CN102074281A - RF plasma transparent conductive film - Google Patents

RF plasma transparent conductive film Download PDF

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Publication number
CN102074281A
CN102074281A CN 201010599341 CN201010599341A CN102074281A CN 102074281 A CN102074281 A CN 102074281A CN 201010599341 CN201010599341 CN 201010599341 CN 201010599341 A CN201010599341 A CN 201010599341A CN 102074281 A CN102074281 A CN 102074281A
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CN
China
Prior art keywords
transparent conductive
film
conductive film
plasma treatment
pet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN 201010599341
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Chinese (zh)
Inventor
汪倩文
武俊
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SUZHOU HESHENG SPECIAL MATERIAL CO Ltd
Original Assignee
SUZHOU HESHENG SPECIAL MATERIAL CO Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SUZHOU HESHENG SPECIAL MATERIAL CO Ltd filed Critical SUZHOU HESHENG SPECIAL MATERIAL CO Ltd
Priority to CN 201010599341 priority Critical patent/CN102074281A/en
Publication of CN102074281A publication Critical patent/CN102074281A/en
Pending legal-status Critical Current

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Abstract

The invention provides a radio frequency (RF) plasma transparent conductive film. A base material is a polyethylene terephthalate (PET) film, the front face of the PET film is coated with a hardened coating, and the surface of the hardened coating is coated with a polyethylene (PE) protective film; and an RF plasma treatment layer is formed on the back face of the PET film, and a transparent conductive layer is sputtered on the RF plasma treatment layer and is coated with the PE protective film. In the transparent conductive film, one hardened coating is saved, and the RF plasma treatment layer is added, so that a reliable adhesion effect still exists between the transparent conductive layer and the PET film, the resistance value of the transparent conductive film still can keep high properties of uniformity and stability even if the transparent conductive film is subjected to high-temperature tempering, and the transparent conductive film can be widely applied to the aspects of touch panels, electronic games, child teaching machines, intelligent mobile phones, tablet personal computers (PCs) and the like.

Description

The nesa coating of radio frequency plasma
Technical field
The present invention relates to a kind of conducing composite material, relate in particular to a kind of nesa coating that uses the preparation of radio frequency plasma technology.
Background technology
Nesa coating is the preparation solar cell, the important materials of devices such as LCD, nesa coating is to cover transparency conducting layer to form on transparent base, in order to improve the interfacial adhesion power between base material and the conductive layer, often need between base material and transparency conducting layer, add one deck hardening coat, this hardening coat need could solidify under hot conditions, but in high-temperature process, the molecular structure skewness of substrate surface will produce scattering phenomenon, form " rainbow line " and then influence the visual effect and the light transmittance of product, in addition, the various materials of hardening coat use, solvent has also increased the manufacturing cost of product.
Summary of the invention
The objective of the invention is to overcome the deficiency that prior art exists, a kind of nesa coating of radio frequency plasma is provided.
Purpose of the present invention is achieved through the following technical solutions:
The nesa coating of radio frequency plasma, base material are the PET film, characteristics: the front of described PET film scribbles hardening coat, and the hardening coat surface is covered with the PE diaphragm; The back side of described PET film is formed with RF plasma treatment layer, and sputter has transparency conducting layer on the RF plasma treatment layer.
Further, the nesa coating of above-mentioned radio frequency plasma is covered with the PE diaphragm on the described transparency conducting layer.
The substantive distinguishing features of technical solution of the present invention and progressive being mainly reflected in:
Adopt the radio frequency plasma technology that base material is carried out surface treatment, not only can improve the chemical constituent and the wetting property of substrate surface, guarantee reliable adhesiving effect between base material and the conductive layer, and can reduce the surface roughness and the square resistance of conducting film; Conductive layer directly forms in the mode of substrate surface by vacuum splashing and plating, has saved and has used optical cement to paste the step of conducting film, provides cost savings; Be coated with hardening coat in the base material front, improve surperficial scratch resistance and chemical resistance, prolonged the useful life of product greatly.
Description of drawings
Below in conjunction with accompanying drawing technical solution of the present invention is described further:
Fig. 1: schematic cross-section of the present invention;
The implication of each Reference numeral among the figure:
The 1-PET film, 2-hardening coat, 3RF plasma treatment layer, 4-transparency conducting layer, 5PE diaphragm, 6-PE diaphragm.
Embodiment
As shown in Figure 1, the nesa coating of radio frequency plasma, base material are PET film 1, and the front of PET film 1 scribbles hardening coat 2, and hardening coat 2 surfaces are covered with PE diaphragm 5; The back side of PET film 1 is handled through radio frequency plasma and is formed with RF plasma treatment layer 3, and sputter has transparency conducting layer 4 on the RF plasma treatment layer 3, is covered with PE diaphragm 6 on the transparency conducting layer 4.
The light transmittance of PET film 1 is more than 90%, and dielectric strength is 16.9KV/mm, but shielding of ultraviolet, and gas and vapor permeability are low.The front of PET film scribbles hardening coat, and the hardening coat surface is covered with the PE diaphragm; Case hardness after hardening coat 2 sclerosis reaches more than the 3H/750g, light transmittance>90%, and the hardening process of hardening coat is to finish under the condition of illumination; The material of transparency conducting layer 4 is nano indium tin metal oxide, wherein Ln 2O 3And Sn 2O 3Ratio be 9: 1.
Adopting PETG (PET) film is base material, under the prerequisite of giving the material high light transmittance, provide composite material to be processed into the possibility of different structure, replace hardening coat at the PET back side with RF plasma treatment layer, guaranteeing has reliable adhesion effect between base material and conductive layer, can also reduce the surface roughness and the square resistance of conducting film simultaneously; The transparency conducting layer of this nesa coating uses the mode sputter nano indium tin metal oxide of vacuum splashing and plating, saves the step of pasting conducting film on base material by optical glue, provides cost savings; Coat the scratch resistance that hardening coat can improve product in substrate front side, prolong the useful life of product.The present invention can be widely used in aspects such as contact panel, electronic game machine, childhood teaching machine, smart mobile phone, panel computer.
It is emphasized that: above only is preferred embodiment of the present invention, be not that the present invention is done any pro forma restriction, every foundation technical spirit of the present invention all still belongs in the scope of technical solution of the present invention any simple modification, equivalent variations and modification that above embodiment did.

