CN102039258A - Liquid supplying system, liquid supplying method and coating apparatus - Google Patents
Liquid supplying system, liquid supplying method and coating apparatus Download PDFInfo
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- CN102039258A CN102039258A CN2010102295930A CN201010229593A CN102039258A CN 102039258 A CN102039258 A CN 102039258A CN 2010102295930 A CN2010102295930 A CN 2010102295930A CN 201010229593 A CN201010229593 A CN 201010229593A CN 102039258 A CN102039258 A CN 102039258A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/027—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34
- H01L21/0271—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers
- H01L21/0273—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising organic layers characterised by the treatment of photoresist layers
- H01L21/0274—Photolithographic processes
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2041—Exposure; Apparatus therefor in the presence of a fluid, e.g. immersion; using fluid cooling means
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02296—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer
- H01L21/02318—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer post-treatment
- H01L21/02343—Forming insulating materials on a substrate characterised by the treatment performed before or after the formation of the layer post-treatment treatment by exposure to a liquid
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- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Coating Apparatus (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Feeding, Discharge, Calcimining, Fusing, And Gas-Generation Devices (AREA)
Abstract
The present invention provides a liquid supplying system for a coating apparatus, which has high safety, high economic performance and high productivity, etc. The liquid supplying system (1) which is used for supplying liquid medicine to a coating part (120) of the coating apparatus (100) is provided with the following components: a buffer tank (3) for storing the liquid medicine; a pipe (5-1); a pipe (5-2) which is connected with the buffer tank (3) and is used for supplying the liquid medicine to the buffer tank (3); a pipe (5-4) which is connected with the buffer tank (3) and is used for supplying air for pressurizing to the buffer tank (3); and a pipe (5-5) which is connected with the buffer tank (3) and the coating parts (120) such as an ejection part (13) and a coating nozzle (14) for supplying liquid from the buffer tank (3) to the coating part (120). The pipe (5-1) and the pipe (5-2) can be detachably connected with a container (17) which is made of resin. The pipe (5-1) can supply gas to the connected container (17) which is made of resin.
Description
Technical field
The present invention relates to liquid-supplying system, feed liquid method and apparatus for coating.More specifically, relate to the liquid-supplying system that the coating part of apparatus for coating is carried out feed flow, the apparatus for coating that uses the feed liquid method of this liquid-supplying system and possess this liquid-supplying system.
Background technology
In the manufacturing process of semiconductor or liquid crystal indicator, in order to supply with soups such as resist or dispersible pigment dispersion, be extensive use of the bag shape liner (liner) that will be used to comprise soup and pack in the canister, and in this liner, fill the system of soup.This system imports the gas that is used for pressurized delivered liquid in the space of the canister in the liner and the outside, this pressure shrinks liner, then by pipe pressurized delivered liquid, because contained soup is covered by liner, usefulness gas does not directly contact with the soup surface so pressurize, and has to prevent that gas soaks into and absorbed advantage under pressurized environment in contained liquid.The example of above-mentioned liner and canister is shown in patent documentation 1.
Above-mentioned advantage is for the positive corrosion-resisting agent that does not utilize radical polymerization (containing the resist of novolac resin and diazo naphthoquinones etc.) advantageous particularly.On the other hand, for the negativity that contains Photoepolymerizationinitiater initiater etc. for photoresist etc., produce free radical and polymerization (dark reaction) takes place under monomer in the process of preservation herb liquid or the effect of oligomer at heat energy, so, guarantee at prescribed volume by making the molten air layer of depositing or will contacting with resist liquid of the gas that contains aerobic on medical liquid container top, make by the free radical inactivation that is included in airborne oxygen generation, thereby hinder dark reaction, improve storage stability.
Therefore, utilize to contact few airtight filling in liner with air and can't fully obtain above-mentioned effect the best preservation state of the photoresist that utilizes Raolical polymerizable of can not saying so.
In addition, in application facet, though can realize the utilization again of packing container by cleaning or purged and packed container, the used liner of replacement or pipe, but the initial stage that produces the buying packing container imports the replacement or the buying expenses of expense and liner or pipe consumable part, and, owing to cleaning, the conveying of packing container needs a period of time etc., so in order stably to use, must prepare stock in advance, therefore have economy problems more than the actual container usage quantity.
In addition, in order to keep the quality of soup, in most cases be difficult to utilize used liner or pipe again, and become discarded object.Be difficult to reclaim attached to resist on the liner etc. or Teflon (registration mark) raw material that is used for liner etc., organic efficiency reduces again again.
Therefore, consider soup is packed in drum (drum) or the shallow jar of metal container mades such as (pale can), be suitable for supply of chemical.That is, import gas in the container that soup is housed, the soup that pressurizes is then carried soup by siphonal siphonic effect.This container is owing to being metal, so reclaim easily again.But, the worry of shock-resistant when exist carrying etc. or distortion such as depression that external force causes, damage, content leaks, and be difficult to handle.In addition, packing that is used to protect container etc. causes the increase of discarded object quantity.
At above-mentioned situation, sometimes soup is packed in the resin container, similarly be applicable to supply of chemical.The chemical liguid supply system that is applicable to resin container is compared with the type of using liner, and the change expense can be controlled in cheap level, and the resin container of cleaning also obtains from commercially available product easily.Further, also has elasticity, so aspect the damage of outside, be good what prevent to cause because of impact such as drop with comparison such as metal container made.In addition, if use polyethylene etc. to make resin container, the material by used container reclaims or hot regeneration cycle (thermal recycle) again, can reduce carrying capacity of environment.
When making semiconductor or liquid crystal indicator, reduce in order to prevent the productive rate that foreign matter etc. causes, in pipe arrangement pipeline from soup to ejection portion one sides such as jet pumps that carry, filter is being set usually.Be used to remove the filter of aggregate particles or gel foreign matter etc., for example can use separately or and with being processed into accordion or discoid thick web filter or film filter, fabric filter etc. (aperture is about 0.1～10 μ m).In addition, in order to remove in the soup micro-bubble of depositing microvesicle that gas produces and so on by molten, degassing assembly (for example the NITOSEP (registration mark) of day Dong Diangongshe system etc.) is set also sometimes.
But, carrying capacity deficiency when filter being set on pipeline causing sometimes producing the pressure loss, low-pressure delivery.In these cases, carry soup to ejection portion one side, must extrude soup or aspirate with the power more than the pressure loss in ejection portion etc. in order to utilize siphonic effect.But, because under the former situation, essential high pressure, the pipe arrangement pipeline is interior owing to become negative pressure state under the latter's the situation, it is the molten gas foaming of depositing in the soup, and produces one of reason of microvesicle, perhaps might cause deterioration, damages such as pump or its engine part by the load of suction.
Therefore, consider the pressure loss in the transfusion pipe arrangement pipeline, sometimes take following method, promptly the soup in medical liquid container applies behind the suitable essential pressure by pressurized delivered such as siphon pipes, the load of the negative pressure when reducing suction thus causes molten foaming of depositing gas or pump etc.
But, in order to obtain essential soup quantity delivered in the desirable time, be necessary that soup in medical liquid container applies the pressure corresponding to its feed speed, the many systems of the soup quantity delivered of unit interval, in order to improve feed speed, be necessary to apply higher pressure more.
When making liquid crystal indicator etc., follow the maximization of mother glass (mother glass) in recent years, the amount of liquid medicine that is used to handle each substrate also increases, and therefore in most cases carries with higher pressure.
