CN110361862B - System and method for eliminating side lobe of super-oscillation light spot - Google Patents

System and method for eliminating side lobe of super-oscillation light spot Download PDF

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CN110361862B
CN110361862B CN201910634860.3A CN201910634860A CN110361862B CN 110361862 B CN110361862 B CN 110361862B CN 201910634860 A CN201910634860 A CN 201910634860A CN 110361862 B CN110361862 B CN 110361862B
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CN110361862A (en
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付神贺
王仕旺
呼燕文
陈振强
李�真
尹浩
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Jinan University
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    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/0025Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical correction, e.g. distorsion, aberration
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/42Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/58Optics for apodization or superresolution; Optical synthetic aperture systems

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Abstract

The invention discloses a system for eliminating a side lobe of a super-oscillation light spot, which comprises: the laser 1, the focusing lens 2, the round lobe structure 3, the objective lens 4, the tube lens 5 and the imaging unit 6 are arranged in sequence; the focusing lens 2 is used for focusing the laser output by the laser 1 and generating a quasi-plane light beam in the focal depth; the round lobe structure 3 comprises symmetrical round lobe pairs 31, a round lobe pore 32 with an opening in the Y direction is formed in the round lobe pairs 31 and used for inducing high-order frequency spectrum components with circularly symmetrical distribution to the alignment plane light beam, the high-order frequency spectrum components are transmitted along with light waves, the round lobe pore of the scheme is provided with an opening in the Y direction, the induced high-frequency components are overlapped from the tip of the Y direction to the center of a base circle, the opening direction of the Y axis does not have the contribution of the high-frequency components, so that almost no side lobe is generated in the Y axis direction of a focusing light spot, the focusing light spot has a very large resolution view field, and the focusing light spot can be applied to wider super-resolution imaging.

Description

System and method for eliminating side lobe of super-oscillation light spot
Technical Field
The invention relates to the technical field of super-resolution imaging, in particular to a system and a method for eliminating side lobes of a super-oscillation light spot.
Background
The superoscillation phenomenon is a phenomenon of realizing far-field superdiffraction focusing outside an evanescent wave region, and is essentially that the oscillation speed of a band-limited function exceeds the highest Fourier component of the band-limited function in a local region. Generally speaking, the superoscillation phenomenon is the result of coherent superposition of light fields, and can realize arbitrarily small focusing distribution in a far-field area, but as the superoscillation focusing size is reduced, the energy of a superoscillation focusing spot is obviously reduced, and simultaneously, as high-intensity side lobes are generated, the super-resolution field of view is inhibited.
The essential understanding of the superoscillation phenomenon is gradually developed in the context of quantum mechanics. In 1985, Bucklew and Saleh designed an ideal virtual imaging system, which can realize one-dimensional images with any resolution. In 1990, the us Aharonov group discovered a weak measure of quantum mechanics, which could yield values outside the spectrum, i.e. some parameters of the local measurement could be out of range of the global measurement in a specific range. In 2006, Berry in England firstly relates the concept of quantum superoscillation with optical super-resolution, and utilizes a sub-wavelength grating structure to modulate the amplitude of an incident plane light field according to the coherent superposition principle of superoscillation, and the modulated diffraction light field can realize sub-wavelength optical diffraction limit focusing in a far field region, thereby leading out the phenomenon of optical superoscillation. In the optical field, for a frequency-limited optical field function, the super-oscillation phenomenon only occurs in a local space, only a small part of energy is gathered in a super-oscillation spot, and most of energy is lost in a side lobe. The results of Berry have led to intense reverberation internationally, and many research teams have conducted intensive research on this problem. For example, in 2007, the Fuming Huang team at the university of south America of England utilizes the quasicrystal nano-aperture structure as a super-oscillation device, and the optical super-oscillation phenomenon is observed experimentally for the first time, so that the optical super-oscillation device can be used for not only the sub-wavelength focusing of the far field, but also an imaging device. In 2012, a british e.t.f.rogers team designs a binary amplitude type multi-ring-band diffraction optical element as a super-oscillation focusing device, which consists of concentric rings with different widths and radii, and optimizes the size between the concentric rings through a binary particle swarm algorithm on the basis of a scalar angular spectrum theory, so as to ensure fine interference of a transmitted light field and obtain a focusing light spot.
