CN102101265B - 一种检测抛光工件受力及定位抛光工具工作原点的夹具 - Google Patents
一种检测抛光工件受力及定位抛光工具工作原点的夹具 Download PDFInfo
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- CN102101265B CN102101265B CN2010105916779A CN201010591677A CN102101265B CN 102101265 B CN102101265 B CN 102101265B CN 2010105916779 A CN2010105916779 A CN 2010105916779A CN 201010591677 A CN201010591677 A CN 201010591677A CN 102101265 B CN102101265 B CN 102101265B
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- Prior art keywords
- polishing
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- grinding head
- clamp
- stressed
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- 238000005498 polishing Methods 0.000 title claims abstract description 64
- 239000000725 suspension Substances 0.000 claims abstract description 16
- 238000005259 measurement Methods 0.000 abstract 4
- 239000007788 liquid Substances 0.000 abstract 2
- 239000012530 fluid Substances 0.000 description 8
- 238000003754 machining Methods 0.000 description 8
- 238000000034 method Methods 0.000 description 6
- 238000005516 engineering process Methods 0.000 description 5
- 239000011888 foil Substances 0.000 description 4
- 238000001514 detection method Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 230000002159 abnormal effect Effects 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 230000003993 interaction Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000007517 polishing process Methods 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- BGPVFRJUHWVFKM-UHFFFAOYSA-N N1=C2C=CC=CC2=[N+]([O-])C1(CC1)CCC21N=C1C=CC=CC1=[N+]2[O-] Chemical compound N1=C2C=CC=CC2=[N+]([O-])C1(CC1)CCC21N=C1C=CC=CC1=[N+]2[O-] BGPVFRJUHWVFKM-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000012938 design process Methods 0.000 description 1
- 238000010010 raising Methods 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
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- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
Abstract
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CN2010105916779A CN102101265B (zh) | 2010-12-16 | 2010-12-16 | 一种检测抛光工件受力及定位抛光工具工作原点的夹具 |
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CN2010105916779A CN102101265B (zh) | 2010-12-16 | 2010-12-16 | 一种检测抛光工件受力及定位抛光工具工作原点的夹具 |
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CN102101265A CN102101265A (zh) | 2011-06-22 |
CN102101265B true CN102101265B (zh) | 2012-05-16 |
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CN2010105916779A Expired - Fee Related CN102101265B (zh) | 2010-12-16 | 2010-12-16 | 一种检测抛光工件受力及定位抛光工具工作原点的夹具 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102773798A (zh) * | 2012-07-21 | 2012-11-14 | 北京工业大学 | 一种力反馈自适应磨抛机用试件夹持装置 |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102554760B (zh) * | 2012-01-19 | 2014-04-23 | 大连理工大学 | 一种多功能的基片磨抛装置及其磨抛方法 |
CN102756333B (zh) * | 2012-07-27 | 2016-06-01 | 厦门大学 | 一种用于抛光机床的在线可调式夹具 |
CN103831721A (zh) * | 2012-11-28 | 2014-06-04 | 吴秉筠 | 一种磨床 |
JP2019198938A (ja) * | 2018-05-18 | 2019-11-21 | 株式会社荏原製作所 | 研磨ヘッドを用いて研磨パッドの研磨面を検出する方法、および研磨装置 |
CN116551474B (zh) * | 2023-06-08 | 2024-03-05 | 上海弘智金属制品有限公司 | 一种铝合金压铸件的优化抛光方法及系统 |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3770352B2 (ja) * | 1997-05-19 | 2006-04-26 | 株式会社ニコン | 露光装置の光軸調整方法 |
JP3982890B2 (ja) * | 1997-08-06 | 2007-09-26 | 富士通株式会社 | 研磨装置、この装置に用いられる研磨治具、及び、この研磨治具に取り付けられる被研磨物取付部材 |
GB0406102D0 (en) * | 2004-03-18 | 2004-04-21 | Rolls Royce Plc | A casting method |
CN201090592Y (zh) * | 2007-04-26 | 2008-07-23 | 沈冲 | 真空吸盘 |
CN100590795C (zh) * | 2008-10-31 | 2010-02-17 | 大连理工大学 | 修正基片晶面偏差的加工方法及夹具装置 |
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2010
- 2010-12-16 CN CN2010105916779A patent/CN102101265B/zh not_active Expired - Fee Related
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102773798A (zh) * | 2012-07-21 | 2012-11-14 | 北京工业大学 | 一种力反馈自适应磨抛机用试件夹持装置 |
CN102773798B (zh) * | 2012-07-21 | 2014-09-03 | 北京工业大学 | 一种力反馈自适应磨抛机用试件夹持装置 |
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CN102101265A (zh) | 2011-06-22 |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
EE01 | Entry into force of recordation of patent licensing contract |
Assignee: Changshu Jingbo Optics Technology Co.,Ltd. Assignor: Zhejiang University of Technology Contract record no.: 2012320010133 Denomination of invention: Clamp for detecting stress of polished workpiece and positioning working original point of polishing tool Granted publication date: 20120516 License type: Exclusive License Open date: 20110622 Record date: 20120612 |
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CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20120516 |