CN102044558B - Transparent conductive substrate of organic light-emitting display device and production method thereof - Google Patents
Transparent conductive substrate of organic light-emitting display device and production method thereof Download PDFInfo
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- CN102044558B CN102044558B CN 201010542025 CN201010542025A CN102044558B CN 102044558 B CN102044558 B CN 102044558B CN 201010542025 CN201010542025 CN 201010542025 CN 201010542025 A CN201010542025 A CN 201010542025A CN 102044558 B CN102044558 B CN 102044558B
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- 238000004519 manufacturing process Methods 0.000 title abstract 3
- 238000000034 method Methods 0.000 claims abstract description 12
- 229910052751 metal Inorganic materials 0.000 claims description 14
- 239000002184 metal Substances 0.000 claims description 14
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 claims description 10
- 238000002360 preparation method Methods 0.000 claims description 9
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 6
- 239000010949 copper Substances 0.000 claims description 6
- 229910052802 copper Inorganic materials 0.000 claims description 6
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Abstract
The invention discloses a transparent conductive substrate of an organic light-emitting display device and a production method thereof. The transparent conductive substrate of the organic light-emitting display device, disclosed in the invention, comprises a flexible base and an array electrode, wherein the array electrode comprises an auxiliary electrode and at least two array electrode units which are arrayed alternately; and the adjacent array electrode units are electrically communicated through the auxiliary electrode. The production method disclosed in the invention is a method for preparing the conductive substrate. Compared with the prior art, an electrode of the transparent conductive substrate, disclosed in the invention, can bear greater stress brought by the bending of the conductive substrate and prevent the electrode from cracking or breaking; and in addition, the auxiliary electrode can reduce the resistance of the electrode and improve the performance of the conductive substrate.
Description
Technical field
The present invention relates to organic light-emitting display device.More specifically, the transparent conductive substrate and preparation method thereof that relates to organic light-emitting display device.
Background technology
Organic luminescent device (Organic Light-Emitting Diode, initialism is OLED) low because of its energy consumption, resolution is high, brightness is high, luminous efficiency is high, response speed is fast, the visual angle is wide, do not need plurality of advantages such as backlight, cost is low, driving voltage is low, has widely research, application prospect in fields such as flat panel display.Especially, OLED has all solid state characteristic, and no vacuum chamber does not have liquid composition, good mechanical property, anti-vibration resistance is strong, uses plastics, polyester film or film as substrate, the OLED screen can be accomplished thinner, even can fold or roll, and can realize that flexible soft screen shows.
OLED is made of folder multilayer organic film between negative electrode and anode usually, for end light emitting-type OLED display device, anode mainly adopts transparent indium tin oxide (Indium Tin Oxides, initialism are ITO) electrode, organic material covers on the anode, and negative electrode adopts the reflective contact metal film.ITO electrode transmitance height, resistance is lower, and stable performance is the outstanding transparent conductive material of present combination property.But compare with low resistive metal, it is high a lot of that resistance is still wanted, and OLED is as far as possible little of to guarantee uniformity and to reduce power consumption as the voltage drop of current mode requirement on devices electrode.Therefore, the sputter one deck ITO on substrate of elder generation makes one deck low resistive metal again as auxiliary electrode in the preparation process of anode.
ITO is the OLED anode of using always.The vitrification point of plastic is lower, can only adopt the ITO conducting film of low temperature depositing, and the ITO performance difference of low temperature ITO performance and The high temperature anneal is very big, and resistivity is higher, has increased the power consumption on the contact conductor, makes the light-emitting zone brightness irregularities simultaneously.Low temperature ITO electrode is fragile material most serious of all, and the ITO film easily forms crackle even jackknifing when bending, the conductive characteristic variation, thus cause component failure.
Chinese invention patent CN1864094A discloses a kind of ITO electrode structure (as shown in Figure 1) of flexible LCD bending.Wherein ITO layer 11 is positioned on the flexible base, board 10, and ITO layer 11 comprises rectangle part 12 and 13, and on the ITO electrode direction, 12 and 13 offset a segment distance 14 also is electrically connected by relative narrow part 15.The warp architecture of ITO layer can enough bear certain stress before fracture.
But still there is the problem of stress ability to bear deficiency and poor electric conductivity in this structure.