[patent documentation 1] spy opens the 2008-007153 communique
Summary of the invention
Above-mentioned resin container (or metal container mades such as drum, shallow jar) is not a pressure vessel, so be difficult to only internal tank directly be pressurizeed with high pressure.For example, under the situation of resin container, consider from the characteristic aspect of resin, if only internal tank is directly pressurizeed, and the stable maintenance high pressure conditions, plastic deformation takes place in the dilatancy of container easily sometimes, causes container breakage etc. thus.
Therefore take following strategy usually, promptly use cylindric withstand voltage packing container, internal tank is exerted pressure when carrying, also exert pressure from the outside etc. in the outside of this container.
Figure 10 represents above-mentioned example.When the liquid crystal indicator etc. of large-scale mother glass has been used in manufacturing, be extensive use of mold pressing coating (die coating) method in painting process, one of apparatus for coating of this kind method possesses reciprocating platform or saddle (gantry), coating nozzle (casting mold (die)) and supplies with the chemical liguid supply system of the soup of coating to the coating nozzle.Figure 10 is the accompanying drawing of the example of this chemical liguid supply system of explanation.Figure 11 described later is also identical.
Among Figure 10, the 31st, resin container, the 33rd, siphon pipe, the 35th, withstand voltage packing container, 37 (37-1,37-2) are pipelines, the 39th, valve, the 41st, adjuster, the 43rd, filter, the 45th, ejection portion (jet pump etc.), the 47th, coating nozzle.
In the example of Figure 10, resin container 31 is enclosed in the cylindric withstand voltage packing container 35, imports gases such as compressed air by pipeline 37-1 to the space of resin container 31 inside that soup is housed and resin container 31 and packing container 35.In addition, utilize ejection portion 45 to aspirate.Utilize the siphonic effect follow pressurization etc. thus,, spray soups by coating nozzle 47 according to its Volume Changes etc. by siphon pipe 33, the soup of pipeline 37-2 in the liquid storing part that is set at ejection portion 45 is supplied with resin container 31.Resin container 31 is owing to pressurized inside and outside it, so can not deform because of pressurization.
In addition, sometimes not resin container 31 to be enclosed in the withstand voltage packing container 35 as described above, but use pressurization backplate covering resin container made 31, expansion, the distortion of resin container 31 when restriction is only directly pressurizeed to the inside of resin container 31 less times greater than resin container 31.To having the identical symbol of component labelling with Figure 10 identical functions structure, and omit explanation among Figure 11.
In the example of Figure 11, utilize pipeline 37-1 to import gases such as compressed air to the inside of the resin container 31 that soup is housed.In addition, utilize jet pump 45 to aspirate.Utilize the siphonic effect follow pressurization etc. thus,, spray soups by coating nozzle 47 according to this Volume Changes etc. by siphon pipe 33, the soup of pipeline 37-2 in the liquid storing part that is set at ejection portion 45 is supplied with resin container 31.Utilize the pressurization backplate 51 in its outside to limit expansion, the distortion that resin containers 31 cause because of pressurization.
Withstand voltage packing container 35 or pressurization backplate 51 are made by mechanical strength excellent material such as stainless steels, and the expansion of container or distortion are effectively when suppressing pressurization.
But, because the diameter of withstand voltage packing container 35 is above (even the common gallon container of diameter that is filled into inner resin container 31 bodies, the container that also needs size about internal diameter 200～300mm), if replace the higher big capacity resin container 31 of efficient when producing so use, then the diameter of withstand voltage thereupon packing container 35 also becomes big.
Therefore, if apply for example high pressure about 100kPa (atmospheric pressure benchmark, later identical) in withstand voltage packing container 35, the power that then is applied to its cap etc. becomes very big.At this moment, if do not carry out the long-pending big airtight portion of uiform section of covering is not opened in withstand voltage packing container 35 pressure releases of pressurized state to atmospheric operation, then might exist parts such as pressurized cap or soup to disperse,, must carefully handle etc. in order to ensure safety.In addition, can reduce danger by suitable release mechanism is set, but because residual potential danger, so be difficult to guarantee operator's safety in the use outside anticipation.
On the other hand, in the distortion of using pressurization backplate 51 restriction resin containers 31, in direct simultaneously the method to resin container 31 forced feed soups, under the effect of the plastic deformation that expansion causes, resin container 31 and 51 engagements of pressurization backplate are not easy to take out resin container 31 when causing replacement operation, and expand, the stress of distortion concentrates on not and the position of pressurization backplate 51 driving fits, might the generating unit branch split, break, leakage or reverse etc., have the mystery of secure context.
In addition, carry in the exert pressure of utilizing pressure medium (gases such as compressed air or compressed nitrogen) to produce under the situation of soup, along with the process of pressing time, the gas in the pressurized environment slowly dissolves in soup, and the molten gas flow of depositing in the soup increases thus.When applying high pressure, the molten gas flow of depositing becomes more.
If at the throttle orifice of pipe arrangement pipelines such as pipeline 37-2 or the position that connector portions is graded and existed the pipe arrangement internal diameter sharply to attenuate, then rise because of the Venturi effect flow velocity, pressure in the pipe arrangement pipeline reduces simultaneously, because cavitation erosion, moltenly exist gas in the soup to produce naked eyes can not to see the micro-bubble of degree, i.e. microvesicle.These microvesicles might become aggregation and become air pocket.
Sneak into and the influence that brings as the bubble of this formation of reason, in the manufacturing process of semiconductor or liquid crystal indicator, microvesicle makes the refractive index of coated film or the homogeneity variation of thickness, and this influence causes the crudy variation, and production performances such as productive rate reduce.
In addition, if be coated on residual air pocket in the resist on the base material, then there is difference in local surface tension, becomes thickness homogeneity variation or outward appearance one of uneven reason takes place.And in filming under the state of residual bubble, if it is carried out drying in that vacuum drying is indoor by the drying under reduced pressure operation, then sometimes air bubble expansion, break, quality is reduced.
In addition, in the mold pressing rubbing method, will by the Volume Changes of the liquid storing part of the ejection portion 45 of the generations such as suction of soup as compression stress pass to be coated with the pipe arrangement that nozzle 47 is connected in soup, change otch (slit) portion ejection soup corresponding to its Volume Changes and pressure thus from coating nozzle 47 front ends.Therefore, the Volume Changes that produces with respect to suction operation of the ejection that is coated with nozzle 47 certainly is not to postpone but must servo-actuated.If minute bubbles are assembled and are stuck in ejection portion 45 or to pipe arrangement, joint or the gap of the notch that is coated with nozzle 47, the Volume Changes that suction operation when then being begun by the coating operation produces acts on the contraction of residual bubble, and the increase time (answer speed) that also becomes the soup ejection pressure in the pipe arrangement pipeline, the main cause of delay took place.
The formation method of filming of coating method one by one of utilizing the mold pressing rubbing method is because the time delay of this soup ejection is to cause near coating beginning portion and the coating end portion thickness homogeneity variation or line network, unequal quality main reasons for decrease, so not preferred.
As countermeasure, can reduce coating speed, thereby weaken the influence of answering delay to a certain extent, but not only the processing time is elongated, productivity ratio reduces, and in majority is handled, follow the mobile bubble of soup also to be moved, to remove, and cause the responsiveness of coating fluid to change thus, be difficult to keep the quality of production of stable uniformity (repeatability).
The present invention finishes in view of the above problems, and its purpose is to provide security, economy, liquid-supplying system that productivity ratio is good etc.
