CN102056037A - Acoustical coupling apparatus - Google Patents
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Abstract
The invention provides an acoustical coupling apparatus which comprises a first CRF (coupled resonator filter) and a second CRF electrically coupled with the first CRF, wherein the first CRF and the second CRF are respectively provided with an input port, an output port and a bottom FBAR (film bulk acoustic resonator); an acoustical decoupling layer is formed on each bottom FBAR; a top FBAR is formed on each acoustical decoupling layer; each bottom FBAR and each top FBAR are respectively provided with a bottom electrode; a piezoelectric layer is formed on each bottom electrode; a top electrode is formed on each piezoelectric layer; the input port and output port of each CRF are respectively electrically connected to the corresponding bottom electrodes and the corresponding top electrodes, so as to position the acoustical decoupling layers between the bottom electrodes and the top electrodes; and the output port of the first CRF is electrically connected to the input port of the second CRF. According to the invention, a capacitor which is composed of the decoupling layer in a coupled resonator filter and upper and lower electrodes is utilized, the roll-off performance of the filter is greatly enhanced on the premise of not adding any extra processing step.
Description
Technical field
The present invention relates to a kind of acoustical coupling device.Particularly relate to a kind of acoustical device that is serially connected and constitutes by two coupled resonance filters.
Background technology
Bulk acoustic wave (BAW) resonator is made up of two metal electrodes and the piezoelectric that is clipped between them usually.When applying an alternating voltage between two electrodes, thereby two interelectrode electric fields can act at the inner sound wave that forms of piezoelectric mutually with piezoelectric.The resonance frequency of BAW device depends on all multifactor, yet the thickness of piezoelectric layer is the leading factor of decision resonance frequency.Fundamental resonance will take place when the wavelength of the mechanical wave of being excited to produce is the twice of piezoelectric layer thickness.Resonance frequency can improve along with the reducing of thickness of piezoelectric layer.By the BAW device that deposit multilayer film on backing material is made, its resonance frequency can expand to 0.5-20GHz.Such BAW device typically refers to thin film bulk acoustic resonator (FBARs).Resonator can be designed to trapezoidal as the elementary cell of forming circuit, thereby grid or other similar circuit structure are realized various filter characteristics.In the ladder-type filter series resonance frequency of the parallel resonance frequency of parallel resonator and series resonator relatively near the time will form a passband.The outer inhibition of the band of ladder-type filter controlled by the capacitance partial pressure of ladder circuit, because can equivalence be an electric capacity at the band external resonator.The grid filter is a crossover network that has balance input port and balance output port, is fit to realize full balance filtering.
Resonator in the trapezoidal and grid filter all adopts and is electrically connected to realize signal specific filtering.In fact resonator also can be to use acoustics to be coupled and realize a classical filter response.One of them main thickness extension vibration mode formula coupled resonators be stacked crystal filter (stacked crystal filter, SCF).A SCF has two or more piezoelectric layers usually, and the electrode layer of three or more is formed, the some of them electrode grounding.Compare with trapezoidal or grid filter, the bandwidth of SCF is narrower.The finite bandwidth of SCF can solve by reducing the acoustical coupling intensity that transducer is seen on the vertical direction, and these resonators no longer are single resonators in this manner, but begins independently resonator works of conduct.Such structure is called as coupled resonance filter (CRF), and it comprises a pair of BAW resonator and is clipped in decoupling layer between two resonators.Acoustic decoupler can take various forms to isolate to realize the part between the resonator.The quarter-wave thick layer that alternately is made of high low acoustic impedance material is a kind of method, and the material that it uses can be the same with the material that reflecting grating uses.The acoustic decoupler of forming by one deck low acoustic impedance material is another kind of method, and this method is different with use reflecting grating structure.In CRF, acoustical coupling intensity is used for the control filters bandwidth between resonator.If the degree of isolation between resonator is too big, insert loss will be very big and bandwidth also can be very narrow, this filter can not satisfy the requirement of bandwidth usually.If it is too strong to be coupled, can produce filter with wider bandwidth and the middle significant depressions of passband.CRF roll-offs outside passband slowly, makes it be difficult to satisfy nearly band harsh in some application and suppresses requirement, as sending and accept frequency range very little at interval PCS and UMTS-8 duplexer.Because be clipped between two electrodes at the decoupling layer and will form coupling layer electric capacity, if configuration rationally will help realizing specific filter response.On the other hand, when carrying out uneven pattern to the balanced mode conversion, the existence of decoupling layer capacitance has damaged the unbalance response of filter greatly among the CRF, because it can produce asymmetric electric capacity or feedback capacity over the ground at the balance output port.
Therefore, also have no idea to solve above-mentioned defective and deficiency in this technical field up to now.
Summary of the invention
Technical problem to be solved by this invention is, provide a kind of and input or output at two coupled resonatorses that port is introduced inside or external capacitive produces a pair of transmission zero, thereby improve filter and far be with inhibition, the acoustical coupling device of reduction amplitude, phase imbalance.
The technical solution adopted in the present invention is: a kind of acoustical coupling device comprises:
The one CRF and with the 2nd CRF of a CRF electrical couplings, wherein, the one CRF and the 2nd CRF have input port, output port, bottom FBAR, the sound decoupling layer that on the FBAR of bottom, forms, the top FBAR that on sound decoupling layer, forms, bottom FBAR and top FBAR have a bottom electrode, the piezoelectric layer that on bottom electrode, forms, the top electrodes that on piezoelectric layer, forms, and the input port of each CRF and output port all be connected electrically to respectively on relative bottom electrode and the top electrodes, and sound decoupling layer is between relative bottom electrode and top electrodes like this;
The output port of the one CRF is connected electrically to the input port of the 2nd CRF.
Described sound decoupling layer is to be made of dielectric material.
For a CRF, in the top electrodes of the bottom electrode of top FBAR and bottom FBAR any one is connected to input port, the another one electrode is connected to output port, the bottom electrode ground connection of the top electrodes of top FBAR and bottom FBAR, the bottom electrode of top FBAR like this, the top electrodes of sound decoupling layer and bottom FBAR has constituted a capacitor C
P
For the 2nd CRF, any one in the top electrodes of the bottom electrode of bottom FBAR and top FBAR is connected electrically to input port, and another one is connected electrically to output port, the bottom electrode ground connection of the top electrodes of bottom FBAR and top FBAR.
For a CRF, any one in the bottom electrode of the top electrodes of top FBAR and bottom FBAR is connected electrically to input port, and the another one electrode is connected electrically to output port, the bottom electrode ground connection of the top electrodes of bottom FBAR and top FBAR;
For the 2nd CRF, in the top electrodes of bottom FBAR and the bottom electrode of top FBAR any one is connected electrically to input port, the another one electrode is connected electrically to output port, the bottom electrode ground connection of the top electrodes of top FBAR and bottom FBAR, the bottom electrode of top FBAR like this, the top electrodes of sound decoupling layer and bottom FBAR constituted capacitor C '
P
For a CRF, in the top electrodes of the bottom electrode of top FBAR and bottom FBAR any one is connected electrically to input port, the another one electrode is connected electrically to output port, the bottom electrode ground connection of the top electrodes of top FBAR and bottom FBAR, the bottom electrode of top FBAR like this, the top electrodes of sound decoupling layer and bottom FBAR has constituted first capacitor C
P
For the 2nd CRF, in the top electrodes of bottom FBAR and the bottom electrode of top FBAR any one is connected electrically to input port, another one is connected electrically to output port, the bottom electrode ground connection of the top electrodes of top FBAR and bottom FBAR, the bottom electrode of top FBAR like this, the top electrodes of sound decoupling layer and bottom FBAR constituted second capacitor C '
P
For a CRF, any one in the bottom electrode of the top electrodes of top FBAR and bottom FBAR is connected electrically to input port, and the another one electrode is connected electrically to output port, the bottom electrode ground connection of the top electrodes of bottom FBAR and top FBAR;
For the 2nd CRF, any one in the top electrodes of the bottom electrode of bottom FBAR and top FBAR is connected electrically to input port, and another one is connected electrically to output port, the bottom electrode ground connection of the top electrodes of bottom FBAR and top FBAR.
