CN102082396A - Off-axis spectrum beam combination device of laser diode array - Google Patents
Off-axis spectrum beam combination device of laser diode array Download PDFInfo
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- CN102082396A CN102082396A CN 201010598464 CN201010598464A CN102082396A CN 102082396 A CN102082396 A CN 102082396A CN 201010598464 CN201010598464 CN 201010598464 CN 201010598464 A CN201010598464 A CN 201010598464A CN 102082396 A CN102082396 A CN 102082396A
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Abstract
The invention relates to an off-axis spectrum beam combination device of a laser diode array, which comprises a laser diode array and a fast axis collimation lens, wherein the rear side of the fast axis collimation lens is provided with a first lens, a second lens and a high-reflection mirror are sequentially arranged above the rear of the first lens, and rear end faces of the high-reflection mirror and the second lens as well as the first lens and the diode array form an off-axis outer feedback cavity; a diffraction grating is arranged below the rear of the first lens, an output coupling mirror is arranged between the diffraction grating and the first lens, a spectrum beam combination structure is formed among the output coupling mirror and the diffraction grating as well as the first lens; and light rays emitted upwards by the laser diode array are subjected to divergence-angle compression through the first lens and the second lens and then projected on the high-reflection mirror, light rays parallel to the high-reflection mirror are reflected to the fast axis collimation lens, light rays emitted downwards by the laser diode array irradiate to the diffraction grating through the lower part of the first lens, and are processed through the output coupling mirror after being diffracted by the diffraction grating, part of the light rays are fed back to an active region of the diode array along the original path, and part of the light rays are output used as laser. The off-axis spectrum beam combination device has a simple and compact structure, can improve the beam quality of the two-dimensional laser diode array and is safe and reliable.
Description
Technical field
The present invention relates to a kind of spectrum beam combination device, especially a kind of diode laser matrix from axle spectrum beam combination device.
Background technology
High power laser diode array has advantages such as efficient height, compact conformation, long service life, has therefore obtained in a lot of fields using widely, for example fields (Opt. Express 12,609) such as industry, military affairs, medical treatment.Yet the beam quality of diode array slow-axis direction is poor, be about 1000 times diffraction limit (Opt. Lett. 21,375-377).This has restricted High power laser diode array application in many aspects, as the application in fields such as pumping solid or fiber laser.Spectrum beam combination technology (Opt. Lett. 30,2104-2106; Appl.Phys.B 83 225-228) also be a kind of efficient and simple method of improving the diode array beam quality; Its core concept is exactly to sacrifice the width of spectrum, to improve beam quality.The method that another kind improves the diode array beam quality is from axle exocoel feedback technique (Opt. Lett. 29,361-363), adopted a stripe-shape plane mirror as feedback element, by changing the inclination angle of stripe-shape plane mirror, optimize best feedback angle, thereby obtain the laser output of good beam quality.At present, mainly be the beam quality that is used to improve the one dimension laser array from axle spectrum beam combination device, and the power of one dimension diode laser matrix output laser is lower, has limited the application in the actual production.
Summary of the invention
The objective of the invention is to overcome the deficiencies in the prior art, provide a kind of diode laser matrix from axle spectrum beam combination device, it is simple and compact for structure, can improve the beam quality of two-dimensional laser diode array, and is safe and reliable.
According to technical scheme provided by the invention, described diode laser matrix from axle spectrum beam combination device, comprise diode laser matrix and be positioned at fast axis collimation mirror on the described diode laser matrix quick shaft direction; Feature is: described fast axis collimation mirror is provided with first lens corresponding to the opposite side that links to each other with diode laser matrix, the back upper place of described first lens is provided with second lens and high reflective mirror successively, and the described high reflective mirror and second lens and first lens and diode laser matrix rear end face form from axle external feedback chamber; The back lower place of first lens is provided with diffraction grating, is provided with output coupling mirror between the described diffraction grating and first lens, forms spectrum beam combination structure between described output coupling mirror and diffraction grating and first lens; The light that diode laser matrix upwards sends through first lens and second lens to angle of divergence compression after, feed back to by high reflective mirror in the active area of described diode laser matrix, the light that sends downwards is through the bottom of first lens directive diffraction grating, feed back to along former road in the active area of described diode laser matrix by output coupling mirror part light after the diffraction grating diffraction selects light, part is as output laser.
Described diode laser matrix comprises one dimension diode laser matrix or the two-dimensional laser diode array that is formed by at least two one dimension diode laser matrixs.
Described one dimension diode laser matrix comprises 19 or 49 LD luminescence units.
Described fast axis collimation mirror is the cylindrical mirror of focal length less than 1mm.
Be provided with the spatial filter that is used for modeling between described first lens and second lens.
Described diffraction grating is a balzed grating.
Described first lens and second lens are cylindrical mirror; The focal length of described second lens is 2 ~ 8 times of first lens.