To achieve these goals, the 1st invention is used for the coating part feed fluid to apparatus for coating for a kind of liquid-supplying system, it is characterized in that having
Storage portion is used for storaging liquid;
The 1st runner;
The 2nd runner is connected with above-mentioned storage portion, is used for the feed fluid to above-mentioned storage portion;
The 3rd runner is connected with above-mentioned storage portion, is used for the supply gas to above-mentioned storage portion;
The 4th runner is connected with above-mentioned storage portion and above-mentioned coating part, is used for from above-mentioned storage portion to above-mentioned coating part feed fluid;
The runner of above-mentioned the 1st runner, above-mentioned the 2nd runner can removably connect the regulation container, and above-mentioned the 1st runner can be to the afore mentioned rules supply for receptacles gas that connects.
Above-mentioned storage portion has and is used for the atmosphere opening member of storage portion inside to atmosphere opening, and above-mentioned the 1st, the 2nd, the 3rd, the 4th runner is provided with the open and close member that is used to open and close each runner.In addition, preferably be provided for detecting the liquid level sensor of liquid level in above-mentioned storage portion.
The liquid-supplying system of the 1st invention preferably also has the container connecting portion that can removably connect the afore mentioned rules container, and above-mentioned the 1st runner, above-mentioned the 2nd runner can connect the afore mentioned rules container by the said vesse connecting portion.
In addition, preferred said vesse connecting portion has internal thread at inner peripheral surface, can connect said vesse connecting portion and afore mentioned rules container by with above-mentioned internal thread and the external thread spiro fastening that is arranged on the peristome outer peripheral face of afore mentioned rules container.
Also preferred above-mentioned the 1st runner supply gas in the afore mentioned rules container that connects, making the pressure in the afore mentioned rules container is the scope of 5kPa～100kPa.
In addition, above-mentioned apparatus for coating can be the device that uses in the manufacturing of semiconductor device or liquid crystal indicator.
Need to prove that the coating part of apparatus for coating is meant that ejection portion such as jet pump or coating nozzle etc. are used for the device to coating soups such as substrates.
Utilize said structure can control interior pressure state of regulation container and the pressure state in the storage portion independently, pressurized delivered is contained in the soup in the regulation container etc., in case be filled in the storage portion, Yi Bian the storage portion inside of then pressurizeing, Yi Bian to the coating part feed fluid of apparatus for coating.That is, directly in container, do not carry liquid to coating part, but in pressurization storage portion inside when coating part is carried liquid.Therefore, can make in order to carry liquid in applied pressure at the low pressure range of for example 5kPa～100kPa to container to storage portion.For this reason, do not need can high voltage bearing container as container, can removably be connected on the runner of liquid-supplying system, and be used with the containers such as resin container of conveying of being generally used for soup etc. as the regulation container with this state.It can be disassembled after soup in the container uses and change other containers, economical into.Because can must be lower, so can carry out the replacement operation etc. of container safely with the pressure restraining that is applied in the container.
In addition, owing in the regulation container, be under the state of low pressure, so it is excessive can not cause molten in the liquid to deposit gas to storage portion feed flow.Therefore, can suppress the to cavitate generation of the bubbles such as microvesicle that cause.For this reason, can suppress of the influence of above-mentioned bubble, and during from the soup of coating part, suppress the time delay that internal pressure piping rises, reduce the deficiency of initial stage spray volume, the high quality of products of stable uniform is provided in coating to quality.And, when coating part is carried liquid, can and use the suction operation of utilizing ejection portions such as pump to carry soup and the mode of the storage portion delivered inside soup that passes through to pressurize, even it is so also can offset the pressure loss that filter etc. causes under the situation of filter etc. or follow suction operation and the negative pressure that produces being provided with on the pipe arrangement pipeline, and also relevant with the generation that suppresses bubble.Can also reduce the possibility of aspirating load deteriorations such as ejection portions such as causing jet pump or its engine part, damage.
Can also on runner, connect the regulation container by the container connecting portion.At this moment, if be connected the regulation container by the external screw thread that screws togather container connecting portion inner peripheral surface internal thread that has and the peristome periphery that is arranged on the regulation container, when then pressurizing vessel is inner, form air-tightness, be difficult for the lax or gas leakage of generation container connecting portion at the container connecting portion.In addition, when replacing container, even the generation container connecting portion is lax, because the external screw thread of container and the internal thread of container connecting portion can block, so container or container connecting portion can not disperse, and gas-pressurized can become atmospheric pressure with internal tank thus safely from because of the lax clearance leakage that produces.Therefore the replacement operation of container becomes safer.
In addition, can use of the supply of level detection member such as sensor, so can be in the state that has gas blanket in the storage portion always according to liquid level position control soup.Can make thus moltenly to exist gas in the liquid to be emitted to gas blanket in the storage portion, thus and fluid separation applications.Therefore, the gas flow of sneaking in the liquid that is supplied to coating part can be reduced, and the generation of bubbles such as microvesicle can be further suppressed.
Therefore, can provide a kind of liquid-supplying system especially, the security in the manufacturing of semiconductor device or liquid crystal indicator of this feed system, economy, productivity ratio are good, and to the coating part feed fluid of apparatus for coating.
To achieve these goals, the 2nd invention is used for the coating part feed fluid to apparatus for coating for a kind of feed liquid method, and this feed liquid method uses a kind of liquid-supplying system, and described liquid-supplying system has the storage portion that is used for storaging liquid; The 1st runner; Be connected with above-mentioned storage portion, be used for the 2nd runner to above-mentioned storage portion feed fluid; Be connected with above-mentioned storage portion, be used for the 3rd runner to above-mentioned storage portion supply gas; Be connected with the coating part of above-mentioned storage portion and above-mentioned apparatus for coating, be used for the 4th runner to above-mentioned coating part feed fluid from above-mentioned storage portion, the runner of above-mentioned the 1st runner, above-mentioned the 2nd runner can removably connect the regulation container, and above-mentioned the 1st runner can be to the afore mentioned rules supply for receptacles gas that connects.Described feed liquid method is characterised in that, comprise: storage portion feed flow operation, promptly utilize by above-mentioned the 1st runner gas supplied pair afore mentioned rules container that is connected with the runner of above-mentioned the 1st runner, above-mentioned the 2nd runner is interior and pressurize, by above-mentioned the 2nd runner liquid in the supply afore mentioned rules container in above-mentioned storage portion; Coating part feed flow operation is promptly utilized by above-mentioned the 3rd runner gas supplied above-mentioned storage portion inside of pressurizeing, by the liquid of above-mentioned the 4th runner in above-mentioned coating part is supplied with above-mentioned storage portion.
Utilize said structure, can independently control interior pressure state of regulation container and the pressure state in the storage portion, pressurized delivered is contained in the liquid such as soup in the regulation container, in case be filled in the storage portion, the storage portion inside of then pressurizeing on one side is on one side to the coating part feed fluid of apparatus for coating.That is, can in container, directly carry liquid to coating part, but in pressurization storage portion inside when coating part is carried liquid.Therefore, can make in order to carry liquid to storage portion the internal tank applied pressure is low pressure.For this reason, do not need can high voltage bearing container as container, and can be the regulation container with the containers such as resin container of conveying of being generally used for soup etc., it removably is connected on the runner of liquid-supplying system is used.With its dismounting, replace to other containers, economical after can the soup in container using.Because can must be lower, so can carry out the replacement operation etc. of container safely with the pressure restraining that is applied in the container.