The structural arrangements of described acoustical coupling device is connected with spread bandwidth and reduces passband ripple with one or more impedance matching networks that comprise inductance and/or electric capacity, impedance matching network is coupled to the input port of a CRF or the output port of the 2nd CRF, perhaps between a CRF output port and the 2nd CRF input port.
Another technical scheme of people that the present invention adopts is: a kind of acoustical coupling device is characterized in that: comprising:
The one CRF, the 2nd CRF with a CRF electrical couplings, building-out capacitor with the 2nd CRF electrical couplings, the one CRF and the 2nd CRF have a bottom FBAR, at sound decoupling layer that forms on the FBAR of bottom and the top FBAR that on sound decoupling layer, forms, bottom FBAR and top FBAR have a bottom electrode, and the piezoelectric layer that forms on bottom electrode is between the top electrodes that forms on the piezoelectric layer;
The one CRF has input port and the output port that is connected electrically to respectively on relative bottom electrode and the top electrodes, and the sound decoupling of such CRF is placed between relative bottom electrode and the top electrodes;
The 2nd CRF has and is connected electrically to the relative bottom electrode respectively, input port on top electrodes and another bottom electrode, first output port and second output port, the sound decoupling of such the 2nd CRF is placed on the relative bottom electrode, top electrodes and another bottom electrode;
The output port of the one CRF is connected electrically to the input port of the 2nd CRF.
Described sound decoupling layer is to be made of dielectric material.
For a CRF, in the top electrodes of the bottom electrode of top FBAR and bottom FBAR any one is connected electrically to input port, the another one electrode is connected electrically to output port, the bottom electrode ground connection of the top electrodes of top FBAR and bottom FBAR, the bottom electrode of top FBAR like this, the top electrodes of sound decoupling layer and bottom FBAR has constituted a capacitor C
P
For the 2nd CRF, in the bottom electrode of bottom FBAR and the top electrodes of top FBAR any one is connected electrically to input port, when the bottom electrode of bottom FBAR is connected electrically to input port, the top electrodes of top FBAR and bottom electrode are connected electrically to first and second output ports respectively, the top electrodes ground connection of bottom FBAR, when the top electrodes of top FBAR is connected electrically to input port, bottom electrode and the top electrodes of bottom FBAR are connected electrically to first and second output ports respectively, the bottom electrode ground connection of top FBAR, the bottom electrode of top FBAR like this, the top electrodes of sound decoupling layer and bottom FBAR has constituted the port electric capacity over the ground of an inside, C '
P
For the 2nd CRF, when the bottom electrode of bottom FBAR is connected electrically to input port, building-out capacitor C
bElectrical couplings between the top electrodes of the top electrodes of top FBAR and bottom FBAR, when the top electrodes of top FBAR is connected electrically to input port, building-out capacitor C
bElectrical couplings is between the bottom electrode of the bottom electrode of bottom FBAR and top FBAR.
For a CRF, any one in the bottom electrode of the top electrodes of top FBAR and bottom FBAR is connected electrically to input port, and the another one electrode is connected electrically to output port, the bottom electrode ground connection of the top electrodes of bottom FBAR and top FBAR;
For the 2nd CRF, in the top electrodes of bottom FBAR and the bottom electrode of top FBAR any one is connected electrically to input port, when the top electrodes of bottom FBAR is connected electrically to input port, the top of top FBAR and bottom electrode are connected electrically to first and second output ports respectively, and the bottom electrode ground connection of bottom FBAR, when the bottom electrode of top FBAR is connected electrically to input port, bottom electrode and the top electrodes of bottom FBAR are connected electrically to first and second output ports respectively, and the top electrodes ground connection of top FBAR, the bottom electrode of top FBAR like this, the top electrodes of sound decoupling layer and bottom FBAR constituted capacitor C '
P
When the top electrodes electrical couplings of bottom FBAR arrives input port, building-out capacitor C
bElectrical couplings between the top electrodes of the top electrodes of top FBAR and bottom FBAR, when the bottom electrode of top FBAR is connected electrically to input port, building-out capacitor C
bElectrical couplings is between the bottom electrode of the bottom electrode of bottom FBAR and top FBAR.
For a CRF, in the top electrodes of the bottom electrode of top FBAR and bottom FBAR any one is connected electrically to input port, the another one electrode is connected electrically to output port, the bottom electrode ground connection of the top electrodes of top FBAR and bottom FBAR, the bottom electrode of top FBAR like this, the top electrodes of sound decoupling layer and bottom FBAR has constituted first capacitor C
P
For the 2nd CRF, in the top electrodes of bottom FBAR and the bottom electrode of top FBAR any one is connected electrically to input port, when the top electrodes of bottom FBAR is connected electrically to input port, the top of top FBAR and bottom electrode are connected electrically to first and second output ports respectively, and the bottom electrode ground connection of bottom FBAR, when the bottom electrode of top FBAR is connected electrically to input port, bottom and the top electrodes of bottom FBAR are connected electrically to first and second output ports respectively, and the top electrodes ground connection of top FBAR, the bottom electrode of top FBAR like this, the top electrodes of sound decoupling layer and bottom FBAR constituted second capacitor C '
PWhen the top electrodes of bottom FBAR is connected electrically to input port, building-out capacitor C
bElectrical couplings between the top electrodes of the top electrodes of top FBAR and bottom FBAR, when the bottom electrode of top FBAR is connected electrically to input port, building-out capacitor C
bElectrical couplings is between the bottom electrode of the bottom electrode of bottom FBAR and top FBAR.
For a CRF, any one in the bottom electrode of the top electrodes of top FBAR and bottom FBAR is connected electrically to input port, and the another one electrode is connected electrically to output port, the bottom electrode ground connection of the top electrodes of bottom FBAR and top FBAR;
For the 2nd CRF, in the bottom electrode of bottom FBAR and the top electrodes of top FBAR any one is connected electrically to input port, when the bottom electrode of bottom FBAR is connected electrically to input port, the top electrodes of top FBAR and bottom electrode are connected electrically to first and second output ports respectively, and the top electrodes ground connection of bottom FBAR, when the top electrodes of top FBAR is connected electrically to input port, bottom and the top electrodes of bottom FBAR are connected respectively to first and second output ports, and the bottom electrode ground connection of top FBAR, the bottom electrode of top FBAR like this, the top electrodes of sound decoupling layer and bottom FBAR has constituted the port direct-to-ground capacitance C ' of an inside
PWhen the bottom electrode of bottom FBAR is connected electrically to input port, building-out capacitor C
bElectrical couplings between the top electrodes of the top electrodes of top FBAR and bottom FBAR, when the top electrodes of top FBAR is connected electrically to input port, building-out capacitor C
bElectrical couplings is between the bottom electrode of the bottom electrode of bottom FBAR and top FBAR.
Described building-out capacitor is the outer separate capacitor of sheet, is embedded in electric capacity stacked or printed circuit board (PCB) or substrate, or electric capacity on the sheet that integrates with filter.
The structural arrangements of acoustical coupling device can be connected with spread bandwidth with one or more impedance matching networks that comprise inductance and/or electric capacity and reduce passband ripple, impedance matching network can be coupled to the input port of a CRF or first output port or second output port of the 2nd CRF, perhaps between a CRF output port and the 2nd CRF input port.
