CN101972758A - Silicon wafer flushing mechanism - Google Patents
Silicon wafer flushing mechanism Download PDFInfo
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- CN101972758A CN101972758A CN 201010523191 CN201010523191A CN101972758A CN 101972758 A CN101972758 A CN 101972758A CN 201010523191 CN201010523191 CN 201010523191 CN 201010523191 A CN201010523191 A CN 201010523191A CN 101972758 A CN101972758 A CN 101972758A
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- enclosed cavity
- box body
- hole
- closed cavity
- box
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Abstract
The invention discloses a silicon wafer flushing mechanism, which comprises a box and a closed cavity, wherein the box is integrated with the closed cavity into a whole through a connecting device which comprises a through hole arranged on the closed cavity; and an inner circumferential surface of the through hole is evenlly provided with a plurality of balls through the connecting seat. In the invention, as the connecting device comprises the through hole arranged on the closed cavity and the inner circumferential surface of the through hole is evenly provided with a plurality of the balls through the connecting seat, an outer circumferential surface of the box is matched with the inner circumferential surface of the through hole in a small rolling friction manner when the box is connected with the closed cavity, thus avoiding damage to the closed cavity caused by long-term friction, prolonging the service time of the flushing device, and facilitating connection between the box and the closed cavity. In addition, the silicon wafer flushing mechanism has a simple structure.
Description
Technical field
The present invention relates to a kind of flushing machine, particularly a kind of flushing machine of silicon chip belongs to the silicon chip machining technology.
Background technology
Because the silicon chip volume is little, therefore thin thickness, very easily produces static between the silicon chip.When silicon chip is poured out,, cause the waste of silicon chip because electrostatic interaction usually has silicon chip to stick in the box in box.Traditional method is to adopt hair-dryer that the silicon chip that these are attached in the box is blown out, though this method can be taken out silicon chip, and inconvenient operation, and silicon chip flies around after blowing out easily.Easily collecting not.
In order to solve the problems of the technologies described above, recently, a kind of silicon chip air-flow flushing device has appearred, comprise box body, enclosed cavity, gas channel and source of the gas, what box body was relative with gas channel is arranged on the enclosed cavity, the openend of described box body is relative with the gas outlet of described gas channel, and the air inlet of described gas channel and source of the gas are logical.The openend of box body connects and communicates with the passage of enclosed cavity, and common outer peripheral face by box body and the inner peripheral surface of enclosed cavity passage closely cooperate and realize being connected of box body and enclosed cavity.The silicon chip flusher of this structure, owing to be that outer peripheral face by box body closely cooperates with the inner peripheral surface of the passage of enclosed cavity and realizes being connected, service time after, wearing and tearing appears in the inner peripheral surface of enclosed cavity passage easily, thereby, cause enclosed cavity not firm with being connected of box body.
Summary of the invention
Technical problem to be solved by this invention provides a kind of easy to connect, the flushing machine of long service life and silicon chip simple in structure.
In order to solve the problems of the technologies described above, the flushing machine of a kind of silicon chip of the present invention, comprise box body, enclosed cavity, described box body and described enclosed cavity link into an integrated entity by jockey, described jockey comprises the through hole that is arranged on the enclosed cavity, evenly be provided with plurality of balls by Connection Block on the described through hole inner peripheral surface, during connection, described box body outer peripheral face matches with described ball.
The flushing machine of above-mentioned a kind of silicon chip, wherein, described Connection Block is a tubular element, evenly is provided with some transverse concave grooves on the inner peripheral surface of described tubular element, described ball evenly embeds in the corresponding grooves, and flexibly connects with described groove.
The present invention can realize following beneficial effect fruit:
1, owing to the present invention includes the through hole that is arranged on the enclosed cavity, evenly is provided with plurality of balls by Connection Block on the described through hole inner peripheral surface; When box body is connected with enclosed cavity, cooperating between the inner peripheral surface of the outer peripheral face of box body and enclosed cavity through hole is rolling friction, frictional force is little, can avoid enclosed cavity owing to long-time friction damages, thereby, prolonged the service time of flusher, and made box body convenient, and the present invention is simple in structure with being connected of enclosed cavity.
2, because described Connection Block is a tubular element, evenly be provided with some transverse concave grooves on the inner peripheral surface of described tubular element, described ball evenly embeds in the corresponding grooves, and flexibly connects with described groove, can make the connection of ball convenient, reliable.
Description of drawings
Fig. 1 is a structural representation of the present invention.
Fig. 2 is the structural representation of Connection Block of the present invention.
The specific embodiment
The invention will be further described below in conjunction with accompanying drawing.