Super-oscillating optical lenses have been demonstrated to achieve sub-wavelength focusing and have been used for super-resolution imaging. However, the sub-wavelength hot spots generated by these lenses are always accompanied by a considerable lateral band of light energy and are highly localized in the axial direction, affecting the super-resolved field of view. In addition, the superoscillation component generally needs to etch a complex structural unit on a metal film with a micro-nano size, and the size of the structural unit is in a nano level, so that an optimization algorithm is often needed to obtain the optimal superoscillation structural parameters. From the existing research results, the currently realized super-diffraction focusing spot size is difficult to break through 0.3 lambda.
In summary, there is a need in the industry to develop a system or method that has a simple structure, but can generate a super-oscillation optical needle with a smaller size, and can reduce the side lobe of a super-oscillation light spot, so as to achieve a better super-resolution effect.
Disclosure of Invention
The invention aims to overcome the defects in the prior art and provides a system and a method for eliminating the side lobe of a super-oscillation light spot.
The purpose of the invention is realized by the following technical scheme:
a system for eliminating side lobes of a super-oscillating spot, comprising: the laser 1, the focusing lens 2, the round lobe structure 3, the objective lens 4, the tube lens 5 and the imaging unit 6 are arranged in sequence; the laser 1 is used for generating monochromatic laser; the focusing lens 2 is used for focusing the laser output by the laser 1 and generating a quasi-plane light beam in the focal depth; the circular lobe structure 3 comprises a symmetrical circular lobe pair, a circular lobe small hole with an opening in the Y direction is formed in the circular lobe pair and used for inducing high-order frequency spectrum components with circularly symmetrical distribution to the alignment plane light beam, and the high-order frequency spectrum components are coherently superposed in the horizontal axis direction of the circular lobe small hole along with the propagation of light waves to form a super-oscillation focusing light needle without side lobes; the objective lens 4 is used for collecting and amplifying the super-oscillation focusing optical needle; the tube lens 5 is used for correcting the aberration of the super-oscillation focusing optical needle; and the imaging unit 6 is used for collecting and imaging the corrected super-oscillation focusing optical needle.
Preferably, the thickness of the pair of circular lobes is in the order of hundreds of nanometers; the round lobe structure 3 is made of gold and chromium and is manufactured on a transparent glass substrate.
Preferably, the imaging unit 6 is a charge coupled device.
Preferably, the laser 1 is a helium-neon laser.
Preferably, the lobe structure is arranged at the intersection of the focal point of the focusing lens 2 and the working distance of the objective lens.
A method for eliminating side lobes of a super-oscillation spot comprises the following steps:
s1, the laser 1 outputs monochromatic laser, and the monochromatic laser is transmitted to the focusing lens 2;
s2, the focusing lens 2 focuses the monochromatic laser and generates a quasi-plane light beam in the focal depth, and the quasi-plane light beam is transmitted to the circular lobe structure 3;
s3, the circular lobe structure 3 induces high-order spectral components with circularly symmetric distribution to the quasi-plane light beam, and the high-order spectral components are coherently superposed in the horizontal axis direction of the circular lobe small hole along with the propagation of the light wave to form a super-oscillation focusing light needle without side lobes;
s4, the objective 4 collects and magnifies the super-oscillation focusing optical needle; the tube lens 5 corrects the aberration of the super-oscillation focusing optical needle;
and S5, the imaging unit 6 acquires and images the corrected super-oscillation focusing optical needle.
Preferably, step S1 is preceded by: preparing a round petal structure; the preparation of the round lobe structure comprises the following steps: plating a gold film on a glass substrate, and drawing a circle lobe structure on the gold film; and etching a circle lobe structure on the gold film on the glass substrate by a focused ion beam milling technology.
Preferably, the drawing of the circle lobe structure on the gold membrane comprises: a circle with the radius of R [ mu ] m is used as a base circle Y1 on the gold film, the base circle Y1 is moved leftwards and rightwards by X [ mu ] m to obtain a circle Y2 and a circle Y3, the area enclosed by the arc on the right side of the base circle Y1 and the arc on the right side of the circle Y2 is used as a first round lobe, the area enclosed by the arc on the left side of the base circle Y1 and the arc on the left side of the circle Y3 is used as a second round lobe, the first round lobe and the second round lobe form a pair of round lobes, and a round lobe small hole with an opening in the Y direction is formed in the pair of round lobes, wherein the radius of the round lobe small hole is R [ mu ] m, and the lobe width of the round lobe pair is X [ mu ] m.
