CN102096377B - Method and device for inputting process parameters to dose controller - Google Patents
Method and device for inputting process parameters to dose controller Download PDFInfo
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- CN102096377B CN102096377B CN2009102418410A CN200910241841A CN102096377B CN 102096377 B CN102096377 B CN 102096377B CN 2009102418410 A CN2009102418410 A CN 2009102418410A CN 200910241841 A CN200910241841 A CN 200910241841A CN 102096377 B CN102096377 B CN 102096377B
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Abstract
The invention discloses a method and device for inputting process parameters to a dose controller, aiming to solve the problem of higher product rejection rate caused by lower accuracy of process parameters input to the dose controller due to the manual factors in the prior art. The method comprises the steps of: storing the process parameters in a process parameter storage device in a menu manner; when an input device inputs an input request for representing input of the process parameters to the dose controller, obtaining a corresponding menu from the process parameter storage device by a central processing unit according to the input request and sending a command of inputting the menu process parameters to a simulated key circuit device; and inputting the process parameters in the menu to the dose controller by the simulated key circuit device according to the command sent by the central processing unit. By adopting the technical scheme provided by the invention, the accuracy of inputting the process parameters to the dose controller is improved, therefore, the product rejection rate is reduced.
Description
Technical field
The present invention relates to the semiconductor technology design field, relate in particular to a kind of method and device of in the dosage control device, importing technological parameter.
Background technology
In the manufacture process of integrated circuit, doping process is a very important production technology program, and it is widely used in the overall process that integrated circuit is made.Mix the element of impurity, the quantity of foreign ion (being dosage) and doping depth to the product of difference in functionality and all need pass through accurate control, the product of avoiding producing can not reach designing requirement and cause the problem of product rejection.
At present, in ic manufacturing process, the doping operation mainly is to realize through ion implantation apparatus, and the dosage control device is the core component of ion implantation apparatus, is mainly used in the dosage that foreign ion is mixed in accurate control; Be illustrated in figure 1 as the structural representation of the dosage control device of domestic 6 inches used ion implantation apparatuses of integrated circuit at present; The model of this ion implantation apparatus is older; When in the integrated circuit fabrication process process, needing to inject ion; Operating personnel are according to current process stipulation; Be input to the dosage control device through manual mode at the dosage of the ion that manually the input key circuit will be to be injected and corresponding correction factor (this correction factor be used for revising on the production line between the same model board in the deviation aspect the dosage control), mix the dosage of foreign ion with control.
Though the mode that prior art inputs to the dosage control device through manual mode with ion dose and correction factor can realize accurately controlling the implantation dosage of ion to a certain extent, still also has following defective:
(1) owing to the correlation parameter through the manual input of operating personnel ion to be injected, possibly owing to the artificial origin makes mistakes, thereby the product that causes producing does not reach designing requirement and the problem of product rejection; Generally speaking; Ripe integrated circuit production line exists hundreds of dissimilar dosage, correction factor; Need dosage that operating personnel remember that each operation of every kind of product need be injected and correction factor be part very because of the thing of difficulty, and be easy to occur dosage and correction factor matching error and cause lower, the product rejection rate problem of higher of accuracy to dosage control device input data.
(2) all do not have logout in the overall process of injecting ion, occur to trace product and unusual reason occurring, thereby cause the difficult problem of malfunction elimination when unusual at follow-up if product.Production cycle like integrated circuit is about 7-30 days, and production procedure has hundreds of processes usually, in case the investigation fault appears being difficult to when unusual in product.
Above-mentioned two technical matterss are the problems that ion often faced of in the integrated circuit technology production run, injecting, and need a solution to solve the problems referred to above in a hurry.
Summary of the invention
The embodiment of the invention provides a kind of method and device of in the dosage control device, importing technological parameter, to solve in the prior art owing to accuracy lower the cause product rejection rate problem of higher of human factor to dosage control device input technological parameter.
