CN101949747B - Calibration measuring system and measuring method of dynamic response characteristic of humidity sensing element - Google Patents
Calibration measuring system and measuring method of dynamic response characteristic of humidity sensing element Download PDFInfo
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- CN101949747B CN101949747B CN2010102729287A CN201010272928A CN101949747B CN 101949747 B CN101949747 B CN 101949747B CN 2010102729287 A CN2010102729287 A CN 2010102729287A CN 201010272928 A CN201010272928 A CN 201010272928A CN 101949747 B CN101949747 B CN 101949747B
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- 230000003068 static effect Effects 0.000 claims abstract description 25
- 238000010438 heat treatment Methods 0.000 claims abstract description 13
- 238000012360 testing method Methods 0.000 claims description 96
- 229920006395 saturated elastomer Polymers 0.000 claims description 65
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- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical class [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 claims description 8
- 238000009413 insulation Methods 0.000 claims description 6
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- 229920006328 Styrofoam Polymers 0.000 claims description 2
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- 230000008859 change Effects 0.000 abstract description 2
- 238000004891 communication Methods 0.000 description 2
- 238000011161 development Methods 0.000 description 2
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- 239000007789 gas Substances 0.000 description 2
- 239000000243 solution Substances 0.000 description 2
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- 238000012271 agricultural production Methods 0.000 description 1
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Abstract
The invention relates to a calibration measuring system and a measuring method of the dynamic response characteristic of a humidity sensing element, wherein the measuring system comprises a thermostatic water bath box body, a temperature and power supply control box, a computer and a digital bridge, wherein the computer is respectively connected with the temperature and power supply control box and the digital bridge; a heating device, a high-low humidity generator and a temperature sensor are arranged in the thermostatic water bath box body; and the temperature and power supply control box is respectively electrically connected with the humidity generator, the heating device and the temperature sensor. The measuring method comprises the following steps: measuring the static capacitance values of the humidity sensing element under different humidity conditions, and computing the capacitance values corresponding to different percentage amplitude values; and measuring the dynamic capacitance values of the humidity sensing element in a humidity switching process, comparing the dynamic capacitance values with the capacitance values corresponding to the different percentage amplitude values, and obtaining the dynamic response times under different humidity change amplitude values. The calibration measuring system of the invention can realize quick switching of different humidity environments, the switching time is 250-300ms, the operation is simple, and the result is accurate.
Description
Technical field
The invention belongs to technical field of measuring equipment, relate to a kind of humidity sensor element calibration facility, be specifically related to a kind of calibration measurements system of humidity sensor element dynamic response characteristic, the invention still further relates to and utilize this measuring system to demarcate the method for humidity sensor element dynamic response characteristic.
Background technology
Fields such as communications and transportation, health care, logistic storage, industrial and agricultural production, architectural environment require humidity sensor (element) to have excellent characteristic, dynamic response characteristic is one of fundamental characteristics of humidity sensor (element), be meant at a certain temperature, when humidity generation step was a certain amount of, the electric parameter of humidity-sensitive element reached the needed time of regulation ratio of humidity variable quantity.Because association area is less to the research of humidity sensor (element) dynamic response characteristic and calibration measurements device thereof both at home and abroad, realize that in addition the quick switching between the different humidity has difficulties, the response time of humidity sensor (element) element is generally longer, the calibration measurements device slower development of dynamic response characteristic far can not satisfy the calibration measurements requirement of quick response humidity sensor (element).External humidity sensor (element) the dynamic response calibration facility of producing, price is very expensive; Recommend in the domestic GB to use manual method to carry out calibration measurements, complex operation, accuracy are not high.So the calibration measurements device of response humidity sensor (element) dynamic response characteristic test request is fast satisfied in development, becomes the task of top priority.
Summary of the invention
In order to overcome above-mentioned problems of the prior art, the purpose of this invention is to provide a kind of calibration measurements system of humidity sensor element dynamic response characteristic, it is simple to operate, and response is rapid, the accuracy height, and also price is lower.
Another object of the present invention provides a kind of method of utilizing above-mentioned measuring system to demarcate humidity sensor element dynamic response characteristic.