Claims (2)

1. the nesa coating of radio frequency plasma, base material is the PET film, it is characterized in that: the front of described PET film scribbles hardening coat, and the hardening coat surface is covered with the PE diaphragm; The back side of described PET film is formed with RF plasma treatment layer, and sputter has transparency conducting layer on the RF plasma treatment layer.
2. the nesa coating of radio frequency plasma according to claim 1 is characterized in that: be covered with the PE diaphragm on the described transparency conducting layer.
CN 201010599341 2010-12-21 2010-12-21 RF plasma transparent conductive film Pending CN102074281A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 201010599341 CN102074281A (en) 2010-12-21 2010-12-21 RF plasma transparent conductive film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN 201010599341 CN102074281A (en) 2010-12-21 2010-12-21 RF plasma transparent conductive film

Publications (1)

Publication Number Publication Date
CN102074281A true CN102074281A (en) 2011-05-25

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN 201010599341 Pending CN102074281A (en) 2010-12-21 2010-12-21 RF plasma transparent conductive film

Country Status (1)

Country Link
CN (1) CN102074281A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102903458A (en) * 2012-11-05 2013-01-30 烟台正海科技有限公司 Method for eliminating etching traces of film electroconductive material
CN104497339A (en) * 2014-12-24 2015-04-08 宁波东旭成新材料科技有限公司 Pretreatment method of prism film base material layer
CN106626681A (en) * 2017-01-03 2017-05-10 陈旭航 Novel combined protective film use technology of conducting film

Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6445006A (en) * 1987-08-13 1989-02-17 Asahi Glass Co Ltd Transparent conductive substrate
JP2003320609A (en) * 2002-02-26 2003-11-11 Dainippon Printing Co Ltd Transparent conductive film
CN1535203A (en) * 2001-07-24 2004-10-06 凸版印刷株式会社 Depositon film
CN101143498A (en) * 2006-09-12 2008-03-19 日东电工株式会社 Transparent electrically conductive laminated body and touching panel with the same
JP2008204683A (en) * 2007-02-19 2008-09-04 Toppan Printing Co Ltd Transparent conductive film
JP2008235098A (en) * 2007-03-22 2008-10-02 Matsushita Electric Ind Co Ltd Transparent conductive film and manufacturing method thereof
JP2008270115A (en) * 2007-04-25 2008-11-06 Toppan Printing Co Ltd Transparent conductive gas barrier film
CN101476109A (en) * 2008-01-02 2009-07-08 甘国工 Preparation of flexible high-resistance multi-layer transparent conductive film
CN101678658A (en) * 2007-06-15 2010-03-24 印可得株式会社 Transparent conductive layer and preparation method thereof
CN101848812A (en) * 2007-11-07 2010-09-29 爱索尔包装有限公司 A multi-layer flexible sheet and method thereof

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6445006A (en) * 1987-08-13 1989-02-17 Asahi Glass Co Ltd Transparent conductive substrate
CN1535203A (en) * 2001-07-24 2004-10-06 凸版印刷株式会社 Depositon film
JP2003320609A (en) * 2002-02-26 2003-11-11 Dainippon Printing Co Ltd Transparent conductive film
CN101143498A (en) * 2006-09-12 2008-03-19 日东电工株式会社 Transparent electrically conductive laminated body and touching panel with the same
JP2008204683A (en) * 2007-02-19 2008-09-04 Toppan Printing Co Ltd Transparent conductive film
JP2008235098A (en) * 2007-03-22 2008-10-02 Matsushita Electric Ind Co Ltd Transparent conductive film and manufacturing method thereof
JP2008270115A (en) * 2007-04-25 2008-11-06 Toppan Printing Co Ltd Transparent conductive gas barrier film
CN101678658A (en) * 2007-06-15 2010-03-24 印可得株式会社 Transparent conductive layer and preparation method thereof
CN101848812A (en) * 2007-11-07 2010-09-29 爱索尔包装有限公司 A multi-layer flexible sheet and method thereof
CN101476109A (en) * 2008-01-02 2009-07-08 甘国工 Preparation of flexible high-resistance multi-layer transparent conductive film

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102903458A (en) * 2012-11-05 2013-01-30 烟台正海科技有限公司 Method for eliminating etching traces of film electroconductive material
CN104497339A (en) * 2014-12-24 2015-04-08 宁波东旭成新材料科技有限公司 Pretreatment method of prism film base material layer
CN106626681A (en) * 2017-01-03 2017-05-10 陈旭航 Novel combined protective film use technology of conducting film

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Application publication date: 20110525