CN102025287A - Linear ultrasonic motor based on alternating force - Google Patents
Linear ultrasonic motor based on alternating force Download PDFInfo
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- CN102025287A CN102025287A CN 201010558749 CN201010558749A CN102025287A CN 102025287 A CN102025287 A CN 102025287A CN 201010558749 CN201010558749 CN 201010558749 CN 201010558749 A CN201010558749 A CN 201010558749A CN 102025287 A CN102025287 A CN 102025287A
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- 238000005452 bending Methods 0.000 claims description 4
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- 238000002604 ultrasonography Methods 0.000 description 9
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- 238000005086 pumping Methods 0.000 description 2
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Abstract
The invention relates to a linear ultrasonic motor based on alternating force, comprising a stator and a mover, wherein the stator is formed by butting a left Lanvgein vibrator and a right Lanvgein vibrator along a central line, each Lanvgein vibrator is integrally in a structure of a continuous section bar with a section gradually reducing from the tail part to the head part, the heads of the left Lanvgein vibrator and the right Lanvgein vibrator are butted to form a whole body, a clamping piece is arranged at the lower part of each Lanvgein vibrator and is installed among a set of piezoelectric ceramic pieces, two pre-tightening force bolts are respectively arranged at both ends of the stator, a piezoelectric ceramic piece for a drive foot is adhered to the butting part of the two Lanvgein vibrators parallel to the surfaces of longitudinal vibration surfaces of the vibrators, and an electrode slice and a friction sheet are adhered to the piezoelectric ceramic piece for the drive foot to form the drive foot; and the mover is a linear guide rail, forms a cruciform structure with the stator and is contacted with the stator on the drive foot. The motor supplies a novel drive mode with force variation as a basis without relating to the problem of the consistency of vibration mode frequency, and therefore, structure design of the linear ultrasonic motor is easier, and the output force is stronger.
Description
Technical field
Based on linear ultrasonic motor and the operation mode and the electric excitation mode of alternating force, belong to the ultrasound electric machine technical field.
Background technology
Ultrasound electric machine is to utilize the inverse piezoelectric effect of piezoelectric ceramic and the new type power output device of ultrasonic vibration.Compare with electromagnetic machine, have compact conformation, low speed high torque, response fast (Millisecond), cut off self-lock, position and speed control are good, be not subjected to advantages such as electromagnetic interference and low noise operation, gather around in fields such as Aero-Space, micromachine, robot, precision instrumentation, servomechanism, medicine equipments to have broad application prospects.
Linear type ultrasound motor belongs to a classification of ultrasound electric machine.Structure according to the linear type ultrasound motor stator is dull and stereotyped and bar (or combining structure of bar), and linear ultrasonic motor is divided into plate structure and bar structure.Though it is simple in structure for the plate structure linear ultrasonic motor, flexible design, its output speed and power are less.Need have big power output, linear type ultrasound motor that efficient is high for applications such as industrial robot, Aero-Space.The rod-type linear ultrasonic motor has advantages such as power output, the speed of service be big.It generally comprises mover and stator, its architectural feature is: mover is a straight line guide rail, stator is made of several Langevin-type transducers, by the regulating frequency unanimity, make oscillator two phase vibration mode complex vibration (motion), driving foot formation space elliptic motion, promote the mover motion with the mover contact friction.On the contact interface of stator and rotor, the interaction of stator and rotor shows as the acting in conjunction of tangential and normal direction table variable force for this class ultrasound electric machine, and they are vertical mutually in the space, differ pi/2 in time.But, because existing linear ultrasonic motor utilizes structural vibrations that normal force (the normally normal vibration of the symmetrical mode generation of stator) is provided.In this design, the vibrational state of the symmetrical mode of stator is subjected to the influence of the precompression between stator and rotor, and when precompression is fully big, the vibration of the symmetrical mode of stator will be restricted, thereby cause the normal direction alternating force to reduce, and power output reduces.That is to say that the architectural feature of existing linear ultrasonic motor has limited the further raising of motor power output.This invention is only utilized a mode of oscillation of structure, tangential alternating force is provided, and utilizes longitudinal vibration piezoelectric chip that the normal direction alternating force directly is provided.Since the not influence of preloading power of normal direction alternating force, therefore, can be by increasing the power output that precompression improves motor.The linear ultrasonic motor that the present invention proposes will have bigger power output than existing linear ultrasonic motor.In addition, the present invention has only utilized a mode of structure, therefore, does not have the mode consistency problem that exists in the existing linear ultrasonic motor design, makes structural design be more prone to simple.
