CN102049183A - Device for treating pyrophoric gas by combining reaction with cyclone separating equipment - Google Patents
Device for treating pyrophoric gas by combining reaction with cyclone separating equipment Download PDFInfo
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- CN102049183A CN102049183A CN2010105711232A CN201010571123A CN102049183A CN 102049183 A CN102049183 A CN 102049183A CN 2010105711232 A CN2010105711232 A CN 2010105711232A CN 201010571123 A CN201010571123 A CN 201010571123A CN 102049183 A CN102049183 A CN 102049183A
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- ingress pipe
- delivery line
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Abstract
The invention relates to a device for treating pyrophoric gas by combining reaction with cyclone separating equipment. An action groove is arranged in a separating cylinder; a lead-out pipe convexly extends into the action groove; an extract fan is arranged in the lead-out pipe; the bottom of the separating cylinder is provided with a collecting area in a connecting way; in addition, the periphery of the separating cylinder is provided with a first lead-in pipe and a second lead-in pipe along the tangent position; oxygen-contained gas and silicon tetyahydride are respectively drained and led in by utilizing the first lead-in pipe and the second lead-in pipe so as to form a cyclone type flow; and solid silicon dioxide and liquid steam are generated by chemical reaction and can be additionally collected and treated respectively.
Description
Technical field
The present invention is relevant for a kind of device of handling pyrophorisity gas with association reaction and Cyclonic separating apparatus, particularly utilize in the operation slot of cylinder, after can supplying oxygen-containing gas and silicon tetrahydride to enter, and produce solid-state silica and liquid aqueous vapor through chemical reaction, and can be for collection and treatment person respectively.
Background technology
Press, at present general petrochemical industry industry, heavy industry, oil refining industry, plating industry, semiconductor industry or chemical industry all are easy to generate as four silane ﹝ SiH4 when manufacturing; Have another name called Gui Jia Wan ﹞, pernicious gas such as lead or sulphur, if these pernicious gases are entered in the atmosphere, then can serious injury be arranged for air quality, also hinder to some extent for health, simultaneously also can destroy atmosphere, ozone layer, and can cause greenhouse effects and make unusual weather conditions, so exhaust gas discharging has considerable danger, therefore handle the mode of waste gas at present, nothing more than utilizing filter material to filter, to collect airborne micro dust particle, or utilize adsorbent, with the absorption pernicious gas, but above-mentioned two kinds of modes then need often to upgrade filter material or adsorbent, so appropriate litigation fees is surprising; The favourable method that washes with water is handled in addition, and its price is comparatively cheap, but then can produce waste water after handling, and the anxiety of secondary pollution is arranged, and is therefore also not desirable to the greatest extent in the use.
In addition just like No. 536604 " combustion-type exhaust treatment system " patent case of TaiWan, China invention bulletin, it mainly is provided with burner, the downstream position of this burner part then is provided with the combustion chamber, be provided with the device that can form combustion flame again, this combustion flame by this burner part towards this combustion chamber, other is provided with gas introduction tube, it connects the inner wall surface of this burner part, combustible waste gases is imported in this combustion flame, this waste gas of oxidation Decomposition by this, wherein this gas introduction tube is provided with the flowing velocity accelerator, and this flowing velocity accelerator is used so that the flowing velocity of the combustible waste gases of this gas introduction tube of flowing through is higher than the burning velocity of this combustible waste gases; Use the mode of utilizing burning and handle harmful and flammable waste gas, wherein this waste gas for example has silicomethane gases (SiH4) or interior halogen-containing gas (NF3, CF3, SF6, CHF3, C2F6, CF4), or the very difficult waste gas that decomposes etc., only, utilize the processing mode of burning, it still can expend a large amount of fuel and burn, so processing cost is still high, the generation of waste gas is still arranged after the burning simultaneously, though its waste gas has not had toxicity, but in a single day it drain in the atmosphere, still can produce certain influence to environment; Therefore above-mentioned all waste gas processing methods all have its shortcoming to exist, and can't reach best treatment effect.
