CN102081174B - Condensing lens array device and manufacturing method thereof - Google Patents
Condensing lens array device and manufacturing method thereof Download PDFInfo
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- CN102081174B CN102081174B CN 201010534639 CN201010534639A CN102081174B CN 102081174 B CN102081174 B CN 102081174B CN 201010534639 CN201010534639 CN 201010534639 CN 201010534639 A CN201010534639 A CN 201010534639A CN 102081174 B CN102081174 B CN 102081174B
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- optical fiber
- lens array
- condenser lens
- array device
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Abstract
The invention relates to a condensing lens array device and a manufacturing method thereof. The device comprises a substrate and optical fibers, wherein one side of the substrate is provided with a plurality of optical fiber grooves for accommodating the optical fibers; and the substrate is also provided with a plurality of pervious through holes which are distributed along the optical fiber grooves. The condensing lens array device and the manufacturing method thereof are suitable for medium and large scale two-dimensional (2D) optical switches, large scale three-dimensional (3D) optical switches and the like, and have high extensibility; the optical fiber grooves formed by a high-accuracy photoetching technology are used for accurately positioning lenses, and optical signals can be accurately and steadily converged, so that an optical reflection module is aligned with the optical fibers, and packaging difficulty and packaging cost are reduced; and the conventional micro electro mechanical system (MEMS) process equipment can be adopted in the manufacturing method, mass manufacturing is realized, and the process is simple, is compatible with various MEMS device processes, and can be used for realizing a micro opto integrated system with more extensive and stronger functions.
Description
Technical field
The present invention relates to microelectromechanical systems (Micro Electro Mechanical systems, MEMS) optical switching technique field, relate in particular to a kind of condenser lens array device and preparation method thereof.
Background technology
The photoswitch that adopts the MEMS technology to realize has that volume is little, lightweight, energy consumption is low, steady performance.Along with the develop rapidly of optical fiber communication technology and dense wavelength division multiplexing system, mems optical switch has obtained using more and more widely as important fiber waveguide device.The existing a lot of reports of the research of at present relevant mems optical switch.
In being applicable to, the optical fiber signal pcl optical lens array device of the minitype optical devices such as extensive 2D photoswitch and extensive 3D photoswitch is the gordian technique that current mems optical switch technical development demands urgently breaking through.The optical switching system of integrated condenser lens array device has that volume is less, weight is lighter, cost is lower, reliability advantages of higher more.By integrated condenser lens array device, develop low cost, high performance minitype optical device with photoswitch, will improve greatly the performance of MEMS communication class optical device and in range of application.Yet, make high precision, cheaply be applicable in, the condenser lens array device of the minitype optical devices such as extensive 2D photoswitch and extensive 3D photoswitch exists huge difficulty.Just at present, worldwide, still scioptics optical fiber or large scale lens realize that light focuses in the system, and for the former, although can be applied to extensive photoswitch, the lens fiber unit price is higher, will greatly improve system cost; For the latter, although have cheaply advantage, the control of photoswitch is required very high, be not easy to expand the scale of photoswitch.
Summary of the invention
The technical matters that (one) will solve
The technical problem to be solved in the present invention is: improve the extensibility of condenser lens array device and the accuracy that converges light signal, reduce difficulty and the cost of encapsulation.
(2) technical scheme
For addressing the above problem, the invention provides a kind of condenser lens array device, this device comprises: matrix and optical fiber, the one side of described matrix are provided with some optical fiber ducts be used to placing described optical fiber, also are provided with the some printing opacity through holes that distribute along described optical fiber duct on the described matrix.
Wherein, this device also comprises: transmission layer covers on the one side of the matrix that described optical fiber and optical fiber places, with fixing described optical fiber.
The present invention also provides a kind of double-deck condenser lens array device, relatively be formed by stacking by two individual layer condenser lens array devices, each described individual layer condenser lens array device includes: matrix and optical fiber, the one side of described matrix is provided with some optical fiber ducts be used to placing described optical fiber, also is provided with the some printing opacity through holes that distribute along described optical fiber duct on the described matrix.
Wherein, the optical fiber of described two individual layer condenser lens array devices is mutually vertical.
Wherein, each described individual layer condenser lens array device all also comprises: transmission layer, cover on the one side of the matrix that described optical fiber and optical fiber places, with fixing described optical fiber, and the described transmission layer stack of two individual layer condenser lens array devices consists of described double-deck condenser lens array device.