Summary of the invention
Technical problem to be solved by this invention is: transparent conductive substrate of a kind of flexible organic light-emitting display device and preparation method thereof is provided.
For solving the problems of the technologies described above, the transparent conductive substrate of a kind of organic light-emitting display device of the present invention comprises flexible substrates and row electrode, it is characterized in that: described row electrode comprises auxiliary electrode and spaced a plurality of row electrode unit; Adjacent row electrode unit is by described auxiliary electrode electric connection.
Preferably, described auxiliary electrode is formed on the described flexible substrates, and described row electrode unit comprises the bonding pad that is formed on the auxiliary electrode and the effective luminous zone that is formed on the described flexible substrates.
For guaranteeing the stability of the electric connection function of auxiliary electrode behind curved substrate, the width of described bonding pad on row electrode arrangement direction is 10-1000nm.
In the practice, described row electrode can be quadrangle, and in order further to improve the electric conductivity of electrically-conductive backing plate, described bonding pad comprises: the vertical bonding pad vertical with column direction and/or the horizontal bonding pad on the column direction:.
Further, described row electrode unit is transparent ITO electrode.
Be to improve conductivity and the pliability of auxiliary electrode, can select for use metal electrode as auxiliary electrode, for example: silver, aluminium, copper, palladium or any two or more alloy wherein.
The preparation method of the transparent conductive substrate of a kind of organic light-emitting display device of the present invention may further comprise the steps: 1) form the auxiliary electrode conductive layer in flexible substrates; 2) adopt the described metal conducting layer of dry method or wet etching to form auxiliary electrode; 3) form row electrodes conduct layer in flexible substrates; 4) adopt dry method or the described row electrodes conduct of wet etching layer to form spaced a plurality of row electrode unit, adjacent row electrode unit is by described auxiliary electrode electric connection.
Preferably, described row electrode can be quadrangle, and described row electrode unit comprises the bonding pad that is formed on the auxiliary electrode and the effective luminous zone that is formed on the described flexible substrates.
Preferably, the width of described bonding pad on column direction is 10-1000nm.
Preferably, described row electrode unit is transparent ITO electrode.
Described auxiliary electrode is metal electrode.Described metal electrode can be selected silver, aluminium, copper, palladium or two or more alloy arbitrarily wherein for use
The beneficial effect that the present invention is compared with the prior art is:
The present invention adopts the row electrode unit to arrange at interval, and thereby the auxiliary electrode that utilizes pliability and good conductivity is connected formation row electrode, compared with prior art the electrode of transparent conductive substrate of the present invention can bear the bigger stress that is brought by the electrically-conductive backing plate bending, prevents electrode cracking or fracture; Auxiliary electrode can reduce electrode resistance simultaneously, improves the performance of electrically-conductive backing plate.
Description of drawings
Fig. 1 is the ITO electrode structure schematic diagram of a kind of flexible LCD bending in the prior art;
Fig. 2 is ITO electrode and the auxiliary electrode structure schematic diagram of the flexible organic light-emitting display device of the specific embodiment of the invention one;
Fig. 3 is ITO electrode and the auxiliary electrode structure schematic diagram of the flexible organic light-emitting display device of the specific embodiment of the invention two;
Fig. 4 is ITO electrode and the auxiliary electrode structure schematic diagram of the flexible organic light-emitting display device of the specific embodiment of the invention three.
Embodiment
Preferred embodiment the invention will be further described for contrast accompanying drawing and combination below.
Embodiment one
Contrast Fig. 2, the flexible and transparent conductive substrate of this preferred embodiment comprises the row electrode on flexible plastic substrates 1 and the plastic-substrates, the row electrode is made up of row electrode unit 2 and auxiliary electrode 3, wherein, row electrode unit 2 is the transparent ITO electrode of rectangle, and auxiliary electrode 3 is metal electrode.The ITO electrode is electrically connected the row electrode that becomes the OLED display along a direction extension and by auxiliary electrode, and the representative value of row electrode width 100 is 240 μ m.The ITO electrode along column direction by certain interval 7 is separately arranged in the column direction alignment.The length 110 of each section ITO electrode is relevant with the transparent conductive substrate bending status, and radius of curvature is more big, and each section is more little, and minimum can reach a luminescence unit size.The ITO electrode is set like this have been guaranteed electrode bending and can not to have ftractureed even rupture.Typically selecting length 110 for use is 240 μ m, can form the long effective light-emitting zone of 190 μ m.