Acoustical coupling device of the present invention utilizes the electric capacity that decoupling layer and its upper/lower electrode constitute in the coupled resonance filter, has greatly strengthened the roll-off characteristic of filter under the situation that does not increase additional technical steps; For the coupled resonance filter with balance output port, the present invention has eliminated the asymmetry of output port direct-to-ground capacitance or feedback capacity by introducing building-out capacitor, has improved the amplitude and the phase imbalance of coupled resonance filter.
Description of drawings
Figure 1A is the acoustical device profile of first kind of form of the present invention;
Figure 1B is the equivalent circuit diagram of the acoustical coupling device shown in Figure 1A;
Fig. 2 A is the profile of the acoustical device of second kind of form of the present invention;
Fig. 2 B is the equivalent circuit diagram of the acoustical coupling device shown in Fig. 2 A;
Fig. 3 A is the profile of the acoustical device of the third form of the present invention;
Fig. 3 B is the equivalent circuit diagram of the acoustical coupling device shown in Fig. 3 A;
Fig. 4 A is the profile of the acoustical device of the 4th kind of form of the present invention;
Fig. 4 B is the equivalent circuit diagram of the acoustical coupling device shown in Fig. 4 A;
Fig. 5 A is the profile of the acoustical device of the 5th kind of form of the present invention;
Fig. 5 B is the equivalent circuit diagram of the acoustical coupling device shown in Fig. 5 A;
Fig. 6 A is the profile of the acoustical device of the 6th kind of form of the present invention;
Fig. 6 B is the equivalent circuit diagram of the acoustical coupling device shown in Fig. 6 A;
Fig. 7 A is the profile of the acoustical device of the 7th kind of form of the present invention;
Fig. 7 B is the equivalent circuit diagram of the acoustical coupling device shown in Fig. 7 A;
Fig. 8 A is the profile of the acoustical device of the 8th kind of form of the present invention;
Fig. 8 B is the equivalent circuit diagram of the acoustical coupling device shown in Fig. 8 A;
Fig. 9 is the acoustical coupling device filtering characteristic shown in Fig. 4 A and Fig. 8 A, does not have electric capacity between the input and output port of a CRF and the 2nd CRF;
Figure 10 is the filtering characteristic of the acoustical coupling device shown in Figure 1A, 2A, 3A, 5A, 6A and the 7A, has electric capacity between the input and output port of a CRF and/or the 2nd CRF;
Figure 11 is the non-equilibrium amplitude and the phase imbalance phenomenon to balance filter of the uncompensated electric capacity of output port;
Figure 12 is non-equilibrium amplitude and the phase imbalance phenomenon to balance filter that output port has building-out capacitor.
Embodiment
Below in conjunction with embodiment and accompanying drawing acoustical coupling device of the present invention is made a detailed description.
The explanation that the present invention will carry out in conjunction with literal and accompanying drawing has provided representative instances more of the present invention in the accompanying drawings.There are a lot of avatars in this patent, yet this patent is not limited to example given here.And providing of these forms is for this patented technology better being illustrated and understand, and the scope of application of this patent of summary that can be complete.Similar reference symbol refers to similar structure division.
Below will carry out more detailed concrete description to this patent by 1-12 with reference to the accompanying drawings.
With reference to Figure 1A, showed first kind of form of the present invention, the structure of acoustical coupling device 100.Acoustical coupling device 100 has a CRF (coupled resonance filter) the 110 and the 2nd CRF 150.The one CRF 110 comprises bottom FBAR (thin film bulk acoustic resonator) 120, top FBAR 140 and to be clipped in the sound decoupling layer 130 between bottom FBAR 120 and the top FBAR 140.Bottom FBAR 120 comprises bottom electrode 122, and the top electrodes 126 adjacent with sound decoupling layer 130 is clipped in the piezoelectric layer 124 between bottom electrode 122 and the top electrodes 126.Top FBAR 140 comprises the bottom electrode 142 adjacent with sound decoupling layer 130, top electrodes 146, and be clipped in piezoelectric layer 144 between bottom electrode 142 and the top electrodes 146.
The input port 112 of the one CRF 110 is connected electrically on the bottom electrode 142 of top FBAR 140, and the output port 114 of a CRF 110 is connected electrically on the top electrodes 126 of bottom FBAR 120.Bottom electrode 122 ground connection of the top electrodes 146 of top FBAR 140 and bottom FBAR 120.The sound decoupling layer 130 that is clipped between the bottom electrode 142 of the bottom top electrodes of FBAR 120 and top FBAR 140 is made of dielectric material.Therefore, sound decoupling layer 130, the top electrodes 126 of bottom FBAR 120 and the bottom electrode 142 of top FBAR 140 have constituted capacitor C
P, the nearly band of CRF 110 suppresses to be improved like this, and roll-off characteristic improves.In addition, top electrodes 146 ground connection of the bottom electrode 122 of bottom FBAR 120 and top FBAR 140.
The 2nd CRF (coupled resonance filter) 150 comprises bottom FBAR 160, top FBAR 180, and to be clipped in the sound decoupling layer 170 between bottom FBAR 160 and the top FBAR 180.Bottom FBAR (thin film bulk acoustic resonator) 160 comprises bottom electrode 162, the top electrodes 166 adjacent with sound decoupling layer 170 and be clipped in bottom electrode 162 and top electrodes 166 between piezoelectric layer 164.Top FBAR 180 comprises the bottom electrode 182 adjacent with sound decoupling layer 170, top electrodes 186, and be clipped in piezoelectric layer 184 between bottom electrode 182 and the top electrodes 186.
The input port 152 of the 2nd CRF 150 is connected electrically on the bottom electrode 162 of bottom FBAR 160, and the output port 154 of the 2nd CRF 150 is connected electrically on the top electrodes 186 of top FBAR 180.
Although the capacitor C between a CRF 100 input and output ports
PImproved the nearly band inhibition of device and improved roll-off characteristic, the stopband that it may damage away from transmission zero frequency place suppresses.Therefore, be necessary to remove the decoupling layer capacitance in some cases, can be by the electrode grounding of decoupling layer above and below be realized.In order to realize closely suppressing bottom electrode 182 ground connection of the top electrodes 166 of the bottom FBAR 160 of the 2nd CRF 150 and top FBAR 180 fast simultaneously with roll-off characteristic and desirable band far away.Because close on two electrodes while ground connection of decoupling layer 170, the coupling capacitance of the 2nd CRF 150 is eliminated.
In this canonical form in Figure 1A, the output port 114 of a CRF 100 and the input port 152 of the 2nd CRF 150 interconnect, and such CRF 110 and the 2nd CRF 150 are cascaded.
(do not show in the drawings) that in an interchangeable form input port of a CRF 110 is connected electrically on the top electrodes 126 of bottom FBAR 120, the output port of a CRF 110 is connected electrically on the bottom electrode 142 of top FBAR 140.The output port 154 that the input port 152 of the 2nd CRF 150 is connected electrically to top electrodes 186, the two CRF150 of top FBAR 180 is connected electrically on the bottom electrode 162 of bottom FBAR 160.
Figure 1B has showed the equivalent electric circuit of acoustical coupling device shown in Figure 1A.Signal is input to the input port 112 of a CRF 110, by having internal capacitance C
PA CRF 110, be sent to the input port 152 of the 2nd CRF 150 through the output port 114 of a CRF 110, then by the 2nd CRF 150, by output port 154 outputs of CRF 150.In a form, also can increase perhaps integrated capacitance on the sheet of sheet dispatch from foreign news agency between the input port 112 of a CRF 110 and the output port 114.