For achieving the above object, the technical solution adopted in the present invention is, humidity sensor element dynamic response characteristic calibration measurements system, comprise water bath with thermostatic control casing 7, temperature and power controling box 3, computing machine 9 and digital electric bridge 10, computing machine 9 is connected with digital electric bridge 10 with temperature and power controling box 3 respectively, be provided with heating arrangement, height-low humidity generator and temperature sensor 6 in the water bath with thermostatic control casing 7, temperature and power controling box 3 are electrically connected with humidity generator, heating arrangement and temperature sensor 6 respectively.
Height-low humidity generator comprises the first saturated salt container 1 and the second saturated salt container 2 that is arranged side by side, be filled with the first saturated saline solution 11 in the first saturated salt container 1, form first test chamber 19 between first saturated salt solution 11 and the first saturated salt container, 1 top, be filled with second saturated salt solution 12 in the second saturated salt container 2, form second test chamber 22 between second saturated salt solution 12 and the second saturated salt container, 2 tops, first test chamber 19 is different with the humidity of air in second test chamber 22, muffler 20 and escape pipe 23 have been horizontally disposed with on the sidewall of the first saturated salt container 1, the two ends of muffler 20 are stretched into respectively in first test chamber 19 and second test chamber 22, the two ends of escape pipe 23 are stretched into respectively in first test chamber 19 and second test chamber 22, escape pipe 23 is provided with air pump 21, air pump 21 communicates with first solenoid valve 14 and second solenoid valve 15 respectively, first solenoid valve 14 also communicates with second test chamber 22, air pump 21, first solenoid valve 14 and second solenoid valve 15 all are positioned at second test chamber 22, second solenoid valve 15 communicates with the end that muffler 20 is positioned at second test chamber 22, the first saturated salt container 1 is outside equipped with the 4th solenoid valve 17, the second saturated salt containers 2 that communicate with first test chamber 19 and is outside equipped with the 3rd solenoid valve 16 that communicates with second test chamber 22.
Another technical scheme of the present invention is, a kind of method of utilizing above-mentioned calibration measurements system calibrating humidity sensor element dynamic response characteristic is carried out according to the following steps:
Step 1: water is added in the water bath with thermostatic control casing 7, by the temperature in temperature and the power-supply controller of electric 3 setting water bath with thermostatic control casings 7;
Step 2: start heating arrangement, the water in the water bath with thermostatic control casing 7 heated, in the heating process, the temperature of water in the temperature sensor 6 induction water bath with thermostatic control casings 7, and with this temperature signal to temperature and power-supply controller of electric 3;
Step 3: the temperature of water rises to predefined temperature in the step 1 in water bath with thermostatic control casing 7, and keep constant after, humidity sensor element 18 to be measured is placed in first test chamber 19, after humidity sensor element 18 balances, measure the static capacitance value of humidity sensor element 18 in first test chamber 19 by digital electric bridge 10, and this static capacitance value transferred to computing machine 9, computing machine 9 receives these static capacitance values, and it is saved as the first direct capacitance data;
Step 4: from first test chamber 19, take out humidity sensor element 18, and this humidity sensor element 18 put into second test chamber 22, after humidity sensor element 18 balances, measure the static capacitance value of humidity sensor element 18 in second test chamber 22 by digital electric bridge 10, and this static capacitance value transferred to computing machine 9, computing machine 9 receives this static capacitance value, and it is saved as the second direct capacitance data;
Step 5: open second solenoid valve 15, close first solenoid valve 14, the 3rd solenoid valve 16 and the 4th solenoid valve 17, open air pump 21, the soft air in the first saturated salt container 1 is sucked escape pipe 23, at this moment, humidity sensor element 18 contact is still soft air in second test chamber 22; When carrying out the humidity switching, send instruction by computing machine 9, close second solenoid valve 15, open first solenoid valve 14, the 3rd solenoid valve 16 and the 4th solenoid valve 17, the soft air that enters escape pipe 23 is successively by air pump 21, the threeway 13 and first solenoid valve 14, arrive humidity sensor element 18, finishing humidity switches, at this moment, humidity sensor element 18 contact be soft air in first test chamber 19, in the humidity handoff procedure, the capacitance of digital electric bridge 10 continuity testing humidity sensing elements 18, and the capacitance that measures constantly is transferred to computing machine 9, computing machine 9 records and storage humidity are switched perdurability and the dynamic capacity value of humidity sensor element 18 in the humidity handoff procedure;
Step 6: the second direct capacitance data that computing machine 9 stores in first direct capacitance data that store according to computing machine in the step 39 and the step 4, calculate the difference of the static capacitance value of humidity sensor element 18 under the identical measurement temperature different humidity environment, calculate the capacitance of different percentage amplitude correspondences according to this difference, the capacitance that the dynamic capacity value of the humidity sensor element 18 of computing machine in the step 59 record and the humidity sensor element 18 different percentage amplitudes that calculate are corresponding is compared, draw the dynamic response time of humidity sensor element 18 under different humidity variation amplitude, finish the demarcation of humidity sensor element 18 dynamic response characteristics.