The present invention also provides a kind of preparation method of above-mentioned condenser lens array device, and the method comprising the steps of:
S1. choose have set thickness two N-type silicon chips of throwing as matrix;
S2. on each silicon chip, all form silicon oxide masking film, corrode or etch optical fiber duct;
S3. the relative one side that at silicon chip optical fiber duct is set forms silicon oxide masking film, corrodes or etches the some printing opacity through holes that distribute along described optical fiber duct;
S4. in optical fiber duct, place optical fiber;
S5. at optical fiber and silicon chip deposit transmission layer on the one side of optical fiber duct is set.
Wherein, further comprise step behind the step S5:
S6. the described transmission layer of attenuate.
The present invention also provides a kind of preparation method of above-mentioned double-deck condenser lens array device, and the method comprising the steps of:
D1. choose two two N-type silicon chips of throwing with setting thickness as matrix;
D2. on each silicon chip, all form silicon oxide masking film, corrode or etch optical fiber duct;
D3. the relative one side that at silicon chip optical fiber duct is set forms silicon oxide masking film, corrodes or etches the some printing opacity through holes that distribute along described optical fiber duct;
D4. in optical fiber duct, place optical fiber;
D5. at optical fiber and silicon chip deposit transmission layer on the one side of optical fiber duct is set;
D6. the transmission layer with the two after keeping the optical fiber of two silicon chips vertical is adhesively fixed, and obtains double-deck condenser lens array device.
Wherein, also comprise step with the transmission layer attenuate behind the step D5.
(3) beneficial effect
During condenser lens array device of the present invention and preparation method thereof is applicable to, the application such as extensive 2D photoswitch and extensive 3D photoswitch, have extremely strong extensibility; With accurate positioning lens, can realize that accurately, firmly light signal converges with the optical fiber duct of high precision lithography definition, thereby realize aiming between light reflecting module and the optical fiber, reduce difficulty and the cost of encapsulation; Preparation method of the present invention can adopt conventional MEMS process equipment, realize making in enormous quantities, and technological process is simple, and is compatible with polytype MEMS device technology, can be used for more extensive, the more powerful low-light integrated system of practical function.
Description of drawings
Fig. 1 is the condenser lens array device front perspective view according to one embodiment of the present invention;
Fig. 2 is the condenser lens array device back side perspective view according to one embodiment of the present invention;
Fig. 3 is the perspective view according to the condenser lens array device silicon layer structure of one embodiment of the present invention;
Fig. 4 is the double-deck condenser lens array device perspective view according to one embodiment of the present invention;
Fig. 5 is the principle of work schematic diagram according to the condenser lens array device of one embodiment of the present invention;
Fig. 6 (a)-Fig. 6 (f) is the preparation process schematic diagram according to the condenser lens array device of one embodiment of the present invention;
Fig. 7 is the preparation process schematic diagram according to the double-deck condenser lens array device of one embodiment of the present invention.
Embodiment
Condenser lens array that the present invention proposes and preparation method thereof is described in detail as follows in conjunction with the accompanying drawings and embodiments.
During condenser lens array proposed by the invention and preparation method thereof is applicable to, the minitype optical devices such as extensive 2D photoswitch and extensive 3D photoswitch.As Figure 1-3, condenser lens array device according to one embodiment of the present invention comprises: matrix 2 and optical fiber 4, the one side of matrix 2 is provided with some optical fiber ducts 3 for placing optical fiber 4, optical fiber duct 3 can be array distribution, also can adjust according to application demand, matrix 2 also is provided with the some printing opacity through holes 1 that distribute along optical fiber duct 3, the size of printing opacity through hole 1, shape can be adjusted according to the size of used optical fiber, to cover the areal extent of fiber end face fully, the spacing between the printing opacity through hole 1 can be adjusted arbitrarily.This device also comprises the transmission layer 5 that the high-transmission rate material is made, and covers on the one side of the matrix 2 that optical fiber 4 and optical fiber 4 places, with fixed fiber 4.
As shown in Figure 4, be the double-deck condenser lens array device according to one embodiment of the present invention, by relatively being formed by stacking of the individual layer condenser lens array device shown in two above-mentioned Fig. 1-3, the 5 contact stacks of stacked system transmission layer, the optical fiber of two individual layer condenser lens array devices can keep orthogonal position.
As shown in Figure 5, in condenser lens array device of the present invention, the end face of optical fiber 4 is circular, can be used as the convex lens of a light-focusing function, and the light signal of dispersing that the incident optical 6 in the optical switching system is sent converges and realizes the parallel transmission of certain distance.Because the circular light spot that the light signal time space that sends of incident optical is propagated, therefore, when the condenser lens array of light signal by individual layer presents, hot spot will pool the Line of light signal; When light signal passes through double-deck condenser lens array device, hot spot will pool the point-like light signal.
