from low frequency vibrational energy | |
| Kim et al. | Piezoelectric MEMS for energy harvesting | |
| US7928634B2 (en) | System and method for providing a piezoelectric electromagnetic hybrid vibrating energy harvester | |
| Zhang et al. | Vibration energy harvesting based on magnet and coil arrays for watt-level handheld power source | |
| US7501726B1 (en) | Micro-electro-mechanical system (MEMS) and apparatus for generating power responsive to mechanical vibration | |
| CN104836478A (en) | Piezoelectric-electromagnetic composite low-frequency broadband energy harvester | |
| CN101941670B (en) | Miniature electromagnetic broadband vibration energy harvester based on permanent magnet assay | |
| JP2007504789A (en) | Electromagnetic device for converting mechanical vibration energy into electric energy and method for manufacturing the same | |
| CN102420517A (en) | Micro electromagnetic vibration energy harvester based on patterned permanent magnet full integration | |
| JP2009165212A (en) | Power generation element using piezoelectric material, and generating set using the power generation element | |
| CN104270032A (en) | Bistable state spherical surface composite cantilever piezoelectric power generation device | |
| Kroener | Energy harvesting technologies: Energy sources, generators and management for wireless autonomous applications | |
| KR101090694B1 (en) | Hybrid power generater and method for manufacturing the same | |
| KR20150002971A (en) | Hybrid energy harvesting module | |
| CN111245294B (en) | Integrated-manufactured nonlinear cascade multi-degree-of-freedom vibration energy collector | |
| KR101458265B1 (en) | An apparatus for generating power responsive to mechanical vibration | |
| Wang et al. | Design and fabrication of a micro electromagnetic vibration energy harvester | |
| CN113890300A (en) | Wide range vibration energy harvester based on asymmetric-biplane springs | |
| KR20170059386A (en) | Vibration energy harvesting device and operating method thereof | |
| Yang et al. | Improved piezoelectric multifrequency energy harvesting by magnetic coupling | |
| JP6424485B2 (en) | POWER GENERATOR AND ELECTRONIC DEVICE PROVIDED WITH THE SAME |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20110706 |