The research and development of present domestic linear ultrasonic motor is very fast, and colleges and universities such as Tsing-Hua University, Nanjing Aero-Space University, Harbin Institute of Technology have successively launched research to linear ultrasonic motor.Online at Chinese patent, published annular standing wave linear ultrasonic motor [200510046044.9], prism longitudinal bend composite vibrator linear supersonic motor [200610132316.1], triangle bended plate type piezoelectric straight line ultrasound electric motor [200710045921.X], H shape standing wave linear ultrasonic motor oscillator [200820014739.8] etc. successively since 2004.In recent years, Nanjing Aero-Space University succeeded in developing column structure dual-wheel foot driving linear ultrasonic motor and electric excitation method thereof [200710020963.8], based on K shape linear ultrasonic motor [200810124426.2] of continuous amplitude transformer principle etc.This class straight line has all utilized two mode of structure, provides the normal direction alternating force by symmetrical modal vibration (or longitudinal vibration or bending vibration modes).At present, do not see as yet and utilize a structural vibration tangent line alternating force to be provided, directly to utilize the longitudinal vibration piezoelectric ceramic that the report of the linear ultrasonic motor of normal direction alternating force is provided.
Summary of the invention
The objective of the invention is to develop a kind of simple in structure, power output is big, the speed of service is fast, delivery efficiency is high linear ultrasonic motor and operation mode and electric excitation mode based on alternating force.Rely on the type of drive that drives foot formation space elliptic motion and then promote mover different with the traditional line ultrasound electric machine, this motor has proposed a kind of brand-new type of drive that is changed to the basis with power, do not relate to the vibration modal frequency consistency problem, the structural design of linear ultrasonic motor is more prone to, and power output is bigger.
The present invention adopts following technical scheme for achieving the above object:
A kind of linear ultrasonic motor based on alternating force, comprise stator and mover, two Langevin-type transducers constituted along the center line butt joint about described stator comprised, each Langevin-type transducer comprises front end housing, rear end cap, piezoelectric ceramic piece and corresponding electrode slice are formed, and each Langevin-type transducer integral body be the cross section by afterbody to the continuous cross section of head convergent bar type structure, about the head butt joint of two Langevin-type transducers be connected as a single entity, the bottom of Langevin-type transducer is provided with holder, described holder is installed between one group of piezoelectric ceramic piece, the two ends of described stator are provided with the pretightning force bolt, a slice driving foot piezoelectric ceramic piece is pasted on the surface that is parallel to the curved face that shakes of oscillator at two Langevin-type transducer joints, paste electrode slice and friction plate on piezoelectric ceramic piece again and constitute and drive foot driving foot, described mover is a straight line guide rail, be arranged to " ten " font structure with described stator, and be in contact with one another at driving foot place.
A kind of electric excitation method thereof of linear ultrasonic motor, at first for two Langevin-type transducers about stator, utilize with the frequency sinusoidal signal and inspire bending vibration modes, because the symmetry of structure, driving the direction of motion that the sufficient stator vibration of locating always is parallel to mover, stator in the vibration and mover are because rubbing action produces the tangential force along the mover direction of motion; Secondly utilization and above-mentioned sinusoidal signal phase difference excite driving foot piezoelectric ceramic piece for the same frequency sinusoidal signal of pi/2, drive the sufficient flexible surperficial extrusion stress of driving foot that makes and be cyclic variation, make that actuating force can be cyclic variation when driving sufficient moving reciprocatingly with piezoelectric ceramic piece.
Beneficial effect:
(1) there is not abrupt-change cross section (identical acoustic impedance is arranged) in the Langevin-type transducer, can not produce reflected wave plane sound wave.
