Background technology
Aluminium oxide ceramics has good wear resistance, corrosion resistance, resistance to elevated temperatures, can under 1600 ℃ of high temperature, use for a long time, in addition, aluminium oxide ceramics also has good electrical insulation properties, electrical insulation capability under high frequency is particularly outstanding, every millimeter thickness can have been enumerated several Al commonly used more than the withstand voltage 15000V in the table 1
2O
3The physical property of pottery.
Several Al commonly used of table 1
2O
3The physical property of pottery
These characteristics in view of aluminium oxide ceramics, the metallization technology of aluminium oxide ceramics is accounting for crucial status in electronics industry, aluminium oxide ceramics with metal layer not only has a lot of premium properties of aluminium oxide ceramics, possess the characteristic of metal again at some regional areas, can be used for production such as high-pressure vacuum switch pipe, controllable silicon shell, integrated circuit ceramic package and various ceramic substrate circuit.
Existing commonly used aluminium oxide ceramics method for metallising is divided into following several: 1) refractory metal powder sintering process, general in 1300~1700 ℃ reducing atmosphere sintering, wherein the most representative is the Mo-Mn method; 2) chemical plating metal method comprises the ceramic surface preliminary treatment, sensitization, activation, preplating, steps such as plating and heat treatment eventually; 3) thin film metallized method, it adopts the method for evaporation or sputter, deposits tens to the hundreds of nanometer metallic film at ceramic surface.This wherein, with the refractory metal powder sintering process, particularly the Mo-Mn method is most widely used, technology is the most ripe, the Mo-Mn method mainly comprises the steps: to add the glassy phase component (mainly by Mn, Al in the Mo powder
2O
3, SiO
2, MgO and CaO form), evenly mix back and adhesive furnishing paste, with paste application or after being printed onto pottery and going up, sintering in 1300~1700 ℃ reducing atmosphere.The dominant mechanism of Mo-Mn method is glassy phase migration, and Mn forms behind the MnO and Al
2O
3Form manganese-aluminium spinelle, manganese-aluminium spinelle and then and SiO
2, reactions such as MgO and CaO generate glassy phase, because the thermal coefficient of expansion of this kind glassy phase material and Al as ceramic matrix
2O
3Close and mobile lover, a part is wherein moved in pottery gradually, and another part is then still stayed in the hole of Mo layer, combines closely with Mo, thereby at Al
2O
3The surface of pottery forms metal layer.But the metallizing paste prescription of existing Mo-Mn method and technology are not suitable for high-density high-strength aluminium oxide ceramics (density reaches more than 3.7), and there is the high problem of energy consumption in the metallizing temperature of existing Mo-Mn method about 1500 ℃.
Summary of the invention
The object of the present invention is to provide a kind of aluminium oxide ceramics metallizing paste powder, to solve the above-mentioned problems in the prior art.Paste provided by the invention can be when reducing sintering temperature with powder, obtains sintered density height, air-tightness is good and sealing-in tensile strength is high ceramic metallized layer and be applicable to that density reaches the aluminium oxide ceramics more than 3.7.
Another object of the present invention provides the preparation method of a kind of paste with powder.
Technical scheme provided by the invention is as follows:
Aluminium oxide ceramics nano metal paste powder is characterized in that, mainly comprises the component of following weight portion proportioning: 65~80 parts in Mo powder, 12~14 parts in Mn powder, Al
2O
38~12 parts in powder, SiO
22.5~7.0 parts in powder, 0.5~3 part in MgO powder, 1~5 part in CaO powder and ZrO
21~2 part in powder, wherein, Al
2O
3Powder is by nanoscale Al
2O
3Powder, submicron order Al
2O
3Powder and micron order Al
2O
3Powder is formed.
Nanoscale Al of the present invention
2O
3Powder can adopt vapor phase method, liquid phase method, solid phase method or polymer-network gel method preparation, this wherein, polymer-network gel method mainly comprises the steps: acrylamide, N, N '-methylene-bisacrylamide and aqueous solution of aluminum nitrate are evenly mixed, in mixed solution, add ammonium persulfate, after 80 ℃ of abundant down reactions, obtain gel aluminum hydroxide, after gel drying, calcining, obtain nanoscale Al
2O
3Powder.
Here said micron order Al
2O
3Powder refers to the powder that particle diameter is distributed in 1~5 μ m, submicron order Al
2O
3Powder refers to the powder that particle diameter is distributed in 100nm~1 μ m, nanoscale Al
2O
3Powder refers to particle diameter and is distributed in the following powder of 100nm.