Dynamic response measuring system of the present invention is based on the demarcation test macro of humidity sensor (element) dynamic response characteristic that the saturated salt solution method builds, be applicable to the demarcation test of quick response humidity sensor (element), can realize the quick switching between the different humidity environment, switching time 250～300ms, simultaneously, measuring operation is simple, and the result is accurate, has certain applicability and uses generalization.
Description of drawings
Fig. 1 is the structural representation of dynamic response measuring system of the present invention.
Fig. 2 is the structural representation of humidity generator in the dynamic response measuring system of the present invention.
Among the figure, the 1. first saturated salt container, the 2. second saturated salt container, 3. temperature and power controling box, 4. multifunctional pump, 5. electric heater, 6. temperature sensor, 7. water bath with thermostatic control casing, 8. heat-insulation layer, 9. computing machine, 10. digital electric bridge, the saturated saline solution of 11. first height-low humidity, 12. the saturated saline solution of second height-low humidity, 13. threeway, 14. first solenoid valves, 15. second solenoid valves, 16. the 3rd solenoid valve, 17. the 4th solenoid valve, 18. humidity sensor elements, 19. first test chambers, 20. muffler, 21. air pump, 22. second test chambers, 23. escape pipes.
Embodiment
The present invention is described in detail below in conjunction with the drawings and specific embodiments.
As shown in Figure 1, the structure of calibration measurements of the present invention system, comprise that temperature-controlled precision is higher than 0.2 ℃ water bath with thermostatic control casing 7, temperature and power controling box 3, computing machine 9 and digital electric bridge 10, computing machine 9 is connected with digital electric bridge 10 with temperature and power controling box 3 respectively, and computing machine 9 is used to control the temperature in the water bath with thermostatic control casing 7.Two cover electric heaters 5 have been arranged side by side in the water bath with thermostatic control casing 7, be provided with height-low humidity generator between two electric heaters 5, also be provided with DS18B20 type temperature sensor 6 and two multifunctional pumps 4 that precision is higher than 0.5 ℃ in the water bath with thermostatic control casing 7, the Way out of these two multifunctional pumps 4 is opposite.Temperature and power controling box 3 are electrically connected with height-low humidity generator, multifunctional pump 4, electric heater 5 and temperature sensor 6 respectively.
The coated outside of water bath with thermostatic control casing 7 has heat-insulation layer 8, and the volume of water bath with thermostatic control casing 7 is 900mm * 450mm * 550mm, and it is the styrofoam of 75～80mm that heat-insulation layer 8 adopts thickness.Water bath with thermostatic control casing 7, heat-insulation layer 8, multifunctional pump 4, electric heater 5, temperature sensor 6 and temperature and power controling box 3 constitute constant temperature water bath apparatus, the isoperibol that provides test process required is provided this constant temperature water bath apparatus, temperature fluctuation is little, and it is little to be affected by the external environment, the temperature-controlled precision height.
The power of electric heater 5 is 250W.
Temperature and power-supply controller of electric 3 comprise high precision temperature control device (± 0.2 ℃) power switch.