(2) convergent design forward made it have identical acoustic impedance on each cross section after the continuous variable cross section bar adopted.
(3) the continuous variable cross section bar adopt by after convergent design forward, also make the vibration of head of Langevin-type transducer be exaggerated.
(4) stator is formed by connecting by driving foot and Langevin-type transducer continuous contraction the on joint face, also makes stator reduce in the moment of flexure that drives the foot place.
(5) fixed, mover is subjected to the effect of tangential and two alternating forces of normal direction on contact-making surface, and these two alternating forces are vertical mutually in the space, differ pi/2 in time, and mover is done rectilinear motion under their acting in conjunction.Therefore, design of the present invention helps to improve speed, power output and the operational efficiency of motor.This linear ultrasonic motor is simple in structure, size is little, power output is big, speed is big, efficient is high.
Description of drawings
Fig. 1 is the linear ultrasonic motor structural representation based on alternating force
Fig. 2 is electroceramics polarization arrangement of the present invention and electric excitation mode
Label title among Fig. 1: 1 line slideway; 2. rear end cap; 3. front end housing; 4. drive the foot piezoelectric ceramic piece; 5. electrode slice; 6. piezoelectric ceramic piece; 7. holder; 8. friction plate; 9. pretightning force bolt.
Embodiment
A kind of linear ultrasonic motor based on alternating force as shown in Figure 1, comprise stator and mover, stator mainly by about two Langevin-type transducers constitute along the center line butt joint, each Langevin-type transducer is by front end housing 3, rear end cap 2, piezoelectric ceramic piece 6 and corresponding electrode slice 5 are formed, and whole be the cross section by afterbody to the continuous cross section of head convergent bar type structure, about the head butt joint of two Langevin-type transducers be connected as a single entity, the surface stickup a slice driving foot piezoelectric ceramic piece 4 that is parallel to the curved face that shakes of oscillator in addition at two Langevin-type transducer joints, drive foot paste again on piezoelectric ceramic piece 4 electrode slice 5 and a slice friction plate 8 constitute drive sufficient, described mover is that a straight line guide rail 1 is arranged to " ten " font structure with said stator in a plane, and is in contact with one another at driving foot place.External support component of the present invention is equipped with through hole, in order to stator and precompression device to be installed, stator is connected the linear ultrasonic motor of formation in aggregates based on alternating force with mover.
Electric excitation method thereof of the present invention is: for two Langevin-type transducers about in the stator, utilize with the frequency sinusoidal signal and inspire bending vibration modes, because the symmetry of structure, driving the direction of motion that the sufficient stator vibration of locating (reciprocating motion) always is parallel to mover, stator in the vibration and mover are because rubbing action produces the tangential force along the mover direction of motion; And utilization and above sinusoidal signal phase difference drive foot with piezoelectric ceramic piece 4 for the same frequency sinusoidal signal of pi/2 excites, drive the sufficient flexible surperficial extrusion stress of driving foot that makes and be cyclic variation with piezoelectric ceramic piece 4, so actuating force can be cyclic variation when driving sufficient moving reciprocatingly, this motor stator is made of the Langevin-type transducer of ultrasonic amplitude transformer principle, can make and drive the bigger displacement of foot acquisition, make motor realize bigger displacement, make motor realize that power output is big, the speed of service is fast, the characteristics that delivery efficiency is high.
Principles of structural design: the 1. mode of oscillation that excites Langevin-type transducer by the inverse piezoelectric effect of piezoelectric ceramic piece.2. be that two same frequency sinusoidal signals of pi/2 encourage the curved longitudinal vibration sheet that shakes piezoelectric ceramic piece and drive the foot place about stator respectively with the phase difference, form stress ellipse driving the foot place, drive mover and do rectilinear motion.3. drive the longitudinal vibration sheet at foot place with sinusoidal signal excitation, and be that the same frequency sinusoidal signal of positive and negative pi/2 encourages the longitudinal vibration piezoelectric ceramic piece about stator respectively, form stress ellipse driving the foot place, drive mover and do rectilinear motion with phase difference with it.
