CN102116886A - Super-resolution photon sieve - Google Patents

Abstract

The invention relates to a super-resolution photon sieve. Parts of an endless belt are retained selectively from the inner part to the outer part on the basis of an ordinary Fresnelzone plate to ensure that a discontinuously distributed concentric circular ring structure is formed, and the super-resolution photon sieve is constructed in the retained circular ring by a similar method of an ordinary photon sieve. In an optimized embodiment, the boundary position of the endless belt where a light-transmitting micropore of each photon sieve is positioned can be moved into the endless belt with a focus optical path difference of mlambda +/- lambda/4. Compared with the conventional photon sieve, the super-resolution photon sieve has the advantages that: when the circular ring formed by the light-transmitting micropore is discontinuously distributed, the technical effect of compressing the size of a main lobe and simultaneously inhibiting the intensity of a minor lobe of a refractive light spot by setting a design constraint condition can be achieved.

Description

The super-resolution photon screen

Technical field

The present invention relates to a kind of optical focus element, especially relate to a kind of photon screen with super-resolution characteristic.

Background technology

The imaging resolution of lens can (point spread function PSF) characterizes by its point spread function.The focus of lens is not an ideal point, but the hot spot that size and intensity distributions are arranged, the intensity distributions of hot spot is called as point spread function.Along with the development of technology such as nanometer technology, optical storage and three-dimensional imaging, the resolution that improves lens imaging is the problem that people were concerned about always.Need energy focusing in the various instruments of center spot in imaging (particularly x-ray imaging), beam shaping, microelectronics maskless lithography, light laser concentration of energy and other, all need further the main lobe of diffraction pattern is compressed.

Traditional optical lens is made by glass, and the focusing of glass lens and imaging realize by the refraction incident light, so be called refractor (refractive lens).Another kind of lens, fresnel's zone plate (Fresnelzone plate, FZP), it is a kind of diffraction optics concentrating element, by selecting to filter the wavefront (wavefront) of incident light, allow light wave after filtering at the space diffraction, form and focus on, therefore also be known as diffraction lens (diffractive lens).

Photon screen is a kind of novel diffraction optical device that people such as calendar year 2001 Kipper proposes first, can focus on and imaging [Kipp, L. grenz ray and EUV radiating light source with it, Skibowski, M., Johnson, R.L., Berndt, R., Adelung, R., Harm, S., and Seemann, R.Sharper images byfocusing soft X-ray with photon sieves.Nature[J], 2001.414,184-188.].As shown in Figure 1, photon screen (Photon Sieve, PS) be the diffraction optical elements of on the fresnel's zone plate endless belt, making a large amount of transparent micropores that suitably distribute with different radii (Diffraction Optical Element, DOE).

Photon screen is compared with traditional fresnel's zone plate, and its minimum micro-pore diameter is bigger than corresponding zone plate endless belt width, is generally 1.53 times.Therefore under the equal resolution situation, the processing photon screen than process zone plate to characteristic dimension require low many, particularly to X ray and the such short wavelength's situation of EUV, the minimum feature of existing process technology can't be competent at the needed endless belt width of high resolving power zone plate processing request, utilizes photon sieve technology can obtain higher resolution under same process conditions.But the limiting resolution of common photon screen still also is subjected to the restriction of wavelength except being subjected to the line width limit at first of processing technology, and under the condition of not considering the restriction of processing technology minimum feature, its limiting resolution is identical with common wavestrip, is limited to λ/2 on the resolution.

Summary of the invention

Common photon screen is to form in common Fresnel zone plate design, and the latter is that a series of donuts are spaced composition, and each annulus is called half-wave zone, and any two adjacent half-wave zones have the optical path difference of λ/2 when arriving focus.The focal distance f of zone plate and n ring radius r _nSatisfy relational expression: $({\mathrm{<figure-callout\; id="2"\; label="r\; n"\; filenames="H2009102479344E00021.png"\; state="\{\{state\}\}">r</figure-callout>}}_n^{}+f^2)={(f+\frac{\mathrm{n\&lambda;}}{2})}^2,$ N=1 wherein, 2,3....That is to say that n is a consecution natural number.Opposite with the understanding of this long-term formation, find when a part of removing in these a series of donuts, form discontinuously arranged donut structure, when constructing photon screen on this basis then, may obtain the compression main lobe size unexpected technique effect of suppressed sidelobes intensity simultaneously.