In the embodiment that recommends, the d of Mo powder
Flat(average grain diameter) is 1.5~2.5 μ m, the d of Mn powder
FlatBe 2~3 μ m, Al
2O
3Powder, SiO
2Powder, MgO powder, CaO powder and ZrO
2The d of powder
Max(maximum particle diameter)≤5 μ m, nanoscale Al
2O
3Powder accounts for Al
2O
30.5~20% of powder gross weight.
The above-mentioned aluminium oxide ceramics nano metal paste preparation method of powder comprises following step:
1) takes by weighing Mo powder, Mn powder, Al by above-mentioned weight proportion
2O
3Powder, SiO
2Powder, MgO powder, CaO powder and ZrO
2Powder places baking oven to dry the powder that is taken by weighing then;
2) in the oven dry powder that obtains in the absolute ethyl alcohol adding step 1 that takes by weighing the castor bean oil that accounts for above-mentioned powder gross weight 0.1~0.5% and account for above-mentioned powder gross weight 45~55%, obtain suspension, above-mentioned suspension ball milling is even;
3) place ultrasonic wave to vibrate 25~35 minutes the suspension behind the ball milling, the metallization powder is mixed in solution and good dispersion;
4) will place baking oven to dry through the suspension of ultrasonic vibration, obtain powder for ceramic metallizing paste.
Owing to comprised nanometer Al in the raw material of preparation powder for ceramic metallizing paste
2O
3Powder, the dispersion technology of nanopowder are the most essential steps that superfine powder is used.Superfine powder has following characteristics in liquid dispersant: 1) sinking speed of superfine powder in liquid phase is slow, and suspension time is long; 2) in disperse system, particle diameter not in time increase and increase.Therefore, superfine powder is very easily reunited, and among the present invention, accounts for the castor bean oil of powder weight 0.1~0.5% by adding in powder, and in conjunction with ultrasonic technology, can solve nanometer Al well
2O
3The agglomeration traits of powder.
In the embodiment that recommends, the step of suspension ball milling is as follows in the step 2: in the general milling machine with 30~40 rev/mins of ball millings after 20~28 hours, again in planetary ball mill with 350~450 rev/mins of ball millings 5~7 hours.
The abrading-ball that general milling machine and planetary ball mill use is advisable with agate or high aluminium ball.
In the embodiment that recommends, the bake out temperature of the baking step in step 1 or the step 4 is 70~85 ℃, and the time is 1.5~3h.
After the acquisition paste was with powder, to the adhesive that wherein adds certain viscosity, ball milling obtained paste after 4~8 hours in vibrator or planetary ball mill.This wherein forms and to be coated with the butyl acetate solution that the employed adhesive of cream is a celluloid (viscosity is 70~80cp), and forming serigraphy is that (viscosity is 2~6pa.s) for the terpineol solution of ethyl cellulose with the adhesive that is coated with cream by hand.
The Al that relates among the present invention
2O
3Powder can be a-Al
2O
3Powder, β-Al
2O
3Powder or?-Al
2O
3Powder.
Compared with prior art, the present invention has following characteristics:
1) paste is with the above-mentioned prescription of selecting rational proportion in the powder for use, and adopts nanoscale, submicron order and micron order Al
2O
3The compound new method of burning altogether of powder is because Al
2O
3Nano particle has the advantages that the surface energy is high, surface atom quantity is many, neighbour's coordinations of surface atom are complete, activity is big, and therefore, interior energy required during the nano particle fusing is less, and fusing point sharply descends, in addition, and owing to nanometer Al
2O
3The introducing of powder, above-mentioned paste powder metal layer bulk density height before sintering, and make glassy phase better infiltration be arranged to the Mo matrix, the glassy phase in the metal layer further is evenly distributed, can obtain the metal layer of higher density behind the sintering, improve sealing strength; Simultaneously, because nanometer Al
2O
3The existence of powder, the capillary model radius of metal layer diminishes, and helps in the pottery glassy phase and moves in metal layer through capillary attraction, surface tension under sintering temperature; Therefore, this method have sintering temperature low (1400~1450 ℃/60min), sintered density height (〉=6.2g/cm
3), good (Q≤10 of air-tightness
-11Pa.m
3/ s) and sealing-in tensile strength height (ASTM method) σ
DrawThe characteristics of 〉=125MPa;
2) paste is with a small amount of ZrO that contains in the powder
2The metal layer and the reactivity of pottery are strengthened, improve the bonding strength of metal layer and pottery.
