The application is that application number is divide an application (applying date of original application is on Dec 7th, 2007, and denomination of invention is the TFT-LCD array base palte) of 200710178944.8 patented claims.
Summary of the invention
The purpose of this invention is to provide a kind of TFT-LCD array base palte; With technological deficiency such as be prone to take place grid line in the existing TFT-LCD array base palte production of effective solution and data line short circuit, grid line open circuit or data line opens circuit, and further solve technological deficiencies such as the prior art maintenance procedures is many, the time is long, success ratio is low.
To achieve these goals; The invention provides a kind of TFT-LCD array base palte, comprise the grid line, data line, pixel electrode and the thin film transistor (TFT) that are formed on the substrate, at grid line and data line infall; The grid line that is positioned at said data line both sides is connected through the grid connecting line with said data line formation two point or multiple spot decussate texture; Said grid connecting line comprises at least two first grid connecting lines, and said first grid connecting line is identical with said grid line material, and is positioned at same one deck with said grid line.
In above-mentioned array base palte, preferably, the data line that is positioned at said grid line both sides is connected through the data connecting line with said grid line formation two point or multiple spot decussate texture.
Said grid connecting line can also be at least two first grid connecting lines and at least one second grid connecting line; Said first grid connecting line is identical with said grid line material; And be positioned at same one deck with said grid line; The said second grid connecting line is identical with said pixel electrode material, and is positioned at same one deck with said pixel electrode.
Further, said first grid connecting line is straight line or camber line, and the width of each said first grid connecting line is 1/10~1/3 of a grid line width, and the distance between the first grid connecting line is 1/10~1/3 of a grid line width.The said second grid connecting line is straight line or camber line, and the width of the said second grid connecting line is 1/4~3/2 of a grid line width.
Further, the said second grid connecting line can be to be connected with the grid line that is positioned at the data line both sides through two passivation layer grid line via holes.
On the technique scheme basis, said data connecting line can be at least two first data connecting lines, and said first data connecting line is identical with said data line material, and with said data line bit in same one deck.
On the technique scheme basis, said data connecting line also can be at least one second data connecting line, and said second data connecting line is identical with said pixel electrode material, and is positioned at same one deck with said pixel electrode.
On the technique scheme basis; Said data connecting line can also be at least two first data connecting lines and at least one second data connecting line; Said first data connecting line is identical with said data line material; And with said data line bit in same one deck, said second data connecting line is identical with said pixel electrode material, and is positioned at same one deck with said pixel electrode.
Further, said first data connecting line is straight line or camber line, and the width of each said first data connecting line is that the distance between 1/10~1/3, first data connecting line of data line width is 1/10~1/3 of a data line width.Said second data connecting line is straight line or camber line, and the width of said second data connecting line is 1/4~3/2 of a data line width.
Further, said second data connecting line can be to be connected with the data line that is positioned at the grid line both sides through two passivation layer data line via holes.
The present invention proposes a kind of TFT-LCD array base palte; Through grid connecting line and/or the data connecting line that forms two point or multiple spot decussate texture being set at grid line and data line infall; Redundant through increasing circuit on the one hand; The bad probability that reduce to take place that grid line opens circuit or data line opens circuit on the other hand through the multiple spot decussate texture, reduces the probability that grid line/data line poor short circuit takes place.Is that technical scheme that single-point intersect compare with data line at infall with the prior art grid line; The present invention intersects with grid line through intersecting with data line or two first data connecting lines are set at two first grid connecting lines of infall setting at least at least; Reduced the area of grid line and data line overlapping region; Reduce the probability that this overlapping region in producing falls foreign matter, therefore reduced the probability of generation grid line/data line poor short circuit; Simultaneously each first grid connecting line or first data connecting line can both conductings during normal condition; When one of them first grid connecting line or first data connecting line open circuit, still can guarantee grid line or data line conducting, therefore also reduce the bad probability that takes place that grid line opens circuit or data line opens circuit.Simultaneously, even grid line/data line poor short circuit occurred in producing, TFT-LCD array base palte of the present invention also has repairs advantages such as simple, that operation is few, the time is short.Further; Is that the technical scheme of single grid line or forms data line is compared with prior art grid line and data line at infall; The present invention is through being provided with at least one second grid connecting line or at least one second data connecting line being set at infall; Form double grid line structure or Double Data line structure, redundant through increasing circuit, effectively reduce the bad probability that takes place that grid line opens circuit or data line opens circuit on the one hand; Can simplify the operation of reparation grid line/data line poor short circuit on the other hand, improve repairable rate.Compare with the prior art that is short-circuited or all adopt chemical vapor depsotition equipment to repair when opening circuit; Not only reparing process is few for TFT-LCD array base palte of the present invention, and the time is short, and owing to cancelled depositing operation; Can not cause pixel bad, repairable rate is high.