In addition, owing in the regulation container, be under the state of low pressure, so it is excessive not cause molten in the liquid to deposit gas to storage portion feed flow.Therefore, can suppress the to cavitate generation of the bubbles such as microvesicle that cause.For this reason, can suppress of the influence of above-mentioned bubble, and during from the soup of coating part, suppress the time delay that internal pressure piping rises, reduce the deficiency of initial stage spray volume, the high quality of products of stable uniform is provided in coating to quality.And, when coating part is carried liquid, suction operation that can and use ejection portions such as utilizing pump to produce is carried the mode of soup and is passed through the mode of pressurization storage portion delivered inside soup, even so also can offset the pressure loss that filter etc. causes or the negative pressure of following suction operation under the situation of filter etc. being provided with on the pipe arrangement pipeline, also relevant with the generation that suppresses bubble.Can also reduce the possibility of aspirating load deteriorations such as ejection portions such as causing jet pump or its engine part, damage.
Therefore, can provide a kind of feed liquid method, its security, economy, productivity ratio are good, and to the coating part feed fluid of apparatus for coating.
To achieve these goals, the 3rd invention is a kind of apparatus for coating, it is characterized in that, possesses the liquid-supplying system of the 1st invention.
Utilize said structure can control interior pressure state of regulation container and the pressure state in the storage portion independently, pressurized delivered is contained in the soup in the regulation container etc., in case be filled in the storage portion, Yi Bian the storage portion inside of then pressurizeing, Yi Bian to the coating part feed fluid of apparatus for coating.That is, directly in container, do not carry liquid to coating part, but in pressurization storage portion inside when coating part is carried liquid.Therefore, can make in order to carry liquid in applied pressure at the low pressure range of for example 5kPa～100kPa to container to storage portion.For this reason, can not need can high voltage bearing container as container, and can removably be connected on the runner of liquid-supplying system, and be used with the containers such as resin container of conveying of being generally used for soup etc. as the regulation container with this state.It can be disassembled after soup in the container uses and change other containers, economical into.Because can must be lower, so can carry out the replacement operation etc. of container safely with the pressure restraining that is applied in the container.
In addition, owing in the regulation container, be under the state of low pressure, so it is excessive not cause molten in the liquid to deposit gas to storage portion feed flow.Therefore, can suppress the to cavitate generation of the bubbles such as microvesicle that cause.For this reason, can suppress of the influence of above-mentioned bubble, and during from the soup of coating part, suppress the time delay that internal pressure piping rises, reduce the deficiency of initial stage spray volume, the high quality of products of stable uniform is provided in coating to quality.And, when coating part is carried liquid, suction operation that can and use ejection portions such as utilizing pump to produce is carried the mode of liquid and is passed through pressurization storage portion delivered inside soup mode, even so also can offset the pressure loss that filter etc. causes or the negative pressure of following suction operation under the situation of filter etc. being provided with on the pipe arrangement pipeline, also relevant with the generation that suppresses bubble.Can also reduce the possibility of aspirating load deteriorations such as ejection portions such as causing jet pump or its engine part, damage.
Can also on runner, connect the regulation container by the container connecting portion.At this moment, if the external screw thread by the inner peripheral surface that screws togather the container connecting portion internal thread that has and the periphery that is arranged on the regulation opening of container is connected the regulation container, when then pressurizing vessel is inner, form air-tightness, be difficult for the lax or gas leakage of generation container connecting portion at the container connecting portion.In addition, when replacing container, even the generation container connecting portion is lax, because the external screw thread of container and the internal thread of container connecting portion can block, so container or container connecting portion can not disperse, and gas-pressurized can make internal tank become atmospheric pressure safely from because of the lax clearance leakage that produces thus.Therefore the replacement operation of container becomes safer.
In addition, can use of the supply of level detection member such as sensor, so can be in the state that has gas blanket in the storage portion always according to liquid level position control soup.Can make thus moltenly to exist gas in the liquid to be emitted to gas blanket in the storage portion, thus and fluid separation applications.Therefore, the gas flow of sneaking in the liquid that is supplied to coating part can be reduced, and the generation of bubbles such as microvesicle can be further suppressed.
Therefore security, economy, apparatus for coating that productivity ratio is good can be provided.
Security, economy, liquid-supplying system that productivity ratio is good etc. can be provided according to the present invention.
Description of drawings
In the accompanying drawing:
Fig. 1 is the schematic diagram of the embodiment of liquid-supplying system among the present invention;
Fig. 2 is the flow chart of the feed liquid method in the liquid-supplying system;
Fig. 3 is the flow chart of the feed liquid method in the liquid-supplying system;
Fig. 4 is the flow chart of the feed liquid method in the liquid-supplying system;
Fig. 5 is the flow chart of the feed liquid method in the liquid-supplying system;
Fig. 6 is the flow chart of the feed liquid method in the liquid-supplying system;
Fig. 7 is the schematic diagram of other embodiments of liquid-supplying system of the present invention;
Fig. 8 is the accompanying drawing of the example of expression auxiliary equipment;
Fig. 9 is the accompanying drawing of expression apparatus for coating example of structure;
Figure 10 is the accompanying drawing of the example of the withstand voltage packing container of expression;
Figure 11 is the accompanying drawing of the example of expression pressurization backplate.
Reference numeral
1 liquid-supplying system
3 surge tanks
4 sensors
5 (5-1,5-2,5-3,5-4,5-5) pipeline
7 (7-1,7-2,7-3,7-4,7-5) valve
9 (9-1,9-2,9-3) adjuster
11 filters
13 pumps
14 coating nozzles
15 auxiliary equipments
17 resin containers
19 siphon pipes
21 gas-liquid separation faces
22 pressurization mouths
23 liquor charging mouths
25 external screw threads
27 internal threads
100 apparatus for coating
120 coating parts
The specific embodiment
With reference to the accompanying drawings embodiments such as liquid-supplying system of the present invention are described.The liquid-supplying system of this embodiment at first, is described with reference to Fig. 1, Fig. 9.
As shown in Figure 9, the part of the apparatus for coating 100 that uses when making liquid crystal indicator or semiconductor device of the liquid-supplying system 1 of this embodiment and assembled.Apparatus for coating 100 also possesses control part 110, coating part 120, substrate maintaining part 130 etc. except that liquid-supplying system 1.
As shown in Figure 1, the liquid-supplying system 1 of this embodiment has surge tank 3 (storage portion), pipeline 5 (runner), valve 7 (open and close member), adjuster 9 etc., soups (liquid) such as the resist in ejection portion 13, coating nozzle 14 (coating part 120) side supply resin container 17 (regulation container), dispersible pigment dispersion.The operation of valve 7 and adjuster 9, ejection portion 13 etc. can be by control part 110 controls.
Utilize under the state of supplying with the gases at high pressure (Compressed Gas or compressed nitrogen etc.) more than the 100kPa even surge tank 3 is preferred, also excellent material, structure are made to the intensity of resistance to deformation.In addition, be preferably formed the design of a kind of like this container, that is,, and can forever keep withstand voltage properties even also can gas leakage or leakage or distortion under the pressurized state of 200kPa at least.But the material of surge tank and shape specifically are not defined in this.For example,, can use metals such as SUS304 stainless steel or aluminium, when the soup that holds has the character of corroding metal or when paying attention to processability, satisfy under the condition of resistance to pressure, can use fluororesin or MC Buddhist nun as the material of surge tank 3
Deng as raw material.In addition, in order to give chemical proofing, can carry out coating resin or coating processing to inner surface.