Digital electric bridge 10 adopts the TH2619 type LCR high precision fast digital electric bridge of producing with the sub-company limited that sends us by cable, be used to measure and show the capacitance of the humidity sensor element that needs demarcation, the accuracy of this LCR digital electric bridge is 0.1%, measuring speed has 295ms/ time, 60ms/ time and 15ms/ third gear, and highest measurement speed is 13ms/ time.And band RS232 communication interface, can carry out man-machine conversation, realize the output of measurement data.
The structure of height in the calibration measurements device of the present invention-low humidity generator, as shown in Figure 2, comprise the first saturated salt container 1 and the second saturated salt container 2 that are arranged side by side, be filled with in the first saturated salt container 1 between first saturated saline solution 11, the first saturated salt solutions, 11 surfaces and the first saturated salt container, 1 top and form first test chamber 19.Be filled with in the second saturated salt container 2 between second saturated salt solution 12, the second saturated salt solutions, 12 surfaces and the second saturated salt container, 2 tops and form second test chamber 22.First saturated salt solution 11 and second saturated salt solution 12 are according to the requirement of humidity measurement range, select the chemical pure standard medicine of two kinds of corresponding humidity of difference according to GB GB/T15768-1995, use pure water that these two kinds of chemical pure standard medicines are configured respectively, and obtain two kinds of saturated saline solutions.The volume of the saturated saline solution of annotating in the saturated salt container is no more than 5% of test chamber volume.First test chamber 19 is different with the humidity of air in second test chamber 22, and air humidity must satisfy the requirement of humidity measurement.Muffler 20 and escape pipe 23 have been horizontally disposed with on the sidewall of the first saturated salt container 1, muffler 20 is positioned at the top of escape pipe 23, one end of muffler 20 is positioned at first test chamber 19, the other end of muffler 20 stretches in second test chamber 22, one end of escape pipe 23 is positioned at first test chamber 19, the other end of escape pipe 23 stretches in second test chamber 22, escape pipe 23 is provided with air pump 21, air pump 21 communicates with a mouth of threeway 13, two mouths in addition of threeway 13 communicate with first solenoid valve 14 and second solenoid valve 15 respectively, and first solenoid valve 14 also communicates with second test chamber 22.Air pump 21, threeway 13, first solenoid valve 14 and second solenoid valve 15 all are positioned at second test chamber 22.Second solenoid valve 15 communicates with the end that muffler 20 is positioned at second test chamber 22.The first saturated salt container 1 is outside equipped with the 4th solenoid valve 17, the four solenoid valves 17 that communicate with atmosphere and communicates with first test chamber 19 by balance pipe; The second saturated salt container 2 is outside equipped with the 3rd solenoid valve 16, the three solenoid valves 16 that communicate with atmosphere and communicates with second test chamber 22 by another balance pipe.
First solenoid valve 14, second solenoid valve 15, the 3rd solenoid valve 16, the 4th solenoid valve 17 and air pump 21 are electrically connected with temperature and power controling box 3 respectively.
The volume of the first saturated salt container 1 and the second saturated salt container 2 is 40 liters, and the humidity environment that provides test process required is provided.
Air pump 21 adopts the vacuum cycle pump.