Summary of the invention
The whence this, because known waste gas separating and treating apparatus has above-mentioned all shortcomings, so the invention provides a kind of device of handling pyrophorisity gas with association reaction and Cyclonic separating apparatus, it is provided with cylinder, this cylinder inside is provided with the effect groove, this cylinder is established into delivery line is arranged, one end of this delivery line convexedly stretches in the effect groove, the cylinder bottom then is equipped with collecting region, be provided with first ingress pipe and second ingress pipe in addition in the cylinder periphery along tangent position, this first ingress pipe and second ingress pipe connect to acting in the groove, and its opening part then faces toward the outer wall edge of delivery line.
The present invention also is a kind of device of handling pyrophorisity gas with association reaction and Cyclonic separating apparatus, include: cylinder, this cylinder inside is provided with the effect groove, and this cylinder is established into delivery line is arranged, one end of this delivery line convexedly stretches in the effect groove, and the cylinder bottom then is equipped with collecting region; Mixing drum, it is communicated to cylinder, and this mixing drum inside is provided with mixing channel, and this mixing channel sets up an introduction segment along the tangent position of cylinder periphery, and then facing to the outer wall edge of delivery line, this mixing drum is connected with first ingress pipe and second ingress pipe respectively to the opening part of this introduction segment again.
The above-mentioned first ingress pipe drainage imports oxygen-containing gas or oxygen, and second ingress pipe then drainage imports four silane ﹝ SiH4; Have another name called Gui Jia Wan ﹞.
Be provided with extraction fan in the above-mentioned delivery line.
Be provided with a negative pressure fan in the above-mentioned mixing channel.
Above-mentioned mixing drum is equipped with a force pipe again.
The present invention has following advantage:
1. the present invention only need utilize oxygen-containing gas or oxygen, can carry out separating treatment for pyrophorisity gases such as silicon tetrahydrides, so quite simple, convenient and safety in the operation.
2. the present invention does not need to use any filter material, adsorbent or fuel fully, can carry out separating treatment for pyrophorisity gas, thus can significantly reduce disposal cost, and save cost, be fit to various industries and use.
3. the present invention can not produce any harmful waste water or waste gas after handling, and does not produce so do not have the shortcoming of secondary pollution.
4. the solid-state silica and the liquid aqueous vapor of other generation that the present invention separates all can re-use for collecting in addition, and using increases its surcharge.
Description of drawings
Fig. 1 is an organigram of the present invention.
Fig. 2 is the A-A cutaway view among the present invention first figure.
Fig. 3 is a use schematic diagram of the present invention.
Fig. 4 is the organigram of another embodiment of the present invention.
Fig. 5 is the assembled sectional view of another embodiment of the present invention.
Fig. 6 is the use schematic diagram of another embodiment of the present invention.
Fig. 7 is the assembled sectional view of further embodiment of this invention.
(1) cylinder (11) effect groove
(12) delivery line (13) extraction fan
(14) collecting region (15) first ingress pipes
(16) second ingress pipe (2) cylinders
(21) effect groove (22) delivery line
(23) extraction fan (24) collecting region
(3) mixing drum (31) mixing channel
(311) introduction segment (32) negative pressure fan
(33) first ingress pipes (34) second ingress pipes
(2A) cylinder (21A) effect groove
(22A) delivery line (23A) extraction fan
(24A) collecting region (3A) mixing drum
(31A) mixing channel (311A) introduction segment
(33A) first ingress pipe (34A), second ingress pipe
(35A) force pipe
(A) silica.
