CN102097149A - Tritium storage thin film electrode for radioactive isotopic voltaic effect beta battery and design of integrating same with semiconductor - Google Patents
Tritium storage thin film electrode for radioactive isotopic voltaic effect beta battery and design of integrating same with semiconductor Download PDFInfo
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- CN102097149A CN102097149A CN 201110027365 CN201110027365A CN102097149A CN 102097149 A CN102097149 A CN 102097149A CN 201110027365 CN201110027365 CN 201110027365 CN 201110027365 A CN201110027365 A CN 201110027365A CN 102097149 A CN102097149 A CN 102097149A
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Abstract
The invention discloses a novel electrode for a radioactive isotopic voltaic effect beta battery, which belongs to the field of micro power of micro electromechanical systems and the field of materials. The electrode is a tritium storage metal or tritium storage alloy thin film which is prepared on the surface of a semiconductor, forms favorable ohmic contact with the semiconductor and has conduction and tritium storage functions. Compared with the traditional electrodes, by means of the invention, the self-absorption of a tritium decay electron in the electrode can be decreased so that the conversion efficiency of the battery is improved and the usage of the tritium is saved.
Description
Technical field
The present invention relates to a kind of electrode of semiconductor devices, relate in particular to a kind of electrode of the radioactive isotope volta effect battery based on PN junction or PIN knot, belong to energy source use field and material field.
Background technology
Usually battery can be divided into chemical cell and physical battery two big classes.Chemical cell mainly contains dry cell, accumulator, fuel cell, microorganism battery etc.Physical battery mainly comprises two kinds of solar cell and radioisotope batteries.Wherein the shortcoming of chemical cell is to satisfy the demand of long-term power supply, and solar cell then can't be worked under dark condition.Radioisotope battery also is nuclear battery, is the battery that nuclear decay can be converted to electric energy.Radioisotope battery has life-span long (by radioisotopic half life period decision), reliability height, energy density advantages of higher, thus need long-term power supply and unattended occasion in Aero-Space, deep-sea, polar region etc., field extensive application prospects such as electronic product such as pacemaker, minute mechanical and electrical system, mobile phone, notebook computer.One of radioisotopic source is a nuke rubbish, the nuke rubbish problem is one of biggest obstacle of further developing of current nuclear energy in the world, can be good at utilizing these special rubbish, turn waste into wealth, it will be extremely meaningful and a be worth thing, the generating of the nuke rubbish that will be possible to use is seen on the whole, will produce huge economic benefit and social benefit widely.
The kind of radioisotope battery also is diversified, and according to the switching mechanism difference, radioisotope battery can be divided into thermal source radioisotope battery and radiation energy radioisotope battery again.The utilization of thermal source radioisotope battery be the isotopic heat energy; The ray energy that the radiation energy radioisotope battery produces when being the isotope decay that utilizes.After 2000, along with the demand of information science development, radioisotope battery mainly develops to low-power (less than 100 μ W), microminiaturization, system combination direction.Particularly along with the development of nanometer micro-processing technology, promoted the research and development and the application of micro motor-driven mechanical (MEMS) sensor widely, its application market development is very fast.According to document announcement, the U.S. reaches 11.6 hundred million dollars the demand to the MEMS sensor in 2005, and has 50% MEMS device to provide energy by minicell, and its marketable value accounts for 10% of whole market share.That is to say, U.S. only, the market price that is used for the minicell of MEMS sensor every year reaches 1.16 hundred million dollars.
The processing of sensor is in micron order even nanoscale scope, in other words, requires battery also to want microminiaturized and be incorporated in the device.Traditional chemical cell does not satisfy these requirements, and utilizes the isotope decay can be the radioisotope battery of the energy--and-radioactive isotope PN junction type volta effect battery just possesses such fusion faculty.Thereby radioactive isotope volta effect battery receives much concern as having most the novel battery of development potentiality.This battery operated principle is: the electron ray that produces when the isotope decay shines on the PN junction, because of the absorbed radiation energy produces ionization effect of radiation, in material, produce a lot of electron hole pairs, electron hole pair drifts about to P type and N type example respectively under the built in field effect of PN junction, to collect a large amount of holes in P type side, and will collect a large amount of electronics in N type side, the P electrode is connected with the N electrode and adds load, in the loop, will produce electric current, the P electrode is equivalent to the positive pole of battery, and the N electrode is equivalent to the negative pole of battery.