The present invention also provides a kind of method of utilizing above-mentioned measuring system to demarcate humidity sensor element dynamic response characteristic, specifically carries out according to the following steps:
Step 1: water is added in the water bath with thermostatic control casing 7, by the temperature in temperature and the power-supply controller of electric 3 setting water bath with thermostatic control casings 7;
Step 2: start electric heater 5 and multifunctional pump 4, water in the electric heater 5 heated constant temperature water-bath casings 7, water mixing stirring in 4 pairs of water bath with thermostatic control casings of multifunctional pump 7, in heating process, the temperature of water in the temperature sensor 6 induction water bath with thermostatic control casings 7, with the temperature transition of the water sensed is signal, and this signal is passed to temperature and power-supply controller of electric 3;
Step 3: the temperature of water rises to predefined temperature in the step 1 in water bath with thermostatic control casing 7, and keep constant after, humidity sensor element 18 to be measured is placed in first test chamber 19, after humidity sensor element 18 balances, start digital electric bridge 10 and measure this humidity sensor element 18 static capacitance value under the corresponding humidity in first test chamber 19, digital electric bridge 10 transfers to computing machine 9 with the static capacitance value of the humidity sensor element 18 that measures, computing machine 9 receives this static capacitance value, and it is saved as the first direct capacitance data;
Step 4: humidity sensor element 18 is taken out from first test chamber 19, then, this humidity sensor element 18 is put into second test chamber 22, and communicate with first solenoid valve 14, after humidity sensor element 18 balances, measure humidity sensor element 18 static capacitance value under the corresponding humidity in second test chamber 22, this static capacitance value is transferred to computing machine 9 by digital electric bridge 10, computing machine 9 receives this static capacitance value, and it is saved as the second direct capacitance data;
Step 5: open second solenoid valve 15, close first solenoid valve 14, the 3rd solenoid valve 16 and the 4th solenoid valve 17, open air pump 21, soft air in the first saturated salt container 1 is sucked escape pipe 23, the soft air that enters escape pipe 23 circulates by air pump 21, threeway 13, second solenoid valve 15 and muffler 20 successively, at this moment, humidity sensor element 18 contact is still soft air in the second saturated salt container 2; When carrying out the humidity switching, send instruction by computing machine 9, close second solenoid valve 15, open first solenoid valve 14, the 3rd solenoid valve 16 and the 4th solenoid valve 17, the soft air that enters escape pipe 23 is successively by air pump 21, the threeway 13 and first solenoid valve 14, enter in second test chamber 22, and in the time of 250～300ms, finish humidity and switch, at this moment, humidity sensor element 18 contact be soft air in the first saturated salt container 1, in the humidity handoff procedure, the capacitance of digital electric bridge 10 continuity testing humidity sensing elements 18, and the capacitance that measures constantly is transferred to computing machine 9, computing machine 9 records and storage humidity are switched perdurability and the dynamic capacity value of humidity sensor element 18 in the humidity handoff procedure;
Step 6: the second direct capacitance data that computing machine 9 stores in first direct capacitance data that store according to computing machine in the step 39 and the step 4, calculate the difference of the static capacitance value of humidity sensor element 18 under the identical measurement temperature different humidity environment, calculate the capacitance of different percentage amplitude correspondences according to this difference, the capacitance that the dynamic capacity value of the humidity sensor element 18 of computing machine in the step 59 record and the humidity sensor element 18 different percentage amplitudes that calculate are corresponding is compared, draw the dynamic response time of humidity sensor element 18 under different humidity variation amplitude, finish the demarcation of humidity sensor element 18 dynamic response characteristics.
According to GB GB/T15768-1995, the response time index is meant that humidity sensor to be measured (element) is in test process, its displayed value is changed to the time of U2+x% Δ U (Δ U=|U1-U2|) from U2, wherein U1 is testing humidity sensor (element) the static balancing displayed value of the first saturated salt solution humidity correspondence, U2 is testing humidity sensor (element) the static balancing displayed value of the second saturated salt solution humidity correspondence, according to different test requests, the desirable different numerical value of x% among the U2+x% Δ U, as 30%, 60%, 90% etc.
According to test request x% is carried out value, the calculated value of U2+x% Δ U is designated as U behind the static test, in the dynamic test, the zero-time that the corresponding humidity of second saturated salt solution of humidity sensor (element) contact is begun the corresponding humidity of transition to the first saturated salt solution is designated as 0 constantly, the initial humidity display value of testing humidity sensor (element) is U2, As time goes on, the variation that the displayed value of testing humidity sensor (element) liter can take place between U2 to U1 (U2+100% Δ U) or falls, the computing machine 9 of test macro will be by the situation of change and the corresponding time thereof of testing humidity sensor (element) displayed value under the value frequency record of setting, at last find out the U time corresponding in the data of test macro Computer Storage, this time is the response time of this humidity sensor (element).
In the dynamic response measuring system of the present invention, the response time of solenoid valve is less than 100ms, system response time is less than 100ms, the flow velocity of air pump 21 driving gases in muffler 20 is 1～2m/s, the distance of threeway 13 to first test chambers 19 is 0.1m, switching back gas flow required time is 50～100ms, the response time that native system is finished switching is 250～300ms, can satisfy the dynamic characteristic measuring requirement of response humidity sensor (element) fast, simultaneously, water bath with thermostatic control temperature-controlled precision height, digital electric bridge 10 response speeds are fast, the precision height, make that this dynamic response measuring system measurement result is accurate, and measuring operation is simple, has certain applicability and use generalization.