As shown in the figure, in order to solve the problems of the technologies described above, the flushing machine of a kind of silicon chip of the present invention, comprise box body 5, enclosed cavity 1, source of the gas 6 and gas channel 7, described box body 5 and described enclosed cavity 1 link into an integrated entity by jockey, described jockey comprises the through hole 2 that is arranged on the enclosed cavity 1, evenly be provided with plurality of balls 4 by Connection Block 3 on described through hole 2 inner peripheral surfaces, when box body 5 is connected with enclosed cavity 1, cooperating between the outer peripheral face of box body and enclosed cavity through hole 2 inner peripheral surfaces is rolling friction, frictional force is little, can avoid enclosed cavity 1 owing to long-time friction damages, thereby, service time of flusher prolonged, and make box body convenient, and the present invention is simple in structure with being connected of enclosed cavity 1.
In sum, the present invention compared with prior art has simple in structure, durable, with low cost and connects reliable advantage.
Here description of the invention and application is illustrative, is not to want that therefore, the present invention is not subjected to the restriction of present embodiment with scope restriction of the present invention in the above-described embodiments, and the technical scheme that any employing equivalence replacement obtains is all in the scope of protection of the invention.
Claims (2)
1. the flushing machine of a silicon chip, comprise box body, enclosed cavity, described box body and described enclosed cavity link into an integrated entity by jockey, it is characterized in that, described jockey comprises the through hole that is arranged on the enclosed cavity, evenly be provided with plurality of balls by Connection Block on the described through hole inner peripheral surface, during connection, described box body outer peripheral face matches with described ball.
2. a kind of flushing machine of silicon chip according to claim 1, it is characterized in that described Connection Block is a tubular element, evenly be provided with some transverse concave grooves on the inner peripheral surface of described tubular element, described ball evenly embeds in the corresponding grooves, and flexibly connects with described groove.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201010523191 CN101972758A (en) | 2010-10-27 | 2010-10-27 | Silicon wafer flushing mechanism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201010523191 CN101972758A (en) | 2010-10-27 | 2010-10-27 | Silicon wafer flushing mechanism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101972758A true CN101972758A (en) | 2011-02-16 |
Family
ID=43572681
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 201010523191 Pending CN101972758A (en) | 2010-10-27 | 2010-10-27 | Silicon wafer flushing mechanism |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101972758A (en) |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2067785U (en) * | 1989-09-26 | 1990-12-19 | 高国梅 | Articulated joint |
| CN2305329Y (en) * | 1997-05-23 | 1999-01-27 | 刘中朝 | Portable automobile cleaner |
| CN2437848Y (en) * | 2000-03-31 | 2001-07-04 | 隆凯成 | Oil flow adjuster |
| CN2559351Y (en) * | 2002-07-03 | 2003-07-09 | 于淑华 | Visual sign sliding mechanism for eyes health |
| CN200960148Y (en) * | 2006-10-30 | 2007-10-17 | 郑森华 | Detachable tong |
| CN201440405U (en) * | 2009-06-30 | 2010-04-21 | 北京七星华创电子股份有限公司 | Silicon chip spraying cleaning tank |
| CN201470637U (en) * | 2009-05-12 | 2010-05-19 | 耿彪 | Rotating groove for cleaning silicon chips |
| CN201529636U (en) * | 2009-10-14 | 2010-07-21 | 无锡尚德太阳能电力有限公司 | Silicon wafer bubbling cleaning device |
| CN201556023U (en) * | 2009-09-11 | 2010-08-18 | 镇江市港南电子有限公司 | Wafer air-flow flusher |
-
2010
- 2010-10-27 CN CN 201010523191 patent/CN101972758A/en active Pending
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2067785U (en) * | 1989-09-26 | 1990-12-19 | 高国梅 | Articulated joint |
| CN2305329Y (en) * | 1997-05-23 | 1999-01-27 | 刘中朝 | Portable automobile cleaner |
| CN2437848Y (en) * | 2000-03-31 | 2001-07-04 | 隆凯成 | Oil flow adjuster |
| CN2559351Y (en) * | 2002-07-03 | 2003-07-09 | 于淑华 | Visual sign sliding mechanism for eyes health |
| CN200960148Y (en) * | 2006-10-30 | 2007-10-17 | 郑森华 | Detachable tong |
| CN201470637U (en) * | 2009-05-12 | 2010-05-19 | 耿彪 | Rotating groove for cleaning silicon chips |
| CN201440405U (en) * | 2009-06-30 | 2010-04-21 | 北京七星华创电子股份有限公司 | Silicon chip spraying cleaning tank |
| CN201556023U (en) * | 2009-09-11 | 2010-08-18 | 镇江市港南电子有限公司 | Wafer air-flow flusher |
| CN201529636U (en) * | 2009-10-14 | 2010-07-21 | 无锡尚德太阳能电力有限公司 | Silicon wafer bubbling cleaning device |
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| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20110216 |