CN102066925B - 氮原子测定方法、氮原子测定装置、等离子体处理方法和等离子体处理装置 - Google Patents

氮原子测定方法、氮原子测定装置、等离子体处理方法和等离子体处理装置 Download PDF

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Publication number
CN102066925B
CN102066925B CN200980123355.7A CN200980123355A CN102066925B CN 102066925 B CN102066925 B CN 102066925B CN 200980123355 A CN200980123355 A CN 200980123355A CN 102066925 B CN102066925 B CN 102066925B
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nitrogen
atoms
gas
mentioned
density
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Chinese (zh)
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CN102066925A (zh
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生沼学
稻永康隆
野田清治
谷村泰宏
田畑要一郎
渡边谦资
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Mitsubishi Electric Corp
Toshiba Mitsubishi Electric Industrial Systems Corp
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Mitsubishi Electric Corp
Toshiba Mitsubishi Electric Industrial Systems Corp
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0011—Sample conditioning
    • G01N33/0013—Sample conditioning by a chemical reaction

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  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Combustion & Propulsion (AREA)
  • Food Science & Technology (AREA)
  • Medicinal Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Non-Biological Materials By The Use Of Chemical Means (AREA)
  • Luminescent Compositions (AREA)
CN200980123355.7A 2008-06-20 2009-04-17 氮原子测定方法、氮原子测定装置、等离子体处理方法和等离子体处理装置 Active CN102066925B (zh)

Applications Claiming Priority (3)

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JP2008161968 2008-06-20
JP2008-161968 2008-06-20
PCT/JP2009/057758 WO2009154037A1 (ja) 2008-06-20 2009-04-17 窒素原子測定方法、窒素原子測定装置、及びプラズマ処理装置

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CN102066925A CN102066925A (zh) 2011-05-18
CN102066925B true CN102066925B (zh) 2013-07-03

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JP (1) JP5295237B2 (ja)
CN (1) CN102066925B (ja)
WO (1) WO2009154037A1 (ja)

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EP2909259A1 (en) 2012-10-19 2015-08-26 Dow Global Technologies LLC Polymer particle dispersions with polyols
SI24727B (sl) 2014-05-22 2023-08-31 Institut "Jožef Stefan" Postopek in naprava za detekcijo in merjenje gostote nevtralnih atomov vodika, kisika ali dušika
TWI792161B (zh) * 2021-01-26 2023-02-11 富蘭登科技股份有限公司 以光譜量測物質的物理狀態之裝置及其方法

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JP4127435B2 (ja) * 1998-10-16 2008-07-30 後藤 俊夫 原子状ラジカル測定方法及び装置
JP4226392B2 (ja) * 2003-05-27 2009-02-18 俊夫 後藤 原子状ラジカル密度測定装置及び原子状ラジカル密度方法

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
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JP特开2000-123996A 2000.04.28
JP特开2004-354055A 2004.12.16

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JPWO2009154037A1 (ja) 2011-11-24
CN102066925A (zh) 2011-05-18
JP5295237B2 (ja) 2013-09-18
WO2009154037A1 (ja) 2009-12-23

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