Through accompanying drawing and embodiment, technical scheme of the present invention is done further detailed description below.
Embodiment
Fig. 1 is the structural representation of TFT-LCD array base palte first embodiment of the present invention.As shown in Figure 1; The agent structure of present embodiment TFT-LCD array base palte comprises grid line 10, data line 20, pixel electrode 30 and the thin film transistor (TFT) (TFT) that is formed on the substrate; Grid line 10 arranged in a crossed manner defines pixel region with data line 20, and pixel electrode 30 is formed in the pixel region.Particularly; Thin film transistor (TFT) as switching device comprises gate electrode 41, source electrode 42 and drain electrode 43 at least; Gate electrode 41 is positioned under the gate insulation layer with grid line 10, and source electrode 42, drain electrode 43 and data line 20 are positioned on the gate insulation layer, forms passivation layer on it; And forming passivation layer via hole 44 in drain electrode 43 positions, pixel electrode 30 is formed on the passivation layer.Gate electrode 41 is connected with grid line 10, and source electrode 42 is connected with data line 20, and pixel electrode 30 is connected with drain electrode 43 through passivation layer via hole 44, and source electrode 42 forms conducting channel with drain electrode 43.In the present embodiment; The grid line 10 that is positioned at data line 20 both sides connects through two first grid connecting lines 11; Form the two point decussate texture of grid line 10 and data line 20 infalls, both guaranteed the conducting of grid line 10, effectively reduce again and take place that grid line opens circuit or the probability of grid line/data line poor short circuit; Can simplify simultaneously the operation of maintenance trouble, improve repairable rate.The material of present embodiment first grid connecting line is identical with grid line, and is formed on same one deck with grid line, can in a mask process, prepare simultaneously, and first grid connecting line can be linear structure, also can be camber line (like semicircle) structure or other polygon structure.
Is that technical scheme that single-point intersect compare with data line at infall with the prior art grid line; Present embodiment intersects with data line through two first grid connecting lines are set at infall; Reduced the area of grid line and data line overlapping region on the one hand; Reduce the probability that this overlapping region in producing falls foreign matter, therefore reduced the probability of generation grid line/data line poor short circuit; It is redundant to have increased circuit on the other hand, and two first grid connecting lines can both conducting during normal condition, when one of them first grid connecting line opens circuit, still can guarantee the grid line conducting, has therefore also reduced the generation grid line bad probability that opens circuit.Further, grid line opens circuit or grid line/data line poor short circuit even occurred in producing, and TFT-LCD array base palte of the present invention also has repairs advantages such as simple, that operation is few, the time is short.For example, if when short circuit occurring between first grid connecting line and the data line, that first grid connecting line that only needs will be short-circuited through the sideline prosthetic appliance cuts off, and signal still can transmit through another first grid connecting line.Signal and for example,, then need not keep in repair, because still can transmit through another first grid connecting line if when a first grid connecting line opens circuit.This shows that compare with the prior art that is short-circuited or all adopt chemical vapor depsotition equipment to repair when opening circuit, not only reparing process is few for present embodiment TFT-LCD array base palte; Time is short; And, can not cause pixel bad owing to cancelled the deposition maintenance process, repairable rate is high.