With reference to figure 2A, showed another kind of form of the present invention, the structure of acoustical coupling device 200.Acoustical coupling device 200 has a CRF 210 and the 2nd CRF 250.The structure of the one CRF 210 and the 2nd CRF 250 is similar with the 2nd CRF 150 to a CRF 110 of the acoustical coupling device 100 shown in Figure 1A.The output port 214 of the one CRF 210 and the input port 252 of the 2nd CRF 250 are electrically connected mutually, and such CRF 210 and the 2nd CRF 250 are connected in series.
The input port 212 of the one CRF 210 is connected electrically on the top electrodes 246 of top FBAR 240, and the output port 214 of a CRF 210 is connected electrically on the bottom electrode 222 of bottom FBAR 220.The bottom electrode 242 of top FBAR 240 and the top electrodes 226 of bottom FBAR 220 be ground connection all, like this, does not have electric capacity and be based upon with on the decoupling layer 230 between the top electrodes 226 of the bottom electrode 242 that is clipped in top FBAR 240 and bottom FBAR 220.
The input port 252 of the 2nd CRF 250 is connected electrically on the top electrodes 266 of bottom FBAR 260, and the output port 254 of the 2nd CRF 250 is connected electrically on the bottom electrode 282 of top FBAR 280.Bottom electrode 262 ground connection of the top electrodes 286 of top FBAR 280 and bottom FBAR 260.The sound decoupling layer 270 that is clipped between the top electrodes 266 of the bottom electrode 282 of top FBAR 280 and bottom FBAR 260 is made of dielectric material.Therefore, sound decoupling layer 270, the top electrodes 266 of bottom FBAR 260 and the bottom electrode 282 of top FBAR 280 constituted capacitor C '
P, just between the input and output port of the 2nd CRF 250, have electric capacity.Therefore, because capacitor C '
PExistence, near passband, can produce two V fonts.This can increase nearly band inhibition of device greatly and improve roll-off characteristic.In an example, in a form, the sheet dispatch from foreign news agency perhaps on the sheet integrated capacitance also can be connected between the input port 252 and output port 254 of a CRF 110.
In order to realize simultaneously that nearly band roll-offs fast and good band far away suppresses, the coupling capacitance among the CRF 210 need be by with the bottom electrode 242 of the top electrodes 226 of bottom FBAR 220 and top FBAR 240 ground connection all.
According to the present invention, the input and output port of a CRF 210 and the 2nd CRF 250 can be connected on other electrodes.For example, in a kind of form, the input port 212 of a CRF 210 is connected electrically on the bottom electrode 222 of bottom FBAR 220, and the output port 214 of a CRF 210 is connected electrically on the top electrodes 246 of top FBAR 240.The input port 252 of the 2nd CRF250 is connected electrically on the bottom electrode 282 of top FBAR 280, and the output port 254 of the 2nd CRF 250 is connected electrically on the top electrodes 266 of bottom FBAR 260.
In addition, acoustical coupling device 200 can be optionally be connected with spread bandwidth and reduces passband ripple with one or more inductance and/or electric capacity acoustic impedance matching networks of comprising, impedance matching network can be coupled to the input port 212 of a CRF 210 or the output port 254 of the 2nd CRF 250, perhaps between a CRF 210 output ports 214 and the 2nd CRF 250 input ports 252.
Fig. 2 B has showed the equivalent electric circuit of the acoustical coupling device 200 among Fig. 2 A.Signal is input to the input port 212 of a CRF 210, by a CRF 210, is sent to the input port 252 of the 2nd CRF 250 through the output port 214 of a CRF 210, then by having internal capacitance C '
PThe 2nd CRF 250, by output port 252 output of CRF 250.
With reference to figure 3A, showed another kind of form of the present invention, acoustical coupling device 300.Acoustical coupling device 300 has a CRF310 and the 2nd CRF 350.The structure of the one CRF310 and the 2nd CRF 350 has similar structure to acoustical coupling device 100 shown in Figure 1.Equally, a CRF310 and the 2nd CRF 350 interconnect with the series connection form.
The input port 312 of the one CRF310 is connected electrically on the bottom electrode 342 of top FBAR 340, and the output port 314 of a CRF310 is connected electrically on the top electrodes 326 of bottom FBAR 320.Bottom electrode 322 ground connection of the top electrodes 346 of top FBAR 340 and bottom FBAR 320.The sound decoupling layer 330 that is clipped between the top electrodes 326 of the bottom electrode 342 of top FBAR 340 and bottom FBAR 320 is formed by dielectric material, therefore at sound decoupling layer 330, constitute first capacitor C between the top electrodes 326 of bottom FBAR 320 and the bottom electrode 342 of top FBAR 340
P
The input port 352 of the 2nd CRF 350 is connected electrically on the top electrodes 366 of bottom FBAR 360, and the output port 354 of the 2nd CRF 350 is connected electrically on the bottom electrode 382 of top FBAR 380.Bottom electrode 362 ground connection of the top electrodes 386 of top FBAR 380 and bottom FBAR 360.Being clipped in the sound decoupling layer that forms between the top electrodes 366 of the bottom electrode 382 of top FBAR 380 and bottom FBAR360 370 is made of dielectric material.Therefore, sound decoupling layer 370, the bottom electrode 382 of the top electrodes of bottom FBAR 360 and top FBAR 380 constituted second capacitor C '
PIn an example, first and second capacitor C
PAnd C '
PAlso can replace, for example, be connected respectively to the sheet dispatch from foreign news agency integrated capacitance on the sheet perhaps of the input and output port of a CRF and the 2nd CRF by the electric capacity of other types.
In this canonical form shown in Fig. 3 A, a CRF310 and the 2nd CRF 350 comprise an electric capacity.Therefore, acoustical coupling device 300 has the roll-off characteristic that is exceedingly fast and stronger nearly band suppresses.
Other collocation forms of input/output port also can be used to realize the present invention.For example, the input port 312 of a CRF310 is connected electrically on the top electrodes 326 of bottom FBAR 320 in an example, and the output port 314 of a CRF310 is connected electrically on the bottom electrode 342 of top FBAR 340.The input port 352 of the 2nd CRF 350 is connected electrically on the bottom electrode 382 of top FBAR 380, and the output port 354 of the 2nd CRF 350 is connected electrically on the top electrodes 366 of bottom FBAR 360.
Similarly, acoustical coupling device 300 also can be configured to the form that is connected with one or more impedance matching networks that comprise inductance and/or electric capacity with spread bandwidth with reduce passband ripple, impedance matching network can be coupled to the input port 312 of a CRF310 or the output port 354 of the 2nd CRF 350, perhaps between a CRF310 output port 314 and the 2nd CRF 350 input ports 352.
Fig. 3 B has showed the equivalent electric circuit of the acoustical coupling device 300 shown in Fig. 3 A.At work, signal is by input port 312 inputs of a CRF310, through having the first internal capacitance C
PA CRF310, be transferred to the input port 352 of the 2nd CRF 350 by the output port 314 of a CRF310, then through having second capacitor C '
PThe 2nd CRF 350, at last by output port 354 outputs of the 2nd CRF 350.
With reference to figure 4A, showed the acoustical coupling device 400 of the another kind of form of the present invention.This acoustical coupling device has a CRF 410 and the 2nd CRF 450.The structure of the one CRF 410 and the 2nd CRF 450 is similar with the 2nd CRF 150 to the CRF 110 among Fig. 1.
Shown in Fig. 4 A, the input port 412 of a CRF 410 is connected electrically on the top electrodes 446 of top FBAR 440, and the output port 414 of a CRF 410 is connected electrically on the bottom electrode 422 of bottom FBAR 420.In addition, top electrodes 426 ground connection of the bottom electrode 442 of top FBAR 440 and bottom FBAR 420.Therefore, in the sound decoupling layer 430 of a CRF 410, there is not electric capacity.