Be based on the example of the linear ultrasonic motor of alternating force below:
Utilize the inverse piezoelectric effect d of piezoelectric ceramic piece
33Inspire the vibration of the mode of oscillation and the middle part chip ceramic of stator.Fig. 1 and Fig. 2 are the structural representations of motor, and it mainly is made up of stator, mover.Stator is mainly docked mutually along center line by two Langevin-type transducers and constitutes, and each Langevin-type transducer comprises front end housing 3, rear end cap 2, holder 7, piezoelectric ceramic piece 4, electrode slice 5, bolt 9, friction plate 8.Totally 8 of the piezoelectric ceramic pieces 6 of two Langevin-type transducers that join are divided into four groups, and per two piezoelectric ceramic pieces 6 constitute one group, accompany electrode slice 5 between every group of two piezoelectric ceramic pieces 6.Each group piezoelectric ceramic piece 6 is arranged in the both sides of holder 7.Paste a slice in addition on the surface that two Langevin-type transducer joints are parallel to the curved face that shakes of oscillator and drive foot with piezoelectric ceramic piece 4, drive foot paste again on piezoelectric ceramic piece 4 electrode slice 5 and a slice friction plate 8 constitute drive sufficient.Front end housing 2 is provided with pretightning force bolt 9, by pretightning force bolt 9 each parts of stator are connected as a single entity, its front end housing 3 cross sections by after be forward the convergent state, form ultrasonic amplitude transformer, in order to amplify the amplitude that motor stator drives the foot place.
The motor stator piezoelectric ceramic piece lays mode and electric excitation mode is seen Fig. 2, and the Langevin-type transducer of butt joint has 8 piezoelectric ceramic pieces 6, and being divided into is four groups, lays respectively at the both sides up and down of holder 7, and every group comprises the opposite piezoelectric ceramic piece of a pair of polarised direction 6.Electrode slice 5 is laid in the centre of every group of piezoelectric ceramic piece 6, is used for external pumping signal.Paste a slice on the surface that the Langevin-type transducer joint is parallel to the curved face that shakes of oscillator and drive foot with piezoelectric ceramic piece 4, paste electrode slice 5 again on piezoelectric ceramic piece 4 driving foot.Sinusoidal excitation signal E=Usin ω t is provided four groups of piezoelectric ceramic pieces to both sides, provide cosine pumping signal E=Ucos ω t to the potsherd that drives the foot place simultaneously, what motivate stator simultaneously curvedly shakes and drives the stretching motion of foot with potsherd 4, utilizes that the actuating force cyclic variation drives mover when driving foot and move reciprocatingly.
Claims (2)
1. linear ultrasonic motor based on alternating force, comprise stator and mover, it is characterized in that: two Langevin-type transducers constituted along the center line butt joint about described stator comprised, each Langevin-type transducer comprises front end housing, rear end cap, piezoelectric ceramic piece and corresponding electrode slice are formed, and each Langevin-type transducer integral body be the cross section by afterbody to the continuous cross section of head convergent bar type structure, about the head butt joint of two Langevin-type transducers be connected as a single entity, the bottom of Langevin-type transducer is provided with holder, described holder is installed between one group of piezoelectric ceramic piece, the two ends of described stator are provided with the pretightning force bolt, a slice driving foot piezoelectric ceramic piece is pasted on the surface that is parallel to the curved face that shakes of oscillator at two Langevin-type transducer joints, paste electrode slice and friction plate on piezoelectric ceramic piece again and constitute and drive foot driving foot, described mover is a straight line guide rail, be arranged to " ten " font structure with described stator, and be in contact with one another at driving foot place.
2. the electric excitation method thereof of a linear ultrasonic motor as claimed in claim 1, it is characterized in that: at first for two Langevin-type transducers about stator, utilize with the frequency sinusoidal signal and inspire bending vibration modes, because the symmetry of structure, driving the direction of motion that the sufficient stator vibration of locating always is parallel to mover, stator in the vibration and mover are because rubbing action produces the tangential force along the mover direction of motion; Secondly utilize with above-mentioned sinusoidal signal phase difference and be
Same frequency sinusoidal signal excite and drive the foot piezoelectric ceramic piece, drive foot and make with piezoelectric ceramic piece flexible and drive the surperficial extrusion stress of foot and be cyclic variation, actuating force can be cyclic variation when making that driving is sufficient and move reciprocatingly.
