CN101949845A - Miniaturized low-cost photoluminescence scanning measurement device - Google Patents
Miniaturized low-cost photoluminescence scanning measurement device Download PDFInfo
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- CN101949845A CN101949845A CN 201010262551 CN201010262551A CN101949845A CN 101949845 A CN101949845 A CN 101949845A CN 201010262551 CN201010262551 CN 201010262551 CN 201010262551 A CN201010262551 A CN 201010262551A CN 101949845 A CN101949845 A CN 101949845A
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Abstract
The invention discloses a miniaturized low-cost photoluminescence scanning measurement device. The device comprises a laser, a coupling device, a fiber coupler, an elastic sample table, a spectrometer and a system controller. The original spatial light path is replaced by using a fiber light path so as to simplify the adjustment step of the light path; a large amount of mechanical fixing devices and mechanical adjusting devices are removed and the miniaturized spectrometer is used so as to reduce the cost and realize miniaturization of the complete device; and because the electric sample table and the spectrometer are controlled by using the system controller, scanning detection of large samples can be implemented.
Description
Technical field
The present invention relates to a kind of photoluminescence measurement device of semiconductor material, relate in particular to the photoluminescence measurement device that a kind of miniaturization low cost can realize scanning survey.
Background technology
The photoluminescence measurement method is a kind of method of test material electronic structure, does not need to touch material during measurement, and can not cause damage to material.In the actual measurement, light shines directly into material surface, and light is given material with NE BY ENERGY TRANSFER after by absorbed, and these energy parts are converted to heat energy loss and fall, another part just consumes with luminous form, and this process luminous by optical excitation just is called photoluminescence.
As shown in Figure 1, by the electron interaction of the light of absorbed and material internal, the energy of Electron absorption photon transits to conduction band from valence band, when the electronics that is excited is got back to valence band, unnecessary energy just discharges by luminous form with other, so the energy of this light that is excited just interrelates with gap (band gap) width of two energy bands of material internal, the light intensity that is excited is relevant with the contribution of radiative process.The measurement of photoluminescence spectra can be applied to band gap detection, impurity levels and defects detection, the multiple mechanism of material and the evaluation of the quality of material of material.
Existing photoluminescence measurement device adopts the form of space optical path more, the exciting light that laser instrument sends is through a plurality of catoptron turnover light paths, transfer the line polarisation to through a linear polaroid again, after lens focus, shine on the sample through catoptron, sample is fixed on and is placed on the sample stage in the constant temperature oven, uses this constant temperature oven to keep low temperature when carrying out the photoluminescence measurement under the low temperature.Use a catoptron that the exciting light that sample surfaces directly reflects is drawn constant temperature oven, avoid photoluminescence is produced interference, the photoluminescence of sample is collected by lens, filter remaining exciting light through linear polarized light, again by entering spectroscope after the lens focus, form a spectrometer by spectroscope and ccd detector, measure photoluminescence spectra, data are sent to Computer Processing and preservation.
This photoluminescence measurement device has used a large amount of catoptrons and lens in light path, increased the volume of whole device and the complexity of adjustment; Use a large amount of mechanical fastening systems and mechanic adjustment unit, increased the cost of package unit; Use vertical fixed sample platform, be not easy to change the scanning survey that sample also is difficult to realize bulk sample.
Summary of the invention
The objective of the invention is at the deficiencies in the prior art, a kind of miniaturization photoluminescence scanning and measuring apparatus cheaply is provided.
The objective of the invention is to be achieved through the following technical solutions: a kind of miniaturization is the photoluminescence scanning and measuring apparatus cheaply, and it comprises: laser instrument, coupling device, fiber coupler, electronic sample stage, spectrometer, system controller.Wherein, coupling device is made up of five times regualting frame and micro objective, the emergent light of laser instrument by micro objective the center and focus on the fiber port of fiber coupler, another fiber port of fiber coupler homonymy connects spectrometer, and a fiber port of fiber coupler opposite side is above electronic sample stage.Electronic sample stage and spectrometer are connected on the system controller by data line respectively.