Based on above-mentioned cognition, one object of the present invention is to provide a kind of super-resolution photon screen, under identical fabrication process condition, further compresses the main lobe halfwidth of photon screen focal beam spot, suppresses the increase of maximum secondary lobe simultaneously, guarantees good contrast.

The present invention is that to solve the problems of the technologies described above the technical scheme that adopts be to propose a kind of super-resolution photon screen, the transparent micropore that comprises many group different-diameters, every group of transparent micropore is distributed on the annulus and the annulus of organizing the transparent micropore place has together circle center and radius difference, wherein each outside annulus sequence number m is selected from a discontinuous natural number set M from this center of circle, and the center radius r of m annulus _mWith endless belt width w _mSatisfy relational expression:

$r_m=\frac{\sqrt{{(m-\frac{1}{4})}^2{\mathrm{\&lambda;}}^2+2(m-\frac{1}{4})\mathrm{\&lambda;f}}+\sqrt{{(m+\frac{1}{4})}^2{\mathrm{\&lambda;}}^2+2(m+\frac{1}{4})\mathrm{\&lambda;<figure-callout\; id="2"\; label="f"\; filenames="H2009102479344E00021.png"\; state="\{\{state\}\}">f</figure-callout>}}}{2};$

$w_m=\frac{\sqrt{{(m+\frac{1}{4})}^2{\mathrm{\&lambda;}}^2+2(m+\frac{1}{4})\mathrm{\&lambda;f}}-\sqrt{{(m-\frac{1}{4})}^2{\mathrm{\&lambda;}}^2+2(m-\frac{1}{4})\mathrm{\&lambda;<figure-callout\; id="2"\; label="f"\; filenames="H2009102479344E00021.png"\; state="\{\{state\}\}">f</figure-callout>}}}{2};$

λ is a lambda1-wavelength, and f is the focal length of photon screen;

And be distributed in the diameter d of the transparent micropore of m annulus _mSatisfy relational expression: d _m=1.53w _m

The another kind of super-resolution photon screen of the present invention, the transparent micropore that comprises many group different-diameters, every group of transparent micropore is distributed on the annulus and the annulus of organizing the transparent micropore place has together circle center and radius difference, wherein each outside annulus sequence number m is selected from a discontinuous natural number set M from this center of circle, and the center radius r of m annulus _mWith endless belt width w _mSatisfy relational expression:

$r_m=\frac{\sqrt{{(m-\frac{1}{4})}^2{\mathrm{\&lambda;}}^2+2(m-\frac{1}{4})\mathrm{\&lambda;f}}+\sqrt{{(m-\frac{3}{4})}^2{\mathrm{\&lambda;}}^2+2(m-\frac{3}{4})\mathrm{\&lambda;<figure-callout\; id="2"\; label="f"\; filenames="H2009102479344E00021.png"\; state="\{\{state\}\}">f</figure-callout>}}}{2};$

$w_m=\frac{\sqrt{{(m-\frac{1}{4})}^2{\mathrm{\&lambda;}}^2+2(m-\frac{1}{4})\mathrm{\&lambda;f}}-\sqrt{{(m-\frac{3}{4})}^2{\mathrm{\&lambda;}}^2+2(m-\frac{3}{4})\mathrm{\&lambda;<figure-callout\; id="2"\; label="f"\; filenames="H2009102479344E00021.png"\; state="\{\{state\}\}">f</figure-callout>}}}{2};$

Wherein λ is a lambda1-wavelength, and f is the focal length of photon screen;

And be distributed in the diameter d of the transparent micropore of m annulus _mSatisfy relational expression: d _m=1.53w _m

More than two kinds of super-resolution photon screens be that each endless belt boundary position with common photon screen moves within the endless belt of focusing optical path difference m λ ± λ/4.Two kinds of super-resolution photon screens proposed below have then kept the endless belt position of common photon screen.