Preferably, the base circle Y1 has a radius of 5 μm and the lobe width of the lobe pair is 1 μm.
Preferably, the gold film is 80nm, and the gold film comprises 10nm of chromium and 70nm of gold.
Compared with the prior art, the invention has the following advantages:
(1) according to the scheme, the high-order frequency of the circular small-hole sharp-edge diffraction wave field is subjected to regular coherent superposition according to the super-oscillation principle, a super-oscillation light needle can be generated in a far field, and a deep sub-wavelength (0.15 lambda) focusing light spot can be realized. Compared with the traditional super-oscillation structure, the binary structure designed by the scheme is simple, does not need nanometer-level processing level, greatly reduces the processing cost and difficulty of devices, and provides a new method for super-oscillation far-field focusing and super-resolution imaging.
(2) The circle valve small hole of the scheme is provided with the opening in the Y direction, the induced high-frequency component is superposed from the tip of the Y direction to the center of the base circle, and the Y-axis opening direction has no contribution of the high-frequency component, so that the Y-axis direction of the focusing light spot almost has no side lobe, has a very large resolution view field, and is applied to more extensive super-resolution imaging
Drawings
Fig. 1 is a schematic structural diagram of a system for eliminating side lobes of a super-oscillation spot in embodiment 1.
Fig. 2 is a schematic flow chart of a method for eliminating the side lobe of the super-oscillation spot in embodiment 1.
Fig. 3 is a schematic plan view of the round lobe structure of example 1.
Fig. 4 is a schematic flow chart of a method for eliminating the side lobe of the super-oscillation spot in embodiment 1.
FIG. 5(a) is a diagram of a superoscillatory light probe generated by a circular lobe structure of example 1, wherein the circular lobe aperture has a radius of 5 μm and a lobe width of 1 μm.
FIG. 5(b) is a super-oscillating focused spot pattern at 2 μm of the super-oscillating optical needle propagation generated by the circular lobe structure of example 1 with a radius of the circular lobe aperture of 5 μm and a lobe width of 1 μm.
FIG. 5(c) is a graph showing the distribution of light intensity of the super-oscillating optical needle produced by the circular lobe structure of example 1, wherein the circular lobe aperture has a radius of 5 μm and a lobe width of 1 μm.
FIG. 6(a) is a diagram of a superoscillatory light probe generated by a circular lobe structure of example 2 having a 7 μm radius of a circular lobe aperture and a 1 μm lobe width.
FIG. 6(b) is a super-oscillating focused spot pattern at 3 μm of propagation of a super-oscillating optical needle generated by a circular lobe structure of example 2 having a 7 μm radius of a circular lobe aperture and a 1 μm lobe width.
FIG. 6(c) is a graph showing the distribution of light intensity of the super-oscillating optical needle produced by the circular lobe structure of example 2 having a 7 μm radius of the circular lobe aperture and a 1 μm lobe width.
Detailed Description
The invention is further illustrated by the following figures and examples.
In order to obtain smaller focused spot size and inhibit the side lobe of the super-oscillation spot, the invention provides a system and a method for eliminating the side lobe of the super-oscillation spot.
Example 1
Referring to fig. 1 and 3, a system for eliminating side lobes of a super-oscillating spot, comprises: the laser 1, the focusing lens 2, the round lobe structure 3, the objective lens 4, the tube lens 5 and the imaging unit 6 are arranged in sequence; the laser 1 is used for generating monochromatic laser; the focusing lens 2 is used for focusing the laser output by the laser 1 and generating a quasi-plane light beam in the focal depth; the circular lobe structure 3 comprises a symmetrical circular lobe pair 31, a circular lobe pinhole 32 with an opening in the Y direction is formed in the circular lobe pair 31 and used for inducing high-order frequency spectrum components with circularly symmetrical distribution to the collimation plane light beam, and the high-order frequency spectrum components are coherently superposed in the horizontal axis direction of the circular lobe pinhole 32 along with the propagation of light waves to form a super-oscillation focusing light needle without side lobes; the objective lens 4 is used for collecting and amplifying the super-oscillation focusing optical needle; the tube lens 5 is used for correcting the aberration of the super-oscillation focusing optical needle; and the imaging unit 6 is used for collecting and imaging the corrected super-oscillation focusing optical needle.