Further, described fiber coupler is the fiber circulators of one three port.
Further, described fiber coupler is the 2x2 fiber coupler of one four port, and this miniaturization photoluminescence scanning and measuring apparatus cheaply also comprises a photo-detector, and last port of the 2x2 fiber coupler of described four ports links to each other with photo-detector.
Further, the optical fiber of described fiber coupler is multimode optical fiber.
Further, described laser instrument 1 is semiconductor pumped neodymium doped yttrium aluminium garnet laser.
Further, described system controller is computing machine or embedded scm.
The invention has the beneficial effects as follows, miniaturization of the present invention is the photoluminescence scanning and measuring apparatus cheaply, by using optic fibre light path to replace original space optical path, simplified regulating step to light path, remove a large amount of mechanical fastening systems and mechanical speed-control device, used the spectrometer of miniaturization, reduced cost, realized the miniaturization of package unit, used system controller to control electronic sample stage and spectrometer and can also realize the scanning of bulk sample is detected.
Description of drawings
Fig. 1 is the synoptic diagram of photoluminescence phenomenon at microscopic fields;
Fig. 2 is a miniaturization of the present invention photoluminescence scanning and measuring apparatus synoptic diagram cheaply;
Fig. 3 is for being the photoluminescence spectra of the InGaAsP quantum-well materials of substrate with InP under the room temperature condition;
Scanning pattern synoptic diagram when Fig. 4 is scanning survey sample photoluminescence;
The photoluminescence spectra peak wavelength distribution figure of the bulk sample that Fig. 5 records for the scanning survey mode;
Among the figure, laser instrument 1, coupling device 2, fiber coupler 3, sample 4, electronic sample stage 5, spectrometer 6, photo-detector 7, system controller 8.
Embodiment
The present invention uses optic fibre light path to replace space optical path, simplified a whole set of photoluminescence scanning and measuring apparatus, a large amount of mechanical fastening systems and mechanic adjustment unit have been removed, used the spectrometer of miniaturization, realize the miniaturization and the low cost of whole system, utilize system controller to control electronic sample stage and spectrometer, also can realize scanning survey bulk sample.
To with reference to the accompanying drawings below and embodiment, specify this invention, it is more obvious that purpose of the present invention and effect will become.
As shown in Figure 2, miniaturization of the present invention cheaply the photoluminescence scanning and measuring apparatus comprise: laser instrument 1, coupling device 2, fiber coupler 3, electronic sample stage 5, spectrometer 6, photo-detector 7, system controller 8.
It is the semiconductor pumped neodymium doped yttrium aluminium garnet laser of 1064nm that laser instrument 1 can adopt output wavelength, coupling device 2 is made up of five times regualting frame and micro objective, fiber coupler 3 is the 2X2 multi-module optical fiber coupler, and system controller 8 can be common computer.
The course of work of the present invention is as follows: the exciting light that laser instrument 1 sends focuses on a port of fiber coupler 3 by the micro objective in the coupling device 2, this fiber coupler 3 can be the 2x2 multi-module optical fiber coupler, use multimode optical fiber to make the easier fiber port that is coupled into of exciting light, the coupling efficiency that obtains is also higher.Exciting light is divided into two-way through fiber coupler 3, one the tunnel is sent to the fiber port that it connects photo-detector 7, enters photo-detector 7 and is used to monitor light intensity, if the subnormal level of light intensity, just need to regulate the five times regualting frame in the coupling device 3, reach normal level and fixing up to light intensity.One road exciting light is sent to another fiber port on the fiber coupler 3 same directions, but the optical fiber of this port is fixed on the support of a up-down adjustment, and the electronic sample stage 5 of perpendicular alignmnet, sample 4 is placed on the electronic sample stage 5, the electronic sample stage 5 of manual adjustments, make sample 4 just be positioned at this fiber port under, regulate this root optical fiber downwards near sample 4, remain on the height of sample top 1mm at last, both guaranteed sufficiently high photoluminescence efficiency, and also guaranteed can not meet this optical fiber when sample 4 moves.Exciting light shines sample 4 surfaces after this fiber port outgoing, inspire photoluminescence, is received by this port more simultaneously, and 2x2 fiber coupler 3 has used multimode optical fiber to make this port can receive more photoluminescence to be used for measurement.The photoluminescence of entry port is sent to the fiber port that it connects spectrometer 6 by 2x2 fiber coupler 3, enters spectrometer 6, on spectrometer 6 suitable parameters is set, as initial wavelength, stop wavelength, reference power etc. are finally seen the photoluminescence spectra spectral line on spectrometer 6.In testing process, need to do the adjustment of machinery hardly, when measuring a plurality of sample 4, all samples 4 can be placed on simultaneously on the electronic sample stage 5, each sample 4 is moved on under the fiber port do detection by regulating electronic sample stage 5, in this process, do not need to do again any light path adjustment.