The specific embodiment
At first, see also Figure 1 and Figure 2, the present invention mainly is provided with cylinder (1), its inside then is provided with an effect groove (11), establish into a delivery line (12) is arranged at the top of this cylinder (1), a suitable distance in one end of this delivery line (12) effect of convexedly stretching in groove (11), be provided with an extraction fan (13) in this delivery line (12) again, the bottom of cylinder (1) then is equipped with a collecting region (14), periphery in cylinder (1) is respectively equipped with first ingress pipe (15) and second ingress pipe (16) along tangent position in addition, this first ingress pipe (15) and second ingress pipe (16) connect to acting in the groove (11), and its opening part then faces toward the outer wall edge of delivery line (12) respectively.
During use, as Fig. 1 and shown in Figure 3, it starts the extraction fan (13) in the delivery line (12) earlier, oxygen-containing gas (or oxygen) is entered in the effect groove (11) via first ingress pipe (15) drainage, simultaneously also with four silane ﹝ SiH4 again; The pyrophorisity gas that has another name called Gui Jia Wan ﹞ enters in the effect groove (11) via second ingress pipe (16) drainage, because first ingress pipe (15) and second ingress pipe (16) are set up along the tangent position of cylinder (1) periphery respectively, therefore after ozone and silicon tetrahydride enter to effect groove (11), can strike the outer wall edge of delivery line (12) simultaneously, and the flow direction of generation cyclone type, and mixed silicon tetrahydride can produce chemical reaction with the oxygen in the oxygen-containing gas simultaneously, and its chemical equation is as follows:
SiH4(g)+O2(g)→SiO2(s)+2H2(g)
After reagentia, can produce the solid-state silica (A) and the hydrogen of gaseous state, because solid-state silica (A) is heavier because of weight, then can be in the introversive sedimentation down of effect groove (11), and can fall into to collecting region (14) and be collected, for other processing, after meeting high temperature, the hydrogen that weight is lighter then can become aqueous vapor (H2O), and can be detached out effect groove (11) via delivery line (12) by extraction fan (13), and use for collecting in addition, or be exhausted in the atmosphere, so, then can and dispose pyrophorisity gas for delamination.
Another embodiment of the present invention, as Fig. 4 and shown in Figure 5, it is provided with cylinder (2), the inside of this cylinder (2) then is provided with an effect groove (21), establish into a delivery line (22) is arranged at the top of this cylinder (2), a suitable distance be provided with an extraction fan (23) in this delivery line (22) again, and the bottom of cylinder (2) is equipped with a collecting region (24) in addition in one end of this delivery line (22) effect of convexedly stretching in groove (21).
Mixing drum (3), it is communicated to cylinder (2), this mixing drum (3) inside is provided with a mixing channel (31), be equipped with a negative pressure fan (32) in this mixing channel (31), this mixing channel (31) then is provided with an introduction segment (311) and sets up along the tangent position of cylinder (2) periphery, and connect cylinder (2), the opening part of this introduction segment (311) then faces toward the outer wall edge of delivery line (22) again, make its mixing channel (31) can be communicated to the effect groove (21) of cylinder (2), this mixing drum (3) is connected with first ingress pipe (33) and second ingress pipe (34) respectively again, and this first ingress pipe (33) and second ingress pipe (34) connect to mixing channel (31).
During use, as Fig. 5 and shown in Figure 6, extraction fan (23) and the interior negative pressure fan (32) of mixing channel (31) that it starts earlier in the delivery line (22) enter to oxygen-containing gas (or oxygen) in the mixing channel (31) via first ingress pipe (33) drainage, more simultaneously also with four silane ﹝ SiH4; The pyrophorisity gas that has another name called Gui Jia Wan ﹞ enters in the mixing channel (31) via second ingress pipe (34) drainage, and the mixed silicon tetrahydride of cocurrent flow can produce chemical reaction with the oxygen in the oxygen-containing gas, and its chemical equation is as follows:
SiH4(g)+O2(g)→SiO2(s)+2H2(g)
After reagentia, can produce the solid-state silica (A) and the hydrogen of gaseous state, enter in the effect groove (21) of cylinder (2) via the introduction segment (311) of mixing channel (31) jointly again, because introduction segment (311) is set up along the tangent position of cylinder (2) periphery, therefore after silica (A) and hydrogen enter to effect groove (21), can strike the outer wall edge of delivery line (22) simultaneously, and the flow direction of generation cyclone type, and because solid-state silica (A) is heavier because of weight, then can be in the introversive sedimentation down of effect groove (21), be collected to collecting region (24) and can fall into, for other processing, after meeting high temperature, the hydrogen that weight is lighter then can become aqueous vapor (H2O), and can be detached out effect groove (21) via delivery line (22) by extraction fan (23), and use for collecting in addition, or be exhausted in the atmosphere, so, then can and dispose pyrophorisity gas for delamination equally.