In the present embodiment such scheme, first grid connecting line can also be three, also can be for a plurality of.The width of first grid connecting line had both depended on the minimum precision of mask process; The minimum precision that depends on sideline renovation technique cutting again; Preferably; The width of each first grid connecting line is 1/10~1/3 of a grid line width, and the distance between the adjacent first grid connecting line is 1/10~1/3 of a grid line width.
Fig. 2 is the structural representation of TFT-LCD array base palte second embodiment of the present invention.As shown in Figure 2; The agent structure and first embodiment of present embodiment TFT-LCD array base palte are basic identical, and difference is, in the present embodiment; The data line 20 that is positioned at grid line 10 both sides connects through two first data connecting lines 21; Form the two point decussate texture of grid line 10 and data line 20 infalls, both guaranteed the conducting of data line 20, effectively reduce again and take place that data line 20 opens circuit or the probability of grid line/data line poor short circuit; Can simplify simultaneously the operation of maintenance trouble, improve repairable rate.The material of present embodiment first data connecting line is identical with data line; And be formed on same one deck with data line; Can in a mask process, prepare simultaneously, first data connecting line can be linear structure, also can be camber line (like semicircle) structure or other polygon structure.
Is that technical scheme that single-point intersect compare with data line at infall with the prior art grid line; Present embodiment intersects with grid line through two first data connecting lines are set at infall; Reduced the area of grid line and data line overlapping region on the one hand; Reduce the probability that this overlapping region in producing falls foreign matter, therefore reduced the probability of generation grid line/data line poor short circuit; It is redundant to have increased circuit on the other hand, and two first data connecting lines can both conducting during normal condition, when one of them first data connecting line opens circuit, still can guarantee the data line conducting, has therefore also reduced the generation data line bad probability that opens circuit.Further, data line opens circuit or grid line/data line poor short circuit even occurred in producing, and present embodiment TFT-LCD array base palte also has repairs advantages such as simple, that operation is few, the time is short.For example, if when short circuit occurring between one first data connecting line and the grid line, that first data connecting line that only needs will be short-circuited through the sideline prosthetic appliance cuts off, and signal still can pass through another first data connecting line transmission.And for example, if when one first data connecting line opens circuit, then need not keep in repair, because signal still can pass through another first data connecting line transmission.This shows that compare with the prior art that is short-circuited or all adopt chemical vapor depsotition equipment to repair when opening circuit, not only reparing process is few for present embodiment TFT-LCD array base palte; Time is short; And, can not cause pixel bad owing to cancelled the deposition maintenance process, repairable rate is high.
In the present embodiment such scheme, first data connecting line can also be three or four, also can be for a plurality of.The width of first data connecting line had both depended on the minimum precision of mask process; The minimum precision that depends on sideline renovation technique cutting again; Preferably; The width of each first data connecting line is 1/10~1/3 of a data line width, and the distance between adjacent first data connecting line is 1/10~1/3 of a data line width.
Fig. 3 is the structural representation of TFT-LCD array base palte the 3rd embodiment of the present invention.As shown in Figure 3, present embodiment is the combination of aforementioned first embodiment and second embodiment.In the present embodiment; The grid line 10 that is positioned at data line 20 both sides connects through two first grid connecting lines 11; The data line 20 that is positioned at grid line 10 both sides connects through two first data connecting lines 21; Form the multiple spot decussate texture of grid line 10 and data line 20 infalls, both guaranteed effective conducting of grid line 10 and data line 20, effectively reduce the probability of generation grid line/data line poor short circuit again.The present embodiment structure is except the effect with first embodiment, second embodiment; Provide more choices for maintenance grid line/data line poor short circuit; Can select to cut off first grid connecting line as required or cut off first data connecting line; Applied widely, improve repairable rate to greatest extent.