A kind of device of in the dosage control device, importing technological parameter comprises input equipment, central processing unit equipment, technological parameter memory device and analogue-key circuit arrangement, wherein:
The technological parameter memory device is used for menu-style storage technology parameter;
Input equipment is used to import the input request of sign to dosage control device input technological parameter, and this input asks to carry the identification information of the menu that remains to be imported technological parameter;
Central processing unit equipment is used for obtaining and identifying corresponding menu from said technological parameter memory device according to said identification information, sends the instruction of input technological parameter to said analogue-key circuit arrangement;
The analogue-key circuit arrangement is used for importing to the dosage control device according to said instruction the technological parameter of said menu.
A kind of method that adopts said apparatus in the dosage control device, to import technological parameter with the stored in form technological parameter of menu, may further comprise the steps in the technological parameter memory device:
Input equipment input characterizes the input request to dosage control device input technological parameter, and this input asks to carry the identification information of the menu that remains to be imported technological parameter;
Central processing unit equipment is according to the identification information of said input equipment input, from said technological parameter memory device, obtains and identifies corresponding menu, and send the instruction of importing technological parameter to said analogue-key circuit arrangement;
The analogue-key circuit arrangement is used for the instruction according to said central processing unit equipment transmission, imports the technological parameter in the said menu to the dosage control device.
In the embodiment of the invention; In the technological parameter memory device with the stored in form technological parameter of menu, when the input equipment input characterizes input request to dosage control device input technological parameter (this input asks to carry the identification information of the menu that remains to be imported technological parameter); Central processing unit equipment is according to the identification information of said input equipment input, from said technological parameter memory device, obtains and identifies corresponding menu, and send the instruction of importing technological parameter to said analogue-key circuit arrangement; The analogue-key circuit arrangement is used for the instruction according to said central processing unit equipment transmission, imports the technological parameter in the said menu to the dosage control device.Adopt technical scheme of the present invention; When needs are imported technological parameter in the dosage control device; Technological parameter is inputed in the dosage control device through analogue-key equipment by central processing unit equipment, overcome prior art and then caused product rejection rate problem of higher because human factor causes importing the technological parameter accuracy than hanging down to dosage control device input technological parameter through manual work.
Description of drawings
Fig. 1 is the structural representation of realizing in the embodiment of the invention to the system of dosage control device input technological parameter;
Fig. 2 adopts system as shown in Figure 1 method flow diagram to dosage control device input data in the embodiment of the invention;
The method flow diagram to the concrete implementation of dosage control device input technological parameter of Fig. 3 for providing in the embodiment of the invention.
Embodiment
Below in conjunction with Figure of description the embodiment of the invention is carried out detailed description.
Referring to Fig. 1; For realizing structural representation in the embodiment of the invention to the system of dosage control device input technological parameter; This structure comprises dosage control device 1 and dosage control management devices 2, and wherein, dosage control device 1 comprises manual input key circuit 11 and controller reset circuit 12; Dosage control management devices 2 comprises central processing unit equipment 21, display device 22, technological parameter memory device 23, logout memory device 24, clock adjustment module 25, input equipment 26, analogue-key circuit arrangement 27, button feedback circuit 28 and synchronous reset circuit 29; Wherein analogue-key circuit arrangement 27, button feedback circuit 28 and synchronous reset circuit 29 are formed dosage control device interface circuit; This interface circuit is used for carrying out information interaction with dosage control device 1, to accomplish to dosage control device 1 input technological parameter the dosage and the correction factor thereof of ion (as mix); Wherein:
Central processing unit equipment 21 is used for each equipment of whole dosage control management devices 2 is controlled, and like the information of reception input equipment 26 inputs, and controls other equipment according to input information and operates accordingly.
Technological parameter memory device 23; Link to each other with central processing unit equipment 21; Be used to receive after the steering order of central processing unit equipment 21; Pass through the technological parameter (like dosage and correction factor) of input equipment 26 inputs with the stored in form operating personnel of menu; This technological parameter memory device 23 can adopt the comparatively conventional storage chip of jumbo EEPROM (Electrically Erasable Programmable Read-Only Memory, EEPROM) chip or other to realize.