Another super-resolution photon screen of the present invention comprises the transparent micropore of many group different-diameters, every group of transparent micropore is distributed on the annulus and the annulus of organizing the transparent micropore place has together circle center and radius difference, wherein each outside annulus sequence number m is selected from a discontinuous natural number set M from this center of circle, and the center radius r of m annulus _mWith endless belt width w _mSatisfy relational expression:

$r_m=\frac{\sqrt{{(m-\frac{1}{2})}^2{\mathrm{\&lambda;}}^2+2(m-\frac{1}{2})\mathrm{\&lambda;f}}+\sqrt{{\mathrm{<figure-callout\; id="2"\; label="m"\; filenames="H2009102479344E00021.png"\; state="\{\{state\}\}">m</figure-callout>}}^2{\mathrm{\&lambda;}}^2+2\mathrm{m\&lambda;<figure-callout\; id="2"\; label="f"\; filenames="H2009102479344E00021.png"\; state="\{\{state\}\}">f</figure-callout>}}}{2},$

$w_m=\frac{\sqrt{{\mathrm{<figure-callout\; id="2"\; label="m"\; filenames="H2009102479344E00021.png"\; state="\{\{state\}\}">m</figure-callout>}}^2{\mathrm{\&lambda;}}^2+2\mathrm{m\&lambda;f}}-\sqrt{{(m-\frac{1}{2})}^2{\mathrm{\&lambda;}}^2+2(m-\frac{1}{2})\mathrm{\&lambda;<figure-callout\; id="2"\; label="f"\; filenames="H2009102479344E00021.png"\; state="\{\{state\}\}">f</figure-callout>}}}{2};$

λ is a lambda1-wavelength, and f is the focal length of photon screen;

And be distributed in the diameter d of the transparent micropore of m annulus _mSatisfy relational expression: d _m=1.53w _m

Another super-resolution photon screen of the present invention comprises the transparent micropore of many group different-diameters, every group of transparent micropore is distributed on the annulus and the annulus of organizing the transparent micropore place has together circle center and radius difference, wherein each outside annulus sequence number m is selected from a discontinuous natural number set M from this center of circle, and the center radius r of m annulus _mWith endless belt width w _mSatisfy relational expression:

$r_m=\frac{\sqrt{{(m-1)}^2{\mathrm{\&lambda;}}^2+2(m-1)\mathrm{\&lambda;f}}+\sqrt{{(m-\frac{1}{2})}^2{\mathrm{\&lambda;}}^2+2(m-\frac{1}{2})\mathrm{\&lambda;<figure-callout\; id="2"\; label="f"\; filenames="H2009102479344E00021.png"\; state="\{\{state\}\}">f</figure-callout>}}}{2},$

$w_m=\frac{\sqrt{{(m-\frac{1}{2})}^2{\mathrm{\&lambda;}}^2+2(m-\frac{1}{2})\mathrm{\&lambda;f}}-\sqrt{{(m-1)}^2{\mathrm{\&lambda;}}^2+2(m-1)\mathrm{\&lambda;<figure-callout\; id="2"\; label="f"\; filenames="H2009102479344E00021.png"\; state="\{\{state\}\}">f</figure-callout>}}}{2};$

λ is a lambda1-wavelength, and f is the focal length of photon screen;

And be distributed in the diameter d of the transparent micropore of m annulus _mSatisfy relational expression: d _m=1.53w _m

In above-mentioned super-resolution photon screen, above-mentioned discontinuous natural number set M makes described photon screen satisfy following condition:

In the compression of the main lobe of diffraction pattern size, maximum side lobe intensity is minimum or be no more than the predetermined ratio of main lobe intensity with respect to main lobe intensity.

In above-mentioned super-resolution photon screen, above-mentioned discontinuous natural number set M obtains by the method for exhaustion, genetic algorithm, global optimization approach or shooting method.

In above-mentioned super-resolution photon screen, above-mentioned transparent micropore is to be distributed on the light tight film of photon screen.