Above-mentioned fiber coupler 3 also can be the fiber circulators of three ports, miniaturization then of the present invention photoluminescence scanning and measuring apparatus cheaply can also be omitted photo-detector 7, makes the photoluminescence that is received by the fiber port near sample 4 can be sent to spectrometer 6 like this and has only seldom loss.
During single measurement, only need control spectrometer 6 as the computing machine of system controller 8, the result who accepts spectrometer 6 measurements handles and preserves.As shown in Figure 3, be the photoluminescence spectra of preserving on the computing machine, the sample of use is the InGaAsP/InP quantum-well materials.
During scanning survey, the sample that uses is the substrate of InGaAsP/InP quantum-well materials, and measurement mechanism is identical when assembling with single measurement.During measurement, lift the fiber port of electronic sample stage 5 top 2x2 fiber couplers 3, sample 4 is placed on the electronic sample stage 5, the electronic sample 5 of manual adjustments with an angle of sample 4 move on to this fiber port under, regulate optical fiber downwards near sample 4, finally remain on the position of sample 4 top 1mm, the parameter on the spectrometer 6 is set, on spectrometer 6, obtain the photoluminescence spectra spectral line.
By electronic sample stage 5 of computer control and spectrometer 6, length L x and Ly that electronic sample stage 5 will be passed by in x direction and y direction are set, gamut Lx*Ly is exactly the sample area that needs measurement, step-length dx and dy that electronic sample stage 5 moves at both direction are set, and step-length is big, and the time of scanning monoblock sample 4 is short, measurement result is rough, step-length is little, and the time of scanning monoblock sample 4 is long, and measurement result is meticulous.Spectrometer 6 need be sent to the data of computing machine when the photoluminescence spectra of each point on the measuring samples 4 was set, as peak wavelength, and peak strength, the full width at half maximum of spectral line, even whole complete photoluminescence spectra, in the present embodiment, the peak wavelength that spectrometer 6 returns photoluminescence spectra is set.
The present invention uses optic fibre light path to replace space optical path, the set-up procedure when having reduced device assembling and actual detected.Remove a large amount of mechanical fastening systems and mechanic adjustment unit, used the spectrometer of miniaturization, realized the miniaturization and the low cost of whole system.Used an electronic sample stage to place sample, and can move, realized the scanning of sample is detected by computer control electricity driving displacement platform drive sample.Computing machine in the said system also can replace with embedded scm, the holonomic system of, miniaturization portable to realize.
Above content only is embodiments of the invention, and its purpose is not the restriction that is used for system and method proposed by the invention.In the protection domain of spirit of the present invention and claim, any modification and change to the present invention makes all fall into protection scope of the present invention.