Clock adjustment module 25; Be connected with central processing unit equipment 21; Be used to dosage control management devices 2 real-time time accurately is provided, and after the time adjustment instruction that receives central processing unit equipment 21, according to the time information renovation time of input equipment 26 inputs.
Analogue-key circuit arrangement 27; Be electrically connected with manual input key circuit 11; And link to each other with central processing unit equipment 21; Be used for after receiving the information input instruction of central processing unit equipment 21, simulate artificial button process technological parameter is inputed in the manual input key circuit 11 of dosage control device 1.
Button feedback circuit 28 is connected with manual input key circuit 11 with central processing unit equipment 21 respectively, is used for monitoring analogue-key circuit arrangement 27 and whether successfully technological parameter to be imported is inputed to manual input key circuit 11.
Synchronous reset circuit 29; Be electrically connected with the controller reset circuit 12 in the dosage control device 1; And be connected with central processing unit equipment 21, be used to detect the reset signal of controller reset circuit 12, and dosage control management devices 2 and dosage control device 1 accomplished synchronous reset according to this reset signal.
For clearer description technical scheme of the present invention, with a concrete method flow technical scheme of the present invention is carried out detailed description below, this method flow is as shown in Figure 2.
Referring to Fig. 2, for adopting the method flow diagram of system as shown in Figure 1 to dosage control device input technological parameter in the embodiment of the invention, technological parameter memory device 23 is with the stored in form technological parameter of menu, and the method comprising the steps of:
Preferably; For the 11 input technological parameters of the manual input key circuit in dosage control device 1 that better guarantee 28 successes of analogue-key equipment; To guarantee normally carrying out of technological process; Central processing unit equipment 21 through analogue-key equipment 28 in the process of the manual input key circuit 11 of dosage control device 1 to analogue-key equipment 28 input high level signals (or low level signal); This high level signal (or low level signal) is through being back to central processing unit equipment 21 after manual input key circuit 11, the button feedback circuit 28, and above-mentioned flow process also comprises:
Whether forward direction analogue-key equipment 28 input high level signals (or low level signal) are consistent with it for the signal that step 204, central processing unit equipment 21 return button feedback circuit 28; When inconsistent; When confirming input technological parameter in dosage control device 1 that this analogue-key equipment 28 fails; Central processing unit equipment 21 starts heavy input mechanism; Again import technological parameter through analogue-key circuit arrangement 27 to dosage control device 1, to guarantee real-time and accuracy to dosage control device 1 input technological parameter.
Preferably, in order to realize real-time tracking logout, for the consequent malfunction investigation provides foundation, above-mentioned flow process is further comprising the steps of:
In this step; The invoked zero-time of menu is set to analogue-key equipment 28 is successfully successfully imported time from technological parameter to dosage control device 1; The menu termination time is set to the invoked zero-time of next menu, and promptly the invoked zero-time of next menu is identical with the invoked termination time of this menu.
Preferably; For guaranteeing the logout accuracy in time of logout memory device 24 records; The embodiment of the invention also provides system time adjustment operation; This operation can be execution before step 201, also can be before the arbitrary steps before the step 205, to accomplish, when this operation is adjusted request according to the user through the time of input equipment 26 inputs through central processing unit equipment 21 (change in the time adjustment request and carry correct time information); To clock adjustment module 25 tranmitting data registers adjustment instruction, adjust the time information renovation time in the request according to the time that receives by central processing unit equipment 21 with telltable clock adjustment module 25.
Preferably, for guaranteeing canned data in the real-time renewal technological parameter memory device 23, the embodiment of the invention provides menu editing interface for the user, upgrades with the information in the technological parameter memory device 23 that the handled easily personnel are real-time; Further; For better guaranteeing the security of the menu information of storage in the technological parameter memory device 23; To avoid the not operation personnel owing to the technological parameter in the deletion of human factor mistake, increase or the modification menu; The embodiment of the invention also provides user login operation, only allows the user who has the menu editing authority after logining successfully, to get into menu editing interface, to accomplish the information in the technological parameter memory device 23 is upgraded.