In this embodiment, the thickness of the pair of circular lobes 31 is in the order of hundreds of nanometers; the round lobe structure 3 is made of gold and chromium and is manufactured on a transparent glass substrate. On one hand, when the planar light wave is incident to the circular lobe structure, the light field in the circular lobe pore can be absorbed. On the other hand, a strong enough sharp edge diffraction effect can be generated at the edge of the circular lobe, high-order spectral components with circular symmetric distribution are induced, the high-order spectral components can be coherently superposed towards the horizontal axis direction of the circular lobe small hole 32 along with the propagation of the optical wave to form a super-oscillation focusing optical needle, and almost no side lobe is generated in the Y-axis direction of the focusing optical spot.
In the present embodiment, the imaging unit 6 is a Charge Coupled Device (CCD).
In this embodiment, the laser 1 is a helium-neon laser. The helium-neon laser outputs monochromatic laser.
In this embodiment, the lobe structure is arranged at the intersection of the focal point of the focusing lens 2 and the working distance of the objective lens.
Referring to fig. 2, the method for eliminating the side lobe of the super-oscillation light spot by using the system for eliminating the side lobe of the super-oscillation light spot includes:
s1, the laser 1 outputs monochromatic laser, and the monochromatic laser is transmitted to the focusing lens 2;
s2, the focusing lens 2 focuses the monochromatic laser and generates a quasi-plane light beam in the focal depth, and the quasi-plane light beam is transmitted to the circular lobe structure 3; the focusing lens 2 is a conventional spherical lens, and because the spot size of the output laser is large, the focusing lens 2 can be used for focusing the monochromatic laser to generate a quasi-plane light beam in the focal depth. In the present embodiment, the focal length of the focusing lens 2 is 10 cm.
S3, the circular lobe structure 3 induces high-order spectral components with circularly symmetric distribution to the quasi-plane light beam, and the high-order spectral components are coherently superposed in the horizontal axis direction of the circular lobe pinhole 32 along with the propagation of the light wave to form a super-oscillation focusing light needle without side lobes; the planar light waves vertically enter the circular lobe structure 3, the edge of the circular lobe can generate a strong enough sharp edge diffraction effect, and high-order spectral components with circularly symmetric distribution are induced.
S4, the objective 4 collects and magnifies the super-oscillation focusing optical needle; the tube lens 5 corrects the aberration of the super-oscillation focusing optical needle; because the size of the focusing light spot is small, the focusing light spot cannot be directly detected by a charge coupling device, the focusing light spot needs to be amplified by jointly using an objective lens 4 and a tube lens 5 with the amplification factor of 150X and the working distance of 1.5mm, and finally the amplified light spot is collected and recorded by the charge coupling device.
And S5, the imaging unit 6 acquires and images the corrected super-oscillation focusing optical needle.
In the present embodiment, step S1 is preceded by: preparing a round petal structure; the preparation of the round lobe structure comprises the following steps: plating a gold film on a glass substrate, and drawing a circle lobe structure on the gold film; and etching a circle lobe structure on the gold film on the glass substrate by a focused ion beam milling technology.
In this embodiment, referring to fig. 4, the drawing of the circle lobe structure on the gold membrane includes: a circle with the radius of R [ mu ] m is used as a base circle Y1 on the gold film, the base circle Y1 is moved leftwards and rightwards by X [ mu ] m to obtain a circle Y2 and a circle Y3, the area enclosed by the arc on the right side of the base circle Y1 and the arc on the right side of the circle Y2 is used as a first round lobe, the area enclosed by the arc on the left side of the base circle Y1 and the arc on the left side of the circle Y3 is used as a second round lobe, the first round lobe and the second round lobe form a round lobe pair 31, a round lobe small hole 32 with an opening in the Y direction is formed inside the round lobe pair 31, the radius of the round lobe small hole 32 is R [ mu ] m, and the lobe width of the round lobe pair 31 is X [ mu ] m. The radius of the round lobe orifice 32 is the same as the radius of the base circle Y1 and the lobe width is equal to the distance the base circle Y1 moves to the left or right.