Described high reflective mirror is to be coated with the plane mirror that increases anti-film; The reflectivity of described high reflective mirror is greater than 99%.
Described output coupling mirror is the level crossing of part transmission.
Advantage of the present invention: the fast axis collimation mirror is positioned on the quick shaft direction of diode laser matrix, the rear end face of first lens, second lens and high reflective mirror and diode array forms from axle external feedback chamber, can improve the beam quality of each luminescence unit in the diode laser matrix, form spectrum beam combination structure between first lens and diffraction grating, output coupling mirror, can improve the output beam quality of diode laser matrix, simple in structure, improved the range of application of diode laser matrix, safe and reliable.
Description of drawings
Fig. 1 is a structural representation of the present invention.
Fig. 2 is the structural representation of diode laser matrix of the present invention.
Fig. 3 is the vertical view of Fig. 2.
Embodiment
The invention will be further described below in conjunction with concrete drawings and Examples.
As Fig. 1 ~ shown in Figure 3: the present invention includes diode laser matrix 1, fast axis collimation mirror 2, first lens 3, second lens 4, high reflective mirror 5, diffraction grating 6, output coupling mirror 7, spatial filter 8, two-dimensional laser diode array 9 and one dimension diode laser matrix 10.
As shown in Figure 1: fast axis collimation mirror 2 is installed on the quick shaft direction of described diode laser matrix 1, and described fast axis collimation mirror 2 is the cylindrical mirror of focal length less than 1mm; The light that the quick shaft direction of 2 pairs of diode laser matrixs 1 of fast axis collimation mirror sends collimates; Wherein, the x direction of principal axis is a slow-axis direction among the figure, and the y direction of principal axis is a quick shaft direction.Fast axis collimation mirror 2 can be collimated to diffraction limit with quick shaft direction, is approximately the angle of divergence about 1 degree.The structural representation of diode laser matrix 1, as shown in Figures 2 and 3; Diode laser matrix 1 can be one dimension diode laser matrix 10, perhaps by the two-dimensional laser diode array 9 that constitutes of at least two one dimension diode laser matrixs 9.Each one dimension diode laser matrix 10 be by 19 or 49 independently the laser light diode constitute, 19 or 49 independently diode arrange to form one-dimensional array along the x direction of principal axis; A plurality of one dimension diode laser matrixs 10 form two-dimensional laser diode array 9 along the y direction of principal axis.
Described fast axis collimation mirror 2 is fixed in the output of diode laser matrix 1, fast axis collimation mirror back is provided with first lens 3, the back upper place of described first lens 3 is provided with second lens 4,4 on described first lens 3 and second lens form beam-expanding system, can compress the angle of divergence that diode laser matrix 1 upwards emits beam.Second lens 4 are provided with high reflective mirror 5 corresponding to the opposite side that links to each other with first lens 3, and described high reflective mirror 5 is for to be coated with the plane mirror that increases anti-film, and the reflectivity of high reflective mirror 5 is higher than 99%; High reflective mirror 5 feeds back to diode laser matrix 1 in the active area of each luminescence unit in the diode laser matrix 1 along former road along the light that special angle upwards sends.First lens 3 and second lens 4 are the post lens, and the focal length of second lens 4 is 2 ~ 8 times of first lens, 3 focal lengths.First lens 3 and 4 on second lens are provided with spatial filter 8, and described spatial filter 8 is size and position adjustable hole or seam, are used for diode laser matrix 1 output zlasing mode is carried out further modeling.
The back lower place of first lens 3 is provided with diffraction grating 6, and described diffraction grating 6 is a balzed grating; Diffraction grating 6 and 3 on first lens are provided with output coupling mirror 7, and described output coupling mirror 7 is the level crossing of part transmission; Output laser will be from output coupling mirror 7 outputs.
The rami posterior superior road of first lens 3 utilizes the reflection of high reflective mirror 5 as a feedback, and described high reflective mirror 5 forms resonant cavity, i.e. an exocoel with diode laser matrix 1 rear end face; Therefore high reflective mirror 5 forms from the axle feedback cavity not on optical axis.For each luminescence unit in the diode laser matrix 1, under free operating condition, the slow-axis direction of diode (y direction) generally all can have tens side forms in vibration, so beam quality is relatively poor.The far-field distribution of each mould all is a bivalve structure, the lateral space mould of different rank, and its space radiation angle difference, the space radiation angle of formula (1) expression m rank mould, wherein,
The width of expression luminescence unit on slow-axis direction,
The expression wave number.