Be that example is carried out detailed description to technical scheme of the present invention with dosage and the correction factor that mixes ion to 1 input of dosage control device below, this flow process is as shown in Figure 3.
Referring to Fig. 3; Be the method flow diagram that provides in the embodiment of the invention to the concrete implementation of dosage control device input technological parameter; When the user selects request through input equipment 26 input menus; Then carry out following steps 331～335, and when as required the dosage of the menu of choosing and correction factor being input to dosage control device 1, also execution in step 351～354; When the input menu edit requests, then execution in step 371～374; When the input user login information was revised request, then execution in step 341～347; When the input system time, adjustment was asked, then execution in step 361～364; This flow process may further comprise the steps:
In this step; Input equipment 26 is common PS/2 keyboard; The user can select request through button F1 input menu, through button F2 input menu edit requests, revises request through button F3 input user login information; Adjust request through the button F9 input system time, and through the request of button F12 input to dosage control device 1 input dosage and correction factor.
In this step, when the input information menu that receives when central processing unit equipment 21 is selected request, then start and carry out following steps 331～335; When the input information that receives when central processing unit equipment 21 is the menu editing request, then start and execution in step 371～374; The input information that receives when central processing unit equipment 21 is a user login information when revising request, then starts and execution in step 341～347; The input information that receives when central processing unit equipment 21 is when dosage control device 1 is imported the request of dosage and correction factor, then starts and execution in step 351～354; When the input information that receives when central processing unit equipment 21 is system time adjustment request, then start and execution in step 361～364.
The interface is selected at the display interface display menu in step 331～335, central processing unit equipment 21 indicated number equipment 22, and prompting user input waits to choose the identification information (like pad name, ID number etc.) of menu; Identification information according to the menu that receives carries out match query in technological parameter memory device 23; When matching this when waiting to choose menu; Read the dosage and the correction factor of this menu; And on the interface, show dosage and the correction factor of waiting to choose menu, if can not in technological parameter memory device 23, inquire this menu to be chosen, the menu that then is back to the menu pick interface and points out the user to choose does not exist.
Step 361～364, central processing unit equipment 21 indicated number equipment 22 show the time editing interface at display interface; And the prompting user imports the new time; Again to time adjustment module 25 transmitting times adjustment instruction, with update time time that instruction time, adjusting module 25 was imported according to the user.
Step 371～374, central processing unit equipment 21 indicated number equipment 22 are at display interface display menu editor login interface, and the prompting user inputs user login information (comprising user name, password); The log-on message of 21 pairs of user's inputs of central processing unit equipment is verified; Indicated number equipment 22 is at display interface display menu editing interface after verifying successfully, and the menu identity and the corresponding dosage and the correction factor thereof of user's input is saved in the technological parameter memory device 23.
Also comprise step 3740～3749 in the above-mentioned steps 374, wherein:
In this step, the user can be through the defeated request like the edit menu title of the button F4 of input equipment 26; After central processing unit equipment 21 received the request of this edit menu title, indicated number equipment 22 was at display interface display menu name edit box.
In this step, the user can pass through the request of the button F5 input editing dosage of input equipment 26; After central processing unit equipment 21 received this editor's dose request, indicated number equipment 22 was at display interface show dose edit box.
In this step, the user can pass through the request of the button F6 input editing correction factor of input equipment 26; Central processing unit equipment 21 receives after the request of editor's correction factor, and indicated number equipment 22 shows the correction factor edit box at display interface.
Turn on the menu of step 3747～3748, user input or under turn over request; Central processing unit stores module indicated number equipment 22 will go up one or next menu be presented in display interface with editable form.
When step 3749, user input were levied the menu editing ending message, central processing unit stores module 21 was edited the user in information stores to the technological parameter memory device 23 of the menu of being edited in this time.
In this step, the user can characterize the information that menu editing finishes through the button F10 input of input equipment 26; When central processing unit equipment 21 receives the information of this sign menu editing end, the menu information behind the editor is stored in the technological parameter memory device 23.