Further embodiment of this invention, as shown in Figure 7, it is provided with cylinder (2A), the inside of this cylinder (2A) then is provided with an effect groove (21A), establish into a delivery line (22A) is arranged at the top of this cylinder (2A), a suitable distance be provided with an extraction fan (23A) in this delivery line (22A) again, and the bottom of cylinder (2A) is equipped with a collecting region (24A) in addition in one end of this delivery line (22A) effect of convexedly stretching in groove (21A).
Mixing drum (3A), it is communicated to cylinder (2A), this mixing drum (3A) inside is provided with a mixing channel (31A), this mixing channel (31A) then is provided with an introduction segment (311A) and sets up along the tangent position of cylinder (2A) periphery, and connect cylinder (2A), the opening part of this introduction segment (311A) then faces toward the outer wall edge of delivery line (22A) again, make its mixing channel (31A) can be communicated to the effect groove (21A) of cylinder (2A), this mixing drum (3A) is connected with first ingress pipe (33A) and second ingress pipe (34A) respectively again, this first ingress pipe (33A) and second ingress pipe (34A) connect to mixing channel (31A), be equipped with a force pipe (35A) again in mixing drum (3) in addition, use and to have imported pressure (air-flow), use the effect that can reach guiding.
Claims (8)
1. device of handling pyrophorisity gas with association reaction and Cyclonic separating apparatus, it is provided with cylinder, this cylinder inside is provided with the effect groove, this cylinder is established into delivery line is arranged, one end of this delivery line convexedly stretches in the effect groove, and the cylinder bottom then is equipped with collecting region, is provided with first ingress pipe and second ingress pipe in addition in the cylinder periphery along tangent position, this first ingress pipe and second ingress pipe connect to acting in the groove, and its opening part then faces toward the outer wall edge of delivery line.
2. device of handling pyrophorisity gas with association reaction and Cyclonic separating apparatus, it is provided with cylinder, and this cylinder inside is provided with the effect groove, and this cylinder is established into delivery line is arranged, one end of this delivery line convexedly stretches in the effect groove, and the cylinder bottom then is equipped with collecting region; Tangent position along this cylinder periphery sets up an introduction segment again, and this introduction segment is communicated to cylinder, and the opening part of this introduction segment then faces toward the outer wall edge of delivery line.
3. the device with association reaction and Cyclonic separating apparatus processing pyrophorisity gas as claimed in claim 1 or 2 wherein is provided with extraction fan in the delivery line.
4. the device with association reaction and Cyclonic separating apparatus processing pyrophorisity gas as claimed in claim 2, wherein introduction segment is connected with a mixing drum, and this mixing drum inside is provided with mixing channel, and this mixing drum is connected with first ingress pipe and second ingress pipe respectively again.
5. as claim 1 or 4 described devices with association reaction and Cyclonic separating apparatus processing pyrophorisity gas, wherein the first ingress pipe drainage imports oxygen-containing gas, and second ingress pipe then drainage imports four silane ﹝ SiH4; Have another name called Gui Jia Wan ﹞.
6. as claim 1 or 4 described devices with association reaction and Cyclonic separating apparatus processing pyrophorisity gas, wherein the first ingress pipe drainage imports oxygen.