In this embodiment, X is 5, R is 1, the radius of the base circle Y1 is 5 μm, and the lobe width of the pair of lobes 31 is 1 μm. In this example, the gold film is 80nm, and the gold film includes 10nm of chromium and 70nm of gold. The thickness of the glass substrate was 0.3 cm. The super-oscillation light needle diagram generated by the circular lobe structure of the present embodiment having a circular lobe aperture radius of 5 μm and a lobe width of 1 μm is shown in fig. 5 (a). The super-oscillation focusing light spot pattern at the position of 2 μm of super-oscillation light needle propagation generated by the circular lobe structure with the radius of the circular lobe aperture of 5 μm and the lobe width of 1 μm in the embodiment is shown in fig. 5 (b). The light intensity distribution diagram of the super-oscillation light needle generated by the circular lobe structure with the radius of the small hole of the circular lobe of 5 μm and the lobe width of 1 μm in the embodiment is shown in fig. 5 (c).
According to the super-oscillation principle, when a plane light wave passes through the circular lobe small holes 32 with the circular lobe structures distributed in a central symmetry mode, the boundaries of the circular lobe small holes 32 can induce a plurality of high-frequency components, and the high-order frequency components are regularly and coherently superposed in a far field, so that a super-oscillation light needle is generated in the far field. In order to effectively inhibit the super-oscillation side lobe, the circular lobe structure is characterized in that: the circle is used as a basic structure, so that high-frequency components induced by sharp edges are coherently superposed to the center of the circle to form a bright spot, and the size of a focused light spot is reduced; when the base circle Y1 moves to the left and right respectively, the lobe structure forms a lobe pinhole 32 with an opening in the Y direction, induced high-frequency components are superposed from the tip of the Y direction to the center of the lobe pinhole 32 due to the opening in the Y direction, and the opening direction of the Y axis has no contribution of the high-frequency components, so that almost no side lobe is generated in the Y axis direction of the focusing spot, and the focusing spot has a large resolution field of view. The scheme does not need complex structural design and optimization algorithm, greatly reduces the precision and difficulty of equipment processing, and is expected to be widely applied to the fields of far-field super-resolution imaging and the like.
Example 2
Example 2 differs from example 1 in that the base circle Y1 has a radius of 7 μm and the lobe width of the pair of circular lobes 31 is 1 μm. The super-oscillation light needle diagram generated by the circular lobe structure with the radius of the circular lobe pore 32 of the embodiment being 7 μm and the lobe width being 1 μm is shown in fig. 6 (a). The super-oscillation focusing light spot pattern at the position of 3 μm of the super-oscillation light needle propagation generated by the circular lobe structure with the radius of the circular lobe small hole 32 of the embodiment being 7 μm and the lobe width being 1 μm is shown in fig. 6 (b). The light intensity distribution diagram of the super-oscillating light needle generated by the circular lobe structure with the radius of the circular lobe small hole 32 of the embodiment being 7 μm and the lobe width being 1 μm is shown in fig. 6 (c).
In conclusion, the invention constructs a centrosymmetric circular lobe structure by utilizing a geometric sharp edge structure of binary amplitude modulation, generates the super-oscillation optical needle based on the geometric sharp edge diffraction principle, inhibits the side lobe of a super-resolution focusing light spot in the Y-axis direction of propagation of the generated super-oscillation optical needle, enlarges the resolution field of view, and the super-oscillation optical needle generated by utilizing the method is simple and easy to control, does not need complex process manufacturing, and has great potential in the fields of super-resolution lithography, high-density optical storage, biomedical imaging and the like. The size of the generated focusing light spot is distributed in a far field, the size of the light spot can reach 0.15 lambda, almost no side lobe is generated in the Y-axis direction of the focusing light spot, the resolving field of view can be greatly improved, the system is simple and easy to control, a complex process is not needed, and the system can be widely applied to the fields of super-resolution imaging and the like.
The above-mentioned embodiments are preferred embodiments of the present invention, and the present invention is not limited thereto, and any other modifications or equivalent substitutions that do not depart from the technical spirit of the present invention are included in the scope of the present invention.