In the also preferred surge tank 3 the level detection member of sensor 4 as the liquid level that detects jar inner liquid medicine is set.Because be formed on the state that there is the above air layer of prescribed volume in surge tank 3 interior tops always, so preferred (below the upper limit position) liquid level that detects regulation by for example sensor 4 is controlled the switching that is arranged on the valve on the pipeline, and then the supply of blocking-up soup etc., so that liquid level is not more than predetermined upper limit position.
Pipeline 5 (5-1,5-2,5-3,5-4,5-5) is gas or flow channel for liquids, comprises the pipeline (5-1,5-3,5-4) of the negotiable gas that is used for supply gas or open atmosphere and is used for the pipeline (5-2,5-5) of the negotiable liquid of supply of chemical.Its material, shape etc. can be used the normally used material of this kind pipeline, shape.
Pipeline 5-1 (the 1st runner) begins to extend from the gas supply part (not shown), and is connected with resin container 17.Pipeline 5-1 is from the pipe arrangement pipeline of gas supply part supply gas in order to pressurize resin container 17 inside.
Pipeline 5-2 (the 2nd runner) is connected with resin container 17, surge tank 3.Pipeline 5-2 is according to the pressure in the resin container 17, utilizes the pipe arrangement pipeline of the soup of siphonic effect in surge tank 3 supply resin containers 17.
Pipeline 5-3 is connected with surge tank 3 with outside, is used for surge tank 3 is become atmospheric pipe arrangement pipeline in atmosphere opening makes surge tank 3.
Pipeline 5-4 (the 3rd runner) tells from pipeline 5-1, is connected with surge tank 3.Pipeline 5-4 is connected with surge tank 3 with gas supply part, is used to pressurization surge tank 3 inner and from the pipe arrangement pipeline of gas supply part supply gas in surge tank 3.
Pipeline 5-5 (the 4th runner) is connected with surge tank 3, ejection portion 13 (coating part 120).Pipeline 5-5 is from the pipe arrangement pipeline of surge tank 3 to coating part 120 supply of chemical such as ejection portion 13, coating nozzles 14.
Valve 7 (7-1,7-2,7-3,7-4,7-5) be open or blocking-up pipeline 5 in liquid or the open and close member of gas flow, its structure etc. is not particularly limited, can use known various structures.In addition, according to various conditions, can make control part 110 utilize the switchings of the above-mentioned valve of control automatically such as Air control valve as required.The operator is waited open and close above-mentioned valve by manual operation.
Valve 7-1 (V1) is arranged on the pipeline 5-1, and valve 7-3 (V3) is provided with on the pipeline 5-3, and valve 7-4 (V4) is arranged on the pipeline 5-4, adjusts airflow flowing in the corresponding pipeline 5 by switching separately.
Need to prove that valve 7-3 is by the flow through air-flow of pipeline 5-3 of its open and close controlling, and with surge tank 3 to atmosphere opening (and blocking-up), thereby play a role as the atmosphere opening member.But the mechanism to atmosphere opening is not limited thereto with surge tank 3.For example, if the outside of surge tank 3 is directly linked to each other with atmosphere, also can bring into play effect as the atmosphere opening member even then only open and close the part of surge tank 3.
In addition, valve 7-2 (V2) is arranged on the pipeline 5-2, and valve 7-5 (V5) is arranged on the pipeline 5-5, by switching separately, adjusts the soup stream that flows in the corresponding pipeline 5.
In addition, though do not illustrate in the accompanying drawing, but can on above-mentioned surge tank 3, connect be used for the pipeline of the soup in the recycling can or be used to inject the solvent that cleans surge tank 3 pipeline can with, the valve that opens and closes the liquid stream in the control piper by it can be set on each pipeline.
Adjuster 9 (9-1,9-2,9-3) is a kind of pressure adjustment means, is used to regulate and keeps pressure from the gas supply part gas supplied, so that the pressure of the gas in resin container 17 or the surge tank 3 is any fixed pressure value.Identical with valve 7, its control can be controlled by control part 110 automatically according to various conditions, also can be controlled by operator's manual operation.
Adjuster 9-1 (REG1) is arranged on close gas supply part one side of component that pipeline 5-1 goes up relative and pipeline 5-4, regulates the pressure of the gas that is supplied to resin container 17 or surge tank 3.
Adjuster 9-2 (REG2) is arranged on close resin container 17 1 sides of component that pipeline 5-1 goes up relative and pipeline 5-4, regulates the pressure of the gas that is supplied to resin container 17.
Adjuster 9-3 (REG3) is arranged on the pipeline 5-4, regulates the pressure of the gas that is supplied to surge tank 3.
Need to prove that generally soup is carried, supplied with by resist manufacturer etc. with the state that is stored in the resin container, but the safety of the container of this moment when guaranteeing to carry satisfies above-mentioned intensity usually.That is, the medical liquid container that is used to carry can be directly applied for this liquid-supplying system 1, under this kind situation, needn't use the special container that is used for liquid-supplying system 1, be favourable aspect economy.
Need to prove that if satisfy above-mentioned condition, then the material of container is not limited to resin, also can use container replacement resin containers 17 such as metal.But, as mentioned above, because the elasticity that has of resin, so preventing aspect the damage of outside, preferably to use resin container 17 because of what impact such as drop caused.In addition, if utilize polyethylene etc. to make resin container, also be favourable on the carrying capacity of environment this point then reducing because of the material recirculation of used container or hot regeneration cycle.
During supply of chemical, if directly resin container 17 is pressurizeed, then resin container 17 expands from the inboard a little.The external screw thread 25 of peristome 24 outer peripheral faces of resin container 17 is from the internal thread 27 of the high auxiliary equipment 15 of inboard isotropically crimp intensity at this moment, be meshing with each other and improve air-tightness, so be difficult for taking place the lax of auxiliary equipment 15 or leak by its gas that causes.
In addition, even auxiliary equipment 15 is lax, because the external screw thread 25 of resin container 17 and the internal thread 27 of auxiliary equipment 15 can block, so external screw thread 25 is by internal thread 27 fastenings, auxiliary equipment 15 can not disperse, and pressurization is overflowed from the lax gap that produces with gas, and can make thus becomes atmospheric pressure safely in the resin container 17.
In addition, the sectional area of auxiliary equipment 15 can be controlled at about the sectional area of peristome 24 (comparing reduced with housing section) on resin container 17 tops, so, the power that is applied to auxiliary equipment 15 is the cap of the above-mentioned withstand voltage packing container more than the resin container 17 body portion diameters less than size, and then safe operating environment can be provided.
For example, if the diameter of the lid of cylindric withstand voltage packing container (rustless steel container etc.) is 300mm, the power that cap integral body is subjected to when then its inside being applied the pressure of 100kPa is about 7065N/m
2
On the other hand, being installed in the diameter of auxiliary equipment 15 of the inlet of resin container 17 can be for about 80mm.If this moment pressure (as described later, in liquid-supplying system 1, can be in low pressure in the resin container 17) to applying 10kPa in the resin container 17, then the power that is subjected to of auxiliary equipment 15 is about 50.24N/m
2, be the size below 1/100, security further improves as can be known.
In addition, auxiliary equipment 15 has more than 1 pressurization mouthfuls 22 and liquor charging mouth 23 at least, and pressurization mouthfuls 22 removably is connected with pipeline 5-1, and liquor charging mouth 23 removably is connected with pipeline 5-2.
Utilize Fig. 2 to Fig. 6 that the flow process of the feed liquid method in the liquid-supplying system 1 of this embodiment is described below.