The present invention is owing to adopt above technical scheme, on with the basis of common Fresnel zone plate, select partial zonal to keep from the inside to the outside, thereby form discontinuously arranged donut structure, and in the annulus that keeps, press and the similar method construct super-resolution photon screen of common photon screen.Compared with prior art, the present invention can reach the recompression of focal beam spot main lobe size, makes it break through the restriction of the minimum λ of common photon screen main lobe halfwidth/2, keeps the not obvious increase of maximum secondary lobe simultaneously, guarantees good contrast.

Description of drawings

For above-mentioned purpose of the present invention, feature and advantage can be become apparent, below in conjunction with accompanying drawing the specific embodiment of the present invention is elaborated, wherein:

Fig. 1 is common photon screen synoptic diagram.

Fig. 2 is a super-resolution photon screen synoptic diagram according to an embodiment of the invention.

Fig. 3 is the diffraction pattern intensity distributions comparison diagram of Fig. 1, two kinds of photon screens shown in Figure 2.

Embodiment

The super-resolution photon screen that is provided in the some embodiments of the present invention is on the basis within the endless belt that each endless belt boundary position of common Fresnel zone plate is moved to focusing optical path difference m λ ± λ/4, selection portion divides the photon screen endless belt to keep from the inside to the outside, thereby make photon screen printing opacity aperture form discontinuously arranged donut structure, to reach the recompression of focal beam spot main lobe size, make it break through the restriction of minimum λ/2 (λ is a lambda1-wavelength) of common photon screen main lobe halfwidth, keep the not obvious increase of maximum secondary lobe simultaneously, guarantee good contrast.

In an embodiment of the present invention, super-resolution photon screen is by a substrate be deposited on this suprabasil film and form.Substrate should see through employed incident light or electromagnetic wave (comprising microwave, millimeter wave, infrared, visible light, ultraviolet light, X ray etc.), and the material of substrate can be quartzy, plastics etc.Film should stop employed incident light or electromagnetic wave, and the material of film can be a metal film, for example gold, silver, titanium, aluminium etc.

The manufacture craft of super-resolution photon screen of the present invention includes but not limited to, lsi technology technology and photoetching process technology, and its manufacturing process can be identical with common photon screen.

Below in conjunction with accompanying drawing specific embodiments of the invention are described.Fig. 2 is a super-resolution photon screen synoptic diagram according to an embodiment of the invention.

Present embodiment has several transparent micropores on the film of photon screen, micropore runs through light tight film, make incident light to pass through, and the light that passes through is focused.These micropores are distributed on the distance concentric circles endless belt of one together circle center different radii.The number of donut is not limit, and generally determines according to the actual design occasion.From this center of circle outwards, the sequence number m of these donuts is selected from a discontinuous natural number set M, the center radius r of m ring belt _mWith endless belt width w _mSatisfy first group of relational expression:

$r_m=\frac{\sqrt{{(m-\frac{1}{4})}^2{\mathrm{\&lambda;}}^2+2(m-\frac{1}{4})\mathrm{\&lambda;f}}+\sqrt{{(m+\frac{1}{4})}^2{\mathrm{\&lambda;}}^2+2(m+\frac{1}{4})\mathrm{\&lambda;<figure-callout\; id="2"\; label="f"\; filenames="H2009102479344E00021.png"\; state="\{\{state\}\}">f</figure-callout>}}}{2},$

$w_m=\frac{\sqrt{{(m+\frac{1}{4})}^2{\mathrm{\&lambda;}}^2+2(m+\frac{1}{4})\mathrm{\&lambda;f}}-\sqrt{{(m-\frac{1}{4})}^2{\mathrm{\&lambda;}}^2+2(m-\frac{1}{4})\mathrm{\&lambda;<figure-callout\; id="2"\; label="f"\; filenames="H2009102479344E00021.png"\; state="\{\{state\}\}">f</figure-callout>}}}{2};---\left(1\right)$

Perhaps also can satisfy second group of relational expression:

$r_m=\frac{\sqrt{{(m-\frac{1}{4})}^2{\mathrm{\&lambda;}}^2+2(m-\frac{1}{4})\mathrm{\&lambda;f}}+\sqrt{{(m-\frac{3}{4})}^2{\mathrm{\&lambda;}}^2+2(m-\frac{3}{4})\mathrm{\&lambda;<figure-callout\; id="2"\; label="f"\; filenames="H2009102479344E00021.png"\; state="\{\{state\}\}">f</figure-callout>}}}{2},$

$w_m=\frac{\sqrt{{(m-\frac{1}{4})}^2{\mathrm{\&lambda;}}^2+2(m-\frac{1}{4})\mathrm{\&lambda;f}}-\sqrt{{(m-\frac{3}{4})}^2{\mathrm{\&lambda;}}^2+2(m-\frac{3}{4})\mathrm{\&lambda;<figure-callout\; id="2"\; label="f"\; filenames="H2009102479344E00021.png"\; state="\{\{state\}\}">f</figure-callout>}}}{2};---\left(2\right)$

Wherein λ is a lambda1-wavelength, and f is the focal length of photon screen.

The diameter of photon screen transparent micropore is identical on each endless belt, the diameter d of transparent micropore on the m ring that distributes _mSatisfy relational expression:

d _m＝1.53w _m。

In the above-mentioned relation formula, when m got consecution natural number, these transparent micropores constituted common photon screen just.In an embodiment of the present invention, m is selected from a discontinuous natural number set M, and this discontinuous natural set M is a design parameter given in advance.It can chosen under the following design constraint: make the diffractional field of photon screen guarantee that simultaneously maximum secondary lobe is with respect to main lobe intensity minimum under the situation of compression main lobe size, big (for example be no more than the predetermined ratio of main lobe intensity, can select maximum secondary lobe to be no more than 5% with respect to main lobe intensity in actual the enforcement) perhaps do not take place obviously to become.Above-mentioned discontinuous integer set M also disobeys the concrete regularity of distribution, so the present invention is not intended to pair set M and carries out concrete qualification.But because the limited amount of set M can obtain to reach the discontinuous annulus combination of above-mentioned design object fully by the test of limited number of time.Only be the preparation method that exemplifies several set M below, be appreciated that the not concrete preparation method of limiting set M of the present invention.

In one embodiment, the selection of M can adopt the method for exhaustion with the endless belt combination that might keep calculate its diffractional field respectively, satisfy maximum secondary lobe with respect under the main lobe strength ratio requirement situation to choose, the M set of compression main lobe optimum.

In another embodiment, also can to adopt various optimized Algorithm such as genetic algorithm, global optimization approach that M set is carried out preferred in the selection of M.

In another embodiment, the selection of M also can adopt shooting method to generate one group of M set at random, calculate the diffractional field of corresponding zone plate, to judge whether it satisfies the compression main lobe and guarantee that maximum secondary lobe with respect to main lobe intensity big requirement does not take place obviously to become, then practice shooting successfully as satisfying, otherwise repeat to generate at random, until finding the M set that meets the demands.

Exemplify the example of a specific implementation of present embodiment at this, this example is to construct according to relational expression (1).Suppose that optical source wavelength is 2.4 nanometers, focal length is 30 microns, and the machinable minimum feature of micro fabrication technology is 30 nanometers, and the common photon screen that then satisfies above-mentioned condition 24 encircles totally, and minimum micro-pore diameter is 30 nanometers, corresponding with it super-resolution photon screen is totally 9 rings, and set M is { 1,7,12,16,19,21,22,23,24}, it respectively encircles micro-pore diameter and respectively is: 212.5,57,42.8,36.9,33.8,32.1,31.3,30.6,30 nanometers, totally 1503 transparent micropores.

Fig. 3 is the diffraction pattern intensity distributions comparison diagram of Fig. 1, two kinds of photon screens shown in Figure 2.With reference to shown in Figure 3, the point spread function halfwidth of the super-resolution photon screen focal plane diffractional field of above-mentioned parameter is compared with corresponding common photon screen with it and has been dwindled 13%, its maximum secondary lobe only is 4.04% of a main lobe intensity simultaneously, has kept good contrast in the compression main lobe.