Because the spatial mode of different rank, the radiation angle difference therefore can be by regulating the inclination angle of high reflective mirror 5, select a lobe of certain spatial mode, it is fed back in the active area of each luminescence unit of diode laser matrix 1, make it continue vibration and amplify, another lobe is done laser output.According to the theory of mode competition, the mode oscillation that obtains feeding back has been reinforced, and other pattern has been suppressed effectively, and the spatial model quantity of exporting laser has like this just reduced a lot, and the beam quality of output will improve.Because the last branch road of first lens 3 utilizes high reflective mirror 5 as public feedback mirror, therefore it is similar substantially that each luminescence unit feeds back the direction at space radiation angle of mould, the directivity of last like this all luminescence unit output laser just becomes relatively good, and beam quality has had a big raising.
The rami posterior inferior road of first lens 3 is spectrum beam combination structures, and it has comprised first lens 3, diffraction grating 6 and output coupling mirror 7.Output coupling mirror 7 is level crossings of a part transmission.Diode laser matrix 1 and diffraction grating 6 are placed on the front focal plane and the back focal plane of first lens 3 respectively, and first lens 3 are made a transform lens.The luminescence unit output laser of diode laser matrix 1 diverse location is got on the diffraction grating 6 with different incidence angles through first lens, 3 backs, behind diffraction grating 6 diffraction, got on the output coupling mirror 7, because output coupling mirror 7 is the level crossing of part transmission, so partly can return with the light of output coupling mirror 7 normal parallels in the diffraction light along former road.The laser of different luminescence unit outputs incides the incidence angle difference of diffraction grating 6 in the diode laser matrix 1, make the normal parallel of diffraction light and output coupling mirror 7, be that the diffraction light direction is identical, then the light wavelength of coming out along the normal direction diffraction of output coupling mirror 7 is different, is different so each luminescence unit obtains feeding back wavelength.Because output coupling mirror 7 is as the common feedback of part laser, so the laser of diode laser matrix 1 all passes through all coaxial propagation behind the output coupling mirror 7.Like this, the beam quality of the laser direction of all unit outputs and single luminescence unit output laser is similar; Therefore beam quality has had a big raising.
As shown in Figure 1: the light that diode laser matrix 1 sends at first through a fast axis collimation mirror 2, collimates to quick shaft direction.Be divided into upper and lower two branch roads at slow-axis direction by first lens 3 at laser diode 1, got on the high reflective mirror 5 behind the beam-expanding system of the light of last branch road through first lens 3 and 4 formation of second lens.By regulating the inclination angle of high reflective mirror 5, select a lobe of certain spatial mode, it is fed back to diode laser matrix 1 place, make it continue vibration and amplify, another lobe carries out the spectrum beam combination by the following branch road of first lens 3.
For following branch road, the luminescence unit output laser of diode laser matrix 1 diverse location is got on the diffraction grating 6 with different incidence angles through lens 3 backs, through behind the optical grating diffraction, got on the output coupling mirror 7, return along former road with the normal parallel light major part of output coupling mirror 7 in the diffraction light and feed back, another part light transmission output coupling mirror 7 is done laser output.Output coupling mirror 7 is as public feedback mirror, so the laser of all luminescence units outputs all passes through all coaxial propagation behind the output coupling mirror 7, and the laser of all unit outputs is similar with the beam quality that single luminescence unit is exported laser, has improved beam quality.
The present invention will combine from axle feedback external cavity principle and spectrum beam combination principle, improve the output beam quality of diode laser matrix 1; The present invention not only can improve one dimension diode laser matrix 10(Laser diode bar effectively) beam quality, but also can improve two-dimensional laser diode array 9(Laser diode stack) beam quality.Spectrum beam combination technology can be improved to the output beam quality of diode laser matrix suitable with single luminescence unit beam quality, and can improve each luminescence unit beam quality from axle feedback external cavity device, therefore these two kinds of methods are combined and will further improve the beam quality of diode laser matrix.
Claims (9)
- A diode laser matrix from axle spectrum beam combination device, comprise diode laser matrix (1) and be positioned at fast axis collimation mirror (2) on described diode laser matrix (1) quick shaft direction; It is characterized in that: described fast axis collimation mirror (2) is provided with first lens (3) corresponding to the opposite side that links to each other with diode laser matrix (1), the back upper place of described first lens (3) is provided with second lens (4) and high reflective mirror (5) successively, and described high reflective mirror (5) and second lens (4) and first lens (3) and diode laser matrix rear end face form from axle external feedback chamber; The back lower place of first lens (3) is provided with diffraction grating (6), be provided with output coupling mirror (7) between described diffraction grating (6) and first lens (3), form spectrum beam combination structure between described output coupling mirror (7) and diffraction grating (6) and first lens (3); After the light that diode laser matrix (1) upwards sends compresses the angle of divergence through first lens (3) and second lens (4), feed back in the active area of described diode laser matrix (1) by high reflective mirror (5), the light that sends downwards is through the bottom of first lens (3) directive diffraction grating (6), feed back to along former road in the active area of described diode laser matrix (1) by output coupling mirror (7) part light after diffraction grating (6) diffraction selects light, part is as output laser.