Plastic-substrates 1 is PETG (Polyethylene Terephthalate, initialism is PET), naphthalenedicarboxylic acid polyvinyl ester (Polyethylene Naphthalate, initialism are PEN), polyether sulfone (Polyethersulfone, initialism is PES), Merlon (Polycarbonate, initialism are PC), polyimides (Polyimide, initialism is PI) etc., the thick PET of 0.1-1.0mm typically adopted.Adopt magnetron sputtering method, thermal evaporation or electron-beam vapor deposition method to form metal conducting layer in the PET substrate, the electric conductivity of described metallic conduction layer material to get well and pliability good, as silver, copper, aluminium, palladium or its alloy etc., thickness is 10-1000nm, typically adopts the thick copper film of 100nm.Adopt dry method or wet processing to form auxiliary electrode 3 then, auxiliary electrode 3 edges align with the ITO electrode rim, the width 9 that wherein is in the auxiliary electrode 3 in the ITO electrode is 1-80 μ m, should guarantee that auxiliary electrode 3 has the favorable conductive ability not reduce effective luminous zone area (effectively the luminous zone refers to not the zone with the overlapping row electrode unit 2 of auxiliary electrode 3) of display screen again, the auxiliary electrode width 9 of optimization is 40 μ m.Auxiliary electrode 3 reduces the resistance of ITO electrode on the one hand, connects each ITO electrode on the other hand and realizes electric connection.The width of auxiliary electrode 3 that is in the ITO electrode gap is consistent with the width 100 of ITO electrode, auxiliary electrode 3 joins with adjacent row electrode unit, lap width 8 is 10nm-1000nm, except guaranteeing that electric connection also must guarantee the reliability that is electrically connected after the transparent conductive substrate bending, typically width 8 is 100nm.
Adopt magnetron sputtering method or electron-beam vapor deposition method at the ITO film of PET substrate formation 50-300nm, adopt dry method or wet processing to form each row electrode unit then.
Embodiment
Two
Contrast Fig. 3, the flexible and transparent conductive substrate of this preferred embodiment comprises the row electrode on flexible plastic substrates 1 and the flexible plastic substrates, the row electrode is made up of transparent ITO electrode 2 and auxiliary electrode 3.The ITO electrode extends the row electrode that becomes the OLED display along a direction, and the representative value of row electrode width 100 is 240 μ m.The ITO electrode is discontinuous, and along column direction by certain interval 7 separately, each cell configuration of ITO is rectangle and staggered mutually at column direction.The length 110 of each section ITO is relevant with the transparent conductive substrate bending status, and radius of curvature is more big, and each section is more little, and minimum can reach a luminescence unit size.The ITO electrode is set like this have been guaranteed electrode bending and can not to have ftractureed even rupture.Typically selecting length 110 for use is 240 μ m, can form the long effective light-emitting zone of 190 μ m.
Method according to embodiment one forms auxiliary electrode 3 and ito transparent electrode 2 in plastic 1.
Embodiment three
Contrast Fig. 4, the difference of this preferred embodiment and embodiment one only is the row electrode unit parallelogram shape of present embodiment.
Above content be in conjunction with concrete preferred implementation to further describing that the present invention does, can not assert that concrete enforcement of the present invention is confined to these explanations.According to the present invention, the ITO units presence can be different from rectangle or the parallelogram that illustrates among the figure, also can be other present situation, and correspondingly, the present situation of auxiliary electrode is done corresponding change according to thought of the present invention.Without departing from the inventive concept of the premise, make some being equal to substitute or obvious modification, and performance or purposes are identical, all should be considered as belonging to protection range of the present utility model.
Claims (8)
1. the transparent conductive substrate of an organic light-emitting display device comprises flexible substrates and row electrode, it is characterized in that: described row electrode comprises auxiliary electrode and spaced at least two row electrode units; Adjacent row electrode unit passes through described auxiliary electrode electric connection, and staggered mutually on column direction; Described auxiliary electrode is metal electrode;
Described auxiliary electrode is formed on the described flexible substrates, and described row electrode unit comprises the bonding pad that is formed on the auxiliary electrode and the effective luminous zone that is formed on the described flexible substrates;
Described bonding pad comprises: the vertical bonding pad vertical with column direction and the horizontal bonding pad on the column direction.