Claims (7)

1. A system for eliminating side lobes of a super-oscillating spot, comprising: the laser device comprises a laser device (1), a focusing lens (2), a round lobe structure (3), an objective lens (4), a tube lens (5) and an imaging unit (6) which are sequentially arranged;
the laser (1) is used for generating monochromatic laser;
the focusing lens (2) is used for focusing the laser output by the laser (1) and generating a quasi-plane beam in the focal depth;
the circular lobe structure (3) comprises symmetrical circular lobe pairs, circular lobe small holes with openings in the Y direction are formed in the circular lobe pairs and used for inducing high-order frequency spectrum components with circularly symmetrical distribution to the alignment plane light beam, and the high-order frequency spectrum components are coherently superposed in the horizontal axis direction of the circular lobe small holes along with the propagation of light waves to form a super-oscillation focusing light needle without side lobes;
the objective lens (4) is used for collecting and amplifying the super-oscillation focusing optical needle;
the tube lens (5) is used for correcting the aberration of the super-oscillation focusing optical needle;
the imaging unit (6) is used for collecting and imaging the corrected super-oscillation focusing optical needle;
the round lobe structure (3) is manufactured on a transparent glass substrate; the circle lobe structure is arranged at the intersection of the focal point of the focusing lens (2) and the working distance of the objective lens;
the circle with the radius of R mum is used as a base circle Y1, the base circle Y1 is moved to the right and left by X mum respectively to obtain a circle Y2 and a circle Y3, the area enclosed by the arc on the right of the base circle Y1 and the arc on the right of the circle Y2 is used as a first circle lobe, the area enclosed by the arc on the left of the base circle Y1 and the arc on the left of the circle Y3 is used as a second circle lobe, the first circle lobe and the second circle lobe form a circle lobe pair, a circle lobe pore with an opening in the Y direction is formed in the circle lobe pair, the radius of the circle lobe pore is R mum, and the lobe width of the circle lobe pair is X mum; the base circle Y1 has a radius of 5 μm and a lobe width of 1 μm.
2. The system for eliminating the sidelobe of the super-oscillation spot according to claim 1, wherein the thickness of the pair of the round lobes is in the order of hundreds of nanometers; the round lobe structure (3) is made of gold and chromium and is manufactured on a transparent glass substrate.
3. The system for eliminating the sidelobe of the super-oscillating spot according to claim 1, wherein the imaging unit (6) is a charge coupled device.
4. The system for eliminating side lobes of a superoscillatory spot of claim 1 wherein the laser (1) is a helium-neon laser.
5. A method for eliminating the side lobe of the super-oscillation light spot based on the system for eliminating the side lobe of the super-oscillation light spot of any one of claims 1 to 4, which is characterized by comprising the following steps:
s1, outputting monochromatic laser by the laser (1), and transmitting the monochromatic laser to the focusing lens 2;
s2, the focusing lens 2 focuses the monochromatic laser and generates a quasi-plane light beam in the focal depth, and the quasi-plane light beam is transmitted to the circular lobe structure (3);
s3, the circular lobe structure (3) induces high-order spectral components with circularly symmetric distribution to the quasi-plane light beam, and the high-order spectral components are coherently superposed in the horizontal axis direction of a circular lobe small hole along with the propagation of light waves to form a super-oscillation focusing light needle without side lobes;
s4, the objective lens (4) collects and amplifies the super-oscillation focusing optical needle; the lens cone (5) corrects the aberration of the super-oscillation focusing optical needle;
s5, the imaging unit (6) acquires and images the corrected super-oscillation focusing optical needle.
6. The method for eliminating the sidelobe of the super-oscillation spot according to claim 5, wherein before the step S1, the method comprises: preparing a round petal structure;
the preparation of the round lobe structure comprises the following steps:
plating a gold film on a glass substrate, and drawing a circle lobe structure on the gold film;
and etching a circle lobe structure on the gold film on the glass substrate by a focused ion beam milling technology.
7. The method for eliminating the sidelobe of the super-oscillating spot as claimed in claim 6, wherein the thickness of the gold film is 80nm, and the gold film comprises 10nm thick chromium and 70nm thick gold.
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