CN102097972B - Resonance device used in driver of piezoelectric actuator - Google Patents
Resonance device used in driver of piezoelectric actuator Download PDFInfo
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- CN102097972B CN102097972B CN 201110037915 CN201110037915A CN102097972B CN 102097972 B CN102097972 B CN 102097972B CN 201110037915 CN201110037915 CN 201110037915 CN 201110037915 A CN201110037915 A CN 201110037915A CN 102097972 B CN102097972 B CN 102097972B
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- piezoelectric actuator
- series
- inductance
- driver
- resonance device
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- 239000003990 capacitor Substances 0.000 abstract description 6
- 230000001939 inductive effect Effects 0.000 abstract 1
- 238000005516 engineering process Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 2
- 230000008447 perception Effects 0.000 description 2
- 238000002604 ultrasonography Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
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Abstract
The invention provides a resonance device used in a driver of a piezoelectric actuator, belonging to a piezoelectric actuator drive controller. The resonance device comprises the piezoelectric actuator (C), a series inductor (Ls), a capacitor (Cs) and a parallel inductor (Lm), wherein the series inductor (Ls) and the capacitor (Cs) are mutually and serially connected to form a series branch, one end of the parallel inductor (Lm) is connected with the input end of the series branch, one end of the piezoelectric actuator (C) is connected with the output end of the series branch, and the other end of the piezoelectric actuator (C) and the other end of the parallel inductor (Lm) are respectively grounded. The resonance device can change the voltage output by the driver into sine waves, the sine wave amplitude and the phase difference change little along the change of the driving frequency, and the system impedance can be changed to be resistive or weakly inductive.
Description
Technical field
The present invention relates to a kind of piezoelectric actuator ultra-precision driving controller, be suitable for the driver of single-phase and heterogeneous piezoelectric actuator.
Background technology
Piezoelectric actuator is a kind of actuator of utilizing the piezoelectricity functional material to consist of, it have simple and compact for structure, flexible form is various, positioning accuracy is high, thereby be subject to extensive concern, show huge application potential and advantage in fields such as MEMS (micro electro mechanical system) (MEMS), nanometer technology, military project, robot, biology, medical machinery, Aero-Space, office automations.
Must be equipped with driver during piezoelectric actuator work.The output that driver is general is square wave, and when driving voltage was sinusoidal waveform, the mechanical property of actuator was best.Therefore must square wave be become sine wave by resonant network, and carry out impedance matching.Most employings is to boost by transformer at present, realizes filtering and impedance matching by series inductance as resonant network.But this resonant network that is made of single inductance can not make driver output voltage amplitude and phase difference keep constant, has limited the raising of piezoelectric actuator performance.
Summary of the invention
Technical problem to be solved of the present invention is for the defective that relates in background technology, and the resonance device in a kind of driver of piezoelectric actuator is provided, and makes driver output voltage amplitude and phase difference keep constant.
The present invention adopts following technical scheme for solving the problems of the technologies described above:
Be used for the resonance device of piezoelectric actuator ultra-precision driving controller, comprise: piezoelectric actuator C, series inductance L
sWith capacitor C
sThe series arm, the shunt inductance L that form
mDescribed shunt inductance L
mAn end be connected with the input of described series arm, the end of described piezoelectric actuator C is connected with the output of described series arm, the other end of described piezoelectric actuator C, shunt inductance L
mOther end ground connection.
Further, aforesaid resonance device for the piezoelectric actuator ultra-precision driving controller, series inductance L
sWith series capacitance C
sNear the series resonance piezoelectric actuator operating frequency, namely satisfy following formula:
Shunt inductance L
m, series inductance L
s, series capacitance C
sC satisfies following formula with piezoelectric actuator:
Wherein
Angular frequency for the piezoelectric actuator operating voltage.
The present invention adopts technique scheme to have following beneficial effect:
Due to series inductance L
sWith series capacitance C
sNear the series resonance piezoelectric actuator operating frequency, make this series arm present low-resistance to the signal of telecommunication of operating frequency, and high order harmonic component is presented high resistant, thus the voltage that makes driver be applied on piezoelectric actuator is sine wave, it is constant that its output voltage amplitude and phase difference keep.Shunt inductance L
mSystem impedance is changed into resistive or weak perception, improved piezoelectric actuator ultra-precision driving device performance.This resonant network is suitable for the driver of single-phase and heterogeneous piezoelectric actuator.
Description of drawings:
Fig. 1 is circuit diagram of the present invention;
Number in the figure: L wherein
m-shunt inductance, L
s-series inductance, C
s-series capacitance, C-piezoelectric actuator.
Fig. 2 is the schematic diagram that the present invention is used for the piezoelectric actuator ultra-precision driving controller;
Wherein Up is the square-wave signal of piezoelectric actuator ultra-precision driving controller output, and Us is through the after-applied sinusoidal waveform voltage to piezoelectric actuator of resonant network.