When liquid-supplying system 1 carried out feed flow, pipeline 5-1 was connected with pressurization mouth 22, and pipeline 5-2 is connected with liquor charging mouth 23, and the peristome 24 on resin container 17 tops is installed on the auxiliary equipment 15 that is installed in advance on pipeline 5-1, the pipeline 5-2 as described above.Resin container 17 perhaps is installed on auxiliary equipment 15, again auxiliary equipment 15 is installed on pipeline 5-1, the pipeline 5-2.
Next as shown in Figure 2, supply with pressurization with gas (compressed air or compressed nitrogen etc.) in resin container 17 by pipeline 5-1 etc., pressurization stores resin container 17 inside of soup.Open valve 7-1 this moment.In this embodiment, utilize adjuster 9-1, adjuster 9-2 that this pressure is transferred to about 10kPa, and keep this pressure.Again valve 7-4 is closed, open valve 7-3 simultaneously, make in the surge tank 3 to become atmospheric pressure.In addition, in valve-off 7-5, open valve 7-2, make in advance to be in the state that to fill soup in the surge tank 3.But, in the surge tank 3 so long as the pressure states that are lower than in the resin container 17 get final product, in this qualification, even it is also passable to be higher than atmospheric pressure state.
If be above-mentioned state, then utilize the siphonic effect of following the draught head of (atmospheric pressure) in resin container 17 interior (10kPa) and the surge tank 3, soup in the resin container 17 is supplied in the surge tank 3 by pipeline 5-2, and as shown in Figure 3, soup is filled in the surge tank 3.Owing to be in low-pressure state in the resin container 17, so can not cause in the soup the molten gas of depositing excessive.
Need to prove, under atmospheric pressure environment, if resin container 17 inside of sealing are applied constant voltage above 100kPa for a long time, then the migration along with the time expands, might have leakage or break, overturning, and can operator's problems such as security appear guaranteeing.Therefore, in the liquid-supplying system 1 of this embodiment, for guaranteeing safety, resin container 17 gas inside pressure are in the scope of 5kPa～100kPa.In addition, under the situation that more positively guarantees security, preferably make pressure in the scope of 5kPa～50kPa and used.But, according to the intensity of resin container 17 or use other containers to replace under the situation of resin containers 17 etc., as long as no leakage or break, overturning, and guarantee operator's security etc., also changing sometimes can applied pressure.
Herein, the 21st, gas-liquid separation face is the liquid level on soup top.During supply of chemical, bubble also might be sneaked into soup from the pipeline of resin container 17 sides etc., but as mentioned above, gas-liquid separation face 21 is set in surge tank 3, is used to separate the bubble and the soup of sneaking into soup, and removes bubble.That is, the top of soup does not reach the upper surface of surge tank 3, and guarantees to be full of the space of gases such as air usually more than prescribed volume.Bubble rises to gas-liquid separation face 21 thus, be discharged in the gas on top, thus and separating liquid medicine.
Therefore, above-mentioned sensor 4 preferably is set in surge tank 3.And, in order to make the top in the surge tank 3 be in the state that has the air layer more than the prescribed volume always, preferably detect the suitably height of the gas-liquid separation face 21 of regulation (upper limit position is following) by sensor 4, utilize the open and close controlling etc. of valve to carry out blocking-up that soup supplies with etc., thereby the gas-liquid separation face of making 21 is not more than the upper limit position of predesignating.
Need to prove, under the independent inadequate situation of gas-liquid separation ability of surge tank 3, can otherwise append bubbles such as gas-liquid separation container or degassing assembly at pipeline etc. and remove device.
In addition, as the example that in surge tank 3, more effectively outgases, for example, the direction that can be on surge tank 3 tilts in the horizontal interior walls tangential direction or the opposed inner walls of cylindric surge tank 3 is provided for flowing through the through hole of the soup that 5-2 by the road supplies with, from this through hole to the inwall tangential direction of surge tank 3 or the direction ejection soup that tilts with respect to inwall.Form the rotating flow of soup this moment in surge tank 3, thereby produce eddy current effect, and the inwall direction at surge tank 3 moves the high liquid of density thus, and at the low gas of horizontal centre direction flow density.Gas moves to gas-liquid separation face 21 from the horizontal centre portion of surge tank 3.Also can improve gas-liquid separation thus.
In addition, in amount of liquid medicine or the flow velocity deficiency supplied with, in the time of can not obtaining the above-mentioned sufficient rotating flow that is used to outgas, the rotation wings such as magnetic stirrer or agitating auger oar can be set, the rotating flow of mandatory thus formation soup in surge tank 3.At this moment, if the shape of the rotation wing is the shape of for example expanding towards top, then because of forming whirlwind shape rotating flow, so preferred towards top gas-liquid separation face 21.
In addition, the bubble that moves for the horizontal centre direction that is collected under the rotating flow effect to surge tank 3, with its guiding top gas-liquid separation face 21 and be discharged in the gas, the Ji Pao pipe can be set in inside, this Ji Pao pipe is the body that the side has the hole portion that is used to take in and collect bubble.In the inside of Ji Pao pipe, bubble coalescence forms air pocket, thereby promotes to be moved upward.
As shown in Figure 4, (gas-liquid separation face 21) arrived assigned position if the sensor 4 detects liquid level, valve-off 7-2, and blocking-up is via the feed flow of pipeline 5-2.In addition, valve-off 7-3 blocking-up atmosphere on the other hand, is opened valve 7-4 on the one hand, supplies with in surge tank 3 and pressurizes with gas (compressed air or compressed nitrogen etc.), surge tank 3 is applied to ejection portion 13 (coating part 120) carry the required pressure of liquid.Need to prove that this moment, valve 7-5 was in closed condition.
Above-mentioned applied pressure is the required pressure of pressurized delivered soup, this pressure carries out the soup suction in ejection portion 13 and the time does not produce draught head, and can offset the pressure loss at the pipeline 5-5 place that filter 11 etc. causes or follow the negative pressure of the soup suction operation of ejection portion 13.In liquid-supplying system 1, to applying the essential pressure in the scope about 10kPa～200kPa in the surge tank 3, but be not limited thereto, according to intensity of surge tank 3 etc., variation can be as required and applied pressure.
After soups in the surge tank 3 are applied the pressure of afore mentioned rules, as shown in Figure 5, open valve 7-5, utilize ejection portion 13 to carry out the suction of soup simultaneously, load soup to the liquid storing part of ejection portion 13, and utilize coating nozzle 14 on base material, to be coated with soup.
But, in this liquid-supplying system 1, when utilizing ejection portion 13 aspiration medicinal liquids, pressurization surge tank 3 inside, and the pressure that applies the degree that can offset the pressure loss that filter 11 etc. produces or negative pressure helps to carry liquid, so can prevent the foaming in above-mentioned pipeline 5-5 or the liquid storing part.Can also suppress the excessive load of the ejection portions 13 such as engine of jet pump to be caused parts deterioration, damage because of when suction.
Need to prove, causing residual a little pressure of liquid storing part because of the auxiliary pressurization in the surge tank 3, when beginning coating, soup overflowed or soup leaks under the situation of (possible) from coating nozzle 14 etc., by before this coating, carrying out predistribution (predispense) operation, can make coating part 120 (runner of peristome etc.) recover atmospheric pressure from liquid storing part to coating nozzle 14, perhaps opening valve 7-3 makes surge tank 3 to atmosphere opening, open valve 7-5 then, remove residual pressure in the liquid storing part thus, it is identical with atmospheric pressure to adjust coating part 120.