The super-resolution photon screen that is provided in other embodiments of the invention is each the endless belt boundary position of Fresnel zone plate that keeps common, just selection portion divides the photon screen endless belt to keep from the inside to the outside, thereby make photon screen printing opacity aperture form discontinuously arranged donut structure, this can reach the recompression of focal beam spot main lobe size equally, keep the not obvious increase of maximum secondary lobe simultaneously, guarantee good contrast.The description of these super-resolution photon screens is provided below.

Super-resolution photon screen comprises many micropores, and these micropores are distributed on the distance concentric circles endless belt of one together circle center different radii.From this center of circle outwards, the sequence number m of these donuts is selected from a discontinuous natural number set M, the center radius r of m ring belt _mWith endless belt width w _mSatisfy the 3rd group of relational expression:

$r_m=\frac{\sqrt{{(m-\frac{1}{2})}^2{\mathrm{\&lambda;}}^2+2(m-\frac{1}{2})\mathrm{\&lambda;f}}+\sqrt{{\mathrm{<figure-callout\; id="2"\; label="m"\; filenames="H2009102479344E00021.png"\; state="\{\{state\}\}">m</figure-callout>}}^2{\mathrm{\&lambda;}}^2+2\mathrm{m\&lambda;<figure-callout\; id="2"\; label="f"\; filenames="H2009102479344E00021.png"\; state="\{\{state\}\}">f</figure-callout>}}}{2},$

$w_m=\frac{\sqrt{{\mathrm{<figure-callout\; id="2"\; label="m"\; filenames="H2009102479344E00021.png"\; state="\{\{state\}\}">m</figure-callout>}}^2{\mathrm{\&lambda;}}^2+2\mathrm{m\&lambda;f}}-\sqrt{{(m-\frac{1}{2})}^2{\mathrm{\&lambda;}}^2+2(m-\frac{1}{2})\mathrm{\&lambda;<figure-callout\; id="2"\; label="f"\; filenames="H2009102479344E00021.png"\; state="\{\{state\}\}">f</figure-callout>}}}{2};---\left(3\right)$

Perhaps also can satisfy the 4th group of relational expression:

$r_m=\frac{\sqrt{{(m-1)}^2{\mathrm{\&lambda;}}^2+2(m-1)\mathrm{\&lambda;f}}+\sqrt{{(m-\frac{1}{2})}^2{\mathrm{\&lambda;}}^2+2(m-\frac{1}{2})\mathrm{\&lambda;<figure-callout\; id="2"\; label="f"\; filenames="H2009102479344E00021.png"\; state="\{\{state\}\}">f</figure-callout>}}}{2},$

$w_m=\frac{\sqrt{{(m-\frac{1}{2})}^2{\mathrm{\&lambda;}}^2+2(m-\frac{1}{2})\mathrm{\&lambda;f}}-\sqrt{{(m-1)}^2{\mathrm{\&lambda;}}^2+2(m-1)\mathrm{\&lambda;<figure-callout\; id="2"\; label="f"\; filenames="H2009102479344E00021.png"\; state="\{\{state\}\}">f</figure-callout>}}}{2};---\left(4\right)$

Wherein λ is a lambda1-wavelength, and f is the focal length of photon screen.

The diameter of photon screen transparent micropore is identical on each endless belt, the diameter d of transparent micropore on the m ring that distributes _mSatisfy relational expression:

d _m＝1.53w _m。

Discontinuous natural number set M is choosing under the following design constraint in the present embodiment: make the diffractional field of photon screen guarantee that simultaneously maximum secondary lobe is with respect to main lobe intensity minimum under the situation of compression main lobe size, big (for example be no more than the predetermined ratio of main lobe intensity, can select maximum secondary lobe to be no more than 5% with respect to main lobe intensity in actual the enforcement) perhaps do not take place obviously to become.The choosing method of discontinuous natural number set M can be identical with aforesaid embodiment, do not repeat them here.