Fig. 4 is the structural representation of TFT-LCD array base palte the 4th embodiment of the present invention.As shown in Figure 4; The agent structure of present embodiment TFT-LCD array base palte comprises grid line 10, data line 20, pixel electrode 30 and the thin film transistor (TFT) that is formed on the substrate; Thin film transistor (TFT) as switching device comprises gate electrode 41, source electrode 42 and drain electrode 43 at least; Gate electrode 41 is positioned under the gate insulation layer with grid line 10, and source electrode 42, drain electrode 43 and data line 20 are positioned on the gate insulation layer, forms passivation layer on it; And forming passivation layer via hole 44 in drain electrode 43 positions, pixel electrode 30 is formed on the passivation layer.Gate electrode 41 is connected with grid line 10, and source electrode 42 is connected with data line 20, and pixel electrode 30 is connected with drain electrode 43 through passivation layer via hole 44, and source electrode 42 forms conducting channel with drain electrode 43.In the present embodiment; The grid line 10 that is positioned at data line 20 both sides also is connected with one second grid connecting line 12 through two passivation layer grid line via holes 13; Form the double grid line structure of grid line 10 and data line 20 infalls; Both effectively reduced the grid line bad probability that opens circuit had taken place, can simplify the operation of reparation grid line/data line poor short circuit simultaneously, improved repairable rate.The material of the present embodiment second grid connecting line is identical with the pixel electrode material, and is formed on same one deck with pixel electrode.Particularly, in preparation TFT-LCD array base palte, form in the technology of passivation layer via hole 44, on the grid line 10 of data line 20 both sides, form two passivation layer grid line via holes 13 simultaneously, make two passivation layer grid line via holes 13 expose grid line.In forming pixel electrode technology; Near grid line 10 and data line 20 infalls, form the second grid connecting line 12 of transparent conductive material simultaneously; And the two ends of the second grid connecting line 12 are connected with grid line 10 through passivation layer grid line via hole 13 respectively, form the double grid line structure of present embodiment.
Is that the technical scheme of single grid line is compared with prior art grid line and data line at infall; Present embodiment is through being provided with the second grid connecting line at infall; Redundant through increasing circuit; Effectively reduce on the one hand the grid line bad probability that opens circuit takes place, can simplify the operation of reparation grid line/data line poor short circuit on the other hand, improve repairable rate.During normal condition, grid connect and the second grid connecting line can both conducting, when wherein open circuit in a certain road, still can guarantee the grid line conducting.When grid line/data line short circuit occurring, only need the grid line that is short-circuited to be cut off, and signal still can transmit through the second grid connecting line through the sideline prosthetic appliance.Compare with the prior art that is short-circuited or all adopt chemical vapor depsotition equipment to repair when opening circuit; Not only reparing process is few for present embodiment TFT-LCD array base palte, and the time is short, and owing to cancelled depositing operation; Can not cause pixel bad, repairable rate is high.
In the present embodiment such scheme, the second grid connecting line can also be two or three, also can be for a plurality of.Because the second grid connecting line adopts the transparent pixels electrode material, its width has bigger scope, and preferably, the width of the second grid connecting line is that the shape of 1/4~2/3, the second grid connecting line of grid line width can be square, polygon, semicircle or arc etc.
Fig. 5 is the structural representation of TFT-LCD array base palte the 5th embodiment of the present invention.As shown in Figure 5, present embodiment is the combination of aforementioned first embodiment and the 4th embodiment.In the present embodiment; The grid line 10 that is positioned at data line 20 both sides not only connects through three first grid connecting lines 11; Also connect through one second grid connecting line 12, the multiple spot that forms grid line 10 and data line 20 infalls intersects, the multiple-grid line structure, has both guaranteed effective conducting of grid line 10; Effectively reduce the probability of generation grid line/data line poor short circuit again, simplified the operation of reparation grid line/data line poor short circuit simultaneously.The present embodiment textural association effect and the effect of first embodiment and the 4th embodiment, can simplify the operation of reparation grid line/data line poor short circuit to greatest extent, improve repairable rate to greatest extent, can be suitable for demand widely.