The input port 452 of the 2nd CRF 450 is connected electrically on the bottom electrode 462 of bottom FBAR 460, and the output port 454 of the 2nd CRF 450 is connected electrically on the top electrodes 486 of top FBAR 480.In addition, bottom electrode 482 ground connection of the top electrodes 466 of bottom FBAR 460 and top FBAR 480.Therefore on the sound decoupling layer 470 of the 2nd CRF 450, there is not electric capacity.
Owing to eliminated the electric capacity on a CRF 410 and the 2nd CRF 450, acoustical coupling device 400 can not produce transmission zero at nearly band, suppresses yet can improve band far away greatly, when need the strong application that suppresses very useful at the frequency place away from passband.
The person skilled in art can realize the present invention to the structural arrangements that input port and output port carry out other.For example, in an example, the input port 412 of a CRF 410 is connected electrically on the bottom electrode 422 of bottom FBAR 420, and the output port 414 of a CRF 410 is connected electrically on the top electrodes 446 of top FBAR 440.The input port 452 of the 2nd CRF 450 is connected electrically on the top electrodes 486 of top FBAR 480, and the output port 454 of the 2nd CRF 450 is connected electrically on the bottom electrode 462 of bottom FBAR 460.
Similarly, acoustical coupling device 400 also can be configured to the form that is connected with one or more impedance matching networks that comprise inductance and/or electric capacity with spread bandwidth with reduce passband ripple, impedance matching network can be coupled to the input port 412 of a CRF410 or the output port 454 of the 2nd CRF 450, perhaps between a CRF 410 output ports 414 and the 2nd CRF450 input port 452.
With reference to figure 4B, showed the equivalent electric circuit of the acoustical coupling device 400 shown in Fig. 4 A.At work, signal through a CRF 410, is transferred to the input port 452 of the 2nd CRF 450 by input port 412 inputs of a CRF410 by the output port 414 of a CRF 410, through the 2nd CRF 450, export by the output port 454 of the 2nd CRF 450 at last then.
Although the acoustical coupling layer capacitance helps to increase the non-equilibrium roll-off characteristic that arrives the nearly band of non-equilibrium filter, it can cause serious amplitude and phase imbalance problem to balance filter for non-equilibrium, this be since the asymmetric port that non-equilibrium sound decoupling layer in balance filter produces over the ground or feedback capacity cause.This balance phenomenon can pass through on other balance output ports and ground or connect the electric capacity of an equivalence between the input and output port of the 2nd CRF, and is extremely shown in Figure 8 as Fig. 5.In Fig. 5 to Fig. 8, the acoustical coupling device comprises a CRF, the building-out capacitor C of the 2nd CRF of electrical couplings to the CRF and electrical couplings to the two CRF
bThe structure of the one CRF and the 2nd CRF is similar with the 2nd CRF to a CRF of above-mentioned elaboration, and difference is that the 2nd CRF has an input port and two different output ports: first output port 656/756/856
With second output port 658/758/858
With reference to figure 5A, showed a kind of form of the present invention, acoustical coupling device 500.Acoustical coupling device 500 has a CRF 510 and the 2nd CRF 550.The one CRF 510 has the structure similar with the CRF 110 among Fig. 1, uses electric capacity between input and output port, produces V font transmission characteristic near being implemented in passband.
In the form shown in Fig. 5 A, the input port 512 of a CRF 510 is connected electrically on the bottom electrode 542 of top FBAR 540, and the output port 514 of a CRF 510 is connected electrically on the top electrodes 526 of bottom FBAR 520.The sound uncoupling layer 530 that is clipped between the top electrodes 526 of the bottom electrode 542 of top FBAR 540 and bottom FBAR 520 is formed by dielectric material.The bottom electrode ground connection of the top electrodes of top FBAR 540 and bottom FBAR 520.At work, such structural arrangements can make uncoupling layer 530, and the top electrodes 526 of bottom FBAR 520 and the bottom electrode of top FBAR 540 542 constitute capacitor C
PIn a kind of form, capacitor C
PAlso can replace by the electric capacity of the other types between the bottom electrode 542 of top electrodes 526 that is connected bottom FBAR 520 and top FBAR 540.
The output port 514 of the one CRF 510 is connected electrically on the input port 552 of the 2nd CRF 550, and input port 552 is connected electrically on the bottom electrode 562 of bottom FBAR 560.First output port 556 of the 2nd CRF 550 and second output port 558 are connected respectively on the top electrodes 586 and bottom electrode 582 of top FBAR 580.In addition, top electrodes 566 ground connection of bottom FBAR 560.The sound decoupling layer 570 that is clipped between the top electrodes 566 of the bottom electrode 582 of top FBAR 580 and bottom FBAR 560 is formed by dielectric material.Therefore, at work, sound decoupling layer 570, the top electrodes 566 of bottom FBAR 560 and the bottom electrode 582 of top FBAR 580 have constituted port direct-to-ground capacitance C '
PThat is to say, between second output port 558 and ground, exist capacitor C '
PThere is direct-to-ground capacitance in second output port 558, yet, between first output port 556 and ground, there is not electric capacity.This asymmetric port direct-to-ground capacitance has a strong impact on the amplitude and the phase equilibrium of acoustical coupling device 500.The port of a redeeming is building-out capacitor C over the ground
bBe electrically connected between the top electrodes and ground of top FBAR 580.Have and the coupling capacitance C ' between second output port 558 and ground
PThe building-out capacitor C of identical appearance value
bCan play the effect of amplitude and phase compensation.In a kind of form, the building-out capacitor C on port-ground
bCan be the outer separate capacitor of sheet, be embedded in electric capacity stacked or printed circuit board (PCB) or substrate, or electric capacity on the sheet that integrates with filter.This electric capacity is connected between top FBAR 580 and the ground.
Similarly, the other forms of structural arrangements of input and output port also can be used to realize this invention.For example, in a kind of form, the input port of a CRF 510 is connected electrically on the top electrodes 526 of bottom FBAR 520, and the output port 514 of a CRF 510 is connected electrically on the bottom electrode 542 of top FBAR 540.The input port 552 of the 2nd CRF 550 is connected electrically on the top electrodes 586 of top FBAR 580, and first and second output ports of the 2nd CRF 550 are connected electrically to respectively on the bottom electrode 562 and top electrodes 566 of bottom FBAR 560.
With reference to figure 5B, showed the equivalent electric circuit of the acoustical coupling device shown in Fig. 5 A.In the reality, signal is by input port 512 inputs of a CRF 510, through having the first internal capacitance C
PA CRF 510, be transferred to the input port 552 of the 2nd CRF 550 by the output port 514 of a CRF 510, pass through CRF550 then, respectively from being connected to building-out capacitor C over the ground
b First output port 556 and inner second output port, 558 outputs with direct-to-ground capacitance.
With reference to figure 6A, showed another kind of form of the present invention, acoustical coupling device 600.Acoustical coupling device 600 has a mutual connected in electrical series CRF 610 and the 2nd CRF 650 together.
The one CRF 610 has the similar structure with the 2nd CRF 210 shown in Figure 2.The input port 612 of the one CRF 610 is connected electrically on the top electrodes 646 of top FBAR 640, and the output port 614 of a CRF 610 is connected electrically on the bottom electrode 622 of bottom FBAR 620.Top electrodes 626 ground connection of the bottom electrode 642 of top FBAR 640 and bottom FBAR 620 do not have electric capacity to form in the sound decoupling layer 630 between the top electrodes 626 of bottom electrode 642 that is clipped in top FBAR 640 with sandwich structure and bottom FBAR 620 like this.
The input port 652 of the 2nd CRF 650 is connected electrically on the top electrodes 666 of bottom FBAR 660.First output port 656 of the 2nd CRF 650 and second output port 658 are connected electrically to respectively on the top electrodes 686 and bottom electrode 682 of top FBAR 680.Bottom electrode 662 ground connection of this outer bottom FBAR 660.