Claims (7)
1. miniaturization photoluminescence scanning and measuring apparatus cheaply is characterized in that it comprises: laser instrument (1), coupling device (2), fiber coupler (3), electronic sample stage (5), spectrometer (6), system controller (8).Wherein, coupling device (2) is made up of five times regualting frame and micro objective, the emergent light of laser instrument (1) by micro objective the center and focus on the fiber port of fiber coupler (3), another fiber port of fiber coupler (3) homonymy connects spectrometer (6), and a fiber port of fiber coupler (3) opposite side is in the top of electronic sample stage (5).Electronic sample stage (5) and spectrometer (6) are connected on the system controller (8) by data line respectively.
2. miniaturization photoluminescence scanning and measuring apparatus cheaply according to claim 1 is characterized in that described fiber coupler (3) is the fiber circulators of one three port.
3. miniaturization photoluminescence scanning and measuring apparatus cheaply according to claim 1, it is characterized in that, described fiber coupler (3) is the 2x2 fiber coupler of one four port, this miniaturization photoluminescence scanning and measuring apparatus cheaply also comprises a photo-detector (7), and last port of the 2x2 fiber coupler of described four ports links to each other with photo-detector (7).
4. miniaturization photoluminescence scanning and measuring apparatus cheaply according to claim 1 is characterized in that the optical fiber of described fiber coupler (3) is multimode optical fiber.
5. miniaturization photoluminescence scanning and measuring apparatus cheaply according to claim 1 is characterized in that described laser instrument (1) is semiconductor pumped neodymium doped yttrium aluminium garnet laser.
6. miniaturization photoluminescence scanning and measuring apparatus cheaply according to claim 1 is characterized in that described system controller (8) is a computing machine.
7. miniaturization photoluminescence scanning and measuring apparatus cheaply according to claim 1 is characterized in that described system controller (8) is an embedded scm.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104142351A (en) * | 2014-07-10 | 2014-11-12 | 深圳清华大学研究院 | Semiconductor laser testing device and method |
| CN106248056A (en) * | 2016-08-18 | 2016-12-21 | 中国科学院嘉兴微电子仪器与设备工程中心 | A kind of multiple light courcess scanning detection method |
| CN107091822A (en) * | 2017-03-14 | 2017-08-25 | 华东师范大学 | The device and its detection method of double light source activation luminescence generated by light detection semiconductor defects |
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| CN101614664A (en) * | 2009-04-28 | 2009-12-30 | 南京航空航天大学 | Dry rubber content measuring system of natural rubber based on Y-type optical fiber |
| CN201488869U (en) * | 2009-08-21 | 2010-05-26 | 北京波联汇成科技有限公司 | Test board for micro electronic mechanical system chip for photoelectric device |
| CN201780269U (en) * | 2010-08-20 | 2011-03-30 | 浙江大学 | Photoluminescence scanning measurer |
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Patent Citations (5)
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| US5579773A (en) * | 1994-09-30 | 1996-12-03 | Martin Marietta Energy Systems, Inc. | Laser-induced differential normalized fluorescence method for cancer diagnosis |
| CN1221119A (en) * | 1998-11-06 | 1999-06-30 | 清华大学 | Photoluminescence spectrum scanning imaging instrument |
| CN101614664A (en) * | 2009-04-28 | 2009-12-30 | 南京航空航天大学 | Dry rubber content measuring system of natural rubber based on Y-type optical fiber |
| CN201488869U (en) * | 2009-08-21 | 2010-05-26 | 北京波联汇成科技有限公司 | Test board for micro electronic mechanical system chip for photoelectric device |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104142351A (en) * | 2014-07-10 | 2014-11-12 | 深圳清华大学研究院 | Semiconductor laser testing device and method |
| CN106248056A (en) * | 2016-08-18 | 2016-12-21 | 中国科学院嘉兴微电子仪器与设备工程中心 | A kind of multiple light courcess scanning detection method |
| CN107091822A (en) * | 2017-03-14 | 2017-08-25 | 华东师范大学 | The device and its detection method of double light source activation luminescence generated by light detection semiconductor defects |
| CN107091822B (en) * | 2017-03-14 | 2019-09-10 | 华东师范大学 | The device and its detection method of double light source activation luminescence generated by light detection semiconductor defects |
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