Fig. 6 is the structural representation of TFT-LCD array base palte the 6th embodiment of the present invention.As shown in Figure 6, present embodiment is the combination of aforementioned second embodiment and the 4th embodiment.In the present embodiment; The grid line 10 that not only is positioned at data line 20 both sides connects through one second grid connecting line 12; And the data line 20 that is positioned at grid line 10 both sides connects through three first data connecting lines 21, and the multiple spot that forms grid line 10 and data line 20 infalls intersects, the multiple-grid line structure, has both guaranteed effective conducting of grid line 10 and data line 20; Effectively reduce the probability of generation grid line/data line poor short circuit again, simplified the operation of reparation grid line/data line poor short circuit simultaneously.The present embodiment textural association effect and the effect of second embodiment and the 4th embodiment, can simplify the operation of reparation grid line/data line poor short circuit to greatest extent, improve repairable rate to greatest extent, to be suitable for demand widely.
Fig. 7 is the structural representation of TFT-LCD array base palte the 7th embodiment of the present invention.As shown in Figure 7, present embodiment is the combination of aforementioned the 3rd embodiment and the 4th embodiment.In the present embodiment; The grid line 10 that not only is positioned at data line 20 both sides connects, connects through one second grid connecting line 12 through three first grid connecting lines 11; And the data line 20 that is positioned at grid line 10 both sides connects through three first data connecting lines 21; The multiple spot that forms grid line 10 and data line 20 infalls intersects, the multiple-grid line structure; Both guarantee effective conducting of grid line 10 and data line 20, effectively reduced the probability of generation grid line/data line poor short circuit again, simplified the operation of reparation grid line/data line poor short circuit simultaneously.The present embodiment textural association effect and the effect of the 3rd embodiment and the 4th embodiment, can simplify the operation of reparation grid line/data line poor short circuit to greatest extent, improve repairable rate to greatest extent, to be suitable for demand widely.
Fig. 8 is the structural representation of TFT-LCD array base palte the 8th embodiment of the present invention.As shown in Figure 8; The agent structure of present embodiment TFT-LCD array base palte comprises grid line 10, data line 20, pixel electrode 30 and the thin film transistor (TFT) that is formed on the substrate; Thin film transistor (TFT) as switching device comprises gate electrode 41, source electrode 42 and drain electrode 43 at least; Gate electrode 41 is positioned under the gate insulation layer with grid line 10, and source electrode 42, drain electrode 43 and data line 20 are positioned on the gate insulation layer, forms passivation layer on it; And forming passivation layer via hole 44 in drain electrode 43 positions, pixel electrode 30 is formed on the passivation layer.Gate electrode 41 is connected with grid line 10, and source electrode 42 is connected with data line 20, and pixel electrode 30 is connected with drain electrode 43 through passivation layer via hole 44, and source electrode 42 forms conducting channel with drain electrode 43.In the present embodiment; The data line 20 that is positioned at grid line 10 both sides also is connected with one second data connecting line 22 through two passivation layer data line via holes 23; Form the Double Data line structure of grid line 10 and data line 20 infalls; Both effectively reduced the data line bad probability that opens circuit had taken place, can simplify the operation of reparation grid line/data line poor short circuit simultaneously, improved repairable rate.The material of present embodiment second data connecting line is identical with the pixel electrode material, and is formed on same one deck with pixel electrode.Particularly, in preparation TFT-LCD array base palte, form in the technology of passivation layer via hole 44, on the data line 20 of grid line 10 both sides, form two passivation layer data line via holes 23 simultaneously, make two passivation layer data line via holes 23 expose data line.In forming pixel electrode technology; Near grid line 10 and data line 20 infalls, form second data connecting line 22 of transparent conductive material simultaneously; And the two ends of second data connecting line 22 are connected with data line 20 through passivation layer data line via hole 23 respectively, form the Double Data line structure of present embodiment.