The sound decoupling layer 670 that is clipped between the top electrodes 666 of the bottom electrode 682 of top FBAR 680 and bottom FBAR 660 is formed by dielectric material.Therefore, sound decoupling layer 670, the bottom electrode 682 of top FBAR 680 and the top electrodes 666 of bottom FBAR 660 constituted capacitor C '
PIn addition, building-out capacitor C
bBe electrically connected between the top electrodes of the top electrodes 686 of top FBAR 680 and bottom FBAR 660.That is to say building-out capacitor C
bPlace between first output port 656 and input port 652 of the 2nd CRF 650.
In a kind of form, building-out capacitor C
bCapacitance and internal capacitance C '
PIdentical, this can realize amplitude and phase compensation.
In a kind of form, building-out capacitor C
bCan be the outer separate capacitor of sheet, be embedded in electric capacity stacked or printed circuit board (PCB) or substrate, or electric capacity on the sheet that integrates with filter.This electric capacity is connected between the top electrodes 666 of the top electrodes 686 of top FBAR 680 and bottom FBAR 660.
In addition, other structural arrangements of input and output port also can realize the present invention.For example, in a kind of form, the input port 612 of a CRF 610 is connected electrically on the bottom electrode 622 of bottom FBAR 620, and the output port 614 of a CRF 610 is connected electrically on the top electrodes 646 of top FBAR 640.The input port 652 of the 2nd CRF 650 is connected electrically on the bottom electrode 682 of top FBAR 680, and first output port 656 of the 2nd CRF 650 and second output port 658 are connected electrically to respectively on the top electrodes 666 and bottom electrode 662 of bottom FBAR 660.
With reference to figure 6B, showed the equivalent electric circuit of acoustical coupling device 600 shown in Fig. 6 A.At work, signal is by input port 612 input of a CRF 610, through a CRF 610, is transferred to the input port 652 of the 2nd CRF 650 by the output port 614 of a CRF 610, then through the 2nd CRF650, respectively from being connected to building-out capacitor C
b First output port 656 and inner second output port, 658 outputs with electric capacity.
With reference to figure 7A, showed another kind of form of the present invention, acoustical coupling device 700.Acoustical coupling device 700 has a mutual connected in electrical series CRF 710 and the 2nd CRF 750 together.
The one CRF 710 has the similar structure with a CRF310 shown in Figure 3.The input port 712 of the one CRF 710 is connected electrically on the bottom electrode 742 of top FBAR 740, and the output port 714 of a CRF 710 is connected electrically on the top electrodes 726 of bottom FBAR 720.The sound decoupling layer 730 that is clipped between the top electrodes 726 of the bottom electrode 742 of top FBAR 740 and bottom FBAR 720 is formed by dielectric material, therefore at sound decoupling layer 730, constituted first capacitor C between the top electrodes 726 of bottom FBAR 720 and the bottom electrode 742 of top FBAR 740
P
The input port 752 of the 2nd CRF 750 is connected electrically on the top electrodes 766 of bottom FBAR 760.First output port 756 of the 2nd CRF 750 and second output port 758 are connected electrically to respectively on the top electrodes 786 and bottom electrode 782 of top FBAR 780.In addition, bottom electrode 762 ground connection of bottom FBAR 760.The sound decoupling layer 770 that is clipped between the top electrodes 766 of the bottom electrode 782 of top FBAR 780 and bottom FBAR 760 is made of dielectric material.Therefore, sound decoupling layer 770, the bottom electrode 782 of top FBAR 780 and the top electrodes 766 of bottom FBAR 760 constituted second capacitor C '
PIn addition, building-out capacitor C
bBe electrically connected between the top electrodes 766 of the top electrodes 786 of top FBAR 780 and bottom FBAR 760.In other words, building-out capacitor C
bBetween first output port 756 and input port 752 of second CRF 750.
In a kind of form, building-out capacitor C
bCan be the outer separate capacitor of sheet, be embedded in electric capacity stacked or printed circuit board (PCB) or substrate, or electric capacity on the sheet that integrates with filter.This electric capacity is connected between the top electrodes 766 of the top electrodes 786 of top FBAR 780 and bottom FBAR 760.
The researcher in this field also can adopt the configuration of other forms of input and output port to realize the present invention.For example, in a kind of form, the input port 712 of a CRF 710 is connected electrically on the top electrodes 726 of bottom FBAR 720, and the output port 714 of a CRF 710 is connected electrically on the bottom electrode 742 of top FBAR 740.The input port 752 of the 2nd CRF 750 is connected electrically on the bottom electrode 782 of top FBAR 780, and first output port 756 of the 2nd CRF 750 and second output port 758 are connected electrically to respectively on the bottom electrode 762 and top electrodes 766 of bottom FBAR 760.
With reference to figure 7B, showed the equivalent electric circuit of the acoustical coupling device 700 shown in Fig. 7 A.Under the working condition, signal is by input port 712 inputs of a CRF 710, through having the first internal capacitance C
PA CRF 710, be transferred to the input port 752 of the 2nd CRF 750 by the output port 714 of a CRF 710, pass through CRF750 then, respectively from being connected to building-out capacitor C
b First output port 756 and inner second output port, 758 outputs with electric capacity.
With reference to figure 8A, showed the acoustical coupling device 800 of another form that obtains according to this patent.Acoustical coupling device 800 has a CRF 810 and the 2nd CRF 850 that mutual series connection is electrically connected.
The one CRF 810 and a CRF 410 structural similarities shown in Figure 4.The input port 812 of the one CRF 810 is connected electrically on the top electrodes 846 of top FBAR 840, and the output port 814 of a CRF 810 is connected electrically on the bottom electrode 822 of bottom FBAR820.In addition, top electrodes 826 ground connection of the bottom electrode 842 of top FBAR 840 and bottom FBAR 820.Therefore, in the sound decoupling layer 830 of a CRF 810, there is not electric capacity to form.
The input port 852 of the 2nd CRF 850 is connected electrically on the bottom electrode 862 of bottom FBAR 860.First output port 856 of the 2nd CRF 850 and second output port 858 are connected electrically to respectively on the top electrodes 886 and bottom electrode 882 of top FBAR 880.In addition, top electrodes 866 ground connection of bottom FBAR 860.The sound decoupling layer 870 that is clipped between the top electrodes 866 of the bottom electrode 882 of top FBAR 880 and bottom FBAR 860 is formed by insulating material.Therefore, sound decoupling layer 870, the top electrodes 866 of bottom FBAR 860 and the bottom electrode 882 of top FBAR 880 constituted over the ground capacitor C of port '
PThat is to say, between second output port 858 and ground, exist capacitor C '
P Second output port 858 has port electric capacity over the ground, yet does not have electric capacity between first output port 856 and ground.The port direct-to-ground capacitance of this asymmetric existence has for the phase place of acoustical coupling device 800 and amplitude balance and has a strong impact on.Therefore, building-out capacitor C
bElectrical couplings is between the top electrodes 886 and ground of top FBAR 880.Building-out capacitor C
bCapacitance identical with coupling capacitance between second output port 858 and the ground with the amplitude of carrying out and phase compensation.
In a kind of form, building-out capacitor C
bCan be the outer separate capacitor of sheet, be embedded in electric capacity stacked or printed circuit board (PCB) or substrate, or electric capacity on the sheet that integrates with filter.This electric capacity is connected between the top electrodes 886 and ground of top FBAR 880.