7. the device with association reaction and Cyclonic separating apparatus processing pyrophorisity gas as claimed in claim 4 wherein is provided with a negative pressure fan in the mixing channel.
8. the device with association reaction and Cyclonic separating apparatus processing pyrophorisity gas as claimed in claim 4, wherein mixing drum is equipped with a force pipe again.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010105711232A CN102049183A (en) | 2010-12-02 | 2010-12-02 | Device for treating pyrophoric gas by combining reaction with cyclone separating equipment |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010105711232A CN102049183A (en) | 2010-12-02 | 2010-12-02 | Device for treating pyrophoric gas by combining reaction with cyclone separating equipment |
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| CN102049183A true CN102049183A (en) | 2011-05-11 |
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| CN2010105711232A Pending CN102049183A (en) | 2010-12-02 | 2010-12-02 | Device for treating pyrophoric gas by combining reaction with cyclone separating equipment |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104667699A (en) * | 2012-08-27 | 2015-06-03 | 深圳市疾病预防控制中心 | Application of nano silicon dioxide to adsorption of lead in atmosphere |
| CN108686839A (en) * | 2018-05-29 | 2018-10-23 | 贵州富燃环保科技有限公司 | A kind of high-efficient purification cyclone separator |
| EP4368278A1 (en) * | 2022-11-11 | 2024-05-15 | EBARA Precision Machinery Europe GmbH | Device and method for cleaning a process gas containing at least one pollutant gas |
Citations (4)
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|---|---|---|---|---|
| JPH1099635A (en) * | 1996-09-27 | 1998-04-21 | Tousetsu:Kk | Exhaust gas treatment for cvd device and exhaust gas treating device |
| TW536604B (en) * | 2000-10-02 | 2003-06-11 | Ebara Corp | Combustion type waste gas treatment system |
| CN101068838A (en) * | 2004-11-11 | 2007-11-07 | 巴塞尔聚烯烃有限公司 | Apparatus for the gas-phase polymerization of olefins, in particular ethylene |
| CN101234282A (en) * | 2007-01-29 | 2008-08-06 | 北京行者多媒体科技有限公司 | Processing equipment and method for waste gases in semiconductor production process |
-
2010
- 2010-12-02 CN CN2010105711232A patent/CN102049183A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH1099635A (en) * | 1996-09-27 | 1998-04-21 | Tousetsu:Kk | Exhaust gas treatment for cvd device and exhaust gas treating device |
| TW536604B (en) * | 2000-10-02 | 2003-06-11 | Ebara Corp | Combustion type waste gas treatment system |
| CN101068838A (en) * | 2004-11-11 | 2007-11-07 | 巴塞尔聚烯烃有限公司 | Apparatus for the gas-phase polymerization of olefins, in particular ethylene |
| CN101234282A (en) * | 2007-01-29 | 2008-08-06 | 北京行者多媒体科技有限公司 | Processing equipment and method for waste gases in semiconductor production process |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104667699A (en) * | 2012-08-27 | 2015-06-03 | 深圳市疾病预防控制中心 | Application of nano silicon dioxide to adsorption of lead in atmosphere |
| CN108686839A (en) * | 2018-05-29 | 2018-10-23 | 贵州富燃环保科技有限公司 | A kind of high-efficient purification cyclone separator |
| CN108686839B (en) * | 2018-05-29 | 2023-10-31 | 贵州富燃环保科技有限公司 | High-efficient cyclone that purifies |
| EP4368278A1 (en) * | 2022-11-11 | 2024-05-15 | EBARA Precision Machinery Europe GmbH | Device and method for cleaning a process gas containing at least one pollutant gas |
| DE102022212009A1 (en) | 2022-11-11 | 2024-05-16 | Ebara Precision Machinery Europe Gmbh | Device and method for cleaning a process gas containing at least one harmful gas |
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Application publication date: 20110511 |