The specific embodiment
Embodiment 1
1) by weight, takes by weighing Mo powder 700g respectively, Mn powder 120g, Al
2O
3Powder 85g, SiO
2Powder 35g, MgO powder 30g, CaO powder 10g and ZrO
2Powder 20g, this wherein, the d of Mo powder
FlatBe 1.5~2.5 μ m, the d of Mn powder
FlatBe 2~3 μ m, Al
2O
3Powder, SiO
2Powder, MgO powder, CaO powder and ZrO
2The d of powder
Max≤ 5 μ m, and Al
2O
3The nanometer Al that contains 0.95g in the powder
2O
3Powder; The powder that takes by weighing is dried in baking oven, and oven temperature is 80 ℃, and drying time is 2 hours;
2) powder with oven dry adds in the ball grinder, and the castor bean that adds 1.8g simultaneously in ball grinder is oily and the absolute ethyl alcohol of 450g, obtain suspension, place the general milling machine with 40 rev/mins of ball millings after 20 hours ball grinder, again in planetary ball mill with 450 rev/mins of ball millings 5 hours, above-mentioned suspension ball milling is even;
3) suspension behind the ball milling is placed ultrasonic wave vibration 25 minutes, the metallization powder is mixed in solution and good dispersion;
4) will place baking oven through the suspension of ultrasonic vibration, continuous drying 2h under 80 ℃ of temperature obtains powder for ceramic metallizing paste;
5) to above-mentioned paste adding 180g adhesive in the powder, adhesive is the terpineol solution of ethyl cellulose, and wherein, the weight ratio of ethyl cellulose and terpinol is 20: 1; Ball milling obtained the ceramic metallizing paste that can print after 4~8 hours after mixing in vibrator or planetary ball mill;
6) an amount of paste is coated on the stainless (steel) wire 50 94%Al
2O
3Ceramic (isostatic compaction) prints, and print thickness is 50 μ m, and the layer of paste after the printing is dried down at 80 ℃; Wherein, the size of the mesh of stainless (steel) wire determines that according to the thickness of metal layer general first pass is 80 orders, and second time is 120 orders;
7) ceramic after will drying is placed in the high temperature sintering furnace, sintering in nitrogen atmosphere, and sintering temperature is at 1400 ℃, and temperature retention time is 1h;
8) after the ceramic metallization,, need in 50%HCl (room temperature), to soak 15~20 seconds, remove the oxide layer on Mo surface for avoiding Mo layer slight oxidation;
9) ceramic of removing oxide layer is electroplated (carrying out as quickly as possible) after metallization is finished, and electroplates in nickelous sulfate is the electroplate liquid of main salt and carries out, and electroplating time is 40min, and coating layer thickness is 4 μ m; The tempering under hydrogen shield of pottery after the plating once can obtain to have the ceramic of metal layer.
Detect: the average sealing-in tensile strength 125.6Mpa of 50 potteries, good (Q≤10 of air-tightness
-11Pa.m
3/ s).
Embodiment 2
1) by weight, takes by weighing Mo powder 650g respectively, Mn powder 130g, Al
2O
3Powder 120g, SiO
2Powder 25g, MgO powder 5g, CaO powder 50g and ZriO
2Powder 20g, this wherein, the d of Mo powder
FlatBe 1.5~2.5 μ m, the d of Mn powder
FlatBe 2~3 μ m, Al
2O
3Powder, SiO
2Powder, MgO powder, CaO powder and TiO
2The d of powder
Max≤ 5 μ m, and Al
2O
3The nanometer Al that contains 1.5g in the powder
2O
3Powder; The powder that takes by weighing is dried in baking oven, and oven temperature is 70 ℃, and drying time is 3 hours;
2) powder with oven dry adds in the ball grinder, and the castor bean that adds 1.1g simultaneously in ball grinder is oily and the absolute ethyl alcohol of 495g, obtain suspension, place the general milling machine with 35 rev/mins of ball millings after 24 hours ball grinder, again in planetary ball mill with 400 rev/mins of ball millings 6 hours, above-mentioned suspension ball milling is even;
3) suspension behind the ball milling is placed ultrasonic wave vibration 30 minutes, the metallization powder is mixed in solution and good dispersion;
4) will place baking oven through the suspension of ultrasonic vibration, continuous drying 3h under 70 ℃ of temperature obtains powder for ceramic metallizing paste;
5) to above-mentioned paste adding 180g adhesive in the powder, adhesive is the terpineol solution of ethyl cellulose, and wherein, the weight ratio of ethyl cellulose and terpinol is 20: 1; Ball milling obtained the ceramic metallizing paste that can print after 4~8 hours after mixing in vibrator or planetary ball mill;
6) an amount of paste is coated on the stainless (steel) wire 50 95%Al
2O
3Ceramic (injection moulding) prints, and print thickness is 40 μ m, and the layer of paste after the printing is dried down at 80 ℃; In the process of printing, the size of the mesh of stainless (steel) wire determines that according to the thickness of metal layer general first pass is 80 orders, and second time is 120 orders;
7) ceramic after will drying is placed in the high temperature sintering furnace, sintering in nitrogen atmosphere, and sintering temperature is at 1450 ℃, and temperature retention time is 1h;
8) after the ceramic metallization,, need in 50%HCl (room temperature), to soak 15~20 seconds, remove the oxide layer on Mo surface for avoiding Mo layer slight oxidation;
9) ceramic of removing oxide layer is electroplated (carrying out as quickly as possible) after metallization is finished, and electroplates in nickelous sulfate is the electroplate liquid of main salt and carries out, and electroplating time is 50min, and coating layer thickness is 5 μ m; The tempering under hydrogen shield of pottery after the plating once can obtain to have the ceramic of metal layer.