In addition, other structural arrangements forms of input/output port also can be used to realize this invention.For example, in a kind of form, the input port 812 of a CRF 810 is connected electrically on the bottom electrode 822 of bottom FBAR 820, and the output port 814 of a CRF 810 is connected electrically on the top electrodes 846 of top FBAR 840.The input port 852 of the 2nd CRF 850 is connected electrically on the top electrodes 886 of top FBAR 880, and first output port 856 of the 2nd CRF 850 and second output port 858 are connected electrically to respectively on the bottom electrode 862 and top electrodes 866 of bottom FBAR 860.
With reference to figure 8B, showed the equivalent electric circuit of the acoustical coupling device 800 shown in Fig. 8 A.Under the working condition, signal is by input port 812 input of a CRF 810, through a CRF 810, is transferred to the input port 852 of the 2nd CRF 850 by the output port 814 of a CRF 810, through the 2nd CRF 850, respectively from being connected to building-out capacitor C over the ground
b First output port 856 and inner second output port, 858 outputs with direct-to-ground capacitance.
Similarly, acoustical coupling device 500 shown in Fig. 5-8,600,700, also can be configured to the form that is connected with one or more impedance matching networks that comprise inductance and/or electric capacity with spread bandwidth with reduce passband ripple with 800, impedance matching network can be coupled to first input end mouth or first output port or second output port, perhaps between first output port and second input port.
Fig. 9 has showed the filter transmission characteristic that does not have electric capacity between a CRF input and output port shown in Fig. 4 A and Fig. 8 A.
Figure 10 has showed as Figure 1A, 2A, 3A, 5A, 6A, and the filter transmission characteristic that has electric capacity between the input and output port of a CRF shown in the 7A.Wherein know and shown a pair of transmission zero there be (or being called the V font).
As among Fig. 9 and Figure 10 see that a CRF exists the roll-off characteristic of electric capacity more sharp-pointed, a CRF does not exist the band far away of electric capacity to suppress to be improved.
Figure 11 has showed Fig. 5 A, and 6A does not exist the amplitude and the phase imbalance phenomenon of the non-equilibrium-balance filter of building-out capacitor at the 2nd CRF input and output port shown in 7A and the 8A.
Figure 12 has showed Fig. 5 A, and 6A exists the amplitude and the phase imbalance phenomenon of the non-equilibrium-balance filter of building-out capacitor at the 2nd CRF input and output port shown in 7A and the 8A.Because the effect of building-out capacitor, balance phenomenon has obtained very big improvement.
In a word, this patent has been enumerated the acoustical coupling device that has electric capacity, can satisfy strict nearly band and suppress requirement.Because utilized the capacitance characteristic of sound decoupling layer, do not needed to increase extra processing step.
Above-mentioned purpose to several formal descriptions among the present invention only is in order to illustrate that these explanations are not in order to summarize all possible forms of the invention, can not limit certain concrete form of invention yet.Based on method described above, the present invention can also make many modifications and variations.
The selection of example and description are for the principle of explaining this patent and practical application, so that the excitation person skilled in art uses this patent and various example, and carry out suitable modification according to special-purpose.In not departing from these patent spirit and scope, it is easily that the technology of using this field changes example.Therefore, the scope of this patent is defined by accessory claim, rather than is determined by the example of foregoing description and wherein discussion.
Claims (15)
1. acoustical coupling device is characterized in that: comprising:
The one CRF and with the 2nd CRF of a CRF electrical couplings, wherein, the one CRF and the 2nd CRF have input port, output port, bottom FBAR, the sound decoupling layer that on the FBAR of bottom, forms, the top FBAR that on sound decoupling layer, forms, bottom FBAR and top FBAR have a bottom electrode, the piezoelectric layer that on bottom electrode, forms, the top electrodes that on piezoelectric layer, forms, and the input port of each CRF and output port all be connected electrically to respectively on relative bottom electrode and the top electrodes, and sound decoupling layer is between relative bottom electrode and top electrodes like this;
The output port of the one CRF is connected electrically to the input port of the 2nd CRF.
2. acoustical coupling device according to claim 1 is characterized in that, described sound decoupling layer is to be made of dielectric material.
3. acoustical coupling device according to claim 1, it is characterized in that, for a CRF, in the top electrodes of the bottom electrode of top FBAR and bottom FBAR any one is connected to input port, the another one electrode is connected to output port, the bottom electrode ground connection of the top electrodes of top FBAR and bottom FBAR, the bottom electrode of top FBAR like this, the top electrodes of sound decoupling layer and bottom FBAR has constituted a capacitor C
P
For the 2nd CRF, any one in the top electrodes of the bottom electrode of bottom FBAR and top FBAR is connected electrically to input port, and another one is connected electrically to output port, the bottom electrode ground connection of the top electrodes of bottom FBAR and top FBAR.
4. acoustical coupling device according to claim 1, it is characterized in that, for a CRF, in the bottom electrode of the top electrodes of top FBAR and bottom FBAR any one is connected electrically to input port, the another one electrode is connected electrically to output port, the bottom electrode ground connection of the top electrodes of bottom FBAR and top FBAR;
For the 2nd CRF, in the top electrodes of bottom FBAR and the bottom electrode of top FBAR any one is connected electrically to input port, the another one electrode is connected electrically to output port, the bottom electrode ground connection of the top electrodes of top FBAR and bottom FBAR, the bottom electrode of top FBAR like this, the top electrodes of sound decoupling layer and bottom FBAR constituted capacitor C '
P
5. acoustical coupling device according to claim 1, it is characterized in that, for a CRF, in the top electrodes of the bottom electrode of top FBAR and bottom FBAR any one is connected electrically to input port, the another one electrode is connected electrically to output port, the bottom electrode ground connection of the top electrodes of top FBAR and bottom FBAR, the bottom electrode of top FBAR like this, the top electrodes of sound decoupling layer and bottom FBAR has constituted first capacitor C
P
For the 2nd CRF, in the top electrodes of bottom FBAR and the bottom electrode of top FBAR any one is connected electrically to input port, another one is connected electrically to output port, the bottom electrode ground connection of the top electrodes of top FBAR and bottom FBAR, the bottom electrode of top FBAR like this, the top electrodes of sound decoupling layer and bottom FBAR constituted second capacitor C '
P
6. acoustical coupling device according to claim 1, it is characterized in that, for a CRF, in the bottom electrode of the top electrodes of top FBAR and bottom FBAR any one is connected electrically to input port, the another one electrode is connected electrically to output port, the bottom electrode ground connection of the top electrodes of bottom FBAR and top FBAR;
For the 2nd CRF, any one in the top electrodes of the bottom electrode of bottom FBAR and top FBAR is connected electrically to input port, and another one is connected electrically to output port, the bottom electrode ground connection of the top electrodes of bottom FBAR and top FBAR.
7. acoustical coupling device according to claim 1, it is characterized in that, the structural arrangements of described acoustical coupling device is connected with spread bandwidth and reduces passband ripple with one or more impedance matching networks that comprise inductance and/or electric capacity, impedance matching network is coupled to the input port of a CRF or the output port of the 2nd CRF, perhaps between a CRF output port and the 2nd CRF input port.
8. acoustical coupling device is characterized in that: comprising:
The one CRF, the 2nd CRF with a CRF electrical couplings, building-out capacitor with the 2nd CRF electrical couplings, the one CRF and the 2nd CRF have a bottom FBAR, at sound decoupling layer that forms on the FBAR of bottom and the top FBAR that on sound decoupling layer, forms, bottom FBAR and top FBAR have a bottom electrode, and the piezoelectric layer that forms on bottom electrode is between the top electrodes that forms on the piezoelectric layer;
The one CRF has input port and the output port that is connected electrically to respectively on relative bottom electrode and the top electrodes, and the sound decoupling of such CRF is placed between relative bottom electrode and the top electrodes;
The 2nd CRF has and is connected electrically to the relative bottom electrode respectively, input port on top electrodes and another bottom electrode, first output port and second output port, the sound decoupling of such the 2nd CRF is placed on the relative bottom electrode, top electrodes and another bottom electrode;
The output port of the one CRF is connected electrically to the input port of the 2nd CRF.