Claims (8)
1. humidity sensor element dynamic response characteristic calibration measurements system, it is characterized in that, this measuring system comprises water bath with thermostatic control casing (7), temperature and power controling box (3), computing machine (9) and digital electric bridge (10), computing machine (9) is connected with digital electric bridge (10) with temperature and power controling box (3) respectively, be provided with heating arrangement, height-low humidity generator and temperature sensor (6) in the water bath with thermostatic control casing (7), temperature and power controling box (3) are electrically connected with humidity generator, heating arrangement and temperature sensor (6) respectively;
Described height-low humidity generator comprises the first saturated salt container (1) and the second saturated salt container (2) that is arranged side by side, be filled with the first saturated saline solution (11) in the first saturated salt container (1), form first test chamber (19) between first saturated salt solution (11) and first saturated salt container (1) top, be filled with second saturated salt solution (12) in the second saturated salt container (2), form second test chamber (22) between second saturated salt solution (12) and second saturated salt container (2) top, first test chamber (19) is different with the humidity of the interior air of second test chamber (22), muffler (20) and escape pipe (23) have been horizontally disposed with on the sidewall of the first saturated salt container (1), the two ends of muffler (20) are stretched into respectively in first test chamber (19) and second test chamber (22), the two ends of escape pipe (23) are stretched into respectively in first test chamber (19) and second test chamber (22), escape pipe (23) is provided with air pump (21), air pump (21) communicates with first solenoid valve (14) and second solenoid valve (15) respectively, first solenoid valve (14) also communicates with second test chamber (22), air pump (21), first solenoid valve (14) and second solenoid valve (15) all are positioned at second test chamber (22), second solenoid valve (15) communicates with the end that muffler (20) is positioned at second test chamber (22), the first saturated salt container (1) is outside equipped with the 4th solenoid valve (17) that communicates with first test chamber (19), and the second saturated salt container (2) is outside equipped with the 3rd solenoid valve (16) that communicates with second test chamber (22).
2. according to the described calibration measurements of claim 1 system, it is characterized in that described water bath with thermostatic control casing (7) is wrapped with heat-insulation layer (8).
3. according to the described calibration measurements of claim 2 system, it is characterized in that it is the styrofoam of 75mm～80mm that described heat-insulation layer (8) adopts thickness.
4. according to claim 1 or 2 described calibration measurements systems, it is characterized in that, be provided with water admixing device in the described water bath with thermostatic control casing (7).
5. according to the described calibration measurements of claim 4 system, it is characterized in that described water admixing device is two multifunctional pumps (4).
6. according to the described calibration measurements of claim 1 system, it is characterized in that described digital electric bridge (10) adopts TH2619 type LCR digital electric bridge.