Adopt technical scheme of the present invention; Owing in the technological parameter memory device, with the stored in form of menu technological parameter is arranged in advance; When input equipment input characterizes input request to dosage control device input technological parameter (this input asks to carry the identification information of the menu that remains to be imported technological parameter); Central processing unit equipment is according to the input request of input equipment input; From the technological parameter memory device, obtain and identify corresponding menu, and send the instruction of input technological parameter to the analogue-key circuit arrangement; The technological parameter of instruction in this menu of dosage control device input that the analogue-key circuit arrangement sends according to central processing unit equipment again; Therefore; Adopt technical scheme of the present invention can the technological parameter in this menu be inputed in the dosage control device through the menu in the calling technological parameter memory device; Need need import to have overcome at every turn that corresponding technological parameter causes because human factor input technological parameter mistake causes the product rejection rate problem of higher of producing then when the dosage control device input technological parameter through the mode of manual work; In addition; In the technical scheme of the present invention; At analogue-key equipment after dosage control device input technological parameter; Information such as the invoked zero-time of central processing unit device start logout storage device records menu, termination time and pad name, thus for the follow-up malfunction elimination that carries out foundation is provided, orient failure cause more fast and effectively.
Obviously, those skilled in the art can carry out various changes and modification to the present invention and not break away from the spirit and scope of the present invention.Like this, belong within the scope of claim of the present invention and equivalent technologies thereof if of the present invention these are revised with modification, then the present invention also is intended to comprise these changes and modification interior.
Claims (8)
1. the device of an input technological parameter in the dosage control device is characterized in that, comprises input equipment, central processing unit equipment, technological parameter memory device and analogue-key circuit arrangement, wherein:
The technological parameter memory device is used for menu-style storage technology parameter;
Input equipment is used to import the input request of sign to dosage control device input technological parameter, and this input asks to carry the identification information of the menu that remains to be imported technological parameter;
Central processing unit equipment is used for obtaining and identifying corresponding menu from said technological parameter memory device according to said identification information, sends the instruction of input technological parameter to said analogue-key circuit arrangement;
The analogue-key circuit arrangement is used for importing to the dosage control device according to said instruction the technological parameter of said menu;
Also comprise the logout memory device;
Said central processing unit equipment is further used for, and after said dosage control device input technological parameter, starts the logout memory device;
The logout memory device is used to write down the identification information of the invoked zero-time of said menu, stand-by time and this menu.
2. device as claimed in claim 1 is characterized in that, also comprises the time adjustment module;
Said input equipment is further used for, and input time, the adjustment request carried temporal information in this request;
Said central processing unit equipment is further used for, and to said time adjustment module transmitting time adjustment instruction, according to said time adjusts the temporal information adjustment time of in request carrying to indicate said time adjustment module according to said time adjustment request;
The time adjustment module is used for the temporal information adjustment time of carrying according to said time adjustment request.
3. device as claimed in claim 1 is characterized in that, also comprises the button feedback circuit, wherein:
Whether the button feedback circuit is used to detect said central processing unit equipment successfully to said dosage control device input technological parameter; If not, then send technological parameter transmission failure notification message to said central processing unit equipment;
Said central processing unit equipment is further used for, after receiving said failure notification message, again to said dosage control device input technological parameter.
4. device as claimed in claim 1 is characterized in that, also comprises the synchronous reset circuit, wherein:
The synchronous reset circuit is used to detect the reset signal of the controller reset circuit of said dosage control device, characterizes when resetting in said reset signal, accomplishes the synchronous reset between said device and the said dosage control device according to said reset signal.