Is that the technical scheme of forms data line is compared with prior art grid line and data line at infall; Present embodiment is through being provided with second data connecting line at infall; Redundant through increasing circuit; Effectively reduce on the one hand the data line bad probability that opens circuit takes place, can simplify the operation of reparation grid line/data line poor short circuit on the other hand, improve repairable rate.During normal condition, the data line and second data connecting line can both conductings, when wherein open circuit in a certain road, still can guarantee the data line conducting.When grid line/data line short circuit occurring, only need the data line that is short-circuited to be cut off, and signal still can pass through the second data connecting line transmission through the sideline prosthetic appliance.Compare with the prior art that is short-circuited or all adopt chemical vapor depsotition equipment to repair when opening circuit; Not only reparing process is few for present embodiment TFT-LCD array base palte, and the time is short, and owing to cancelled depositing operation; Can not cause pixel bad, repairable rate is high.
In the present embodiment such scheme, second data connecting line can also be two or three, also can be for a plurality of.Because second data connecting line adopts the transparent pixels electrode material; Its width has bigger scope; Preferably, the width of second data connecting line is that the shape of 1/4~2/3, second data connecting line of data line width can be square, polygon, semicircle or arc etc.
Fig. 9 is the structural representation of TFT-LCD array base palte the 9th embodiment of the present invention.As shown in Figure 9, present embodiment is the combination of aforementioned first embodiment and the 8th embodiment.In the present embodiment; The grid line 10 that not only is positioned at data line 20 both sides connects through three first grid connecting lines 11; And the data line 20 that is positioned at grid line 10 both sides connects through one second data connecting line 22, and the multiple spot that forms grid line 10 and data line 20 infalls intersects, the multidata line structure, has both guaranteed effective conducting of grid line 10 and data line 20; Effectively reduce the probability of generation grid line/data line poor short circuit again, simplified the operation of reparation grid line/data line poor short circuit simultaneously.The present embodiment textural association effect and the effect of first embodiment and the 8th embodiment, can simplify the operation of reparation grid line/data line poor short circuit to greatest extent, improve repairable rate to greatest extent, to be suitable for demand widely.
Figure 10 is the structural representation of TFT-LCD array base palte the tenth embodiment of the present invention.Shown in figure 10, present embodiment is the combination of aforementioned second embodiment and the 8th embodiment.In the present embodiment; The data line 20 that is positioned at grid line 10 both sides not only connects through three first data connecting lines 21; But also connect through one second data connecting line 22, the multiple spot that forms grid line 10 and data line 20 infalls intersects, the multidata line structure, has both guaranteed effective conducting of data line 20; Effectively reduce the probability of generation grid line/data line poor short circuit again, simplified the operation of reparation grid line/data line poor short circuit simultaneously.The present embodiment textural association effect and the effect of second embodiment and the 8th embodiment, can simplify the operation of reparation grid line/data line poor short circuit to greatest extent, improve repairable rate to greatest extent, can be suitable for demand widely.
Figure 11 is the structural representation of TFT-LCD array base palte the 11 embodiment of the present invention.Shown in figure 11, present embodiment is the combination of aforementioned the 3rd embodiment and the 8th embodiment.In the present embodiment; The grid line 10 that not only is positioned at data line 20 both sides connects through three first grid connecting lines 11; And the data line 20 that is positioned at grid line 10 both sides connects, connects through one second data connecting line 22 through three first data connecting lines 21; The multiple spot that forms grid line 10 and data line 20 infalls intersects, the multidata line structure; Both guarantee effective conducting of grid line 10 and data line 20, effectively reduced the probability of generation grid line/data line poor short circuit again, simplified the operation of reparation grid line/data line poor short circuit simultaneously.The present embodiment textural association effect and the effect of the 3rd embodiment and the 8th embodiment, can simplify the operation of reparation grid line/data line poor short circuit to greatest extent, improve repairable rate to greatest extent, to be suitable for demand widely.
What should explain at last is: above embodiment is only unrestricted in order to technical scheme of the present invention to be described; Although the present invention is specified with reference to preferred embodiment; Those of ordinary skill in the art is to be understood that; Can make amendment or be equal to replacement technical scheme of the present invention, and not break away from the spirit and the scope of technical scheme of the present invention.