7. method of utilizing the described calibration measurements system calibrating of claim 1 humidity sensor element dynamic response characteristic is characterized in that this method is carried out according to the following steps:
Step 1: adopt a calibration measurements system, this calibration measurements system comprises water bath with thermostatic control casing (7), temperature and power controling box (3), computing machine (9) and digital electric bridge (10), computing machine (9) is connected with digital electric bridge (10) with temperature and power controling box (3) respectively, the water bath with thermostatic control casing is provided with heating arrangement in (7), height-low humidity generator and temperature sensor (6), temperature and power controling box (3) respectively with humidity generator, heating arrangement and temperature sensor (6) are electrically connected, described height-low humidity generator comprises the first saturated salt container (1) and the second saturated salt container (2) that is arranged side by side, be filled with the first saturated saline solution (11) in the first saturated salt container (1), form first test chamber (19) between first saturated salt solution (11) and first saturated salt container (1) top, be filled with second saturated salt solution (12) in the second saturated salt container (2), form second test chamber (22) between second saturated salt solution (12) and second saturated salt container (2) top, first test chamber (19) is different with the humidity of the interior air of second test chamber (22), muffler (20) and escape pipe (23) have been horizontally disposed with on the sidewall of the first saturated salt container (1), the two ends of muffler (20) are stretched into respectively in first test chamber (19) and second test chamber (22), the two ends of escape pipe (23) are stretched into respectively in first test chamber (19) and second test chamber (22), escape pipe (23) is provided with air pump (21), air pump (21) communicates with first solenoid valve (14) and second solenoid valve (15) respectively, first solenoid valve (14) also communicates with second test chamber (22), air pump (21), first solenoid valve (14) and second solenoid valve (15) all are positioned at second test chamber (22), second solenoid valve (15) communicates with the end that muffler (20) is positioned at second test chamber (22), the first saturated salt container (1) is outside equipped with the 4th solenoid valve (17) that communicates with first test chamber (19), the second saturated salt container (2) is outside equipped with the 3rd solenoid valve (16) that communicates with second test chamber (22)
Water is added in the water bath with thermostatic control casing (7), set the interior temperature of water bath with thermostatic control casing (7) by temperature and power-supply controller of electric (3);
Step 2: start heating arrangement, the water in the water bath with thermostatic control casing (7) heated, in the heating process, the temperature of the interior water of temperature sensor (6) induction water bath with thermostatic control casing (7), and with this temperature signal to temperature and power-supply controller of electric (3);
Step 3: the temperature of water rises to predefined temperature in the step 1 in water bath with thermostatic control casing (7), and keep constant after, humidity sensor element (18) to be measured is placed in first test chamber (19), after humidity sensor element (18) balance, measure the static capacitance value of humidity sensor element (18) in first test chamber (19) by digital electric bridge (10), and this static capacitance value transferred to computing machine (9), computing machine (9) receives this static capacitance value, and it is saved as the first direct capacitance data;
Step 4: from first test chamber (19), take out humidity sensor element (18), and this humidity sensor element (18) put into second test chamber (22), after humidity sensor element (18) balance, measure the static capacitance value of humidity sensor element (18) in second test chamber (22) by digital electric bridge (10), and this static capacitance value transferred to computing machine (9), computing machine (9) receives this static capacitance value, and it is saved as the second direct capacitance data;
Step 5: open second solenoid valve (15), close first solenoid valve (14), the 3rd solenoid valve (16) and the 4th solenoid valve (17), open air pump (21), soft air in the first saturated salt container (1) is sucked escape pipe (23), at this moment, humidity sensor element (18) contact is still soft air in second test chamber (22); When carrying out the humidity switching, send instruction by computing machine (9), close second solenoid valve (15), open first solenoid valve (14), the 3rd solenoid valve (16) and the 4th solenoid valve (17), the soft air that enters escape pipe (23) is successively by air pump (21), threeway (13) and first solenoid valve (14), arrive humidity sensor element (18), finishing humidity switches, at this moment, humidity sensor element (18) contact be soft air in first test chamber (19), in the humidity handoff procedure, the capacitance of digital electric bridge (10) continuity testing humidity sensing element (18), and the capacitance that measures constantly is transferred to computing machine (9), computing machine (9) record and storage humidity are switched perdurability and the dynamic capacity value of humidity sensor element (18) in the humidity handoff procedure;
Step 6: the second direct capacitance data that computing machine (9) stores in first direct capacitance data that store according to computing machine in the step 3 (9) and the step 4, calculate the difference of the static capacitance value of humidity sensor element (18) under the identical measurement temperature different humidity environment, calculate the capacitance of different percentage amplitude correspondences according to this difference, the capacitance that the dynamic capacity value of the humidity sensor element (18) of computing machine in the step 5 (9) record and the different percentage amplitudes of humidity sensor element (18) that calculate are corresponding is compared, draw the dynamic response time of humidity sensor element (18) under different humidity variation amplitude, finish the demarcation of humidity sensor element (18) dynamic response characteristic.
8. according to the described measuring method of claim 7, it is characterized in that humidity switching time is 250ms～300ms in the described step 5.
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| CN113325028B (en) * | 2021-06-07 | 2022-05-24 | 中国核动力研究设计院 | Boiling critical experiment device for unstable flow of natural circulation system and control method |
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