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| Application Number | Priority Date | Filing Date | Title |
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| CN 201010558749 CN102025287B (en) | 2010-11-25 | 2010-11-25 | Linear ultrasonic motor based on alternating force and electric excitation method |
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| CN 201010558749 CN102025287B (en) | 2010-11-25 | 2010-11-25 | Linear ultrasonic motor based on alternating force and electric excitation method |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102751902A (en) * | 2012-06-25 | 2012-10-24 | 南京航空航天大学 | Parallel anti-friction drive-type ultrasonic motor |
| CN102810997A (en) * | 2012-06-25 | 2012-12-05 | 南京航空航天大学 | Antifriction driving type ultrasonic motor and composite stator component thereof |
| CN103684037A (en) * | 2012-09-13 | 2014-03-26 | 中国科学技术大学 | Double-end clamping piezoelectric motor for utilizing opposite-direction rubs to reduce friction force and control method |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101072000A (en) * | 2007-03-26 | 2007-11-14 | 哈尔滨工业大学 | Single-driving foot sandwiched transducer type longitudinal bending linear ultrasonic motor |
| CN200987127Y (en) * | 2006-10-30 | 2007-12-05 | 苏州市职业大学 | K-shaped straight line ultrasonic motor |
| JP2008079359A (en) * | 2006-09-19 | 2008-04-03 | Nsk Ltd | Actuator for driving slider |
| CN101777852A (en) * | 2010-01-05 | 2010-07-14 | 南京航空航天大学 | Double-stator bending mode linear ultrasonic motor and operation mode and electric excitation method |
| CN201918918U (en) * | 2010-11-25 | 2011-08-03 | 南京航空航天大学 | Linear ultrasonic motor based on alternating force |
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2010
- 2010-11-25 CN CN 201010558749 patent/CN102025287B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008079359A (en) * | 2006-09-19 | 2008-04-03 | Nsk Ltd | Actuator for driving slider |
| CN200987127Y (en) * | 2006-10-30 | 2007-12-05 | 苏州市职业大学 | K-shaped straight line ultrasonic motor |
| CN101072000A (en) * | 2007-03-26 | 2007-11-14 | 哈尔滨工业大学 | Single-driving foot sandwiched transducer type longitudinal bending linear ultrasonic motor |
| CN101777852A (en) * | 2010-01-05 | 2010-07-14 | 南京航空航天大学 | Double-stator bending mode linear ultrasonic motor and operation mode and electric excitation method |
| CN201918918U (en) * | 2010-11-25 | 2011-08-03 | 南京航空航天大学 | Linear ultrasonic motor based on alternating force |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102751902A (en) * | 2012-06-25 | 2012-10-24 | 南京航空航天大学 | Parallel anti-friction drive-type ultrasonic motor |
| CN102810997A (en) * | 2012-06-25 | 2012-12-05 | 南京航空航天大学 | Antifriction driving type ultrasonic motor and composite stator component thereof |
| CN102751902B (en) * | 2012-06-25 | 2016-02-17 | 南京航空航天大学 | Parallel anti-friction drive-type ultrasonic motor |
| CN102810997B (en) * | 2012-06-25 | 2016-06-15 | 南京航空航天大学 | Anti-friction drive-type ultrasonic motor and composite stator component thereof |
| CN103684037A (en) * | 2012-09-13 | 2014-03-26 | 中国科学技术大学 | Double-end clamping piezoelectric motor for utilizing opposite-direction rubs to reduce friction force and control method |
| CN103684037B (en) * | 2012-09-13 | 2016-01-20 | 中国科学技术大学 | A kind of both-end utilizing rubbing in opposite directions to reduce frictional force clamps piezo-electric motor and control method |
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| CN102025287B (en) | 2012-12-26 |
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