The above embodiment of the present invention is chosen in optimization on the basis of annulus of common Fresnel zone plate and is made photon screen, has kept good contrast in wave of compression strap diffractional field main lobe, has promoted the resolution performance of photon screen.

Above-described concrete embodiment; purpose of the present invention, technical scheme and beneficial effect have been carried out further detailed description; but not in order to limit the present invention; without departing from the spirit and scope of the present invention all; the modification of being done and perfect all should be included within protection scope of the present invention.

Claims (16)

1. super-resolution photon screen, the transparent micropore that comprises many group different-diameters, every group of transparent micropore is distributed on the annulus and the annulus of organizing the transparent micropore place has together circle center and radius difference, wherein each outside annulus sequence number m is selected from a discontinuous natural number set M from this center of circle, and the center radius r of m annulus _mWith endless belt width w _mSatisfy relational expression:

$r_m=\frac{\sqrt{{(m-\frac{1}{4})}^2{\mathrm{\&lambda;}}^2+2(m-\frac{1}{4})\mathrm{\&lambda;f}}+\sqrt{{(m+\frac{1}{4})}^2{\mathrm{\&lambda;}}^2+2(m+\frac{1}{4})\mathrm{\&lambda;f}}}{2},$

$w_m=\frac{\sqrt{{(m+\frac{1}{4})}^2{\mathrm{\&lambda;}}^2+2(m+\frac{1}{4})\mathrm{\&lambda;f}}-\sqrt{{(m-\frac{1}{4})}^2{\mathrm{\&lambda;}}^2+2(m-\frac{1}{4})\mathrm{\&lambda;f}}}{2};$

λ is a lambda1-wavelength, and f is the focal length of photon screen;

And be distributed in the diameter d of the transparent micropore of m annulus _mSatisfy relational expression: d _m=1.53w _m

2. super-resolution photon screen as claimed in claim 1 is characterized in that, described discontinuous natural number set M makes described photon screen satisfy following condition:

In the compression of the main lobe of diffraction pattern size, maximum side lobe intensity is minimum or be no more than the predetermined ratio of main lobe intensity with respect to main lobe intensity.

3. super-resolution photon screen as claimed in claim 1 or 2 is characterized in that, described discontinuous natural number set M obtains by the method for exhaustion, genetic algorithm, global optimization approach or shooting method.

4. super-resolution photon screen as claimed in claim 1 is characterized in that, described transparent micropore is to be distributed on the light tight film of described photon screen.

5. super-resolution photon screen, the transparent micropore that comprises many group different-diameters, every group of transparent micropore is distributed on the annulus and the annulus of organizing the transparent micropore place has together circle center and radius difference, wherein each outside annulus sequence number m is selected from a discontinuous natural number set M from this center of circle, and the center radius r of m annulus _mWith endless belt width w _mSatisfy relational expression:

$r_m=\frac{\sqrt{{(m-\frac{1}{4})}^2{\mathrm{\&lambda;}}^2+2(m-\frac{1}{4})\mathrm{\&lambda;f}}+\sqrt{{(m-\frac{3}{4})}^2{\mathrm{\&lambda;}}^2+2(m-\frac{3}{4})\mathrm{\&lambda;f}}}{2},$

$w_m=\frac{\sqrt{{(m-\frac{1}{4})}^2{\mathrm{\&lambda;}}^2+2(m-\frac{1}{4})\mathrm{\&lambda;f}}-\sqrt{{(m-\frac{3}{4})}^2{\mathrm{\&lambda;}}^2+2(m-\frac{3}{4})\mathrm{\&lambda;f}}}{2};$

Wherein λ is a lambda1-wavelength, and f is the focal length of photon screen;

And be distributed in the diameter d of the transparent micropore of m annulus _mSatisfy relational expression: d _m=1.53w _m

6. super-resolution photon screen as claimed in claim 5 is characterized in that, described discontinuous natural number set M makes described photon screen satisfy following condition:

In the compression of the main lobe of diffraction pattern size, maximum side lobe intensity is minimum or be no more than the predetermined ratio of main lobe intensity with respect to main lobe intensity.