Detect: the average sealing-in tensile strength 134.2Mpa of 50 potteries, good (Q≤10 of air-tightness
-11Pa.m
3/ s).
Embodiment 3
1) by weight, takes by weighing Mo powder 800g respectively, Mn powder 120g, Al
2O
3Powder 80g, SiO
2Powder 70g, MgO powder 10g, CaO powder 10g and ZrO
2Powder 10g, this wherein, the d of Mo powder
FlatBe 1.5~2.5 μ m, the d of Mn powder
FlatBe 2~3 μ m, Al
2O
3Powder, SiO
2Powder, MgO powder, CaO powder and TiO
2The d of powder
Max≤ 5 μ m, and Al
2O
3The nanometer Al that contains 2g in the powder
2O
3Powder; The powder that takes by weighing is dried in baking oven, and oven temperature is 85 ℃, and drying time is 1.5 hours;
2) powder with oven dry adds in the ball grinder, and the castor bean that adds 5g simultaneously in ball grinder is oily and the absolute ethyl alcohol of 550g, obtain suspension, place the general milling machine with 30 rev/mins of ball millings after 28 hours ball grinder, again in planetary ball mill with 350 rev/mins of ball millings 7 hours, above-mentioned suspension ball milling is even;
3) suspension behind the ball milling is placed ultrasonic wave vibration 35 minutes, the metallization powder is mixed in solution and good dispersion;
4) will place baking oven through the suspension of ultrasonic vibration, continuous drying 1.5h under 80 ℃ of temperature obtains powder for ceramic metallizing paste;
5) to above-mentioned paste adding 180g adhesive in the powder, adhesive is the terpineol solution of ethyl cellulose, and wherein, the weight ratio of ethyl cellulose and terpinol is 20: 1; Ball milling obtained the ceramic metallizing paste that can print after 4~8 hours after mixing in vibrator or planetary ball mill;
6) an amount of paste is coated on the stainless (steel) wire 50 96%Al
2O
3Ceramic (isostatic compaction) prints, and print thickness is 45 μ m, and the layer of paste after the printing is dried down at 80 ℃; Wherein, the size of the mesh of stainless (steel) wire determines that according to the thickness of metal layer general first pass is 80 orders, and second time is 120 orders;
7) ceramic after will drying is placed in the high temperature sintering furnace, sintering in nitrogen atmosphere, and sintering temperature is at 1400 ℃, and temperature retention time is 1h;
8) after the ceramic metallization,, need in 50%HCl (room temperature), to soak 15~20 seconds, remove the oxide layer on Mo surface for avoiding Mo layer slight oxidation;
9) ceramic of removing oxide layer is electroplated (carrying out as quickly as possible) after metallization is finished, and electroplates in nickelous sulfate is the electroplate liquid of main salt and carries out, and electroplating time is 60min, and thickness of coating is 6 μ m; The tempering under hydrogen shield of pottery after the plating once can obtain to have the ceramic of metal layer.
Detect: the average sealing-in tensile strength 129.8Mpa of 50 potteries, good (Q≤10 of air-tightness
-11Pa.m
3/ s).
The foregoing description is a preferred implementation of the present invention; but embodiments of the present invention are not restricted to the described embodiments; other any do not deviate from change, the modification done under spiritual essence of the present invention and the principle, substitutes, combination, simplify; all should be the substitute mode of equivalence, be included within protection scope of the present invention.