Also can carry out in surge tank 3 supply of chemical simultaneously and from surge tank 3 to coating part 120 supply of chemical.In such cases, if gas-liquid separation face 21 has reached the position of regulation, the surge tank 3 of then under the state of opening valve 7-2, pressurizeing inner and from surge tank 3 to coating part 120 supply of chemical such as ejection portion 13, coating nozzles 14.
At this moment, with the bubble of separating liquid medicine and soup together be inhaled into pipeline 5-5 or fully the soup before the divided gas flow be inhaled under the situation of pipeline 5-5 (possible), supply of chemical in surge tank 3 at first, then, open a period of time, be divided gas flow, discharge bubble upward, finish the needed time interval of gas-liquid separation, open valve 7-5 afterwards, by pipeline 5-5 to the coating part supply of chemical.Because the viscosity of soup or add the influence of the surfactant in the soup to, defoaming is different sometimes, and the stand-by time of this moment does not have special provision.
Through above operation, form with the state in the low pressure pressurization resin container 17, suppress the molten storage of gas in soup, and in surge tank 3, bubble is separated from soup, to coating part 120 feed fluid only optionally.In addition, the auxiliary pressurization in the surge tank 3 is offset the pressure loss of generations such as filter 11 or is followed the negative pressure of suction operation, thereby can be to coating part 120 supply of chemical.Can suppress the influence of above-mentioned bubble thus to quality.And, when utilizing ejection portion 13, can suppress the initial stage spray volume deficiency that the pressure rising delay time is followed in interior pressure rising delay time of pipe arrangement or reduction, and the high quality of products of stable uniformity is provided from coating nozzle 14 ejection soups.
Need to prove that if finished charging to the liquid storing part of pump 13, as shown in Figure 6, valve-off 7-4, valve 7-5 open valve 7-3 then, with in the surge tank 3 to atmosphere opening.Prior to valve 7-3 valve-off 7-5 is in order to prevent that soup flows backwards when the atmosphere opening in surge tank 3.
If open valve 7-2, then as shown in Figure 6, the siphonic effect that utilizes the pressure differential in resin container 17 and the surge tank 3 to produce again, soup in the resin container 17 is delivered in the surge tank 3, thereby fill soup in surge tank 3 by siphon pipe 19, liquor charging mouth 23, pipeline 5-2 pressurization.
As described above, the liquid-supplying system 1 of this embodiment can independently separate the inside of controlling resin container 17 and surge tank 3 under the pressure state.Thus, when keeping the low pressure (for example scope of 5kPa～100kPa) that is applied in the resin container 17, make in the surge tank 3 to be in atmospheric pressure state, open the valve 7-2 of pipeline 5-2 then, utilize siphonic effect thus to surge tank 3 supply of chemical.
Therefore, will not merge use or the extra high container of working strength with withstand voltage packing container or pressurization backplate by resin container 17, the resin container that can use separately when being generally used for carrying etc. is as resin container 17, so abatement device expense and simplification safety device mechanism, thereby improve economy.In addition, operability such as container replacement when improving the raffinate of having used up in the medical liquid container or cleaning, thus can use effectively.And also be preferred aspect recirculation.Also because the pressure restraining that will be applied in the container is a low pressure, so can carry out the replacement operation etc. of container safely.
In addition, in resin container 17, be under the state of low pressure, so it is excessive can not cause molten in the soup to deposit gas to surge tank 3 feed flows.Therefore, can be suppressed at the interior foaming of pipeline 5-5 or liquid storing part.And during the soup in coating part 120 supply surge tanks 3, apply to a certain degree lower low-pressure to offset the pressure loss that produces by filter 11 grades etc., the soup suction operation of auxiliary jet pump ejection portions 13 such as (syringe, periosteum (tubephragm), diaphragms (diaphragm) etc.), so, even when on pipeline 5-5, filter 11 being set, also can offset the pressure loss that filter 11 grades cause or the negative pressure of following suction operation, and suppress the foaming in pipeline 5-5 or the liquid storing part.
Can suppress the influence of above-mentioned bubble thus to quality.And can eliminate the pressure rise time in when beginning coating and postpone because of bubble, carry out precision, coating uniformly thereby can utilize stable soup to carry.Therefore, can keep the high-quality of stable uniform easily, and boost productivity.The ejection portions 13 such as engine of ejection portion cause part deterioration, damage because of over load in the time of can also suppressing to aspirate.
In addition, in the liquid-supplying system 1, though resin container 17 is directly pressurizeed, this moment is by auxiliary equipment 15 connecting line 5-1, pipeline 5-2 and resin container 17.The internal thread 27 of external screw thread 25 and auxiliary equipment 15 inner peripheral surfaces that are provided with corresponding to external screw thread 25 of peristome 24 (inlet) outer peripheral face of resin container 17 is screwed togather, thereby resin container 17 is installed on the auxiliary equipment 15.Therefore, when pressurization caused that resin container 17 expands a little, because internal thread 27 engagements of the external screw thread 25 of its peristome 24 outer peripheral faces and auxiliary equipment 15, so air-tightness uprises, danger lax or that leak reduced.
In addition, when replacing container etc., even the lax of auxiliary equipment 15 taken place, owing to can block at the external screw thread 25 of resin container 17 and internal thread 27 places of auxiliary equipment 15, so external screw thread 25 is by internal thread 27 fastenings, thereby auxiliary equipment 15 can not disperse, and owing to pressurization is overflowed from the gap form because of relaxing with gas, becomes atmospheric pressure state so can make safely in the resin container 17.And the sectional area of auxiliary equipment 15 can little peristome 24 degree to resin container 17, and the power that auxiliary equipment 15 is born diminishes.Therefore can provide safer operating environment.
In addition, sensor 4 is set in the surge tank 3, supplies with according to liquid level position control soup thus, and can form the state that has the gas blanket of certain volume in the surge tank 3 usually.Therefore, can make by sneak into the bubble that the gas in the soup forms from pipeline 5-2 etc. and rise, discharge from gas-liquid separation face 21, with separating liquid medicine.Can suppress bubble thus and sneak in the pipeline 5-5 of coating part 120 sides such as ejection portion 13, coating nozzle 14, thus the generation of bubbles such as inhibition microvesicle.
Do not accumulate superfluous pressure in the soup of the liquid storing part of ejection portion 13, and carry out before the coating predistribution operation or by open valve 7-5, valve 7-3 removes the residual pressure in the liquid storing part, thereby identical with atmospheric pressure, can suppress soups in the nozzle 14 thus and before coating, be extruded or when the ejection beginning, overflow.
Utilize Fig. 7 that other embodiment of liquid-supplying system of the present invention is described.To having the identical symbol of component labelling with Fig. 1 identical function structure, and omit explanation among Fig. 7.
In the liquid-supplying system 30 of this embodiment, pipeline 5-6 (the 1st runner) extends from the gas supply part (not shown), is connected with resin container 17.In the resin container 17 that pressurizes, pipeline 5-6 is from gas supply part supply gas in resin container 17.
Pipeline 5-7 (the 3rd runner) extends from the gas supply part (not shown), is connected with surge tank 3.In the surge tank 3 that pressurizes, pipeline 5-7 is from gas supply part supply gas in surge tank 3.