Radiator beta-ray commonly used has high-purity 63Ni, 90Sr, 147Pm and 3H.Very expensive and domestic being difficult to of high-purity 63Ni, 90Sr, 147Pm price obtains, tritium (3H) be obtain the easiliest in the at present known β source, the candidate material of suitable industrialization.The average decay of tritium can be 5.7KeV, and the β electron range of tritium decay is little, and the half life period is 12.3; Energy density reaches 1000mWh/g, exceeds 4 orders of magnitude than high power lithium battery energy density; Avirulence, the low pollution, safety has good bio-compatibility again, than more environmental protection such as existing lithium batteries.Therefore tritium isotope volta effect battery has broad application prospects.Document (AdvancedMaterials2005,171230-1233) reported that use gaseous state tritium is as the design of isotope source porous silicon as the semiconductor transducer, the shortcoming that adopts the gaseous state tritium is that the specific activity of tritium is low, and the battery efficiency of preparation is low, and cell package is also very difficult.Patent of invention (CN200910030430.7, CN200910030431.1) and document (AppliedPhysicsLetters200995,233112 and AppliedRadiationandIsotopes2010,682214-2217) the volta effect isotope BEC beta electric cell of Gong Buing all is isotope source 1 to be positioned over outside PN junction 3 and the electrode 2 make tritium isotope volta effect battery, as shown in Figure 1.The advantage of this mode is that technology is simple, can make on the preparation technology of conventional semiconductors, place PN junction at a distance but the weak point of the method is an isotope source, the β electron range of decay is little, self absorption effect can cause the utilization factor of β electronics greatly to reduce, so battery efficiency is extremely low.Particularly for the battery of making isotope source with tritium, the inferior position of this method is more obvious.
The maximal density of the hydrogen that can store in hydrogen storage metal or the hydrogen bearing alloy can be greater than the density of solid-state hydrogen, and some hydrogen storage metal or hydrogen-storage alloy also have good electrical conductivity.Therefore, can design the electrode that adopts storage tritium metal or storage tritium alloy to be used as radioactive isotope volta effect BEC beta electric cell.
Summary of the invention
Cause the low problem of conversion efficiency at traditional volta effect radioactive isotope BEC beta electric cell electrode absorption, the present invention is based on the fundamental property of hydrogen storage metal or hydrogen bearing alloy and the principle that forms Ohmic contact between the metal-semiconductor, proposed to store tritium film double as electrode technology scheme, shown in Fig. 2, absorption when passing through electrode film to reduce electronics improves the purpose that battery efficiency is saved the isotope source consumption thereby reach.Different with traditional simple metal electrode, the material of this novel electrode 4 is alloys that the metal of storage tritium comprises titanium tritide (Ti:3H), tritiate zirconium (Zr:3H) or storage tritium, comprises titanium tritide alloy, tritiate magnesium alloy, tritiate aluminium alloy, tritiate zircaloy, tritiate ferroalloy, tritiate rare earth alloy.Kind electrode 4 is produced on the surface of semiconductor wafer 7, and what connect PN junction or PIN knot is N+ zone or P+ zone 5, forms Ohmic contact between electrode and the semiconductor wafer with this.The thickness L of kind electrode
1Be 10nm ~ 100 μ m.The thickness L in N+ zone or P+ zone 5
2Be 10 nm ~ 700 nm.Electrode surface is to the distance L of the surface distance PN junction or the PIN knot 6 of semiconductor wafer
2Be 10 nm ~ 2 μ m.For the low conductivity that guarantees electrode and enough electron densities that decays, the specific activity that contains tritium in the tritium electrode should be 100 Ci/g ~ 3000 Ci/g.
Description of drawings
Fig. 1 has shown the structure of the radioisotope battery that traditional electrode separates with the tritium source.
Fig. 2 has shown novel to contain the tritium metal or to contain the structure that the tritium alloy is the novel isotope battery of electrode.
Wherein, 1-tritium source 2-electrode 3-PN knot or PIN knot 4-storage tritium metal or storage tritium alloy 5-P+ or N+ heavily doped region 6-PN knot or PIN knot 7-semiconductor wafer.
Embodiment
Below in conjunction with accompanying drawing 2, clear, complete explanation is carried out in enforcement of the present invention.
Embodiment
Thickness is that the titanium tritide Ti:3H film that contains of 3 μ m is used as storage tritium electrode 4.4 preparations of storage tritium electrode are outside Si semiconductor wafer 7.The specific activity of tritium is 1100 Ci/g in the electrode.What directly link to each other with electrode is that thickness is the P+ heavily doped region 5 of 10 nm.The distance of electrode 4 distance P N knot 6 is 400 nm.
