CN101931024B - 用于薄膜太阳能电池制造的溅射机及溅射方法 - Google Patents
用于薄膜太阳能电池制造的溅射机及溅射方法 Download PDFInfo
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- CN101931024B CN101931024B CN2009101493518A CN200910149351A CN101931024B CN 101931024 B CN101931024 B CN 101931024B CN 2009101493518 A CN2009101493518 A CN 2009101493518A CN 200910149351 A CN200910149351 A CN 200910149351A CN 101931024 B CN101931024 B CN 101931024B
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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CN2009101493518A CN101931024B (zh) | 2009-06-18 | 2009-06-18 | 用于薄膜太阳能电池制造的溅射机及溅射方法 |
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CN2009101493518A CN101931024B (zh) | 2009-06-18 | 2009-06-18 | 用于薄膜太阳能电池制造的溅射机及溅射方法 |
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CN101931024A CN101931024A (zh) | 2010-12-29 |
CN101931024B true CN101931024B (zh) | 2012-11-07 |
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CN2009101493518A Expired - Fee Related CN101931024B (zh) | 2009-06-18 | 2009-06-18 | 用于薄膜太阳能电池制造的溅射机及溅射方法 |
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Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
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CN1572900A (zh) * | 2003-05-23 | 2005-02-02 | 株式会社爱发科 | 溅射源、溅射装置和溅射方法 |
CN101044260A (zh) * | 2004-10-22 | 2007-09-26 | 株式会社昭和真空 | 薄膜形成装置及其方法 |
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Publication number | Priority date | Publication date | Assignee | Title |
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CN1572900A (zh) * | 2003-05-23 | 2005-02-02 | 株式会社爱发科 | 溅射源、溅射装置和溅射方法 |
CN101044260A (zh) * | 2004-10-22 | 2007-09-26 | 株式会社昭和真空 | 薄膜形成装置及其方法 |
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Owner name: JIFU ENERGY EQUIPMENT CO., LTD. Free format text: FORMER OWNER: ASIA SOLAR TECHNOLOGY CO., LTD. Effective date: 20140107 |
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Effective date of registration: 20140107 Address after: Hongkong Chinese Chai Patentee after: Ji Fu Energy Equipment Co., Ltd. Address before: Kowloon, Hongkong, China Patentee before: Asia Sun Science and Technology Co., Ltd. |
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CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20121107 Termination date: 20160618 |
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CF01 | Termination of patent right due to non-payment of annual fee |