That is, in this embodiment, supplying with pressurization in surge tank 3 is not from supplying with pipeline (pipeline 5-6) that pressurization uses gas along separate routes to resin container 17 with the pipeline (pipeline 5-7) of gas, and above-mentioned pipeline is connected with gas supply part independently and is provided with.Valve 7-1 and adjuster 9-2 are set on the pipeline of pipeline 5-6, valve 7-4 and adjuster 9-3 are set on the pipeline of pipeline 5-7, the pressurized state in independent control resin container 17, the surge tank 3.
In such cases, can utilize method same as described above, order to be coated with to coating part 120 supply of chemical such as ejection portion 13, coating nozzles 14, the effect of this moment is also same as described above.Promptly, as long as the configuration of pipeline or valve, adjuster etc. can be carried out following operation, be not limited to the configuration shown in the embodiment, described be operating as in resin container 17 imports gas (low pressure) and pressurizes, utilize in the resin container 17 and the pressure reduction supply of chemical in surge tank 3 in the surge tank 3, in surge tank 3, import gas then, to the soups in the surge tank 3 apply regulation pressure (with the soup suction operation of ejection portion 13 and with), simultaneously soup is delivered to coating part 120.
As described above, utilize this embodiment, security, economy, liquid-supplying system that productivity ratio is good etc. can be provided.
Need to prove, the preferred soup of the scope of application of this liquid-supplying system 1 be have about 1～100mPas, the liquid of the viscosity about preferred 1～10mPa, more preferably Newtonian fluid.This is the rerum natura of soup of coating one by one that is suitable in the mold pressing rubbing method, but also can be suitable for for the soup of the non-newtonian fluid with thixotropy etc.
Consider from other viewpoint; the preferred soup of the scope of application is to use PGMEA; PGME; EEP; MBA; EDM; DMDG; butyl acetate; ethyl lactates etc. are as the soup of main solvent; example as concrete purposes; can enumerate the semiconductor photoetching process in the manufacturing of semiconductor or liquid crystal indicator; the active matrix element; distribution forms uses photoetching process; colour filter forms the operation with photoetching process etc.; for example use photolithographic operation, then comprise the formation of shading with black matrix" if colour filter forms; painted formation with RGBY or CMY colour element; the formation of white layer (white layer) or scattering layer; orientation is set the formation with projection; the formation of LCD gap control material (Photo spacer); the formation of protective layer (overcoat layer) etc.
In addition, the applied base material that carries out soup coating comprises silicon chip, glass, metal, plastics, film (film) etc.
Abovely be illustrated with reference to the preferred implementation of accompanying drawing to liquid-supplying system of the present invention etc., but be not limited to of the present invention for example.To those skilled in the art, in the scope of the disclosed technological thought of the application, it is conspicuous expecting various modified examples or revise example, and they also should belong to technical scope of the present invention.
Claims (9)
1. a liquid-supplying system is used for the coating part feed fluid to apparatus for coating, it is characterized in that possessing:
Storage portion is used for storaging liquid;
The 1st runner;
The 2nd runner is connected with described storage portion, is used for the feed fluid to described storage portion;
The 3rd runner is connected with described storage portion, is used for the supply gas to described storage portion;
The 4th runner is connected with described storage portion and described coating part, is used for from described storage portion to described coating part feed fluid;
Described the 1st runner, described the 2nd runner can removably connect the regulation container, and described the 1st runner can be to the described regulation supply for receptacles gas that connects.
2. liquid-supplying system as claimed in claim 1 is characterized in that, described storage portion has and is used for the atmosphere opening member of storage portion inside to atmosphere opening;
In described the 1st, the 2nd, the 3rd, the 4th runner, be provided with the open and close member that is used to open and close each runner.
3. liquid-supplying system as claimed in claim 1 is characterized in that, described storage portion is provided with the level detection member that is used to detect liquid level.
4. liquid-supplying system as claimed in claim 1 is characterized in that, also possesses the container connecting portion that can removably connect described regulation container,
Described the 1st runner, described the 2nd runner can connect described regulation container by described container connecting portion.
5. liquid-supplying system as claimed in claim 4, it is characterized in that, described container connecting portion has internal thread at inner peripheral surface, by described internal thread and the external thread spiro fastening that is arranged on the peristome outer peripheral face of described regulation container, can connect described container connecting portion and described regulation container.
6. liquid-supplying system as claimed in claim 1 is characterized in that, described the 1st runner is supply gas in the described regulation container that connects, and makes the scope of the interior pressure of described regulation container at 5kPa to 100kPa.
7. liquid-supplying system as claimed in claim 1 is characterized in that described apparatus for coating is used to make semiconductor device or liquid crystal indicator.
8. feed liquid method, described feed liquid method use liquid-supplying system and are used for coating part feed fluid to apparatus for coating, and described liquid-supplying system possesses the storage portion that is used for storaging liquid; The 1st runner; Be connected with described storage portion, be used for the 2nd runner to described storage portion feed fluid; Be connected with described storage portion, be used for the 3rd runner to described storage portion supply gas; Be connected with the coating part of described storage portion and apparatus for coating, be used for the 4th runner to described coating part feed fluid from described storage portion; Described the 1st runner, described the 2nd runner can removably connect the regulation container, and described the 1st runner can is characterized in that having to the described regulation supply for receptacles gas that connects
Storage portion feed flow operation is promptly utilized by described the 1st runner gas supplied pair described regulation container that is connected with described the 1st runner, described the 2nd runner is interior and is pressurizeed, by described the 2nd runner liquid in the described regulation container of supply in described storage portion;
Coating part feed flow operation is promptly utilized by described the 3rd runner gas supplied described storage portion inside of pressurizeing, by the liquid of described the 4th runner in described coating part is supplied with described storage portion.
9. an apparatus for coating is characterized in that, possesses as each the described liquid-supplying system in the claim 1 to 7.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009240218A JP5471281B2 (en) | 2009-10-19 | 2009-10-19 | Liquid supply system, liquid supply method, and coating apparatus |
| JP2009-240218 | 2009-10-19 |
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| CN102039258A true CN102039258A (en) | 2011-05-04 |
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| CN2010102295930A Pending CN102039258A (en) | 2009-10-19 | 2010-07-13 | Liquid supplying system, liquid supplying method and coating apparatus |
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| JP (1) | JP5471281B2 (en) |
| KR (1) | KR101701508B1 (en) |
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| TW (1) | TWI523699B (en) |
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| WO2013170502A1 (en) * | 2012-05-18 | 2013-11-21 | 深圳市华星光电技术有限公司 | Liquid crystal suction device and liquid crystal coating device |
| CN103801789A (en) * | 2012-11-06 | 2014-05-21 | 宁夏小牛自动化设备有限公司 | Device for storing, supplying and spraying solar cell scaling powder |
| WO2015066945A1 (en) * | 2013-11-06 | 2015-05-14 | 徐辉 | Immediately-stopping stage fogger |
| CN106890768A (en) * | 2017-04-24 | 2017-06-27 | 桂林紫竹乳胶制品有限公司 | A kind of sheath lubricant Dropping feeder |
| CN109085705A (en) * | 2018-07-13 | 2018-12-25 | 深圳市华星光电技术有限公司 | Liquid crystal coating apparatus and liquid crystal coating method |
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Also Published As
| Publication number | Publication date |
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| TW201114502A (en) | 2011-05-01 |
| KR101701508B1 (en) | 2017-02-13 |
| JP5471281B2 (en) | 2014-04-16 |
| JP2011083737A (en) | 2011-04-28 |
| KR20110043408A (en) | 2011-04-27 |
| TWI523699B (en) | 2016-03-01 |
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