Claims (3)
1. a storage tritium electrode that is used for volta effect radioactive isotope BEC beta electric cell is to store tritium metal or storage tritium alloy at one deck of semiconductor wafer surface preparation, it is characterized in that: the specific activity of tritium is 100 Ci/g ~ 3000 Ci/g in storage tritium metal electrode or the storage tritium alloy electrode, and the thickness of storage tritium metal electrode or storage tritium alloy electrode is 10 nm ~ 100 μ m; The structure of storing tritium metal electrode or storage tritium alloy electrode and semiconductor wafer integration is: storage tritium metal electrode or the direct preparation of storage tritium alloy electrode are on semi-conductive P+ heavily doped region or N+ heavily doped region surface, the surface distance PN junction that storage tritium metal electrode or storage tritium alloy electrode contact with semiconductor or the distance of PIN knot are 10 nm ~ 2 μ m, and the thickness of P+ heavily doped region or N+ heavily doped region is 10 nm ~ 700 nm.
2. a kind of storage tritium electrode that is used for the volta effect radioisotope battery according to claim 1 is characterized in that, described storage tritium metal comprise titanium tritide (Ti:
3H), the tritiate zirconium (Zr:
3H).
3. a kind of storage tritium electrode that is used for the volta effect radioisotope battery according to claim 1, it is characterized in that described storage tritium alloy comprises titanium tritide alloy, tritiate magnesium alloy, tritiate aluminium alloy, tritiate zircaloy, tritiate ferroalloy, tritiate rare earth alloy.
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102306511A (en) * | 2011-08-31 | 2012-01-04 | 北京理工大学 | Composite isotopic battery with high output energy and preparation method thereof |
| CN102446572A (en) * | 2011-12-19 | 2012-05-09 | 中国工程物理研究院核物理与化学研究所 | Tritium isotope microcell and preparation method thereof |
| CN102737747A (en) * | 2012-07-05 | 2012-10-17 | 四川大学 | Micro tritium battery and preparation method of micro tritium battery |
| CN107093486A (en) * | 2017-05-23 | 2017-08-25 | 华中科技大学 | A kind of integrated halogen perovskite nuclear battery and preparation method thereof |
| CN107767983A (en) * | 2017-09-19 | 2018-03-06 | 壹号元素（广州）科技有限公司 | A kind of tritium based nanotube isotope battery |
| CN111446019A (en) * | 2019-01-25 | 2020-07-24 | 厦门大学 | Three-dimensional nano-structure tritium photovoltaic battery |
| CN115910415A (en) * | 2022-11-07 | 2023-04-04 | 南方电网数字电网研究院有限公司 | Tritiated metal battery with long service life |
-
2011
- 2011-01-26 CN CN 201110027365 patent/CN102097149A/en active Pending
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| 《同位素》 19960229 王铁山等 同位素电池发电机制的研究与发展 第41-46页 第9卷, 第01期 * |
| 《材料导报》 20080831 胡睿等 氚在硅中的无载体加载行为 第22卷, 第08期 * |
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| 《核技术》 20090831 王关全等 PN结型器件在氚钛片辐照下电输出性能 第32卷, 第08期 * |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102306511A (en) * | 2011-08-31 | 2012-01-04 | 北京理工大学 | Composite isotopic battery with high output energy and preparation method thereof |
| CN102306511B (en) * | 2011-08-31 | 2013-07-31 | 北京理工大学 | Composite isotopic battery with high output energy and preparation method thereof |
| CN102446572A (en) * | 2011-12-19 | 2012-05-09 | 中国工程物理研究院核物理与化学研究所 | Tritium isotope microcell and preparation method thereof |
| CN102446572B (en) * | 2011-12-19 | 2014-04-02 | 中国工程物理研究院核物理与化学研究所 | Tritium isotope microcell and preparation method thereof |
| CN102737747A (en) * | 2012-07-05 | 2012-10-17 | 四川大学 | Micro tritium battery and preparation method of micro tritium battery |
| CN102737747B (en) * | 2012-07-05 | 2015-08-05 | 四川大学 | A kind of miniature tritium battery and preparation method thereof |
| CN107093486A (en) * | 2017-05-23 | 2017-08-25 | 华中科技大学 | A kind of integrated halogen perovskite nuclear battery and preparation method thereof |
| CN107093486B (en) * | 2017-05-23 | 2018-01-02 | 华中科技大学 | A kind of integrated halogen perovskite nuclear battery and preparation method thereof |
| CN107767983A (en) * | 2017-09-19 | 2018-03-06 | 壹号元素（广州）科技有限公司 | A kind of tritium based nanotube isotope battery |
| CN111446019A (en) * | 2019-01-25 | 2020-07-24 | 厦门大学 | Three-dimensional nano-structure tritium photovoltaic battery |
| CN115910415A (en) * | 2022-11-07 | 2023-04-04 | 南方电网数字电网研究院有限公司 | Tritiated metal battery with long service life |
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Application publication date: 20110615 |