9. acoustical coupling device according to claim 8 is characterized in that, described sound decoupling layer is to be made of dielectric material.
10. acoustical coupling device according to claim 8, it is characterized in that, for a CRF, in the top electrodes of the bottom electrode of top FBAR and bottom FBAR any one is connected electrically to input port, the another one electrode is connected electrically to output port, the bottom electrode ground connection of the top electrodes of top FBAR and bottom FBAR, the bottom electrode of top FBAR like this, the top electrodes of sound decoupling layer and bottom FBAR has constituted a capacitor C
P
For the 2nd CRF, in the bottom electrode of bottom FBAR and the top electrodes of top FBAR any one is connected electrically to input port, when the bottom electrode of bottom FBAR is connected electrically to input port, the top electrodes of top FBAR and bottom electrode are connected electrically to first and second output ports respectively, the top electrodes ground connection of bottom FBAR, when the top electrodes of top FBAR is connected electrically to input port, bottom electrode and the top electrodes of bottom FBAR are connected electrically to first and second output ports respectively, the bottom electrode ground connection of top FBAR, the bottom electrode of top FBAR like this, the top electrodes of sound decoupling layer and bottom FBAR has constituted the port electric capacity over the ground of an inside, C '
P
For the 2nd CRF, when the bottom electrode of bottom FBAR is connected electrically to input port, building-out capacitor C
bElectrical couplings between the top electrodes of the top electrodes of top FBAR and bottom FBAR, when the top electrodes of top FBAR is connected electrically to input port, building-out capacitor C
bElectrical couplings is between the bottom electrode of the bottom electrode of bottom FBAR and top FBAR.
11. acoustical coupling device according to claim 8 is characterized in that,
For a CRF, any one in the bottom electrode of the top electrodes of top FBAR and bottom FBAR is connected electrically to input port, and the another one electrode is connected electrically to output port, the bottom electrode ground connection of the top electrodes of bottom FBAR and top FBAR;
For the 2nd CRF, in the top electrodes of bottom FBAR and the bottom electrode of top FBAR any one is connected electrically to input port, when the top electrodes of bottom FBAR is connected electrically to input port, the top of top FBAR and bottom electrode are connected electrically to first and second output ports respectively, and the bottom electrode ground connection of bottom FBAR, when the bottom electrode of top FBAR is connected electrically to input port, bottom electrode and the top electrodes of bottom FBAR are connected electrically to first and second output ports respectively, and the top electrodes ground connection of top FBAR, the bottom electrode of top FBAR like this, the top electrodes of sound decoupling layer and bottom FBAR constituted capacitor C '
P
When the top electrodes electrical couplings of bottom FBAR arrives input port, building-out capacitor C
bElectrical couplings between the top electrodes of the top electrodes of top FBAR and bottom FBAR, when the bottom electrode of top FBAR is connected electrically to input port, building-out capacitor C
bElectrical couplings is between the bottom electrode of the bottom electrode of bottom FBAR and top FBAR.
12. acoustical coupling device according to claim 8 is characterized in that,
For a CRF, in the top electrodes of the bottom electrode of top FBAR and bottom FBAR any one is connected electrically to input port, the another one electrode is connected electrically to output port, the bottom electrode ground connection of the top electrodes of top FBAR and bottom FBAR, the bottom electrode of top FBAR like this, the top electrodes of sound decoupling layer and bottom FBAR has constituted first capacitor C
P
For the 2nd CRF, in the top electrodes of bottom FBAR and the bottom electrode of top FBAR any one is connected electrically to input port, when the top electrodes of bottom FBAR is connected electrically to input port, the top of top FBAR and bottom electrode are connected electrically to first and second output ports respectively, and the bottom electrode ground connection of bottom FBAR, when the bottom electrode of top FBAR is connected electrically to input port, bottom and the top electrodes of bottom FBAR are connected electrically to first and second output ports respectively, and the top electrodes ground connection of top FBAR, the bottom electrode of top FBAR like this, the top electrodes of sound decoupling layer and bottom FBAR constituted second capacitor C '
PWhen the top electrodes of bottom FBAR is connected electrically to input port, building-out capacitor C
bElectrical couplings between the top electrodes of the top electrodes of top FBAR and bottom FBAR, when the bottom electrode of top FBAR is connected electrically to input port, building-out capacitor C
bElectrical couplings is between the bottom electrode of the bottom electrode of bottom FBAR and top FBAR.
13. acoustical coupling device according to claim 8 is characterized in that,
For a CRF, any one in the bottom electrode of the top electrodes of top FBAR and bottom FBAR is connected electrically to input port, and the another one electrode is connected electrically to output port, the bottom electrode ground connection of the top electrodes of bottom FBAR and top FBAR;
For the 2nd CRF, in the bottom electrode of bottom FBAR and the top electrodes of top FBAR any one is connected electrically to input port, when the bottom electrode of bottom FBAR is connected electrically to input port, the top electrodes of top FBAR and bottom electrode are connected electrically to first and second output ports respectively, and the top electrodes ground connection of bottom FBAR, when the top electrodes of top FBAR is connected electrically to input port, bottom and the top electrodes of bottom FBAR are connected respectively to first and second output ports, and the bottom electrode ground connection of top FBAR, the bottom electrode of top FBAR like this, the top electrodes of sound decoupling layer and bottom FBAR has constituted the port direct-to-ground capacitance C ' of an inside
PWhen the bottom electrode of bottom FBAR is connected electrically to input port, building-out capacitor C
bElectrical couplings between the top electrodes of the top electrodes of top FBAR and bottom FBAR, when the top electrodes of top FBAR is connected electrically to input port, building-out capacitor C
bElectrical couplings is between the bottom electrode of the bottom electrode of bottom FBAR and top FBAR.
14. acoustical coupling device according to claim 8 is characterized in that, described building-out capacitor is the outer separate capacitor of sheet, is embedded in electric capacity stacked or printed circuit board (PCB) or substrate, or electric capacity on the sheet that integrates with filter.
15. acoustical coupling device according to claim 8, it is characterized in that, the structural arrangements of acoustical coupling device can be connected with spread bandwidth with one or more impedance matching networks that comprise inductance and/or electric capacity and reduce passband ripple, impedance matching network can be coupled to the input port of a CRF or first output port or second output port of the 2nd CRF, perhaps between a CRF output port and the 2nd CRF input port.
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Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6107721A (en) * | 1999-07-27 | 2000-08-22 | Tfr Technologies, Inc. | Piezoelectric resonators on a differentially offset reflector |
| CN1871768A (en) * | 2003-10-30 | 2006-11-29 | 阿瓦戈科技通用Ip(新加坡)股份有限公司 | Film acoustically-coupled transformers with enhanced common mode rejection |
| US20070176710A1 (en) * | 2006-01-30 | 2007-08-02 | Tiberiu Jamneala | Impedance transforming bulk acoustic wave baluns |
-
2010
- 2010-12-20 CN CN201010596666.XA patent/CN102056037B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6107721A (en) * | 1999-07-27 | 2000-08-22 | Tfr Technologies, Inc. | Piezoelectric resonators on a differentially offset reflector |
| CN1871768A (en) * | 2003-10-30 | 2006-11-29 | 阿瓦戈科技通用Ip(新加坡)股份有限公司 | Film acoustically-coupled transformers with enhanced common mode rejection |
| US20070176710A1 (en) * | 2006-01-30 | 2007-08-02 | Tiberiu Jamneala | Impedance transforming bulk acoustic wave baluns |
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| CN102056037B (en) | 2014-08-13 |
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