Specific embodiments:
Be described in further detail below in conjunction with the enforcement of accompanying drawing to technical scheme:
As shown in Figure 1, this resonant network comprises: piezoelectric actuator C, inductance L
s, capacitor C
sWith shunt inductance L
mC is the single-phase equivalent capacity of piezoelectric actuator, inductance L
sWith capacitor C
sBe composed in series series arm, shunt inductance L
mAn end be connected with the input of described series arm, the end of described piezoelectric actuator C is connected with the output of series arm, the other end of described piezoelectric actuator C, shunt inductance L
mOther end ground connection.
The shunt inductance two ends are connected with the output of piezoelectric actuator ultra-precision driving controller.Wherein, inductance L
sWith capacitor C
sThe front and back order no requirement (NR) that connects.
Piezoelectric actuator of the present invention, it can be single-phase driving, also can be heterogeneous driving.
Piezoelectric actuator of the present invention, it can be rotary-type ultrasound electric machine, also can be linear type ultrasound motor.
Series inductance L
sWith C
sNear the series resonance piezoelectric actuator operating frequency, namely satisfy following formula:
Shunt inductance L
m, series inductance L
s, series capacitance C
sC satisfies following formula with piezoelectric actuator:
Wherein
Angular frequency for the piezoelectric actuator operating voltage.
Due to series inductance L
sWith series capacitance C
sNear the series resonance piezoelectric actuator operating frequency, make this series arm present low-resistance to the signal of telecommunication of operating frequency, and high order harmonic component is presented high resistant, thus the voltage that makes driver be applied on piezoelectric actuator is sine wave, it is constant that its output voltage amplitude and phase difference keep.Shunt inductance L
mSystem impedance is changed into resistive or weak perception, improved piezoelectric actuator ultra-precision driving device performance.
As shown in Figure 2, the signal of actuator driving governor output is square-wave voltage Up, and after-applied voltage U s to piezoelectric actuator is sinusoidal waveform through resonant network.
Claims (1)
1. a resonance device that is used for the driver of piezoelectric actuator, is characterized in that: comprise piezoelectric actuator (C), series inductance (L
s) and electric capacity (C
s), shunt inductance (L
m), series inductance (L wherein
s) and electric capacity (C
s) mutually be composed in series series arm, described shunt inductance (L
m) an end be connected with the input of described series arm, an end of described piezoelectric actuator (C) is connected with the output of described series arm, the other end of described piezoelectric actuator (C), shunt inductance (L
m) other end ground connection; Described series inductance (L
s) and series capacitance (C
s) satisfy following formula:
ω
2L
sC
s=1；
Described shunt inductance (L
m), series inductance (L
s), series capacitance (C
s) satisfy following formula with piezoelectric actuator (C):
C+C
s-ω
2CC
s(L
m+L
s)=0；
Wherein ω is the angular frequency of piezoelectric actuator operating voltage.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201110037915 CN102097972B (en) | 2011-02-15 | 2011-02-15 | Resonance device used in driver of piezoelectric actuator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201110037915 CN102097972B (en) | 2011-02-15 | 2011-02-15 | Resonance device used in driver of piezoelectric actuator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102097972A CN102097972A (en) | 2011-06-15 |
| CN102097972B true CN102097972B (en) | 2013-06-19 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201110037915 Expired - Fee Related CN102097972B (en) | 2011-02-15 | 2011-02-15 | Resonance device used in driver of piezoelectric actuator |
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Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101822069B1 (en) | 2012-05-07 | 2018-03-08 | 페어차일드코리아반도체 주식회사 | Piezo circuit, piezo driving circuit for the piezo circuit, and piezo driving method |
| JP6503764B2 (en) * | 2015-02-02 | 2019-04-24 | セイコーエプソン株式会社 | Piezoelectric element drive circuit and robot |
| CN105071693B (en) * | 2015-08-21 | 2017-05-31 | 西安空间无线电技术研究所 | A kind of supersonic motor drives match circuit and adapts to the driving method of wide temperature range |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3165701B2 (en) * | 1991-03-06 | 2001-05-14 | キヤノン株式会社 | Vibration wave motor |
| JP3883707B2 (en) * | 1998-08-28 | 2007-02-21 | 三菱電機株式会社 | Dual frequency matching circuit |
| CN100448148C (en) * | 2007-01-09 | 2008-12-31 | 南京航空航天大学 | DC zero-voltage switched full-bridged converter of diode mutual inductor clamp |
| CN100499344C (en) * | 2007-04-04 | 2009-06-10 | 南京理工大学 | Zeta type three-level AC-AC converter |
| CN201204735Y (en) * | 2008-05-28 | 2009-03-04 | 深圳雅胜电业有限公司 | Drive device for electric discharge lamp |
| KR20100045671A (en) * | 2008-10-24 | 2010-05-04 | 주식회사 필룩스 | Electric ballast |
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2011
- 2011-02-15 CN CN 201110037915 patent/CN102097972B/en not_active Expired - Fee Related
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Granted publication date: 20130619 |