Preparation method according to the above-mentioned condenser lens array device of one embodiment of the present invention comprises step:
S1. shown in Fig. 6 (a), choose that to have thickness be that two N-type (100) silicon chips 11 of throwing of 400 ± 10 microns are as matrix 2;
S2. shown in Fig. 6 (b), form silicon oxide masking film at silicon chip 11, by wet etching or dry etching optical fiber duct 3;
S3. shown in Fig. 6 (c), the relative one side that optical fiber duct 3 is set at silicon chip 11 forms silicon oxide masking film, goes out the some printing opacity through holes 1 that distribute along optical fiber duct 3 by wet etching or dry etching;
S4. shown in Fig. 6 (d), at optical fiber duct 3 interior placement optical fiber 4;
S5. shown in Fig. 6 (e), deposit transmission layer 5 on the one side of optical fiber duct 3 is set at optical fiber 4 and silicon chip 11;
S6. shown in Fig. 6 (f), the methods such as the polishing of transmission layer 5 usefulness or chemical corrosion are thinned to suitable thickness.
Prepare two identical condenser lens array devices with above-mentioned method, then as shown in Figure 7, the transmission layer 5 of two condenser lens array devices aimed at be adhesively fixed, can obtain the present invention double-deck condenser lens array device.
Above embodiment only is used for explanation the present invention; and be not limitation of the present invention; the those of ordinary skill in relevant technologies field; in the situation that do not break away from the spirit and scope of the present invention; can also make a variety of changes and modification; therefore all technical schemes that are equal to also belong to category of the present invention, and scope of patent protection of the present invention should be defined by the claims.
Claims (4)
1. double-deck condenser lens array device, relatively be formed by stacking by two individual layer condenser lens array devices, it is characterized in that, each described individual layer condenser lens array device includes: matrix and optical fiber, the one side of described matrix is provided with some optical fiber ducts be used to placing described optical fiber, described matrix also is provided with the some printing opacity through holes that distribute along described optical fiber duct, and the optical fiber of described two individual layer condenser lens array devices is mutually vertical.
2. double-deck condenser lens array device as claimed in claim 1, it is characterized in that, each described individual layer condenser lens array device all also comprises: transmission layer, cover on the one side of the matrix that described optical fiber and optical fiber places, with fixing described optical fiber, and the described transmission layer stack of two individual layer condenser lens array devices consists of described double-deck condenser lens array device.
3. the preparation method such as each described double-deck condenser lens array device of claim 1-2 is characterized in that, the method comprising the steps of:
D1. choose two two N-type silicon chips of throwing with setting thickness as matrix;
D2. on each silicon chip, all form silicon oxide masking film, corrode or etch optical fiber duct;
D3. the relative one side that at silicon chip optical fiber duct is set forms silicon oxide masking film, corrodes or etches the some printing opacity through holes that distribute along described optical fiber duct;
D4. in optical fiber duct, place optical fiber;
D5. at optical fiber and silicon chip deposit transmission layer on the one side of optical fiber duct is set;
D6. the transmission layer with the two after keeping the optical fiber of two silicon chips vertical is adhesively fixed, and obtains double-deck condenser lens array device.
4. the preparation method of condenser lens array device as claimed in claim 3 is characterized in that, also comprises the step with the transmission layer attenuate behind the step D5.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201010534639 CN102081174B (en) | 2010-11-03 | 2010-11-03 | Condensing lens array device and manufacturing method thereof |
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| Application Number | Priority Date | Filing Date | Title |
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| CN 201010534639 CN102081174B (en) | 2010-11-03 | 2010-11-03 | Condensing lens array device and manufacturing method thereof |
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| CN102081174A CN102081174A (en) | 2011-06-01 |
| CN102081174B true CN102081174B (en) | 2013-02-06 |
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Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1364993A (en) * | 2002-01-22 | 2002-08-21 | 上海交通大学 | Aluminium alloy flat plate type solar energy collector |
| CN1768284A (en) * | 2003-03-31 | 2006-05-03 | 康宁股份有限公司 | Two-dimensional optical fiber array |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030174998A1 (en) * | 2002-03-15 | 2003-09-18 | George Shevchuk | Assembly for stacking optical fibers in an aligned two dimensional array |
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Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1364993A (en) * | 2002-01-22 | 2002-08-21 | 上海交通大学 | Aluminium alloy flat plate type solar energy collector |
| CN1768284A (en) * | 2003-03-31 | 2006-05-03 | 康宁股份有限公司 | Two-dimensional optical fiber array |
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