7. as claim 5 or 6 described super-resolution photon screens, it is characterized in that described discontinuous natural number set M obtains by the method for exhaustion, genetic algorithm, global optimization approach or shooting method.

8. super-resolution photon screen as claimed in claim 5 is characterized in that, described transparent micropore is to be distributed on the light tight film of described photon screen.

9. super-resolution photon screen, the transparent micropore that comprises many group different-diameters, every group of transparent micropore is distributed on the annulus and the annulus of organizing the transparent micropore place has together circle center and radius difference, wherein each outside annulus sequence number m is selected from a discontinuous natural number set M from this center of circle, and the center radius r of m annulus _mWith endless belt width w _mSatisfy relational expression:

$r_m=\frac{\sqrt{{(m-\frac{1}{2})}^2{\mathrm{\&lambda;}}^2+2(m-\frac{1}{2})\mathrm{\&lambda;f}}+\sqrt{m^2{\mathrm{\&lambda;}}^2+2\mathrm{m\&lambda;f}}}{2},$

$w_m=\frac{\sqrt{m^2{\mathrm{\&lambda;}}^2+2\mathrm{m\&lambda;f}}-\sqrt{{(m-\frac{1}{2})}^2{\mathrm{\&lambda;}}^2+2(m-\frac{1}{2})\mathrm{\&lambda;f}}}{2};$

λ is a lambda1-wavelength, and f is the focal length of photon screen;

And be distributed in the diameter d of the transparent micropore of m annulus _mSatisfy relational expression: d _m=1.53w _m

10. super-resolution photon screen as claimed in claim 9 is characterized in that, described discontinuous natural number set M makes described photon screen satisfy following condition:

In the compression of the main lobe of diffraction pattern size, maximum side lobe intensity is minimum or be no more than the predetermined ratio of main lobe intensity with respect to main lobe intensity.

11., it is characterized in that described discontinuous natural number set M obtains by the method for exhaustion, genetic algorithm, global optimization approach or shooting method as claim 9 or 10 described super-resolution photon screens.

12. super-resolution photon screen as claimed in claim 9 is characterized in that, described transparent micropore is to be distributed on the light tight film of described photon screen.

13. super-resolution photon screen, the transparent micropore that comprises many group different-diameters, every group of transparent micropore is distributed on the annulus and the annulus of organizing the transparent micropore place has together circle center and radius difference, wherein each outside annulus sequence number m is selected from a discontinuous natural number set M from this center of circle, and the center radius r of m annulus _mWith endless belt width w _mSatisfy relational expression:

$r_m=\frac{\sqrt{{(m-1)}^2{\mathrm{\&lambda;}}^2+2(m-1)\mathrm{\&lambda;f}}+\sqrt{{(m-\frac{1}{2})}^2{\mathrm{\&lambda;}}^2+2(m-\frac{1}{2})\mathrm{\&lambda;f}}}{2},$

$w_m=\frac{\sqrt{{(m-\frac{1}{2})}^2{\mathrm{\&lambda;}}^2+2(m-\frac{1}{2})\mathrm{\&lambda;f}}-\sqrt{{(m-1)}^2{\mathrm{\&lambda;}}^2+2(m-1)\mathrm{\&lambda;f}}}{2};$

λ is a lambda1-wavelength, and f is the focal length of photon screen;

And be distributed in the diameter d of the transparent micropore of m annulus _mSatisfy relational expression: d _m=1.53w _m

14. super-resolution photon screen as claimed in claim 13 is characterized in that, described discontinuous natural number set M makes described photon screen satisfy following condition:

In the compression of the main lobe of diffraction pattern size, maximum side lobe intensity is minimum or be no more than the predetermined ratio of main lobe intensity with respect to main lobe intensity.

15., it is characterized in that described discontinuous natural number set M obtains by the method for exhaustion, genetic algorithm, global optimization approach or shooting method as claim 13 or 14 described super-resolution photon screens.

16. super-resolution photon screen as claimed in claim 13 is characterized in that, described transparent micropore is to be distributed on the light tight film of described photon screen.

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