- Diode laser matrix according to claim 1 from axle spectrum beam combination device, it is characterized in that: described diode laser matrix (1) comprises one dimension diode laser matrix or the two-dimensional laser diode array that is formed by at least two one dimension diode laser matrixs.
- Diode laser matrix according to claim 2 from axle spectrum beam combination device, it is characterized in that: described one dimension diode laser matrix comprises 19 or 49 LD luminescence units.
- Diode laser matrix according to claim 1 from axle spectrum beam combination device, it is characterized in that: described fast axis collimation mirror (2) for focal length less than the cylindrical mirror of 1mm.
- Diode laser matrix according to claim 1 from axle spectrum beam combination device, it is characterized in that: be provided with the spatial filter (8) that is used for modeling between described first lens (3) and second lens (4).
- Diode laser matrix according to claim 1 from axle spectrum beam combination device, it is characterized in that: described diffraction grating (6) is a balzed grating.
- Diode laser matrix according to claim 1 from axle spectrum beam combination device, it is characterized in that: described first lens (3) and second lens (4) are cylindrical mirror; The focal length of described second lens (4) is 2 ~ 8 times of first lens (3).
- Diode laser matrix according to claim 1 from axle spectrum beam combination device, it is characterized in that: described high reflective mirror (5) is for being coated with the plane mirror that increases anti-film; The reflectivity of described high reflective mirror (5) is greater than 99%.
- Diode laser matrix according to claim 1 from axle spectrum beam combination device, it is characterized in that: described output coupling mirror (7) is the level crossing of part transmission.
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| CN 201010598464 CN102082396A (en) | 2010-12-21 | 2010-12-21 | Off-axis spectrum beam combination device of laser diode array |
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| CN 201010598464 CN102082396A (en) | 2010-12-21 | 2010-12-21 | Off-axis spectrum beam combination device of laser diode array |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102437509A (en) * | 2011-12-14 | 2012-05-02 | 江南大学 | Device for improving coherence of high-power laser diode array |
| CN103199439A (en) * | 2013-03-26 | 2013-07-10 | 温州泛波激光有限公司 | Semiconductor laser device |
| CN104269742A (en) * | 2014-10-10 | 2015-01-07 | 江南大学 | High-power high-laser-beam-quality multi-array beam combining laser device |
| CN106338836A (en) * | 2016-10-25 | 2017-01-18 | 湖北航天技术研究院总体设计所 | Fiber laser asymmetric compensation spectral synthesizing device |
| CN109273982A (en) * | 2018-11-09 | 2019-01-25 | 中国科学院长春光学精密机械与物理研究所 | Semicondcutor laser unit |
| WO2020078197A1 (en) * | 2018-10-15 | 2020-04-23 | 中国科学院理化技术研究所 | Semiconductor laser |
Citations (1)
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| CN2924866Y (en) * | 2006-03-31 | 2007-07-18 | 中国科学院上海光学精密机械研究所 | Laser diode array double-feedback external cavity laser |
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2010
- 2010-12-21 CN CN 201010598464 patent/CN102082396A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN2924866Y (en) * | 2006-03-31 | 2007-07-18 | 中国科学院上海光学精密机械研究所 | Laser diode array double-feedback external cavity laser |
Non-Patent Citations (4)
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| 《APPLIED OPTICS》 20060520 Andreas Jechow et al High cw power using an external cavity for spectral beam combining of diode laser-bar emission 3545-3547 1-9 第45卷, 第15期 2 * |
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| 《OPTICS LETTERS》 20000315 V. Daneu et al Spectral beam combining of a broad-stripe diode laser array in an external cavity 1-9 第25卷, 第6期 2 * |
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Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102437509A (en) * | 2011-12-14 | 2012-05-02 | 江南大学 | Device for improving coherence of high-power laser diode array |
| CN103199439A (en) * | 2013-03-26 | 2013-07-10 | 温州泛波激光有限公司 | Semiconductor laser device |
| CN103199439B (en) * | 2013-03-26 | 2015-06-10 | 温州泛波激光有限公司 | Semiconductor laser device |
| CN104269742A (en) * | 2014-10-10 | 2015-01-07 | 江南大学 | High-power high-laser-beam-quality multi-array beam combining laser device |
| CN106338836A (en) * | 2016-10-25 | 2017-01-18 | 湖北航天技术研究院总体设计所 | Fiber laser asymmetric compensation spectral synthesizing device |
| WO2020078197A1 (en) * | 2018-10-15 | 2020-04-23 | 中国科学院理化技术研究所 | Semiconductor laser |
| CN109273982A (en) * | 2018-11-09 | 2019-01-25 | 中国科学院长春光学精密机械与物理研究所 | Semicondcutor laser unit |
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Open date: 20110601 |