5. the method that input technological parameter in the dosage control device is installed in employing according to claim 1 is characterized in that, in the technological parameter memory device, with the stored in form technological parameter of menu, may further comprise the steps:
Input equipment input characterizes the input request to dosage control device input technological parameter, and this input asks to carry the identification information of the menu that remains to be imported technological parameter;
Central processing unit equipment is according to the identification information of said input equipment input, from said technological parameter memory device, obtains and identifies corresponding menu, and send the instruction of importing technological parameter to said analogue-key circuit arrangement;
The analogue-key circuit arrangement is used for the instruction according to said central processing unit equipment transmission, imports the technological parameter in the said menu to the dosage control device;
Said central processing unit equipment at said analogue-key circuit arrangement after said dosage control device input technological parameter, said central processing unit device start logout memory device;
The identification information of the invoked zero-time of the said menu of logout storage device records, stand-by time and this menu.
6. method as claimed in claim 5 is characterized in that, said input equipment is before said central processing unit device start logout memory device, and input time, the adjustment request carried temporal information in this request;
Said central processing unit equipment is adjusted instruction according to the time adjustment request of said input equipment input to time adjustment module transmitting time;
The time adjustment module is used for after the time adjustment instruction that receives said central processing unit equipment transmission, adjusting the time according to the temporal information of carrying in the said time adjustment request.
7. method as claimed in claim 5 is characterized in that,, after said dosage control device input technological parameter, also comprises at said analogue-key equipment:
Whether the button feedback circuit detects said central processing unit equipment successfully to said dosage control device input technological parameter; If not, then send technological parameter transmission failure notification message to said central processing unit equipment;
Said central processing unit equipment is after receiving said failure notification message, again to said dosage control device input technological parameter.
8. method as claimed in claim 5 is characterized in that said device also comprises the synchronous reset circuit;
The reset signal of the controller reset circuit of the said dosage control device of said synchronous reset electric circuit inspection when said reset signal sign resets, is accomplished the synchronous reset between said device and the said dosage control device according to said reset signal.
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| CN2009102418410A CN102096377B (en) | 2009-12-10 | 2009-12-10 | Method and device for inputting process parameters to dose controller |
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| CN2009102418410A CN102096377B (en) | 2009-12-10 | 2009-12-10 | Method and device for inputting process parameters to dose controller |
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| CN102243138A (en) * | 2011-08-05 | 2011-11-16 | 中国科学院光电技术研究所 | Focal plane detection device for projection lithography |
| CN106325910B (en) * | 2015-07-02 | 2019-09-24 | 无锡华润华晶微电子有限公司 | A kind of program card and process acquisition methods |
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| CN1445662A (en) * | 2002-03-14 | 2003-10-01 | 旺宏电子股份有限公司 | System and method for automatic presetting technological parameters for ion implantation machine set |
| US7041990B2 (en) * | 2001-06-29 | 2006-05-09 | Samsung Electronics Co., Ltd. | Apparatus for monitoring ion-implantation input parameter in semiconductor fabricating devices and monitoring method thereof |
| CN101087118A (en) * | 2006-06-06 | 2007-12-12 | 上海伙伴科技发展有限公司 | A device and method for setting parameters of DC brushless electromotor speed-adjuster |
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| US7041990B2 (en) * | 2001-06-29 | 2006-05-09 | Samsung Electronics Co., Ltd. | Apparatus for monitoring ion-implantation input parameter in semiconductor fabricating devices and monitoring method thereof |
| CN1445662A (en) * | 2002-03-14 | 2003-10-01 | 旺宏电子股份有限公司 | System and method for automatic presetting technological parameters for ion implantation machine set |
| CN101087118A (en) * | 2006-06-06 | 2007-12-12 | 上海伙伴科技发展有限公司 | A device and method for setting parameters of DC brushless electromotor speed-adjuster |
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Effective date of registration: 20220718 Address after: 518116 founder Microelectronics Industrial Park, No. 5, Baolong seventh Road, Baolong Industrial City, Longgang District, Shenzhen, Guangdong Province Patentee after: SHENZHEN FOUNDER MICROELECTRONICS Co.,Ltd. Address before: 100871, Beijing, Haidian District Cheng Fu Road 298, founder building, 9 floor Patentee before: PEKING UNIVERSITY FOUNDER GROUP Co.,Ltd. Patentee before: SHENZHEN FOUNDER MICROELECTRONICS Co.,Ltd. |