2. transparent conductive substrate according to claim 1, it is characterized in that: the width of described vertical bonding pad on column direction is 10-1000nm.
3. the transparent conductive substrate of organic light-emitting display device according to claim 1 and 2, it is characterized in that: described row electrode unit is the transparent indium tin oxide electrode.
4. the transparent conductive substrate of organic light-emitting display device according to claim 1 is characterized in that: described metal electrode is silver, aluminium, copper, palladium or any two or more alloy wherein.
5. the preparation method of the transparent conductive substrate of an organic light-emitting display device is characterized in that: may further comprise the steps:
1) forms metal conducting layer in flexible substrates;
2) adopt the described metal conducting layer of dry method or wet etching to form auxiliary electrode;
3) form row electrodes conduct layer in flexible substrates;
4) adopt dry method or the described row electrodes conduct of wet etching layer to form spaced at least two row electrode units, adjacent row electrode unit passes through described auxiliary electrode electric connection, and staggered on column direction; Each described row electrode unit comprises the bonding pad that is formed on the auxiliary electrode and the effective luminous zone that is formed on the described flexible substrates; Described bonding pad comprises the vertical bonding pad vertical with column direction and/or the horizontal bonding pad on the column direction.
6. the preparation method of the transparent conductive substrate of organic light-emitting display device according to claim 5, it is characterized in that: the width of described vertical bonding pad on row electrode arrangement direction is 10-1000nm.
7. the preparation method of transparent conductive substrate according to claim 6, it is characterized in that: described row electrode unit is the transparent indium tin oxide electrode.
8. the preparation method of transparent conductive substrate according to claim 5 is characterized in that: described metal electrode is silver, aluminium, copper, palladium or at least two kinds alloy wherein.
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| CN 201010542025 CN102044558B (en) | 2010-11-12 | 2010-11-12 | Transparent conductive substrate of organic light-emitting display device and production method thereof |
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| CN102044558B true CN102044558B (en) | 2013-08-21 |
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| CN105140240B (en) * | 2015-08-21 | 2020-01-03 | 京东方科技集团股份有限公司 | Flexible substrate, manufacturing method thereof and display device |
| CN105449123B (en) * | 2015-11-18 | 2018-03-06 | 上海大学 | The preparation method of water oxygen barrier layer |
| CN105789262A (en) | 2016-04-29 | 2016-07-20 | 京东方科技集团股份有限公司 | Flexible display substrate and manufacturing method thereof, and flexible display device |
| CN109461835A (en) * | 2018-09-28 | 2019-03-12 | 云谷（固安）科技有限公司 | Flexible display panels and preparation method thereof, display device |
| CN109256398A (en) * | 2018-10-26 | 2019-01-22 | 武汉华星光电半导体显示技术有限公司 | Have the flexible display panels of signal wire resistant to bending |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4638206A (en) * | 1984-06-14 | 1987-01-20 | Ngk Spark Plug Co., Ltd. | Sheet-like piezoelectric element |
| CN1585074A (en) * | 2004-05-25 | 2005-02-23 | 中华映管股份有限公司 | Electrode structure of plasma planar displaying device |
| CN1705065A (en) * | 2004-05-31 | 2005-12-07 | 三星Sdi株式会社 | Plasma display panel |
| CN1864094A (en) * | 2003-10-04 | 2006-11-15 | 皇家飞利浦电子股份有限公司 | Device and method of making a device having a meandering layer on a flexible substrate |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN1278357C (en) * | 2003-10-16 | 2006-10-04 | 友达光电股份有限公司 | Alternating current pulp display panel |
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4638206A (en) * | 1984-06-14 | 1987-01-20 | Ngk Spark Plug Co., Ltd. | Sheet-like piezoelectric element |
| CN1864094A (en) * | 2003-10-04 | 2006-11-15 | 皇家飞利浦电子股份有限公司 | Device and method of making a device having a meandering layer on a flexible substrate |
| CN1585074A (en) * | 2004-05-25 | 2005-02-23 | 中华映管股份有限公司 | Electrode structure of plasma planar displaying device |
| CN1705065A (en) * | 2004-05-31 | 2005-12-07 | 三星Sdi株式会社 | Plasma display panel |
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